© Autoliv, Inc. All Rights Reserved. / INTERNAL

Microelectromechanical_systems“MEMS”subcommittee workshop

24-Apr-2014Earl Fischer

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 2

MEMS Subcommittee Scope

�Determine the need to modify AEC Q100’s:

�Qualification tests (Table 2)

�Process Change Qualification … Selection of Tests (Table 3)

�Definition of a Product Qualification Family (Appendix 1)

�Others as needed.

� We need members to join.

� It would be good to have a balance of OEM, user and supplier companies contributing.

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 3

Automotive MEMS functions

�Accelerometers

� Crash Sensors

�Angular rate Sensors (Gyros)

� Yaw and rollover

�Pressure Sensors

� Tire Pressure, Side Impact

�Microphones

� Hands free

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 4

High Level Overview from the Internet

� The following slides in this section are to give a simple introduction to MEMS construction. Then potential qualification test changes to Q100 could be understood.

� To assure integrity and confidentiality only internet files are included in these examples.

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 5

MEMS Accelerometer Basic Elements

From page 6 ofhttp://mafija.fmf.uni-lj.si/seminar/files/2007_2008/MEMS_accelerometers-koncna.pdf

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 6

� From:

� http://www.analog.com/library/analogdialogue/archives/43-02/mems_microphones.html

ADXL50 MEMS accelerometer structure.

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 7

Analog Devices ADXRS Gyro die

� From

� http://www.analog.com/library/analogdialogue/archives/37-03/gyro.html

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 8

Electrical interfacing

� Analog Devices ADXL345B Image from:

http://www.memsindustrygroup.org/images/newsletter/Oct2009/fig5215_mems_asic.jpg

Cap

MEMS

ASIC

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 9

Pressure Sensors

� From

� http://www.sensorsmag.com/automotive/making-sense-automotive-pressure-sensors-1403

An ultra-small piezoresistive absolute pressure sensor die, covered by a silicone-gel coating (the light blue area at the bottom right of the structure) to protect the piezo-resistive structures and the micro-machined silicon membrane of the airbag pressure sensor from harsh environmental conditions.

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 10

MEMS Microphones

� From: http://www.eeherald.com/section/design-guide/mems-microphone.html

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 11

MEMS Failure Mechanisms Examples

�Particle

�Cracked structure

�Contaminant

�Cap seal breech

�Package stress impacts parasitic or sensor structure

�Moisture impacts parasitic in package or sensor structure

�Stiction

� “KPPI” Key Product Parameter Indicator shifts

© Autoliv, Inc. All Rights Reserved. / INTERNAL / ALVcode-Initials-MMMYYYY / filename.pptx - 12

Qualification test changes to Q100

� In the attached file qualification and characterization tests are included as thought starters.

�Qualification stress test modifications that impact MEMS can be filtered by selecting items beginning with M in column A.

� Failure mechanism columns have been added for discussion on what test could discover or activate a failure mechanism.

Q100 exceptions

for MEMS 1.1

Autoliv

Every year, Autoliv’s products save over 30,000 lives