picoblade® picosecond micromachining laser · the picoblade laser system is a versatile tool for...

7
Data Sheet www.lumentum.com PicoBlade® Picosecond Micromachining Laser Precision and flexibility for optimized processes—a fully featured, machine-ready system

Upload: hoangminh

Post on 22-Jul-2018

253 views

Category:

Documents


1 download

TRANSCRIPT

Data Sheetwww.lumentum.com

PicoBlade® Picosecond Micromachining LaserPrecision and flexibility for optimized processes—a fully featured, machine-ready system

PicoBlade® Picosecond Micromachining Laser

www.lumentum.com 2

The PicoBlade laser system is a versatile tool for processing virtually any material with the highest precision and reliability.

Features• Industrial, rugged, unibody design

• Easy integration

• Horizontal or vertical mounting

• Fully detachable umbilical

• Cost-effective, on-site maintenance

• High productivity:

− Wide range of PRF

− A/D modulation capability

− FlexBurst™ technology

Options• 532 nm, 355 nm, and auto-switching

• Lower-power, lower-cost configurations

• High pulse energy

• Super-sync for high-speed line scanners

• Process shutter

• Customized umbilical length

Applications• High-speed precision machining

• Glass cutting, welding, scribing

• Processing hard materials (diamond, sapphire, carbide, ceramics, and CVD)

• Semiconductor dicing

• Drilling of multiple materials

• Selective thin-film ablation

Many of today’s picosecond lasers generate an excessively high fixed pulse energy for applications that cannot be adjusted without reducing the average power overall. This limitation results in poor production throughput, even for high-power laser systems. In contrast, the PicoBlade laser system lets you adjust the pulse energy to meet specific application values—at full average power and maximum process speed. This is the most flexible high-precision, high-speed picosecond laser on the market.

PicoBlade® Picosecond Micromachining Laser

www.lumentum.com 3

High-power PicoBlade typical power versusrepetition rate for 1064, 532, and 355 nm*

Medium-power PicoBlade typical output powerversus repetition rate for 1064, 532, and 355 nm

High-power PicoBlade typical pulse energy versusrepetition rate for 1064, 532, and 355 nm*

Medium-power PicoBlade typical pulse energy versusrepetition rate for 1064, 532, and 355 nm

Low-power PicoBlade typical pulse energy versusrepetition rate for 1064, 532, and 355 nm

Low-power PicoBlade typical output powerversus repetition rate for 1064, 532, and 355 nm

0

10

20

30

40

50

100 1000 10000

Repetition rate (kHz)

Pow

er (W

)

1064 nm

532 nm

355 nm

PicoBlade® Picosecond Micromachining Laser

www.lumentum.com 4

Output Beam Profile

High-power PicoBlade output beam Medium-power PicoBlade output beam Low-power PicoBlade output beam

* The PicoBlade system's optimum power output for green and UV wavelengths can be engineered to the customer's optimal repetition rate.

Dimensions Diagram for IR Version

Dimensions Diagram for theSingle NLO G or UV Version

Beam Exit1064 nm

Clearance area for better service and installation

Clearance area for better service and installation

(1139.2)9.2 71 753

150 590

3061

37

.59

86

.4

42.5

55

162.5 162.5

min

10

04

10

min

10

0

Beam Exit355 nm

Clearance area for better service and installation

Clearance area for better service and installation

A1 A2

B1 B2

Clearance area for umbilical

7539.2590 162.5 162.542.5

205 (205)

86

,41

37

.59

41

01

00

min

10

0m

in

14

6.1

(1279.2)211

20

0m

in

PicoBlade® Picosecond Micromachining Laser

www.lumentum.com 5

Dimensions Diagram for the autoNLO IR, G, and UV Versions

Beam Exit1064 nm

Beam Exit Beam Exit355 nm 532 nm

Clearance area for better service and installation

Clearance area for better service and installation

A1 A2

B1 B2

Clearance area for umbilical2

00

,04

41

01

00

min

10

0m

in

9.2

395 59042.5 162.5 162.575332214

(1375.24)306

20

0m

in8

6.414

6.1

55

281.3

358.7

Specifications

Parameter 1064 nm 532 nm 355 nm

Output power High-power PicoBlade with Pulse-on-Demand (PoD)

Up to 50 W Up to 25 W Up to 15 W

Medium-power PicoBlade with PoD Up to 12 W Up to 6 W Up to 3 W

Low-power with PicoBlade with PoD Up to 4.4 W Up to 0.9 W Up to 0.4 W

Repetition rate Single shot to 8 MHz

Pulse energy Up to 200 μJ Up to 125 μJ Up to75 μJ

Pulse energy stability (>1 kHz) <0.5% rms

Pulse width measured at 1064 nm 10 ps

Peak power 20.0 MW 12.5 MW 7.5 MW

Spatial mode High-power PicoBlade with PoD TEM00, M2<1.2 TEM00, M

2<1.2 TEM00, M2<1.3

Medium-power PicoBlade with PoD TEM00, M2<1.2 TEM00, M

2<1.2 TEM00, M2<1.3

Low-power with PicoBlade with PoD TEM00, M2<1.2 TEM00, M

2<1.2 TEM00, M2<1.3

Pointing stability <40 μrad/C

Turn-on time <15 min

Voltage (single phase) 100 – 240 V AC

Frequency 50 – 60 Hz

Input power (single phase) 2100 VA

Laser head(L x W x H, weight)

V1 (1 output: IR) 1139 x 410 x 138 mm, 80 kg N/A N/A

V2 (1 output: G or UV) N/A 1279 x 410 x 138 mm, 80 kg 1279 x 410 x 138 mm, 80 kg

V3 (3 outputs: IR, G, UV) 1375 x 410 x 138 mm, 80 kg

Power supply (fits 19-in rack) (L x W x H, weight) 435 x 139 (3 RU) x 483 mm, 15 kg

Chiller (fits 19-in rack) (L x W x H, weight) 640 x 267 (6 RU) x 483 mm, 42 kg

PicoBlade® Picosecond Micromachining Laser

www.lumentum.com 6

Laser Safety

Laser Head

PB - - - - - - 00

Power Level Code

High H

Medium M

Low L

Energy E

PoD Code

No PoD 0

PoD P

NLO Code

1064 nm 0R

Single NLO 532 nm sG

Single NLO 355 nm sV

Auto NLO 1064+532 nm aRG

Auto NLO 1064+355 nm aRV

Auto NLO 532+355 nm aGV

Auto NLO 1064+535+355 nm aRGV

Shutter Code

No options 0

Shutter S

Sync 1 Code

No options 0

CLX1 C

Sync 2 Code

No options 0

Sync2 T

Power Monitor Code

No options 0

(Power) monitor MPRF Code

50 kHz 0050

200 kHz 0200

Ordering InformationFor more information on this or other products and their availability, please contact your local Lumentum account manager or Lumentum directly at [email protected].

North AmericaToll Free: 844 810 LITE (5483)

Outside North AmericaToll Free: 800 000 LITE (5483)

ChinaToll Free: 400 120 LITE (5483)

© 2016 Lumentum Operations LLCProduct specifications and descriptions in this document are subject to change without notice.

picobladepmlaser-ds-cl-ae 30175857 902 0616www.lumentum.com

Accessories

Description Product Code

Controller

Controller without shutter electronics PB-PS-H-0-00

Controller with shutter electronics PB-PS-H-S-00

Chiller

Water-water, US with 110 V AC CH-M-W110

Water-water, European with 220 V AC CH-M-W220

Air-water, US with 110 V AC CH-M-A110

Air-water, European with 220 V AC CH-M-A220

Umbilical Cable

3 m standard, right orientation PB-PS-A30R

5 m standard, right orientation PB-PS-A50R

3 m standard, left orientation PB-PS-A30L

5 m standard, left orientation PB-PS-A50L

Chiller Hoses

3 m chiller hoses PB-CH-A30S

5 m chiller hoses PB-CH-A50S

3 m chiller hoses for NLO module PB-CH-A30A

5 m chiller hoses for NLO module PB-CH-A50A

Other Accessories

ZeroAir generator (only for autoNLO including UV) PB-ZA

Vertical mounting PB-VER

Notes:

1. CLX-110 phase-locked clock synchronizer to synchronize the repetition rate of a laser system to a reference clock signal.

2. Sync enables control of the timing of the output pulses in nanoseconds.

Example of a Complete OrderPB-H-P-0200-aRGV-000M-00 (high power, PoD, autoNLO with all three wavelengths, and a power monitor as option)

CH-M-A220 (chiller, air-water, European with 220 V AC)

PB-CH-A30A (3 m chiller hoses for UV NLO module)

PB-PS-H-0-00 (controller without shutter electronics)

PB-PS-A30R (3 m umbilical cable, right orientation)

PB-ZA (ZeroAir generator for UV)