physics of nanoscale transistors - an introduction to electronics from the bottom up
TRANSCRIPT
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23rd Symposium on Microelectronics Technology and Devices: SB Micro 2008IEEE / EDS Mini Colloquium
September 1, 2008, Gramado, Brazil
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NCN
Mark Lundstrom
Network for Computational Nanotechnology
Birck Nanotechnology Center
Discovery Park, Purdue University
West Lafayette, Indiana USA
23rd Symposium on Microelectronics Technology and Devices: SB Micro 2008IEEE / EDS Mini Colloquium
September 1, 2008, Gramado, Brazil
Physics
ofNanoscale Transistors:
An Introduction to Electronics from the Bottom Up
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technology trends..
logL
1975
5 mMoores Law
5 nm
2005
50 nm
log # chip
10 3
10 9
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models for devices (conceptual and computational)
0.1 mm
10 m
1 m
0.1 m
10 nm
1 nm
0.1 nm
Macroscopicdimensions
Atomicdimensions
drift-diffusion
drift-diffusion + velocity saturation
Boltzmann for velocity overshoot
quasi-ballistic
quantum mechanical
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NCN
21st Century electronic devices
HfO2
10 nm SiO2
p++ Si
SD
Al
Gate
SWNTcarbon nanotube
electronics
CoFe (2.5)
Ru (0.85)
InsulatorCoFeB (3)
CoFeB (3)
MgO (0.85)
spin torque devices
nanowire PVnanowire
bio-sensors
molecular electronics
nanonets
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Electronics from the Bottom Up
1) Introduction
2) Generic model of a nanodevice
3) The ballistic MOSFET
4) Scattering in nano-MOSFETs
5) Discussion
6) Summary
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Gate
D(E U)
generic model
S. Datta, Quantum Transport: Atom to Transistor, Cambridge, 2005(Concepts of Quantum Transport nanohub.org)
21
EF1 EF2
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filling states from the left contact
1
d N(E)
dt =N1
0 (E) N1
N10 (E) = D(E U)f1(E)
Assumption:Each energy channel isindependent
includes spin
Gate
D(E U)EF1
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filling states from the right contact
2
d N(E)
dt=
N20(E) N
2
N20
(E) = D(E U)f2(E)
Gate
D(E U) EF2
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steady-state
d N(E)
dt=
N10 N
1+
N20 N
2= 0
1 1( )N10 1 1( )N+ 1 2( )N20 1 2( )N = 0
N E( )=1 1( )
1 1( )+ 1 2( )N1
0E( )+
1 2( )1 1( )+ 1 2( )
N20
E( )
N10
E( ) D E U( )f1 E( )
N20
E( ) D E U( )f2 E( )
1 = h 1
1 = h 2
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steady-state electron number, N(E)
N E( )= 1
1
+ 2
D E U( )f1 E( )+2
1
+ 2
D E U( )f2 E( )
N E( )= D1 E U( )f1 E( )+ D2 E U( )f2 E( )
D1 E U( )=1
1 + 2D E U( )
D2 E U( )=2
1 + 2D E U( )
DOS that can be filled by
contact 1
DOS that can be filled bycontact 2
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steady-state current, I
ID
ID
d N(E)
dt 1
=N1
0 (E) N E( )
1
d N(E)
dt 2
=N2
0(E) N
2
ID E( )= +qd N(E)
dt1
= qd N(E)
dt2
Gate
D(E U)f2 E( )f1 E( )
EF1 EF2 VDS
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result
I E( )= qh
12
1 + 2
D E U( ) f1 f2( )
ID = I E( )dE =2q
h
2
D E U( ) f1 f2( )dE
1 = 2 =
N = N E( )dE= D E U( )2 f1 E( )+ f2 E( )( ) dE
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final results
ID =2q
h D E U( ) f1 f2( )dE
1 = 2 = = h
N = D E U( ) f1 + f2( )dE
D E U( )= D E U( )2
density-of-states per spin
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determining ()
ID E( )=2q
h
D E U( ) f1 f2( )
N E( )= D E U( ) f1 E( )+ f2 E( )
energy channels are independent:
qN
ID
=h
=
if f1 >> f2(source injects, drain collects), then:
ID =Q
=
stored charge
transit time
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Nanoelectronics and the Meaning of Resistance
1) What and where is theresistance?
2) Microscopic model for electricalresistance
3) Spins and magnets
4) Energy conversion
5) Beyond the one-electronpicture
Electronics from the Bottom Up on nanoHUB.org
Supriyo Datta
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outline
1) Introduction
2) Generic model of a nanodevice
3) The ballistic MOSFET
4) Scattering in nano-MOSFETs
5) Discussion
6) Summary
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electron energy vs. position
VDS = 0.05 VVGS
controlling current with energy barriers
E = qV
VDS = 1.0 V
VGS
E.O. Johnson, The Insulated-Gate Field EffectTransistor: A Bipolar Transistor in Disguise, RCAReview, 34, pp. 80-94, 1973.
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top of the barrier MOSFET model
energy
position
1 = 2 =
h
device
LDOS
L
contact 1 contact 2
U = EC = EC0 qS
EF1
EF2
EC x( )
EC 0( )
low drain bias:
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top of the barrier MOSFET model
energy
position
contact 1 contact 2
1
= 2
=h
device
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electron density
U = EC(0)
Wx
y
contact 2contact 1
D =m*
2h2
Wl
N = D E U( ) f1 + f2( )dE
f1 E( )=1
1+ eEF1 EC (0)( ) kBT
f2 E( )=1
1+ eEF1 qVDS EC (0)( ) kBT
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electron density
N = D E U( ) f1 + f2( )dE
F1 EF1 EC(0)[ ] kB T
F2 = F1 qVDS kBT
N2D = m
*kBT h
2
nS 0( )=N
Wl=
N2D
2F0 F1( )+F0 F2( )
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current
U = EC(0)
Wx
y
contact 2contact 1
D =
m*
2h2 Wl
=h
=
h x
l
ID
=2q
h D f
1
f2
( )dE
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current (cont.)
U = EC(0)
Wx
y
contact 2contact 1
=h
=h x
l
x = cos = 2 E EC( ) m* cos
x = cos/2/2
d = 2
=
2 E EC( )m*
2
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current (cont.)
ID =2q
h D f1 f2( )dE
D E( )= hl
2 E EC( )m
*
2
m*
2h2Wl
D E( )= W2m* E EC( )
h= M E( )
ID =2q
hM E( ) f1 f2( )dE
M(E) =W
2( )
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current (final result)
ID =2q
hM E( ) f1 f2( )dE
ID = WqN2D
2T
F1/ 2 F1( )F1/ 2 F2( )
F1 EF1 EC(0)[ ] kB T
F2 = F1 qVDS kBTT = 2kBT m*
N2D = m
*kBT h
2
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re-cap
nS 0( )=N2D
2
F0 F1( )+F0 F2( )
(1)
(2)
Solve (2) for N2D, then insert in (1):
ID = WqN2D
2
T
F1/ 2 F1( )F1/ 2 F2( )
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I-V characteristic
ID = WqnS 0( )TF1/ 2 F1( )F1/ 2 F2( )F
0
F1
( )+F
0
F2
( )
qnS 0( ) Cox VGS VT( ) (simple, 1D MOS electrostaticsVGS> VT)
ID = WQI 0( ) T
F1/ 2 F1( )F0 F1( )
1F1/2 F2( ) F1/2 F1( )1 +F0 F2( ) F0 F1( )
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final result
ID = WCox VGS VT( )%T1-F1/ 2 F2( ) F1/2 F1( )1 +F0 F2( ) F10 F1( )
%T 2kBT
m*F1/ 2 F1( )F0 F1( )
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Boltzmann limit
ID = WCox VGS VT( )T 1- e qV
DS
/kB
T
1 + e qVDS /kBT
T =2kBT
m*
Fj F( ) eF
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on-current
IDS
VDS
VDSAT
kB
T q
VGS = VDD
ID = WCox %T VGS VT( )1-F1/ 2 F2( ) F1/2 F1( )1+F0 F2( ) F10 F1( )
%T 2kBTm*F1/2 F1( )F0 F1( )
(100) [110] Si (single subband)
ID WCox %T VDD VT( )
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velocity saturation in a ballistic MOSFET
VDS
VGS = VDD
ID = WCox %T VGS VT( )1-F1/2 F2( ) F1/ 2 F1( )1 +F0 F2( ) F10 F1( )
= WQI(0) 0( )
EF1 EC(0)[ ] q
IDS
VDS
(0)
T
ballistic injection
velocity
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channel resistance of a ballistic MOSFET
IDS
VDS
VDSAT
kB
T q
ID = WCox %T VGS VT( )1-F1/ 2 F2( ) F1/2 F1( )1+F0 F2( ) F10 F1( )
finite channelresistance
VGS = VDD
as T 0
GCH =1
RCH M EF1( )
2q2
h
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ION ballistic( ) = WQI (0 ) %T
T 1.8 107 cm/s
QI(0) q
is a nanoscale MOSFET really ballistic?
= Cinv VDD VT( )
0.8 1013
cm-2
ION W ballistic( ) 2 mA/m
Typical N-channel MOSFET:
ION 1 mA/m
(Courtesy, Shuji Ikeda, ATDF, Dec. 2007)
about 10% of the ballistic limit.
about 50% of theballistic limit
li
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outline
1) Introduction
2) Generic model of a nanodevice
3) The ballistic MOSFET
4) Scattering in nano-MOSFETs5) Discussion
6) Summary
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scattering in Si n-channel nano-MOSFETs
ID =
W
L
nCox VGS VT( )VDS ?
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top of the barrier MOSFET model
energy
position
1
= 2
=h
device
LDOS
L
contact 1 contact 2
EF1
EF2
EC x( )
EC 0( )
low drain bias: =
2 E EC( )
m*
cos x + sin y( )
(ballistic)
ff
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diffusive current
U = EC(0)
L
W
x
ycontact 2contact 1
=h
=h x
L
ballistic
ID =2q
h
D f1 f2( )dE
=h
= ? diffusive
=L
2
2Dn
b b lli i d diff i
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between ballistic and diffusive
D =0
0 + L B D
=h
B + D=
1
1 + D B
h
B
ID = WCox VGS VT( )0
0 + L
%T
1-F1/ 2 F2( ) F1/ 2 F1( )1 +F0 F2( ) F10 F1( )
Dn (E) =x
20 =
2
2
0 T =0
0 + L
li i t
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linear-region current
ID = WCox VGS VT( )0
0 + L
T1- e
qVDS /kBT
1 + eqVDS /kBT
Boltzmann statistics:
Low VDS:
ID = WCox VGS VT( )0
0 + L
T
2 kBT q( )VDS
ID =W
L + 0nCox VGS VT( )VDS
tt i i Si h l MOSFET
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scattering in Si n-channel nano-MOSFETs
ID =W
LnCox VGS VT( )VDS ID =
W
L + 0nCox VGS VT( )VDS
on-current
where scattering matters (the most)
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where scattering matters (the most)
Increasing VDS
X(nm) --->
-10 -5 0 5 10
EC
(eV)
--->
X(nm) --->
-10 -5 0 5 10
EC
(eV)
--->
ECvs. xfor VGS= 0.5V
T =0
0 +LT =
0
0 + l
ECvs. xfor VGS= 0.5V
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outline
1) Introduction
2) Generic model of a nanodevice
3) The ballistic MOSFET
4) Scattering in nano-MOSFETs5) Discussion
6) Summary
Physics of Nanoscale Transistors
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Physics of Nanoscale Transistors
1) Review of MOSFET Fundamentals
2) Elementary Theory of the NanoscaleMOSFET
3) Theory of the Ballistic MOSFET
4) Scattering in Nanoscale MOSFETs
5) Application to State-of-the-ArtMOSFETs
6) Quantum Transport in NanoscaleMOSFETs
7) Connection to the Bottom UpApproach Mark Lundstrom
Electronics from the Bottom Up on nanoHUB.org
S/D quantum mechanical tunneling
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S/D quantum mechanical tunneling
from M. Luisier, ETH Zurich
4) 3)
2) 1)
generic model to NEGF
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Gate
D(E U)
2
generic model to NEGF
S. Datta, Quantum Transport: Atom to Transistor, Cambridge, 2005(Concepts of Quantum Transport nanohub.org)
1
EF1 EF2H[ ] S[ ]
1[ ]/ 1[ ] 2[ ]/ 2[ ]
randomness is the rule - not the exception!
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randomness is the rule - not the exception!
side view
top view
Random dopant fluctuations
nanonets
Percolation in Electronic Devices
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Percolation in Electronic Devices
1) Percolation in Electronic Devices
2) Thresholds, Islands, and Fractals
3) Nonlinear Electrical Conduction inPercolative Systems
4) Stick Percolation and Nanonet Electronics
5) 2D Nets in 3D World: Sensors, Solar Cells,
and Antennas
M. Ashraf Alam
Electronics from the Bottom Up on nanoHUB.org
outline
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outline
1) Introduction
2) Generic model of a nanodevice
3) The ballistic MOSFET
4) Scattering in nano-MOSFETs5) Discussion
6) Summary
summary
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y
1) The bottom-up view provides a simple, but rigorousapproach to nanoelectronics.
2) Its useful for familiar devices, like MOSFETs.
3) Its also a good starting point for new devices.
4) You can learn more on nanoHUB.org or by attending theannual Electronics from the Bottom Up summerschools at Purdue University.
nanoHUB.org
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g
Electronics from the Bottom Up
Questions & Answers
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Quest o s & s e s