microelectromechanical systems (mems ... - people · mems applications –valves and pumps
TRANSCRIPT
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 1
ROCHESTER INSTITUTE OF TEHNOLOGY MICROELECTRONIC ENGINEERING
4-8-2015 mem_app_pumps.ppt
Microelectromechanical Systems (MEMs) Applications – Valves and Pumps
Dr. Lynn Fuller
webpage: http://www.people.rit.edu/lffeee
Microelectronic Engineering Rochester Institute of Technology
82 Lomb Memorial Drive Rochester, NY 14623-5604
Tel (585) 475-2035 Email: [email protected]
Webpage: http://www.microe.rit.edu
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 2
REVIEW
Valves and Pumps Valves Flap Diaphragm Pumps Rotary Diaphragm Pump Peristaltic
Actuation Heat Piezoelectric Electrostatic Magnetic
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 3
OUTLINE
Introduction Basic Flapper and Diaphragm Valve Micromachined Silicon Microvalve, T. Ohnstein, et.el., Sensor and System Development Center, Honeywell, Inc., Bloomington, Minnesota, Proceedings of the IEEE Micro Electro Mechanical Systems Conference, February 1990. A Pressure-Balanced Electrostatically Actuated Microvalve, M. A. Huff, et.el., MIT, Cambridge, MA, Technical Digest of the IEEE Solid-State Sensor and Actuator Workshop, June 1990.
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 4
OUTLINE
Basic Diaphragm and Peristaltic Pumps A Thermopneumatic Micropump Based on Micro-engineering Techniques, F.C. M. Van De Pol, et. el., University of Twente, Department of Electrical Engineering, Enschede, The Netherlands, Proceedings of 5th International Conference on Solid-State Sensors and Actuators, June 1990 Piezoelectrically Actuated Miniature Peristaltic Pump, Y. Bar-Cohen, JPL/Caltech, Pasadena, CA, SPIE’s 7th Annual International Symposium on Smart Structures and Materials, March 1-5, 2000, Newport CA. Thermally Actuated Peristaltic Pump Design, Vinay V. Abhyankar, Lynn F. Fuller, RIT, January 22, 2002
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 5
INTRODUCTION
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 6
FLAPPER VALVES
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 7
DIAPHRAGM VALVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 8
AN ELECTROSTATIC FLAPPER VALAVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 9
AN ELECTROSTATIC FLAPPER VALAVE
Normally-open Valve Closure Plate 350 µm x 390 µm Inlet Orifice 24 µm x 60 µm
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 10
AN ELECTROSTATIC FLAPPER VALAVE
Metal electrodes (did not say, guess W) 4 Nitride Layers Oxide or Aluminum Sacrificial Layer
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 11
AN ELECTROSTATIC FLAPPER VALAVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 12
AN ELECTROSTATIC FLAPPER VALAVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 13
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 14
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 15
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 16
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 17
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 18
VALVE DESIGN AND SIMULATION
Greg Schallert – 2003
Fluent Simulation
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 19
JERMAINE WHITE CHECK VALVE
200
µ
200
µ
100
µ
2µ
2µ
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 20
CHECK VALVE THEORY OF OPERATION
When the backside pressure is greater, the flexible flap will bend up and allow airflow.
When the front side pressure is greater, the flap bends down and occludes the hole thus preventing airflow.
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 21
MOVIE OF CHECK VALVE OPERATING
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 22
MOVIE OF CHECK VALVE OPERATING
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 23
DIAPHRAGM PUMP
Heater
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 24
PERISTALTIC PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 25
THERMAL ACTIVATED DIAPHRAGM PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 26
THERMAL ACTIVATED DIAPHRAGM PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 27
THERMAL ACTIVATED DIAPHRAGM PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 28
THERMAL ACTIVATED DIAPHRAGM PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 29
THERMAL ACTIVATED DIAPHRAGM PUMP
Conclusion:
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 30
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 31
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 32
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 33
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 34
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
Flow = 3 cc/min
Pressure = 1100 Pascal = 0.16 psi
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 35
THERMAL ACTUATED PERISTALTIC PUMP
Silicon Substrate
Silicon
80 mm diaphragm (watch glass)
Insulating material
Thin Film Heater
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 36
THERMAL ACTUATED PERISTALTIC PUMP
1 2 3 4 5 6
• Sequentially activating the pumps 1- 6 will advance the fluid
• Cycling pumping system gives desired flow rate [picoL/sec]
• Additional channels can be added in increase flow rate further
1 2 3 4 5 6
1 2 3 4 5 6
reservoir reservoir
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 37
THERMAL ACTUATED PERISTALTIC PUMP
• The resistive heating element heats the cavity
• The cavity pressure rises till the watch glass deflects downward
since p/T = constant (want 10 psi activation pressure)
• The deflection results in volume displacement in the etched channel
Silicon Substrate
Silicon
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 38
THERMAL ACTUATED PERISTALTIC PUMP
Length
Width
Deflected diaphragm
Forward Displacement Reverse Displacement
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 39
THERMAL ACTUATED PERISTALTIC PUMP
32
24
)/1(
]1)/1[()979.249(
vE
vPRy
y = deflection [mm]
P = pressure [mm hg]
R = diaphragm radius [mm]
v = Poisson’s ratio [-]
Y = Young’s Modulus [dyne/cm2]
= diaphragm thickness [mm]
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 40
THERMAL ACTUATED PERISTALTIC PUMP
Required Pressure vs Diaphragm Radius for 0.75 mm deflection
Required Pressure vs Diaphram Radius for 0.75 mm
Deflection
0
5
10
15
20
25
30
1000 1200 1400 1600 1800
Radius
Pre
ss
ure
[p
si]
v = 0.206 [-]
y = 0.75 mm
Y = 7.30E11 dyne/cm2
= 80 mm
P = 517.149 mm Hg
(10 psi)
R = 1226.932983 mm
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 41
THERMAL ACTUATED PERISTALTIC PUMP
Thermal Design Calculations
(qin – qout) + qgen = qstored 0 0
qgen= q1 + q2 ~ 0
qgen = q2
Theater – Tambient (kA/L)glass + (kA/L) silicon
q2 =
= 20 mW
Tambient
Tsurface
Power
q1
q2
Tambient
Theater
(kA/L)glass
(kA/L) silicon
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 42
THERMAL ACTUATED PERISTALTIC PUMP
Fabrication Process
Anisotropically etch pump pattern in silicon wafer
Glue 80µm thick slip glass cover across channel section
Place resistance heaters above diaphragm
Glue patterned rubber insulator or pattern photoresist over channel section
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 43
THERMAL ACTUATED PERISTALTIC PUMP
Fabrication Process Continued
Not to scale
Heater Diaphragm Insulator Channel
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 44
PUMPING FLUIDS WITH VOLTAGE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 45
PUMPING FLUIDS WITH VOLTAGE
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 46
REFERENCES
1. Micromachined Transducers, Gregory T.A. Kovacs, McGraw-Hill, 1998.
2. Microsystem Design, Stephen D. Senturia, Kluwer Academic Press, 2001.
3. Microfluidic Technology and Applications, Michael Koch, Research Studies Press Ltd., Baldock, Hertfordshire, England, TJ853.K63 2000, ISBN 0 86380 244 3, 2000.
2. IEEE Journal of Microelectromechanical Systems.
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 47
HW – APPLICATIONS VALVES AND PUMPS
1. Find another publication describing the fabrication of a MEMs valve or pump. Describe the fabrication sequence in your own words. Attach a copy of the paper.