New Dimensions in Parametric Analysis

Agilent 4155C Semiconductor Parameter Analyzer

Agilent 4156C Precision Semiconductor Parameter Analyzer

Agilent E5250A Low Leakage Switch Mainframe

Agilent E5240A I/CV Automation Software

Parametric Test Leader

Agilent Technologies has become the world leader in parametric test(judged by market share) by alwaysstriving to lower your cost-of-testand provide you with the right test at the right cost. In the year 2000Agilent reached the milestone of installing its 2000th parametric testsystem. It has also sold over 10,000benchtop parameter analyzers sincecreating the first version of thisproduct, the 4145A, back in 1982.

Continuous Innovation

The Agilent 4155C and 4156C maintain this tradition of continuousinnovation in parametric measurementand analysis. The new capabilities of the 4155C and 4156C make themmore than just new “boxes”; they arecomplete parametric measurement solutions. The integrated matrix controland quasi-static CV measurement capabilities of the 4155C and 4156Ctruly add new dimensions to yourparametric test capability. Most importantly, the ability to start smalland then build your way up to a fastand efficient automated parametricmeasurement station provides youwith a solution without limits.

The Power of Information

Agilent’s Parametric Test Assistant CDcontains the answers to all of yourparametric measurement challenges.This unique HTML-based tool containsover 100 FAQs, as well as PDF versionsof all instrument manuals, data sheets,and application notes (organized in asearchable database). It also containsa JavaScript-based ApplicationNavigator utility that can help you toconfigure solutions based upon yourmeasurement needs. Moreover, the entire CD works in both PC and UNIX environments. Please specifypublication number 5980-0393E to get your free copy.

Thinking Beyond the Box...

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Start with the Agilent 4155C and 4156C

The superior low-current and low-voltageresolution and built-in quasi-static CVmeasurement capability of the 4155C and 4156C provide a firm foundation forfuture expansion.

Perform Benchtop Analysis

The Agilent 4155C and 4156C combinewith the Agilent E5250A and Agilent4284A to form an efficient and cost-effective benchtop analysis system.Integrated matrix control ensures that you can perform CV-IV analysis quicklyand effortlessly without the need for a PC. Alternatively, if you want instrument control in an MS Windows environment,you can use Agilent InteractiveCharacterization Software (ICS).

High-speed Automated Test

The Agilent FLEX command language gives you a powerful tool for automatingyour testing in conjunction with a semi-automatic wafer prober. Automate with commercial packages such as Agilent I/CV,or with your own custom software writtenin BASIC, C/C++, National InstrumentsLabView, or Agilent VEE.

to a Solution Without Limits

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A Powerful and Expandable Solution

Preserve device powerbetween measurementswith the standby mode.

Execute separate stressconditions with a singlekeystroke.

Automate or create yourown measurements withInstrument BASIC.

Output hardcopiesthrough GPIB or parallelprinter port. Also, sendprint/plots via LAN portto networked printers.

Sweep a family of curves with asimple turn of the knob.

Organize test flow and minimize time required to obtain semiconductor parameters with the logical setup pages.

Save setups and measured results to the MS-DOS compatible floppy drive, or to an NFS server via a 10 base-T LAN port.

Extend your capabilities to 1 A/200 V, andadd a low noise ground unit and dual pulsegenerators with the Agilent 41501B SMUand Pulse Generator Expander.

Ease measurement setups andprogramming with the full size detachable keyboard.

Easily analyze measured results on the large LCD.

Automatically obtain derivedresults like GMMAX with a sin-gle button.

Quickly set up measurementsand extract parameters usingcontext-dependent menu andsub-menu softkeys.

Ultra-Low Current Capability

The 1 fA resolution (0.01 fA readableresolution) and 20 fA accuracy of theAgilent 4156C enable you to meet thelow-current measurement challengesposed by current and future devices.Agilent continues to set the standard inSMU technology and precision, withoutsacrificing throughput, flexibility, or resolution. Moreover, Agilent achievesthis measurement performance withoutany cumbersome preamplificationschemes. This means you can use the4156C to develop your most advancedprocesses, including difficult measure-ments such as subthreshold leakage and reverse-biased diode currents.

Measure Low Resistance Accurately

The advent of Cu metal processes hasmade contact and sheet resistancemeasurements increasingly difficult toperform. With 0.2 µV resolution andspecial voltage offset cancellation capability, the 4155C and 4156C havethe measurement power to enable youto characterize precisely your low resistance Cu metal test structures.

Unsurpassed Resolution and Accuracy

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Repeatable Ultra-Low Subthreshold Characteristic

Cu Metal Resistance Structure

Single Sweep Measurement

Capacitance versus voltage (CV) measurements provide essential information about many criticalprocess parameters, such as oxidethickness (tox), surface state charge(Qss), and flat band voltage (Vfb).However, high frequency CV measure-ments only measure oxide capacitancein the accumulation mode. Low frequency or quasi-static CV (QSCV)techniques often yield better resultsbecause the entire range of operationof the oxide capacitor can be moni-tored in one continuous sweep.

Easy Quasi-static CV Setup

The 4155C and 4156C quasi-static CV measurement function is integratedinto the front-panel control. No programming or additional equipmentis required. Simply pick your voltagesweep range and the step voltage interval at which you want to measurecapacitance. The internal firmwareroutines take care of the rest.

Reliable Measurement Results

The superior accuracy and resolutionof the 4155C and 4156C guarantee thatyour quasi-static CV measurementresults will be consistent and reliable.You can use the auto-analysis functionof the 4155C and 4156C to calculateimmediately important process parameters.

Built-in Quasi-static CV Analysis

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Quasi-static CV Measurement Procedure

Quasi-static CV Measurement Setup

Quasi-static CV Measurement Results

³V

Measure ³Q

IntegrationTime

VAR1 Step

Delay Time

••

•

ICS Gives Convenient Analysis Capability

Interactive Characterization Software(ICS) provides a graphical user interface(GUI) in an MS Windows 98, NT, or 2000environment. ICS displays the device un-der test (DUT) as a graphical schematic,which makes parametric testing intuitiveand easy by eliminating the need to writecomplex programs.

To connect the instrument sources to device terminals, simply select the appropriate instrument, such as an SMUor meter, from the pop-up display andclick on the terminal lead on the schematic.The Setup Editor configures the resourcefor your application.

The Data/Plot View tool can immediatelyand automatically display all of yourmeasured and derived data either as agraph or in a spreadsheet format.

ICS offers all the functionality of the instrument conveniently accessible from your PC for true desktop testing.

True MS Windows Environment

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Fast and Efficient Automated Test

Agilent FLEX Speeds Execution Time

Agilent’s Fast Language for Execution(FLEX) gives you direct control of instrument hardware, yielding bothshorter programming code and fastermeasurement times. Agilent FLEX canalso be used in conjunction with theprogram memory feature of the 4155Cand 4156C to gain even further measurement speed improvements. In addition, since the 4155C and 4156CVXIplug&play driver uses AgilentFLEX, it provides a convenient means of enjoying this fast execution speed inBASIC, C/C++, National InstrumentsLabView, or Agilent VEE with minimalprogramming work.

I/CV also has a built-in FLEX driver forthe 4155C and 4156C. This allows youto enjoy the benefits of Agilent FLEX ina GUI environment without having to doany programming. Using the I/CV FLEXdriver to control your instruments during automated test enables you toachieve measurement times up to 10times faster than the equivalent 4145emulation or SCPI mode commands.

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IBASIC Programming Example Using Agilent FLEX

Agilent I/CV Automation Software

Standardized Software Environment

Agilent I/CV provides a standardized software solution for parametric measurement and analysis. The softwareruns on Windows 98, NT, and 2000, and supports a wide variety of semi-automaticwafer probers. Since I/CV uses ICS as itscore measurement “engine,” you can easilytransport algorithms developed in ICS intothe automated I/CV environment. I/CValso has a built-in test sequencer that enables you to automate die and sub-diemoves, sequence ICS measurement algo-rithms, and make conditional branchingdecisions. Thus, I/CV provides you with an efficient test automation environmentwithout sacrificing either measurementspeed or ease of use.

Total CV-IV Solutions

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Benchtop CV-IV

Automated CV-IV

Integration without Complication

When making CV-IV measurements,you want to focus on the measurementsand not on the equipment. The 4155Cand 4156C allow you to do this by creating a seamless benchtop CV-IVmeasurement solution that has integrated matrix control, quasi-staticCV measurement capability, and built-in capacitance compensation routines.Moreover, you can easily network your4155C or 4156C to any NFS serveranywhere on your LAN. You can savedata files into Excel spreadsheets, anddump graphs to high-resolution TIFFfiles.

Automation without Frustration

Agilent can also provide you with answers to your automated CV-IVmeasurement needs. With a single PC you can automate and control bothyour wafer prober and your measure-ment instruments. You can do this viaa commercial package such as AgilentI/CV, or your own customized solution.

Ultra-accurate Low Current Measurement

The Agilent E5250A Low Leakage Switch Mainframe and E5252A Crosspoint Matrix module combine to forma complete low current matrix solution. Each E5252Acard has 10 inputs and 12 outputs. The E5250A can hold up to four E5252A cards, for a maximum of 48 outputs. The inputs to rows 5 and 6 consist of a 3-to-1multiplexer, which maintains cost-effectiveness withoutsacrificing performance. With this solution you can easily measure currents of 10fA and less through yourswitching matrix.

Superior CV Measurement

The E5250A has special built-in compensation routines toensure that your CV measurements achieve accuracyand repeatability. Whether you are using the quasi-staticCV measurement capability of the 4155C and 4156C, orthe high-frequency measurement features of the Agilent4284A, you can be confident that your capacitance versus voltage data is both consistent and reliable. Theplot to the right shows the results of superimposing quasi-static and high frequency CV data.

Exceptional Switching Performance

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Consistent and Reliable CV Data

E5250A with E5252A Cards

E5252A 10 x 12 Matrix Module

Integrated Matrix Control

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Array Control Mode

A Complete Wafer-probing Solution

List Control Mode

Easy Front-Panel Control

You can control your E5252A matrixcards directly from the front panel ofthe 4155C and 4156C. All features ofthe E5252A cards are supported andno programming or external PC control is necessary. In addition, you can save your matrix setups as.MAT files and use these files in bothmanual and automated applications.

Dual Control Modes

The 4155C and 4156C allow you tocontrol the matrix in two differentmodes. The Array control mode pro-vides a useful overview of the matrixstatus. The List control mode makes it easy to view and change output pinnumber assignments. You can chooseeither of the two modes to control the matrix and you can switch between them.

The Best and Only Instrument for Wafer Level Reliability (WLR) Test

The Agilent 4155C and 4156C have acomplete set of functions to supportWLR test. For example, many WLRtests require extremely precise clocksin order to determine accurately thearea under a curve for such importantparameters as charge to breakdown(Qbd). The 4155C and 4156C have asuper-accurate clock that can measuretime intervals with 20 µs resolution(PC clocks are not adequate for thistask). Also, the 4155C and 4156C feature a thinned-out sampling capability that is useful for measuringparameters over long time periods.

Determine Charge to Breakdown

The 4155C and 4156C can easily perform both Vramp and Jramp testsand automatically determine chargeto breakdown (Qbd). Vramp testingcan be performed directly from thefront panel, and Jramp testing can beperformed using a very simple IBASICprogram supplied by Agilent.

Intelligent TDDB Testing

For time-sampled measurements, the4155C and 4156C support a unique“thinned-out” sampling function. Thisfeature is particularly useful whenperforming tests such as time dependent dielectric breakdown(TDDB), where the time to failure isunknown beforehand. The thinned-out sampling function intelligentlythrows out extraneous data points ifthe data buffer (up to 10,001 points)fills up without reaching your failurecriteria. This capability ensures thatyou never overflow your data bufferno matter how long your TDDB test isrunning.

Standard Wafer Level Reliability Functions...

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Ibd

Time

Qbd= I(t) dt

dt Time

Qbd

I Q

TDDB Test

Vramp Test

Effortless Push Button Stress Measure

Many tests such as hot carrier injection (HCI) involve repeating a voltage stress until the user degrades a device parameter by some predetermined amount. The4155C and 4156C simplify this tedious stress/measure procedure to only two keys: stress and measure.The user can also create programs to automate this stress/measure procedure (see next page).

Charge Pumping Station

Charge pumping is a direct measureof the interface state density, whichin turn provides an indication of theelectron and hole trapping occurringin a MOS transistor. The Agilent41501B expander unit provides a fully integrated solution for chargepumping. The pulse generators providethe range of pulse types, widths, andamplitudes, as well as the rise and falltime control needed for this crucialmeasurement.

13The Agilent 41501B expander unit enables a variety of charge pumping pulses.

Push Button HCI

Charge Pumping Using Agilent 41501B PGU

n+ n+

p+

PGU:41501B

4155C 4156Cor

A A

SQUAREPULSE

TRIANGULARPULSE

TRAPEZOIDALPULSE

Expandable to Advanced Applications

OPTIONALRESISTOR

LOWLEAKAGEI-V INPUT

OUTPUT1 2 3 4 5 6 7 8

BIAS INPUT

Eight of 24 channels in the E5255A multiplexer module

Long-Term Stress Testing

The Agilent E5250A Low LeakageSwitch Mainframe also supports theE5255A Multiplexer Module for long-term reliability testing. The multiplexermodule has 24 outputs, organized ingroups of 8. Each module has one multilevel dc bias input for each set of eight channels, permitting the useof inexpensive power supplies for aconsistent stress. The E5250A acceptsfour of these cards, for a total of 96outputs. Each channel can also have acustomer-selected protection resistorto safeguard against erroneous results.The user can gang up to four E5250Aswitch mainframes to create a systemwith 384-channel capability.

Benchtop HCI

Agilent can supply you with the hard-ware and the free software to build alow-cost benchtop HCI test solution.You can stress and measure eight ormore devices automatically for days orweeks. The only equipment required is a 4156C, an E5250A, and a quad-output power supply. You can performHCI testing without a PC. Please seeour Parametric Test Assistant CD formore information.

Automated Reliability Test

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E5250A with E5255A Cards

HCI Test Solution

Flash Memory Cell Evaluation

Standard Solid-state Switch

The Agilent 16440A SMU/PulseGenerator Selector is a special solid-stateswitching module designed specificallyfor Flash cell testing. It enables you toperform thousands of Write/Erase cycleson Flash memory cells, which would beimpossible using conventional mechani-cal relays.

Versatile Flash Memory Cell Solution

The 4155C and 4156C, the 41501BExpander Box (with PGU option), andthe 16440A combine to form a powerfulFlash memory cell evaluation solution.The PGUs are fully integrated resourceswithin the 4155C and 4156C front panel,and they can be used to control otherpulse generators such as the Agilent 81110A.

Million Cycle Write/Erase

You can use the 4155C and 4156C to bothstress and measure Flash memory cellsover thousands of cycles. You can alsouse them to perform automatic analysisand display of important data such asVth shift.

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Agilent 16440A SMU/Pulse Generator Selector (front)

Agilent 16440A SMU/Pulse Generator Selector (back)

Flash Test Results

Benchtop Flash Testing

Automated Parameter Extraction

The 4155C and 4156C have extensivebuilt-in analysis capabilities that greatly facilitate parameter extractionand post-measurement calculations.The user can define new variables byspecifying mathematical equationsthat utilize measurement parametersand/or other user-defined variables.The automatic analysis capabilitiesthen enable you to calculate and toplot your desired variables each timeyou do a measurement without theneed to resort to any other post-measurement computations.

Parameter Extraction for Modeling

The Agilent Integrated CircuitCharacterization and AnalysisProgram (IC-CAP) is an industry-standard device modeling package that provides a complete environmentfor parameter extraction and circuitsimulation.

The superb accuracy and resolution ofthe 4155C and 4156C allow the user toextract extremely accurate modelingparameters without any programmingor instrument interaction.

Device Characterization

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Automatic Extraction Facilitates Gm max and Vth Measurement

Compare Simulated and Measurement Data Using IC-CAP

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Specialized Measurement Needs

Low-Noise 300 mm Wafer Probers

The Agilent 4155C and 4156C workwith a wide variety of analytical waferprobers. Various low-noise cables and probe cards are available to help you achieve accurate on-wafer measurements.

Multi-site Probe Cards

For multi-site testing such as HCI andTDDB, Agilent works with CeladonSystems (www.celadonsystems.com) to provide you with cost-effective solutions. Celadon can provide youwith multi-site probe cards and cablesthat plug directly into the E5250A’sMultiplexer Module (E5255A) card.

Packaged Part Testing

For packaged part testing Agilent cansupply you with the Agilent 16442ATest Fixture. A variety of standardmodules are available for testing different packaged part types. Agilentcan also supply blank Teflon boardsand connection pins so that you cancreate your own custom low-leakagepackaged part testing modules.

Cascade 300 mm Wafer Prober

Celadon Probe Card

Agilent 16442A Test Fixture

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Agilent 4155C/4156C Selection Guide

Standard Resources:Source Monitor Unit (SMU)Voltage Monitor Unit (VMU)Voltage Source Unit (VSU)

Optional Resources:Medium Power SMUHigh Power SMUPulse Generator Unit (PGU)Ground Unit

Measurement Capabilities:SMU Voltage Measurement RangeSMU Current Measurement RangeSMU Voltage ResolutionSMU Current ResolutionSMU Voltage Measurement AccuracySMU Current Measurement AccuracySMU Pulse WidthVMU Resolution (Differential)VMU Accuracy (Differential)Quasi-static CV ResolutionPGU Minimum Pulse Width/Period

Data Acquisition and Control:Available User InterfacesSwitching Matrix ControlProgramming OptionsInteractive Characterization Software (ICS)Agilent I/CV

Other PC Control

Plotting and Reporting:Export to Spreadsheet

Saving Plots to Files

Connectivity:Network File Management PrintingOther Interfaces

Agilent 4155C4 Medium Power SMUs2 VMUs2 VSUs

2 Medium Power SMUs1 High Power SMU2 Integrated Pulse Generator Units (+/-40 V, 200 mA)1 Ground Unit (1.6 A)

2 µV/200 V†

10 fA/1 A†

2 µV10 fA (1 fA readable)††

700 µV3 pA500 µs to 100 ms0.2 µV10 µV10 fF1 µs/2 µs

Push button, knob sweep, or keyboard. E5250A matrix control integrated into front panel.4142B and 4145 emulation, SCPI commands, Agilent FLEX.PC control of the 4155C, 4156C, E5250A, and 4284A in a Windows98, NT, or 2000 environment.Agilent FLEX driver available for ultra-fast measurement. Waferprober control. Note: I/CV includes ICS.VXIplug&play Driver compatible with BASIC, C/C++, NationalInstruments LabView, and Agilent VEE.

Spreadsheet key allows data to be exported with space, comma, ortab delimiters.Direct export to TIFF files.

NFS client capability. Prints to networked printer via network print server.GPIB, parallel port, and 10 base-T LAN port.

Agilent 4156C4 High Resolution SMUs2 VMUs2 VSUs

2 µV/200 V †

1 fA/1 A†

2 µV1 fA (0.01 fA readable)††

200 µV20 fA500 µs to 100 ms0.2 µV10 µV5 fF1 µs/2 µs

The 200 V and 1 A ranges are available when using the Agilent 41501B and HPSMU.†

The accuracy of the readable resolution is not guaranteed.††

4156C Key Features:• High resolution and accuracy measurement solution.• Full Kelvin; force, sense, and guard terminals for each HRSMU.• 1 fA resolution, 20 fA accuracy.

Agilent 4156C Back Panel View

4155C Key Features:• Cost effective measurement solution.• Non-Kelvin; force and guard terminals for each MPSMU.• 10 fA resolution, 3 pA accuracy.

Agilent 4155C Back Panel View

Agilent 4156C Controlling the Agilent E5250A

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For more information about AgilentTechnologies semiconductor test products,applications, and services, visit our website:www.agilent.com/go/semiconductoror you can call one of the centers listedand ask to speak with a semiconductortest sales representative.

For more information about other Agilenttest and measurement products,go towww.agilent.com

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Product specifications and descriptions in thisdocument subject to change without notice.Copyright ©2001 Agilent TechnologiesPrinted in U.S.A. October 1, 20015988-0307EN