qualification management and its impact on … · qualification management and its impact on...
TRANSCRIPT
Qualification Management and Its Impact on Capacity Optimization
Mehdi Rowshannahad1,2, Stéphane Dauzère-Pérès1 and Bernard Cassini2
1 Department of Manufacturing Sciences and Logistics – Center of Microelectronics in Provence – Ecole des Mines de Saint-Etienne – 13541 Gardanne, France 2 Soitec – Parc Technologique des Fontaines – 38190 Bernin, France
INTRODUCTION INDUSTRIAL EXPERIMENTS
CONCLUSION AND FURTHER RESEARCH
REFERENCES
“NEW” and “NOT PREVIOUSLY QUALIFIED” RECIPES
CONTACT INFORMATION
Semiconductor manufacturing:
• Complex industrial environment
• Dynamic business and production environment
Flexibility and Agility
• Expensive manufacturing equipment
Optimum Capacity Utilization
Studied problem
Recipe-to-machine Qualification Configuration
Benefits of Qualification Management DSS:
• Warns of a loss of flexibility,
• Increases capacity utilization,
• Avoids machines to become overloaded,
• Increases flexibility for production scheduling,
• Avoids costly, unnecessary and urgent qualifications,
• Reduces downtimes caused by too many qualifications,
• Supports the acquisition of new machines,
• Supports the introduction of new products.
Further Research:
• Considering batch sizes in workload balancing algorithms,
• Including maximum capacity of each machine in flexibility
measures.
QUALIFICATION MANAGEMENT
Recipe: Machine instructions to obtain the desired process
Qualification: Capability of processing a recipe (products) on a tool
Direct impact on capacity
Impact on Production Planning and Scheduling
FLEXIBILITY MEASURES
• New Products: Never qualified
• Not Previously Qualified Recipes: Completely disqualified
Thermal Treatment Toolset (22 machines of 4 different types)
Fig. 2. Flexibility gains with one not previously qualified recipe (NQR): “Recipe 3-
Alternate Recipe 3”
Mehdi Rowshannahad – Stéphane Dauzère-Pérès – Bernard Cassini
Department of Manufacturing Sciences and
Logistics - Center of Microelectronics in
Provence
Ecole des Mines de Saint-Etienne
880 avenue de Mimet, F13541 Gardanne, France
Soitec — Parc Technologique des Fontaines,
38190 Bernin, France
Phone: +33 (0)4 76 92 75 72,
Fax: +33 (0)4 76 92 96 29
Email: [email protected]
Email: [email protected]
Email: [email protected]
OPTIONAL
LOGO HERE
OPTIONAL
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• C. Johnzén, S. Dauzère-Pérès, and P. Vialletelle, “Flexibility measures for
qualification management in wafer fabs,” Production Planning & Control, vol.
22, no. 1, pp. 81–90, Jan. 2011.
• C. Johnzén, “Modeling and Optimizing Flexible Capacity Allocation in
Semiconductor Manufacturing,” Ph.D. dissertation, 2009.
• J. P. Ignizio, “Cycle time reduction via machine-to-operation qualification,”
International Journal of Production Research, vol. 47, no. 24, pp. 6899–6906,
Dec. 2009
Fig1: Current workload balancing (in hours) for production volumes of one week
M
1
M
2
M
3
M
4
M
5 Toolset
Product mix
WIP and Time Flexibility:
1. Proposes qualifications for the not previously qualified
recipes (NQR)
2. Once all the NQRs are qualified, suggest further
qualifications for “normal” recipes.
Fig. 3: New workload balancing after 1st qualification
Fig. 4. New flexibility gains after 1st qualification
Fig. 5. Workload balancing after best qualification: “Recipe 7” on “Machine 19”
Fig. 6. Optimal WIP distribution after best qualification: “Recipe 7” on “Machine 19”
From (Johnzén et al., 2011)
Toolset Flexibility: Guarantee against machine breakdown
System Flexibility: Combination of different flexibility measures
WIP Flexibility: Workload balance in terms of production volume
Increase machine utilization (capacity) and avoid bottleneck
Time Flexibility: Workload balance in terms of production time
Increase machine utilization (capacity) and avoid bottleneck
INDUSTRIALIZATION
Excel-based application
• Process time
• Batch size
• Qualification Status
QUALIFICATION MANAGEMENT
DECISION SUPPORT SYSTEM
Data
Extractor
Input File
Creator
Best
Qualification
Optimized
Capacity
Optimized
WIP
Distribution
Production
Control Process
IE
Planning
Production Volume Per
Recipe
Weekly
Operational
Plan (WOP)
Fab
DataBase
(PLL) Process Department
