proberbench - wafer probing · proberbench operating environment ... adjustable wafermap coordinate...
TRANSCRIPT
ProberBenchOperating Environment
™
ProberBench start menu• Advanced start menu for quick access to
important functions and settings• Lists most-used programs for quick start up
Control center• All navigation and control elements are at the user’s
fingertips• Provides instant feedback about wafer and probe
positions for worry-free, safe wafer navigation and probing• Dock- and auto-hide function
Stage selector• Quick stage selection• Synchronized with Expert Control Panel
Wizard-style dialogs• Guided procedure of index setting, wafer and probe card theta
alignment
Software joystick• Easy navigation with digital or analogue movement• Graphical position feedback• Synchronized with Expert Control Panel
Programmable position buttons• Memorize user-defined positions referenced to either home or zero
Context-sensitive graphical user interface• Quick access to user-defined parameters
Z control• Easy access to three programmed Z positions
(Contact, Alignment, Separation) and chuck lift function to place chuck at a safe height
Micro-step function• In-die navigation using customizable
XY steps• Recent XY values are stored for quick access
First navigation tab• Safe operation of the system using only
programmed functions• Pre-programmed positions prevent errors
caused by accidental clicks
Fully-integrated thermal chuck interface
Sub-die setup• Setup sub-die coordinates and labels
WaferMap• Fully-customizable from single die
to sub-die mapping, binning and other useful features
Stop button• Stops all motorized moves with one click
Adjustable WaferMap coordinate system• Four orientations possible• Origin can be selected by user
Second navigation tab• Provides secure interface for control of Z and theta
movement• Setting of up to four different Z positions (Contact,
Alignment, Separation, Overtravel)• Direct access to wafer handling functions vacuum and load
Position tracking• In-die navigation• Gives feedback of where
the user is looking at the wafer currently
Turn all light sources on / off• Microscope• Chuck camera• ContactView™
Quick launch bar (customizable)• Quick access to most important programs - ControlCenter - SPECTRUM™ Vision System - WaferMap - SussCal® Professional
Scope follow mode• Synchronizes the movement
of the microscope and chuck Z-axis
Status bar• Live feedback about the most
important system states
Login and open / save project• Open or save all product related
data with one mouse click• Login required to access safety
relevant data
©Copyright 2010 Cascade Microtech, Inc. All rightsreserved. Cascade Microtech and SussCal are registeredtrademarks and iVista, ProberBench and SPECTRUM aretrademarks of Cascade Microtech, Inc. All other trademarksare the property of their own respective owners.
Data subject to change without notice.
PBOE-DD-0310
Patented ContactView™ system• Optical side view of the probing area, which precisely
controls the relationship between probe tips and wafer surface using the ProbeHorizon™ Wizard
Upward-looking chuck camera• Probe-tip observation and control• Probe-to-pad alignment with ReAlign™
SPECTRUMVision System
™
ProbeHorizon™Just three clicks automated wizard for:
• Elimination of probe and/or wafer damage• Fast and easy wafer loading• Set contact quickly and safely• Easy probe tip Z depth adjustment with probe
cards and single positioner• Easy and unique RF probe planarization
AutoAlign• Automatic wafer alignment• Automatic index measurement• Automatic wafer map generation
ReAlign™Automated probe-to-pad alignment based on an upward looking chuck camera enables unattended tests at multiple temperatures
• Automated generation of parameter and reliability data
• Constant contact quality over the whole wafer at temperature range
• Small pad probing at multiple temperatures• Easy to integrate in test executive programs
Real multi-cam imaging• Shows up to four live camera/ microscope views
simultaneousely
Multi-zoom Imaging• Up to eight freely adjustable zoom windows with
unlimited zoom• Real scale
Change objective• Change the pixel-to-micron scale quickly and easily
Two-point alignment function
Measurement function• Measures distances with
two mouse clicks
AutoFocus• Fast autofocus function
using iVista™ Pro
Snapshot function• Saves high-quality images• Raw data and screenshot
Adjust illumination Multi-view layout• Select the layout of up to
eight detail zoom windows
Change illumination• Choose between true color,
blue, green, yellow, cyan, magenta and white
Toggle between color andB/W mode
©Copyright 2010 Cascade Microtech, Inc. All rights reserved. Cascade Microtech is a registered trademark and ContactView, iVista, ProbeHorizon, ReAlign and SPECTRUM are trademarks of Cascade Microtech, Inc. All other trademarks are the property of their own respective owners.
Data subject to change without notice.
SPECTRUM-DD-0310
Function only available on systems with an iVista™ Digital Microscope.
ReAlign™ Guide