nanomechanics for nems : scientific and technological issues · 16.30 vlsi of nems (title to be...

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The Observatory for Micro & NanoTechnologies proposes a workshop devoted to a worldwide state-of-the-art on NEMS and nanomechanics. In- ternational leading researchers are invited to display the cur- rent state of research on funda- mental topics and associated technological developments, challenges to overcome, main teams involved, applications & market to be aimed. In 2 days, get a complete and synthetic view of the subject! More details on the OMNT Web site: www.omnt.fr Online registration: www.minatec-crossroads.com Program elaborated in collaboration with Michael ROUKES, Jean-Louis LECLERCQ, Pascal VINCENT, Anthony AYARI, Stephen PURCELL, Joël CHEVRIER, Fabio PISTOLESI, Alain BOSSEBOEUF, Marcelo GOFFMAN, Eric COLINET, Laurent DURAFFOURG, Philippe ANDREUCCI, Eric OLLIER, Liviu NICU and Lionel BUCHAILLOT. 9.45 Welcome OMNT 9.50 General Introduction M. Roukes, Caltech Session 1 Quantum issues / chairman: to be confirmed 10.20 The Casimir effect and applications in nanophysics A. Lambrecht, ENS LKB 11.00 Quantum limits (title to be confirmed) K. Schwab, Cornell 11.40 Theoretical perspectives on quantum electromechanical systems A. Clerk, McGill University 12.20 Debate on session 1 12.30 - Buffet Session 2 Process-Integration / Chairman: L. Nicu, Laas 14.00 Towards NEMS IC: integrated actuation / transduction methods for NEMS H. Tang, Yale 14.40 Integration of NEMS on CMOS: Fabrication approaches and mass sensing applications F. Perez-Murano, IMB-CNM 15.20 Hybrid NEMS-CMOS: technological platforms, devices and applications A. Ionescu, EPFL 16.00 - Pause 16.30 VLSI of NEMS (title to be confirmed) T. Ernst, CEA/Leti 17.10 Alternative processes to be confirmed 17.50 Debate on session 2 L. Nicu, Laas 18.00 - End 19.30 - Workshop dinner Nanomechanics for NEMS : scientific and technological issues an international state-of-the-art workshop by OMNT 26 & 27 June 2008, Grenoble-Minatec, France mnt OBSERVATOIRE DES MICRO ET NANOTECHNOLOGIES Unité Mixte de Service CEA-CNRS n°2920 Session 3 Nanomechanics / chairman K. Schwab, Cornell 8.30 Micro-and nano-optomechanical systems: fundamentals, applications and challenges M. Aspelmeyer, IQOQI 9.10 A new on chip nanomechanical testing method T. Pardoen, Louvain 9.50 Nano-electromechanical systems for single electron transport R. Blick, Madison 10.30 - Pause 11.00 Carbon Nanotubes for NEMS (title to be confirmed) A. Zettl, Berkeley 11.40 Non-linear mechanics for NEMS (title to be confirmed) A. Nayfeh, Virginia Tech 12.20 Debate on session 3 K. Schwab, Cornell 12.30 - Buffet Session 4 Applications / chairman M. Roukes, Caltech 14.00 RF NEMS S. Bhave, Cornell 14.40 CNT NEMS: SWNTs as functional elements for sensors C. Hierold, ETH Zurich Biosensors special issue: 15.20 Nanomechanics in fluids(title to be confirmed) J. Arlett, Caltech 16.00 - Pause 16.30 Surface chemistry and NEMS: questions and opportunities M. Hines, Cornell 17.10 Heterogeneous systems: applications of bioMEMS M. Hegner, Trinity College 17.50 Debate on session 4 M. Roukes, Caltech 18.10 - End Day 2 Day 1

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Page 1: Nanomechanics for NEMS : scientific and technological issues · 16.30 VLSI of NEMS (title to be confirmed) T. Ernst, CEA/Leti 17.10 Alternative M. Hines, Cornellprocesses to be confirmed

The Observatory for Micro & NanoTechnologies proposes a workshop devoted to a worldwide state-of-the-art on NEMS and nanomechanics. In-ternational leading researchers are invited to display the cur-rent state of research on funda-mental topics and associated technological developments, challenges to overcome, main teams involved, applications & market to be aimed.In 2 days, get a complete and synthetic view of the subject!

More details on the OMNT Web site: www.omnt.fr

Online registration: www.minatec-crossroads.com

Program elaborated in collaboration with Michael ROUKES, Jean-Louis LECLERCQ, Pascal VINCENT, Anthony AYARI, Stephen PURCELL, Joël CHEVRIER, Fabio PISTOLESI, Alain BOSSEBOEUF, Marcelo GOFFMAN, Eric COLINET, Laurent DURAFFOURG, Philippe ANDREUCCI, Eric OLLIER, Liviu NICU and Lionel BUCHAILLOT.

9.45 WelcomeOMNT

9.50 GeneralIntroductionM. Roukes, Caltech

Session 1 Quantum issues / chairman: to be confirmed10.20 TheCasimireffectandapplicationsinnanophysics

A. Lambrecht, ENS LKB11.00 Quantumlimits(titletobeconfirmed)

K. Schwab, Cornell11.40 Theoreticalperspectivesonquantumelectromechanicalsystems

A. Clerk, McGill University12.20 Debateonsession1

12.30 - Buffet

Session 2 Process-Integration / Chairman: L. Nicu, Laas14.00 TowardsNEMSIC:integratedactuation/transductionmethodsfor

NEMSH. Tang, Yale

14.40 IntegrationofNEMSonCMOS:FabricationapproachesandmasssensingapplicationsF. Perez-Murano, IMB-CNM

15.20 HybridNEMS-CMOS:technologicalplatforms,devicesandapplicationsA. Ionescu, EPFL

16.00 - Pause

16.30 VLSIofNEMS(titletobeconfirmed)T. Ernst, CEA/Leti

17.10 Alternativeprocessesto be confirmed

17.50 Debateonsession2L. Nicu, Laas

18.00 - End19.30 - Workshop dinner

NanomechanicsforNEMS:scientificandtechnologicalissuesaninternationalstate-of-the-artworkshopbyOMNT

26&27June2008,Grenoble-Minatec,France

mntO B S E R V A T O I R E D E S

MICRO ET NANOTECHNOLOGIESUnité Mixte de Service CEA-CNRS n°2920

Session 3 Nanomechanics / chairman K. Schwab, Cornell8.30 Micro-andnano-optomechanicalsystems:fundamentals,applications

andchallengesM. Aspelmeyer, IQOQI

9.10 AnewonchipnanomechanicaltestingmethodT. Pardoen, Louvain

9.50 Nano-electromechanicalsystemsforsingleelectrontransportR. Blick, Madison

10.30 - Pause

11.00 CarbonNanotubesforNEMS(titletobeconfirmed)A. Zettl, Berkeley

11.40 Non-linearmechanicsforNEMS(titletobeconfirmed)A. Nayfeh, Virginia Tech

12.20 Debateonsession3K. Schwab, Cornell

12.30 - Buffet

Session 4 Applications / chairman M. Roukes, Caltech14.00 RFNEMS

S. Bhave, Cornell14.40 CNTNEMS:SWNTsasfunctionalelementsforsensors

C. Hierold, ETH ZurichBiosensorsspecialissue:

15.20 Nanomechanicsinfluids(titletobeconfirmed)J. Arlett, Caltech

16.00 - Pause

16.30 SurfacechemistryandNEMS:questionsandopportunitiesM. Hines, Cornell

17.10 Heterogeneoussystems:applicationsofbioMEMSM. Hegner, Trinity College

17.50 Debateonsession4M. Roukes, Caltech

18.10 - End

Day 2

Day 1