particle measurement part2 - rion particle counters
TRANSCRIPT
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.
2µm 3µm 4µm
Num
ber
of S
igna
l Pul
ses
coun
ted
Particle Size = Signal Thresholds with Size Calibration
Instrument response to2µm PSL spheres
Instrument response to3µm PSL spheres
1µm
Sensitivity Criteria
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1.E+00
1.E+01
1.E+02
1.E+03
1.E+04
1.E+05
1.E+06
1.E+07
0.1 1 10
Particle diameter (µm)
Rel
ativ
e sc
atte
red
light
inte
nsity
:Experimental
Theoretical
0.312µm
2.001µm
0.700µm 1.020µm
0.506µm
Calibration Curve
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Calibration Curve
Size Sensitivity Depend on a Material of Particle/Medium.
1.E+00
1.E+01
1.E+02
1.E+03
1.E+04
1.E+05
1.E+06
1.E+07
0.1 1 10
Particle diameter (µm)
Rel
ativ
e sc
atte
red
light
inte
nsity
m=1.33
m=1.46
m=1.60
m=1.78
m: Refractive index of particlesWavelength=0.633µm
(refractive index of medium=1)
(m: Refractive indexof Particles)
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Microscope
Standard Particle Sensor
Particle Counter(Products)
Standard Particles
Reference Particle Counter
Counting Accuracy
Standard Particles
Standard Particles
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Flow Cell
Light Intensity Distribution
Laser Lens
Sample Laser Beam
Time
Vol
tage
Signal
Resolution
Same Particle Size
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Particle Size
Cou
nted
Rat
e
PSL Size Distribution
Measured Size Distribution
High Resolution Low Resolution
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Concentration Limit
Flow Cell
Laser BeamParticles
Laser
Amp.
Lens Photo Detector
Vol
tage
TimeSignal
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10
100
1000
10000
100000
1000000
10 100 1000 10000 100000 1000000
Ideal
Experimental
Calculated
Count Loss (5%)
Count Loss (10%)
Particle Concentration of Sample
Mea
sure
d P
artic
le C
once
ntra
tion
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Flow RateFlow Rate is important for Calibration and Measurement.
Particle Counter
Precision film type flow-meter
Airborne Particle Counter
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Flow Rate Check for
Liquid borne Particle Counter
Particle Counter
+ Stop watchDrain
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Particle Counter (Products)
Measuring Instruments
RION Standard
Official Standard
Trace-ability for physical value
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Traceability for Particle Counter
ElectrotechanicalLaboratory
JSR
BIPMCommunicationsResearchLaboratory
BIPM
Particle Counter (Products)
StandardParticles
Weigh Pulse Generator
Particle Size Mass Time
PTB
Frequency Counter
YHP
JEMIC
Volt Meter
Pulse HeightAnalyzer
Fluke Sartorius
StandardWeight
NRLM
JQA JQA
Voltage
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A Point of Notice for Particle Measurementusing
Airborne Particle Counter
• Check a Flow Rate• Tube Material• Tube Length• Pressure Drop of Sampling System• Zero Count Check• Calibration within a year
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Sampling Tube Material
Do not use a materials that cause staticelectricity such as Teflon, Silicon etc. because particles will deposit on the wall of tube.
We recommend nylon.
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Sampling Tube Length
Long tube will cause deposit particleson the wall of tube.It’s depend on a 1. inner diameter of tube2. particle size3. flow rate
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Pressure Drop of Sampling System
Particle Counter
Manometer
Sample
An over reduction of pressure of the inlet will cause low counting efficiency, erroneous countand will dirty an optical system.
Inlet
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A Point of Notice for Particle Measurementusing
Liquid-borne Particle Counter
• Check a chemicals• Flashing• Babble • Residual Sample (Change a Chemicals)• Sample Pressure• Calibration within a year
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Check a wet materials of particle counter
Hydrogen Fluoride (HF) will dissolve glasses and quartz.
Wet material should be Sapphire. In case of sampling HF.
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Flashing a sampling line is a basic
Accurate particle measurement is requiringflash a sampling line for remove a depositedparticles.
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Bubble
Particle Counters count bubbles same asparticles.
Residual Sample
According to circumstances particles willgenerate particles by chemical reaction.
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Conclusions
• Particle Counters are useful for many field.
• There are many standards for cleanliness.
• Some standards described for calibration,sampling and measurement.
• Operating Procedure is important for accuratelymeasurement.