Realize your nano vision

Myfab – the Swedish Open Access Research Infrastructure

Industrial Advantages of Research Infrastructures

Näringslivets hus,Stockholm 14 June, 2012

Thomas Swahn Director Myfab

Myfab is the first choice, world‐class infrastructure

for

micro‐ and nanoscale fabrication and

characterization,

enabling researchers and innovators to solve the

grand challenges of the future.

Myfab vision

Myfab geography

Chalmers NFL, Gothenburg

KTH Electrumlab, Stockholm,

Ångström MSL, Uppsala

The Swedish Research Infrastructure for Micro-/ Nano-fabrication, and Characterization

Numbers and facts•4 800 m² clean room space

•Highly trained personnel

•Open access

•600 instruments

•622 active users 2011 (i.e. some 1500

researchers supported!)

•> 80 active companies 2010 – 2011, 130 companies (last 5 y)

•All time high usage 2011! (annual increase 7 – 8 %/y since 2008)

KTH Electrum Lab, Stockholm

Ångström Microstructure Lab, Uppsala

Chalmers MC2Nanofabrication Lab, Gothenburg

Myfab – usage statistics 2008 – Q1 2012

2008 2009 2010 20110

100

200

300

400

500

600

700

Active Myfab Users – annually 2008 - 2011

2008 2009 2010 20110

20000

40000

60000

80000

100000

120000

140000

160000

Myfab Booked Hours – annually 2008 - 2011

2008 2009 2010 2011 20120

50

100

150

200

250

300

350

400

450

500

Q1Q2Q3Q4

Active Myfab Users – Quarterly 2008 – Q1 2012

2008 2009 2010 2011 20120

5000

10000

15000

20000

25000

30000

35000

40000

45000

Q1Q2Q3Q4

Myfab Booked Hours – Quarterly 2008 – Q1 2012

Who is using Myfab? And for what?

For Nobel-prize level physics experiments? YES!

For exploitation of research results and startof new companies?

YES!3 x 5 examples, with ”commercial bias” on next pages!

Five Myfab Success Stories @ KTH

• Silex Microsystems – worlds largest “pure play” MEMS foundry

• IR Nova – new sensor for SF6 detection

• SiC companies TransIC, Ascatron, AMDS

• High-sensitivity AFM – Intermodulation products

• Photonic compon.res. – Intel and DARPA contacts

Five Myfab Success Stories @ UU

•Ångström Space Technology Centre – MEMS for

space and extreme environments

•Solibro – solar cell modules

•Åmic / Fiomi – biochips

•Rolling Optics – holographic images (3D images)

•Uppsala Berzelii Technology Centre for

Neurodiagnostics - biotechnological analysis

Five Myfab Success Stories @ Chalmers

•Light from Vacuum – dyn. Casimir effect

•Terahertz mixer in Herschel space observatory

•InP HEMT/InP MMIC/Low noise factory

•Smoltek (Graphene) and Nanofactory

Instruments (TEM-instr.)

•40 Gbit/s VCSEL – ultrabroadband low-cost

fiberoptical communication

Do we have typical users?

Flexibility is key!• Often academic users

(approx. 80%)• wants state of the art

performance • goal: publications• Flexibility rather than restricted

process lines

Repeatability is key!• Often industrial users

(approx. 20%)• Repetability• Established ”process lines”• Goal: products• Non-disclosure• Time schedule

Myfab supports everyone!

Myfab promotes quality:KTH: ISO 9001-certified in 2012Chalmers and Uppsala Univ. in next step!

One-stop-shopping

• One-stop-shop to all

processing needs

• Myfab LIMS – a joint system

for booking, logging, resource

planning and evaluation

• One distributed cleanroom

facility

• Homepage for information and

interaction: http://myfab.se

Myfab LIMS

•Booking systemBooking of equipment, booking rules,

licenses

•ToolsTool info, documents, tool responsible instructors, process log, service log,

•UsersMessage functions,

•AdministrationStatistics, invoice data, newsletter,

•Altogether an efficient management systemFor the operation of a university

cleanroom facility

Myfab LIMS

Used by• All Myfab nodes, and about 10 other Swedish academic labs: Lund

Nano Lab, Greenhouse Labs at KTH, Linköping Univ., …..• Three other national research infrastructures

Ireland: Tyndall National Institute http://www.tyndall.ie/

Finland: Micronova, http://www.micronova.fi/

Norway: NorFab (four nodes)http://norbab.no

International Myfab LIMS users

History and Operations Today

Three Swedish cleanroom facilities but no coordination:

1987 KTH, Electrum Laboratory

1997 UU, Ångström Microstructure Laboratory

2000 Chalmers, MC2 Nanofabrication Laboratory

A decade to set up today’s Myfab

2000 Swedish Microtechnology Process Integration Network

– the “SPIN document”

2004 – 2006 The first Myfab period (mFab, MyFab).

Financial support from VR, SSF, KAW and VINNOVA.

2007 – 2009 Second financing period – transformation period –

today’s Myfab is being formed. (VR, SSF, KAW, VINNOVA)

2010 – 2014 Myfab a VR National Research Infrastructure

Progress Graph

Separate research group labs

Common research labs at universities

National coordination:

Myfab

National facility, distributed and

open access

Internationalvisibility and

attraction

Agreement on shared responsibility

Common support systems

Common SME programs

Common investment strategy for profile equipment

Active collaboration

Local support, formal and active

Acting as Myfab, providing open Myfab access

Steering group, Management and Owner group

“We give and take – for a larger cake!”

Motto for success:

Challenges

• A distributed infrastructure

• Legal structure – differences between the nodes

• Not a single owner, matrix organisation,

• Economics not always a driving force strong enough (compare with

industry) – i.e. a mixed agenda

How to cope with this?

• Win-win situations is a must!

• Everyone must feel the common strengths – don’t try to measure

too much

• A living network – (infrastructure itself is dead …). People must

meet face to face (-in positive isolation)

• True commitment to common agreements, planning etc. Signed

contracts are not enough – shared responsibilities helps a lot!

• Build trust within the network: represent each others –common

structures, educations etc. supports this

• A transparent infrastructure – at Myfab represented by Myfab LIMS

Core values

Sharing

We share common resources, knowledge and opportunities. We

pass new knowledge on to others for continuous improvements.

Supporting

We have an open and generous environment supporting each

other for constant enhancement of our results.

Responsibility for quality

In everything we do, we take individual responsibility and action

for quality.

New Users and User Groups Wanted!

• The Myfab Access call will be announced during the autumn 2012

• For academic and SME groups in Sweden with no previous experience

• Aiming to establish long term relations/cooperation with new users

• Professional training and fabrication/processing free of charge

• travel and accommodation costs can also be supported

• Simple application process, simple reporting requirements

• Inspired by former very successful FP6 program MC2 Access

• Details to be specified

WELCOME! – and watch the news on: http://myfab.se

Said about Myfab

“Myfab is one of Sweden's most important technological platforms where new ideas are born, new methods and materials tested and new devices invented.

It is also an invaluable meeting place for exchange of ideas, knowledge and scientific experience among researchers in their daily efforts to make new scientific breakthroughs.”

Karin Markides,

Vice Chancellor, Chalmers

Thomas SwahnDirector Myfab

Chalmers University of TechnologyDepartment of Microtechnology and Nanoscience - MC2SE-412 96 GOTHENBURG, SwedenPhone: +46 31 772 46 76

E-mail: thomas.swahn@chalmers .se http://myfab.se

 

Myfab

an Open Swedish Research Infrastructure

Realize your nano vision

Laboratory profiling

• Each laboratory has its own profile and expensive tools

• Efficient use of investments

• Myfab road-map: investment and development plan

Benefits of coordination, networking and open access

Benefits

• Local access to the whole network

• Harmonized user fees and instrument classes

• Backup for standard processes

• Cross-disciplinary synergies

• Access to a broad range of expertise

• Efficient investments – common strategy with local profiles for

expensive equipment

• Size-benefits, open doors internationally

Exploitation

• More than 130 companies

have been using

Myfab during the last five

years!

• 30 spin-off companies have

started from the Myfab

laboratories

• MC2 Access, FP7, Myfab SME

Access, VINNOVA, concluded

Process linesMicrowave and Photonic

Nano and Quantum Tech.

Two e-beam systems:• Jeol JBX 9300 FS

300 mm substrate, ≈ 10 nm feature size

• Jeol JBX 5DII125 mm substrate, ≈ 20 nm feature size

Profile tools

Nanofabrication Lab

Profile lines

Process: 350 keV High Current Implanter

Analysis: 5 MV Tandem AcceleratorSpectroscopic methods

Profile tools

Life ScienceMaterials/thin film CharacterizationIon Beam Technology

ISO 9001 certified / controlled processes and calibrated characterization tools:

Silicon TechnologyIC, Microsystems

Compound SemiconductorsIII-V, wide-bandgap sc.Optical & electronic applications

Nanomaterials synthesisDie Mounting and packaging Characterization of materials and devices

Process lines

Stepper Lithography

Precision Etching

Epitaxial Growth

Profile tools

– sister organisation in Norway!

Started in June, 2011

http://www.norfab.no/

NorFab + Myfab geography

Chalmers NFL, Gothenburg

KTH Electrumlab, Stockholm,

Ångström MSL, Uppsala

Scandinavian Research Infrastructure for Micro-/ Nano-fabrication, and Characterization

SINTEF MiNaLab, Oslo

NanoLab NTNU, Trondheim

MSTLab, Horten

UiO MiNaLab, Oslo

Ireland: Tyndall National Institute http://www.tyndall.ie/

Finland: Micronova, http://www.micronova.fi/

Norway: NorFabhttp://norbab.no

International Myfab LIMS users

Strategic plan for Myfab 2012 – 2016The Myfab model and realization of open user access Goals:•The new Myfab portal to be opened during 2012.•Launch routines for remote processing by 2012.•At least three task groups with lab personnel to be established by 2013.•Myfab will develop a common PhD course in fabrication techniques by 2013.

Adoption to a dynamic research environment Goals:•Broadening the utilization by at least four new research user groups and at least six new companies per year.

Paths to meet societal needs Goals:•Myfab will propose a long term Myfab access program for Swedish SMEs, similarly to the VINNOVA program from 2010 but valid for several years and fully operative by 2015 or before.

Strategic plan for Myfab 2012 – 2016Myfab makes Swedish nanoscience visible in Europe Goals:•Myfab should, through one or more nodes, be partner in at least two infrastructure programs financed by EU, typically according to the I3 model (integrated Infrastructures Initiative), by 2014. •Myfab should, through its present EU connections, co‐develop input to EU to establish one new call in the next framework program.

Tools and technologies - Investment plan Goals:•Myfab will improve its success rate for funding applications for infrastructure investments from 55% (2007‐2010) to 75% in 2014.•Myfab should form alliances with at least two process equipment manufacturers•for development of state‐of‐the‐art tools.

Strategic plan for Myfab 2012 – 2016

Connecting users and tools - Myfab LIMS and the Myfab web portalGoals:•At least 35% of all active users should visit the web portal every month from 2013.•Myfab LIMS should be used by at least 10 cleanroom infrastructures by 2013.•Myfab LIMS should be used by at least 6 external paying customers by 2014.•A possibility to simplify following‐up on new research groups, new companies, and new application areas within LIMS will be introduced.

Quality system for superior performanceMyfab grows better through communication and visibility International Science and Technology Advisory Board Goals: • The advisory board should come in operation during 2012

The role of Myfab within Sweden will be further developed

Thomas SwahnDirector Myfab

Chalmers University of TechnologyDepartment of Microtechnology and Nanoscience - MC2SE-412 96 Göteborg, SwedenPhone: +46 31 772 46 76 E-mail: thomas.swahn@cit.chalmers .se www.myfab.se

 

Myfab

an Open Swedish Research Infrastructure

Realize your nano vision