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  • Qualification Management and Its Impact on Capacity Optimization

    Mehdi Rowshannahad1,2, Stphane Dauzre-Prs1 and Bernard Cassini2

    1 Department of Manufacturing Sciences and Logistics Center of Microelectronics in Provence Ecole des Mines de Saint-Etienne 13541 Gardanne, France 2 Soitec Parc Technologique des Fontaines 38190 Bernin, France

    INTRODUCTION INDUSTRIAL EXPERIMENTS

    CONCLUSION AND FURTHER RESEARCH

    REFERENCES

    NEW and NOT PREVIOUSLY QUALIFIED RECIPES

    CONTACT INFORMATION

    Semiconductor manufacturing:

    Complex industrial environment

    Dynamic business and production environment

    Flexibility and Agility Expensive manufacturing equipment

    Optimum Capacity Utilization

    Studied problem

    Recipe-to-machine Qualification Configuration

    Benefits of Qualification Management DSS:

    Warns of a loss of flexibility,

    Increases capacity utilization,

    Avoids machines to become overloaded,

    Increases flexibility for production scheduling,

    Avoids costly, unnecessary and urgent qualifications,

    Reduces downtimes caused by too many qualifications,

    Supports the acquisition of new machines,

    Supports the introduction of new products.

    Further Research:

    Considering batch sizes in workload balancing algorithms,

    Including maximum capacity of each machine in flexibility

    measures.

    QUALIFICATION MANAGEMENT

    Recipe: Machine instructions to obtain the desired process

    Qualification: Capability of processing a recipe (products) on a tool

    Direct impact on capacity Impact on Production Planning and Scheduling

    FLEXIBILITY MEASURES

    New Products: Never qualified

    Not Previously Qualified Recipes: Completely disqualified

    Thermal Treatment Toolset (22 machines of 4 different types)

    Fig. 2. Flexibility gains with one not previously qualified recipe (NQR): Recipe 3-

    Alternate Recipe 3

    Mehdi Rowshannahad Stphane Dauzre-Prs Bernard Cassini

    Department of Manufacturing Sciences and

    Logistics - Center of Microelectronics in

    Provence

    Ecole des Mines de Saint-Etienne

    880 avenue de Mimet, F13541 Gardanne, France

    Soitec Parc Technologique des Fontaines,

    38190 Bernin, France

    Phone: +33 (0)4 76 92 75 72,

    Fax: +33 (0)4 76 92 96 29

    Email: rowshannahad@emse.fr

    Email: dauzere-peres@emse.fr

    Email: bernard.cassini@soitec.com

    OPTIONAL

    LOGO HERE

    OPTIONAL

    LOGO HERE

    C. Johnzn, S. Dauzre-Prs, and P. Vialletelle, Flexibility measures for

    qualification management in wafer fabs, Production Planning & Control, vol.

    22, no. 1, pp. 8190, Jan. 2011.

    C. Johnzn, Modeling and Optimizing Flexible Capacity Allocation in

    Semiconductor Manufacturing, Ph.D. dissertation, 2009.

    J. P. Ignizio, Cycle time reduction via machine-to-operation qualification,

    International Journal of Production Research, vol. 47, no. 24, pp. 68996906,

    Dec. 2009

    Fig1: Current workload balancing (in hours) for production volumes of one week

    M

    1

    M

    2

    M

    3

    M

    4

    M

    5 Toolset

    Product mix

    WIP and Time Flexibility:

    1. Proposes qualifications for the not previously qualified

    recipes (NQR)

    2. Once all the NQRs are qualified, suggest further

    qualifications for normal recipes.

    Fig. 3: New workload balancing after 1st qualification

    Fig. 4. New flexibility gains after 1st qualification

    Fig. 5. Workload balancing after best qualification: Recipe 7 on Machine 19

    Fig. 6. Optimal WIP distribution after best qualification: Recipe 7 on Machine 19

    From (Johnzn et al., 2011)

    Toolset Flexibility: Guarantee against machine breakdown

    System Flexibility: Combination of different flexibility measures

    WIP Flexibility: Workload balance in terms of production volume

    Increase machine utilization (capacity) and avoid bottleneck

    Time Flexibility: Workload balance in terms of production time

    Increase machine utilization (capacity) and avoid bottleneck

    INDUSTRIALIZATION

    Excel-based application

    Process time

    Batch size

    Qualification Status

    QUALIFICATION MANAGEMENT

    DECISION SUPPORT SYSTEM

    Data

    Extractor

    Input File

    Creator

    Best

    Qualification

    Optimized

    Capacity

    Optimized

    WIP

    Distribution

    Production

    Control Process

    IE

    Planning

    Production Volume Per

    Recipe

    Weekly

    Operational

    Plan (WOP)

    Fab

    DataBase

    (PLL) Process Department

    mailto:rowshannahad@emse.frmailto:dauzere-peres@emse.frmailto:dauzere-peres@emse.frmailto:dauzere-peres@emse.frmailto:bernard.cassini@soitec.com

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