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Particle Measurement and

Particle Counter

1. The world of Particle Measurement2. Standards3. Principal of Particle Counter4. Traceability of Particle Counter

byKazuo Ichijo

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SemiconductorSemiconductor

• Clean Room Monitoring• DI Water Measurement• Pure Chemicals

Standards: SEMI

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PharmaceuticalPharmaceutical

• Particles in Injections• Clean Room Monitoring• Operation Room Monitoring• Water for Injection

Standards: USP, JP, EP

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AerospaceAerospace

• Parts Cleaning• Clean Room Monitoring

Standards: NAS 1638

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Hard Disk DriveHard Disk Drive

• Parts Cleaning• Clean Room Monitoring• DI Water• Pure Chemicals• Particle Generation Test

Standards: IDEMA

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Precision MachiningPrecision Machining

• Clean Room Monitoring• Parts Cleaning

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for Safety and Long Life Time

Hydraulic FluidHydraulic Fluid

Standards: ISO 4406ISO 11171ISO 11500NAS 1638

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TransportTransport

SpaceSpaceMachineMachine

NuclearNuclear

Semiconductor Semiconductor PharmaceuticalPharmaceutical

MedicalMedical

EnvironmentEnvironment

BiotechnologyBiotechnology

Gas(Air, Process Gases)

Gas(Air, Process Gases)

Liquid(Water, Oil, Chemicals)

Liquid(Water, Oil, Chemicals)

Particle CountersParticle Counters

The World of Particle MeasurementThe World of Particle Measurement

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Standards for Particle Contamination

• Clean Room ISO 14644Fed-Std 209EJIS B9920

• Pharmacopoeia USP 24 <788> InjectionJP 13 Injection

• OIL ISO 4406, 11171, 11500NAS 1638

• Particle Counter Standards JIS B 9921 (Airborne) and B 9925 (Liquid-borne)

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Light

Particle

Light Interaction with a particle

• Particle diameter• Wavelength• Refractive index of particles• Refractive index of medium

Scattered light intensity

Reflection

Refraction

Absorption

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Particle Counter

for Air

Light Scattering

for Liquid

Light Scattering Light Extinction

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Laser Beam

Particle

Scatter Pattern

Receiving Optics

Light Scattering

Interaction of Light with Particle

φφ

θθ

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Laser Beam

Particle

Scatter Pattern

Light Extinction

Integral of Scatter Pattern over αα

Detector

redirected energy

αα

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Head amp.

Power supplyLight source

PumpFilterValve

Photo-detector

Inlet

Air

Amp.

Low�pass filter

Pulse height analyzer

Counter

Display

Collector lenses

Light beam

Airborne Particle Counter

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Collimator

Flow- cell

Off- axis e llipsoidal mirror

Sample

Laser Drive rThermal Controlle r

Laser Diode ( 40mW, 780nm)

Collecting lensand photo de tector

Lase r Beam(0.8×0.02mm)

Flow- Cell(inner dimension: 0.5×0.5mm)

cross section

Liquid Borne Particle Sensor

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Time

Vo

ltag

e

Scattered Light Signal by Particles

Pulse Numbers

Pulse Height

Particle Numbers

Particle Size

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Time

Vo

ltag

e

0.5µm

0.3µm

Equal to and larger than 0.5µm : 1 particle

Equal to and larger than 0.3µm : 6 particles

1µm

Equal to and larger than 1µm : 0 particle

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Check Points of Particle Counter

1. Calibration2. Counting Accuracy 3. Resolution4. Concentration Limit5. Flow Rate

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Calibration1. Size calibration

Mono-disperse particlesPolystyrene Latex Spheres known size, artificial material (n=1.595)

2. Number calibrationPoly-disperse particlesISO-MTD (ACFTD)

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Time

Puls

e he

ight

Vol

tage

Pulse signals from PSL Particle

Frequency

Puls

e he

ight

Vol

tage

Signals and Distribution with PSL