paratek - bst tunable rf capacitor on semiconductor tcp-3027 teardown reverse costing report...

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DISCLAIMER : System Plus Consulting provides cost studies based on its knowledge of the manufacturing and selling prices of electronic components and systems. The given values are realistic estimates which do not bind System Plus Consulting nor the manufacturers quoted in the report. System Plus Consulting is in no case responsible for the consequences related to the use which is made of the contents of this report. The quoted trademarks are property of their owners. © 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 1 Electronic Costing & Technology Experts www.systemplus.fr 21 rue la Nouë Bras de Fer 44200 Nantes – France Phone : +33 (0) 240 180 916 email : [email protected] June 2014 – Version 1 – Written by Sylvain Hallereau

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Manufactured and sold by ON Semiconductor and based on a Paratek technology the TCP-3027 is a tunable RF capacitor of 2.7pF. The tunable RF capacitor has a better quality factor (Q) than the standard varactor diode. The TCP-3027 is a passive tunable integrated capacitor (PTIC) packaged in a WLCSP measuring 0.87 x 0.71mm. The tunability is due to the material called ParaScan™ by Paratek. A Barium Strontium Titanate (BST) doped ceramic is used as a dielectric in the capacitor. The ferroelectric characteristics of the ParaScan™ allows a large variation of the electric constant. Paratek has developed a specific capacitor structure and a DC bias compensation to reduce the parasitic acoustic wave. This reverse costing report provides an estimation of the production cost of the TCP-3027. It describes the overall manufacturing process and highlights key points of innovation developed by Paratek and ON Semiconductor and a comparison between the products of STMicroelectronics and ON Semiconductor manufactured from Paratek’s license . More information on that report at http://www.i-micronews.com/mems-sensors-report/product/paratek-bst-tunable-rf-capacitor-on-semiconductor-tcp-3027.html

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Page 1: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

DISCLAIMER : System Plus Consulting provides cost studies based on its knowledge of the manufacturing and selling prices of electronic components and systems. The given values are realistic estimates which do not bind System Plus Consulting nor the manufacturers quoted in the report. System Plus Consulting is in no case responsible for the consequences related to the use which is made of the contents of this report. The quoted trademarks are property of their owners.

© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 1

Electronic Costing & Technology Experts

www.systemplus.fr21 rue la Nouë Bras de Fer44200 Nantes – France Phone : +33 (0) 240 180 916 email : [email protected]

June 2014 – Version 1 – Written by Sylvain Hallereau

Page 2: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 2

Glossary1. Overview / Introduction 4

– Executive Summary

– Reverse Costing Methodology

2. Company Profile 8– ON Semiconductor

3. Blackberry Z10 Teardown 14

4. Physical Analysis 17– Synthesis of the Physical Analysis

– Physical Analysis Methodology

– Package 19

– Package Views & Dimensions

– Package Opening

– Copper Pillar

– PTIC Die 26

– View & Dimensions

– Marking

– Bond Pads

– Capacitor Structure

– Delayering

– Polysilicon traces

– Cross-Sections

– Patents

– Physical Dimensions

– STMicroelectronics STPTIC

5. Manufacturing Process Flow 60– Global Overview

– PTIC Process Flow

– PTIC Wafer Fabrication Unit

– Packaging Process Flow

– Package Assembly Unit

6. Cost Analysis 68– Synthesis of the cost analysis

– Main steps of economic analysis

– Yields Hypotheses

– PTIC Front-End Cost

– PTIC Back-End 0 : Probe Test & Dicing

– PTIC Front-End Cost per process steps

– PTIC Front-End: Equipment Cost per Family

– PTIC Front-End: Material Cost per Family

– PTIC Wafer Cost

– PTIC – Copper Pillar

– PTIC – PROBE and Dicing Cost

– Back-End : Final Test Cost

– PTIC Component Cost & Price

Contact 85

Page 3: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 3

The reverse costing analysis is conducted in 3 phases:

Teardown analysis

• Package is analyzed and measured• The dies are extracted in order to get overall data: dimensions, main blocks, pad number and pin out, die marking• Setup of the manufacturing process.

Costing analysis

• Setup of the manufacturing environment• Cost simulation of the process steps

Selling price analysis

• Supply chain analysis• Analysis of the selling price

Page 4: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 4

• Package: WLCSP 8 pillar

• Dimensions: 0.874 x 0.716 x 0.54mm

Package top view

Package Side View

0.716mm0.XXmm

0.874mmSolder

Page 5: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 5

• The die marking includes:

P

2.7 (probably capacitor of 2.7pF)

X527

Die Marking

Page 6: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 6

Capacitor stacking – Optical view

Top electrode

Top BST dielectric layer

Bottom BST dielectric layer

Capacitor line

Top electrode widt: XXµm

BST width: XXµm

Bottom electrode width: XXµm

Pitch: XXµm

Interconnection between the capacitor lines

Page 7: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 7

Contact with medium and top electrodes after passivation etching –SEM view

Contact with medium and top electrodes after passivation etching –SEM view

Page 8: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 8

TPIC cross-section– Optical View

Page 9: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 9

Tunable capacitor

•Oxide 1 Deposition

•Polysilicon trace pattern

•Oxide 2 deposition and pattern

•CMP

Tunable capacitor

•XX

Tunable capacitor

•XXX

PolysiliconOxide 2

Oxide 1

Al2O3 substrate

Page 10: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 10

Page 11: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 11Manufacturing Steps Cost (Simulated with MEMS CoSim+ Cost Simulation Tool)

Page 12: Paratek - BST Tunable RF Capacitor ON Semiconductor TCP-3027 teardown reverse costing report published by Yole Developpement

ON Semiconductor PTIC - Tunable Capacitor

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© 2014 by SYSTEM PLUS CONSULTING, all rights reserved. 12

Reverse costing analysis represents the best cost/price evaluation given the publically available data, and estimates completed by industry experts.

Given the hypothesis presented in this analysis, the major sources of correction would lead to a +/- 10% correction on the manufacturing cost (if all parameters are cumulated)

These results are open for discussion. We can reevaluate this circuit with your information. Please contact us:

Europe & USA Office

• Yole Développement Headquarter, France: David Jourdan, Sales Coordination & Customer Service, Tel: +33 472 83 01 90, Email: [email protected]

Japan Office• For custom research: Yutaka Katano, General Manager, Yole Japan & President, Yole K.K.Phone: (81) 362 693 457 - Cell : (81) 80 3440 6466 - Fax: (81) 362 693 448 - Email: [email protected]• For reports business: Takashi Onozawa, Sales Asia & General Manager, Yole K.K.

Email: [email protected]

Korea Office • Hailey Yang, Business Development Manager, Phone : (82) 2 2010 883 - Cell: (82) 10 4097 5810

- Fax: (82) 2 2010 8899 – Email: [email protected]