Polo Sant’Anna Valdera

Strumentazioni & macchine di precisione: un’opportunità per le PMI

-Specialized equipment & high-precision machinery: an opportunity for SMEs

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Features

!Modularity

!3D multifocus synthesis

!Rotary head

!Large area image stitching

!Endoscopy optics KH-7700

Hirox Corp.

Digital Optical Microscope

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3D multifocus synthesis of SU-8 microstructures

KH-7700 - Digital Optical Microscope

Radical apex

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Features

!4! to 60! objective lenses

!FTIC, TRITC, DAPI ßuorescence Þlters

!USB PC interface

!Equipped with diode laser

ECLIPSE Ti-EInverted epißuorescence microscope

Nikon Instruments

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ApplicationsECLIPSE Ti-E Inverted Epißuorescence Microscope

Fluorescent labeled myotubes on PDMS

PC12 cells on poly(hydroxybutyrate)

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LAMBDA 45UV-Vis spectrophotometer

Perkin-Elmer

CFX CONNECT

NANO-ZS90Particle Analyzer

Malvern Instruments

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CFX CONNECT

CFX CONNECTReal Time PCR

Biorad

VICTOR X3Plate Reader

Perkin-Elmer

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Features

!Capacitive sensor

!0.05 mg minimum force

!3D imaging

!Submicron stylus tip

!Surface stress measurement P-6Surface proÞler

KLA-Tencor

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Features

!100 µm ! 100 µm scan area (closed-loop)

!AFM phase imaging

!STM, FMM

!Nanolithography and nanoindentation INNOVA SPM

Scanning Probe MicroscopeBruker AXS

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ApplicationsSurface topography of PLLA - SPIONs composite

3D rendering of gold sputtered on thermally shrinked PS

INNOVA SPM -Scanning Probe Microscope

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Features

!0.2 - 30 kV acceleration voltage

!Secondary electron detector

!Backscattered electron detector

!Silicon Drift Detector microanalysis

EVO MA10 / INCAx-actSEM with Microanalysis

Carl Zeiss AG / Oxford instruments

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Growth cone of a P12 cell on PHB

EVO MA10 / INCAx-act - SEM with Microanalysis

ApplicationsP12 cell on poly(hydroxybutyrrate) (PHB)

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Features

!30 kV FIB

!10 nm imaging & milling resolution

!Compatible with Nanomanipulator workstation

!Pt, SiO2 deposition, Enhanced Etch beam chemistries FIB 200

Focused Ion BeamFEI

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ApplicationsBeam deposition of platinum

FIB 200 - Focused Ion Beam

Cross-section of alumina membrane

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Features

!350 V - 30 kV SEM, 500 V - 30 kV FIB

!Low kV FIB operation

!FE-SEM

!STEM detector

!EDS, WDS, and EBSP analysis, OmniprobeTM sample extraction

HELIOS NANOLAB 600iDualBeam FIB/SEM

FEI

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ApplicationsHelios Nanolab 600i - DualBeam FIB/SEM

Ion-milled silicon

PEGylated nanospheres

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Features

!800 dpi XYZ resolution

!298 ! 185 ! 203 mm build volume

!Prints acrylic resinsPROJET HD 3000

3D Printer3D Systems

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Features

!Double trough

!Alternating multilayer deposition

!Trough surface area: 775 ! 120 mm

!Max substrate size 100 ! 100 mm KSV 5000

Langmuir-Blodgett SystemKSV NIMA

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Features

!Multi-photon absorption lithography

!Submicron resolution

!3D laser printing

!Works with speciÞc and traditional photoresists

!Interface autofocusNANOSCRIBE

Direct Laser WriterNanoScribe GmbH

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ApplicationsNANOSCRIBE - Direct Laser Writer

Micro-Tour Eiffel in SU-8

SU-8 micropillars crosslinked at different beam power

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Features

!1-10 pL drop volume

!Drop jetting camera

!Alignment camera

!210 x 315 mm sample size

!Protein, polymer, nanoparticle jetting

DIMATIX DMP-2800Materials Inkjet Printer

FUJIFILM Dimatix, Inc.

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ApplicationsDIMATIX DMP-2800 - Materials Inkjet Printer

All-printed organic TFT

PLL-FITC printed on PMMA

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Features

!50 W CO2 laser

!Resolution < 50 µm

!Cuts glass, PMMA, PDMS

!Engraves metals VLS 3.50Cutting/Engraving Laser

Universal Laser Systems

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Features

!Ultrasound bath

!Spin coater/drier

!Hot plate

!Chemical baths

!Gas/water guns

!Chemical hood WET BENCHArias GmbH

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Features

!6” wafers

!Soft, hard contact exposure

!Split Þeld optics

!0.4 µm resolution

!350 W Hg lamp MA6Mask AlignerSuss Microtech GmbH

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Features

!Metals and insulators thin Þlm ballistic deposition

THERMAL EVAPORATORTecno Service

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Features

!Metal and insulator thin Þlm deposition

RF/DC MAGNETRON SPUTTERING

Kenosistec Srl

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Features

!Potentiostat, galvanostat

!Cyclic voltammetry

!10 µHz - 1 MHz EIS measurements

!Equivalent circuit modeling REFERENCE 600Potentiostat

Gamry Instruments

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ApplicationsREFERENCE 600 - Potentiostat

Template-assisted electroplating of silver nanorods

ZCURVE (provino_Cu20-1.DTA) ZCURVE (provino_Cu20-2.DTA)ZCURVE (provino_Cu20-3.DTA) ZCURVE (provino_Cu20-4.DTA)ZCURVE (provino_Cu20-5.DTA) ZCURVE (provino_Cu20-6.DTA)ZCURVE (provino_Cu20-7.DTA) ZCURVE (provino_Cu20-8.DTA)

100,0 ohm

1,000 kohm

10,00 kohm

-60,00 °

-40,00 °

-20,00 °

0,000 °

20,00 °

100,0 mHz 1,000 Hz 10,00 Hz 100,0 Hz 1,000 kHz 10,00 kHz 100,0 kHz 1,000 MHz 10,00 MHz

Zmod

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Potentiostatic EISPotentiostatic EIS

Freq (Hz)

EXPERIMENTAL PARAMETERS

DC Voltage (V): 0 vs. EocAC Voltage (mV rms): 10Potentiostatic EIS22/12/201018.10.25Initial Freq. (Hz): 1000000Final Freq. (Hz): 0,1Points/decade: 10Area (cm^2): 1Conditioning: OffInit. Delay: OnTime(s): 100Stab.(mV/s): 0Open Circuit (V): 0,0121836

EXPERIMENTAL NOTES

T=20.2H=59%

provino_Cu20-1.DTA Page 1 01-13-2011

Impedance spectrum of conductive cellulose

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CFX CONNECT

NANOCALCThin Þlm reßectrometry system

Ocean Optics

NANOMANIPULATORMicro Probe Station

Kleindiek Nanotechnik

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CFX CONNECT

PM5Manual Probe System

Cascade Microtech

COLIBRÌMultiuse plasma system

Gambetti SpA

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Features

!7 DoF

!Impedance control

!Weights less than 20 kg

LIGHTWEIGHT ROBOT 4+Robotic ArmKUKA Roboter GmbH

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Features ‣micro-milling and drilling on metallic and plastic materials

‣pre-setter laser for tool measurement in dynamic condition and touch probe

‣automatic tool changer

‣fully automatic 5 axes unmanned operation HSPC 2522

CNC Micro milling machine Kern

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Features ‣3 axes machining center for milling and drilling

‣Pre-setter laser for tool measurement in dynamic condition

VM1 CNC milling machine

Hurco

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Features

‣machining of very hard metals with the accuracy of 1 micron ‣Automatic wire threader (AWT)

‣Active Power Restart APR (UPS)

‣Fine Measuring Control FMC

‣SODICK Fine Corner Control SFCC

‣Super PIKA O/W AP200L CNC Micro WEDM machine

Sodick

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Features ‣micro-holes up to 50 micron

T1-T4 Micro Sink EDM machine

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Features ‣easy to operate and ergonomic

‣high tech 3 axes digital display

‣999 tool positions

‣999 contour points

‣ constant cutting speed

‣infinitely variable control EMCOMAT 17D

High Precision Lathe EMCO

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Features ‣measurement in real condition

‣geometric and roughness measurements

‣Accuracy of 2 micron on the volume Video-Check-EA

CNC Measuring Machine WERTH

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The BioRobotics InstituteScuola Superiore Sant’Anna

@ Polo Sant’Anna ValderaViale Rinaldo Piaggio, 34

56025 - Pontedera (Pisa), Italy

Istituto Italiano di TecnologiaCenter for Micro-BioRobotics

@ Polo Sant’Anna ValderaViale Rinaldo Piaggio, 34

56025 - Pontedera (Pisa), Italy