picoblade® picosecond micromachining laser · the picoblade laser system is a versatile tool for...
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Data Sheetwww.lumentum.com
PicoBlade® Picosecond Micromachining LaserPrecision and flexibility for optimized processes—a fully featured, machine-ready system
PicoBlade® Picosecond Micromachining Laser
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The PicoBlade laser system is a versatile tool for processing virtually any material with the highest precision and reliability.
Features• Industrial, rugged, unibody design
• Easy integration
• Horizontal or vertical mounting
• Fully detachable umbilical
• Cost-effective, on-site maintenance
• High productivity:
− Wide range of PRF
− A/D modulation capability
− FlexBurst™ technology
Options• 532 nm, 355 nm, and auto-switching
• Lower-power, lower-cost configurations
• High pulse energy
• Super-sync for high-speed line scanners
• Process shutter
• Customized umbilical length
Applications• High-speed precision machining
• Glass cutting, welding, scribing
• Processing hard materials (diamond, sapphire, carbide, ceramics, and CVD)
• Semiconductor dicing
• Drilling of multiple materials
• Selective thin-film ablation
Many of today’s picosecond lasers generate an excessively high fixed pulse energy for applications that cannot be adjusted without reducing the average power overall. This limitation results in poor production throughput, even for high-power laser systems. In contrast, the PicoBlade laser system lets you adjust the pulse energy to meet specific application values—at full average power and maximum process speed. This is the most flexible high-precision, high-speed picosecond laser on the market.
PicoBlade® Picosecond Micromachining Laser
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High-power PicoBlade typical power versusrepetition rate for 1064, 532, and 355 nm*
Medium-power PicoBlade typical output powerversus repetition rate for 1064, 532, and 355 nm
High-power PicoBlade typical pulse energy versusrepetition rate for 1064, 532, and 355 nm*
Medium-power PicoBlade typical pulse energy versusrepetition rate for 1064, 532, and 355 nm
Low-power PicoBlade typical pulse energy versusrepetition rate for 1064, 532, and 355 nm
Low-power PicoBlade typical output powerversus repetition rate for 1064, 532, and 355 nm
0
10
20
30
40
50
100 1000 10000
Repetition rate (kHz)
Pow
er (W
)
1064 nm
532 nm
355 nm
PicoBlade® Picosecond Micromachining Laser
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Output Beam Profile
High-power PicoBlade output beam Medium-power PicoBlade output beam Low-power PicoBlade output beam
* The PicoBlade system's optimum power output for green and UV wavelengths can be engineered to the customer's optimal repetition rate.
Dimensions Diagram for IR Version
Dimensions Diagram for theSingle NLO G or UV Version
Beam Exit1064 nm
Clearance area for better service and installation
Clearance area for better service and installation
(1139.2)9.2 71 753
150 590
3061
37
.59
86
.4
42.5
55
162.5 162.5
min
10
04
10
min
10
0
Beam Exit355 nm
Clearance area for better service and installation
Clearance area for better service and installation
A1 A2
B1 B2
Clearance area for umbilical
7539.2590 162.5 162.542.5
205 (205)
86
,41
37
.59
41
01
00
min
10
0m
in
14
6.1
(1279.2)211
20
0m
in
PicoBlade® Picosecond Micromachining Laser
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Dimensions Diagram for the autoNLO IR, G, and UV Versions
Beam Exit1064 nm
Beam Exit Beam Exit355 nm 532 nm
Clearance area for better service and installation
Clearance area for better service and installation
A1 A2
B1 B2
Clearance area for umbilical2
00
,04
41
01
00
min
10
0m
in
9.2
395 59042.5 162.5 162.575332214
(1375.24)306
20
0m
in8
6.414
6.1
55
281.3
358.7
Specifications
Parameter 1064 nm 532 nm 355 nm
Output power High-power PicoBlade with Pulse-on-Demand (PoD)
Up to 50 W Up to 25 W Up to 15 W
Medium-power PicoBlade with PoD Up to 12 W Up to 6 W Up to 3 W
Low-power with PicoBlade with PoD Up to 4.4 W Up to 0.9 W Up to 0.4 W
Repetition rate Single shot to 8 MHz
Pulse energy Up to 200 μJ Up to 125 μJ Up to75 μJ
Pulse energy stability (>1 kHz) <0.5% rms
Pulse width measured at 1064 nm 10 ps
Peak power 20.0 MW 12.5 MW 7.5 MW
Spatial mode High-power PicoBlade with PoD TEM00, M2<1.2 TEM00, M
2<1.2 TEM00, M2<1.3
Medium-power PicoBlade with PoD TEM00, M2<1.2 TEM00, M
2<1.2 TEM00, M2<1.3
Low-power with PicoBlade with PoD TEM00, M2<1.2 TEM00, M
2<1.2 TEM00, M2<1.3
Pointing stability <40 μrad/C
Turn-on time <15 min
Voltage (single phase) 100 – 240 V AC
Frequency 50 – 60 Hz
Input power (single phase) 2100 VA
Laser head(L x W x H, weight)
V1 (1 output: IR) 1139 x 410 x 138 mm, 80 kg N/A N/A
V2 (1 output: G or UV) N/A 1279 x 410 x 138 mm, 80 kg 1279 x 410 x 138 mm, 80 kg
V3 (3 outputs: IR, G, UV) 1375 x 410 x 138 mm, 80 kg
Power supply (fits 19-in rack) (L x W x H, weight) 435 x 139 (3 RU) x 483 mm, 15 kg
Chiller (fits 19-in rack) (L x W x H, weight) 640 x 267 (6 RU) x 483 mm, 42 kg
PicoBlade® Picosecond Micromachining Laser
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Laser Safety
Laser Head
PB - - - - - - 00
Power Level Code
High H
Medium M
Low L
Energy E
PoD Code
No PoD 0
PoD P
NLO Code
1064 nm 0R
Single NLO 532 nm sG
Single NLO 355 nm sV
Auto NLO 1064+532 nm aRG
Auto NLO 1064+355 nm aRV
Auto NLO 532+355 nm aGV
Auto NLO 1064+535+355 nm aRGV
Shutter Code
No options 0
Shutter S
Sync 1 Code
No options 0
CLX1 C
Sync 2 Code
No options 0
Sync2 T
Power Monitor Code
No options 0
(Power) monitor MPRF Code
50 kHz 0050
200 kHz 0200
Ordering InformationFor more information on this or other products and their availability, please contact your local Lumentum account manager or Lumentum directly at [email protected].
North AmericaToll Free: 844 810 LITE (5483)
Outside North AmericaToll Free: 800 000 LITE (5483)
ChinaToll Free: 400 120 LITE (5483)
© 2016 Lumentum Operations LLCProduct specifications and descriptions in this document are subject to change without notice.
picobladepmlaser-ds-cl-ae 30175857 902 0616www.lumentum.com
Accessories
Description Product Code
Controller
Controller without shutter electronics PB-PS-H-0-00
Controller with shutter electronics PB-PS-H-S-00
Chiller
Water-water, US with 110 V AC CH-M-W110
Water-water, European with 220 V AC CH-M-W220
Air-water, US with 110 V AC CH-M-A110
Air-water, European with 220 V AC CH-M-A220
Umbilical Cable
3 m standard, right orientation PB-PS-A30R
5 m standard, right orientation PB-PS-A50R
3 m standard, left orientation PB-PS-A30L
5 m standard, left orientation PB-PS-A50L
Chiller Hoses
3 m chiller hoses PB-CH-A30S
5 m chiller hoses PB-CH-A50S
3 m chiller hoses for NLO module PB-CH-A30A
5 m chiller hoses for NLO module PB-CH-A50A
Other Accessories
ZeroAir generator (only for autoNLO including UV) PB-ZA
Vertical mounting PB-VER
Notes:
1. CLX-110 phase-locked clock synchronizer to synchronize the repetition rate of a laser system to a reference clock signal.
2. Sync enables control of the timing of the output pulses in nanoseconds.
Example of a Complete OrderPB-H-P-0200-aRGV-000M-00 (high power, PoD, autoNLO with all three wavelengths, and a power monitor as option)
CH-M-A220 (chiller, air-water, European with 220 V AC)
PB-CH-A30A (3 m chiller hoses for UV NLO module)
PB-PS-H-0-00 (controller without shutter electronics)
PB-PS-A30R (3 m umbilical cable, right orientation)
PB-ZA (ZeroAir generator for UV)