Mika Koskenvuori, Program DirectorMemsCat – Catalyst & Ecosystem on MicrosystemsCulminatum Innovation Oy Ltdwww.memscat.fi

Your source for smart systems:Your source for smart systems:

MemsCat – Catalyst & MemsCat – Catalyst & Ecosystem on MicrosystemsEcosystem on Microsystems

Nanocluster team reaches >90% of all Finnish nano and micro activities and stakeholders

Nanotechnology cluster programme 2007 - 2013 Nanotechnology cluster programme 2007 - 2013 – the gateway to Finnish nanotech expertise – the gateway to Finnish nanotech expertise Ministry of Employment and The EconomyMinistry of Employment and The Economy

Fostering the growth of Finnish nanotech based business and implementation of nanotechnology in industry

Serviceso OSKE Partneringo OSKE Promotionso OSKE Projectso OSKE Business skills

InternationallyFinnish partners to International business and projects!

Oulu

MikkeliJoensuu

Kokkola

Turku

Tampere

Jyväskylä

Helsinki Region & Coordination

Spearheading nanotechnologies Spearheading nanotechnologies in Finlandin Finland

Well established business & High class research• Aerosols (www.fineparticleforum.com)• Nanomaterials• Nanosurfaces • Photonics (www.photonics.fi)• Microtechnologies and MEMS (www.memscat.fi)• Medical diagnostics

High class research, to be commercialized• Nanocellulose• Printed Intelligence (www.printocent.fi)• Nanoelectronics• Safety and metrology• Modelling and characterization

MicroelectromechanicalMicroelectromechanical Systems Systems (MEMS)(MEMS)• MEMS are fabricated like ICs, however, MEMS has movable

structures, for example a spring and a mass.• Microsystems and MEMS are often used as synonyms.• MEMS are usually used for sensing or for actuation.

Nintendo Wii game console was a forerunner in consumer MEMS.

Photo: SensorDynamics(Maxim)

MEMS spring and mass:

Classical spring and mass:

MembersMembers

MemsCat: Key OfferingsMemsCat: Key OfferingsTechnology

• Off-the-shelf components• Tailored products• New products

Expertise and resources• Education• Partners• Manufacturing

Projects• Feasilibility• Validation• Development

MEMS Success storiesFinnish Mems cases

Case: Mems in Cars

Raw silicon Silicon wafers Sensor Elements: Sensor with ASIC/electronics

Sensor fitted on application Final system utilizing the MEMS

2 31 4

5 6

Sensor with ASIC/electronics

Cell phone with MEMS-sensors

Software enabled by MEMS

Case: Mems and Software

Polysilicon Silicon wafer Sensor Element:

2 31 4

5 6

Sensor with electronics

Weather station Service enabled business

Case: Mems and services

Polysilicon Silicon wafer Sensor

2 31 4

5 6

Mem

s in

Fin

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200

6-11

Solutions from members

Packaging

Integration

Electronics

Wireless sensor networks

Wireless

Materials

Enabling technologies

MemsCat sensors at different development stage

2 Concept

Microcalorimeter

1. Vision 3 Product proto

TRL : 1 2 3 4 5 6 7 8 9

4 Commercial

Safety with microsystemsSafety with microsystemsIdentification or detection of

people and vehicles◦ Collision-, motion-, MV-

sensorsEnergy harvesting for critical

applications◦ Vibrating MEMS-structures

Detection of radiation and dangerous chemical compounds

Quality with microsystemsQuality with microsystemsCondition based maintenance

(CBM)◦ Measurement of vibration or heat

◦ Acoustic emissionMonitoring of moisture in

pneumatic or hydraulic systemsMeasurement of moisture in

lubrication, transmission or transformer oils◦ Humidity sensors

Industrial

internet

Vaisala dewpoint sensor Vaisala dewpoint sensor ensures the safety of trainsensures the safety of trains

Pressurized air is needed in the braking systems, coupling of the trains, air conditioning and pneumatic doors. Any excess moisture in compressed air line may freeze and therefore obstruct or damage the system of pneumatic valves. This can lead to malfunction of the doors and brakes.

Continuous monitoring of the humidity ensures the

safe and reliable operation of the trains

MEMS improves detection of MEMS improves detection of dangerous substancesdangerous substances

Image: Gasera

Photo-acoustic technique is an effective method to analyze small amounts of substances like gases in air. Gasera replaced the conventional membrane component with a MEMS-cantilever and produced a gas analyzer with a sensitivity of more than hundred times better than previous solutions. MEMS-component is fabricated in Micronova

MEMS cantilever enables sub-ppb (1:109) level

monitoring in demanding environments

Murata MEMS sensors help to Murata MEMS sensors help to reduce fuel consumptionreduce fuel consumption

Rising fuel prices and growing demand for clean technology are putting pressure on car manufacturers to develop new solutions that cut fuel consumption and minimize the vehicle emissions. For this automatic stop-start systems are being developed. For optimized engine stopping conditions regarding vehicle speed and for safe engine starting inertial sensors are used.

MEMS enabled ”Start-stop” systems help to

reduce fuel consuption up to 10%

The engine is the heart of a ship and ensuring its operation is a truly business-critical task. In order to avoid severe damages in engines, monitoring wear in the major bearings and water contamination in the lubrication oil is essential.

Vaisala’s sensor monitors Vaisala’s sensor monitors condition of the ship’s enginecondition of the ship’s engine

MAN approved Vaisala’s temperature-humidity transmitter to monitor

water content of lubication oil in sea-

diesel engines

As the fossil alternative fuel sources become more and more popular, the quality of fuels used in combustion engines becomes more diverse. A MEMS sensor developed by VTT and Continental enables the online measurement of fuel before injection to control the injection timing or to even prevent injecting potentially damaging compounds into the combustion chamber.

Intelligent fuel monitoring Intelligent fuel monitoring protects the engineprotects the engine

MEMS-sensor enables real time measurement of

fuel quality and thus opens the possibility for online injection timing

for optimized combustion

For pacemakers the key parameters are accuracy, low power consumption and reliability. If patient’s activity can be measured accurately, it allows more precise adjustment of patient’s heart rate to suit the needs of the patient and activity. Effective way to measure the activity of the patient is by using accelerometers. Murata’s 3D MEMS-technology is the market leader in this application.

Accelerometer increases the Accelerometer increases the accuracy of the pacemakeraccuracy of the pacemaker

Accelerometer can be used to tune the heart

based on the activity of the patient

In precision agriculture the control of the auto steering in farming equipment is today handled via GPS; but there are several tasks which GPS is not able to handle by itself and there is need for complementing solutions. Murata MEMS Gyro combo sensors are perfectly adapted to the most accurate GPS systems and can solve challenges that simple GPS solutions have.

Combo-sensor complements Combo-sensor complements GPS in harvestingGPS in harvesting

Savings up to 20% can be achieved by using micromechanical

gyroscope in typical farm use

Optical Image Stabilization (OIS) has become essential feature in today’s smartphones and digital still cameras. Movement of camera distorts the image especially in low light conditions. This can be avoided by moving the lens of the camera in real-time to compensate for movement of the camera. This real-time OIS can be achieved through STMicroelectronics’s LxG3IS family MEMS gyroscopes.

MEMS gyroscopes create MEMS gyroscopes create shake-free imagesshake-free images

Movement of digital camera or mobile device can be eliminated from

the pictures by using MEMS gyroscopes

MemsCat – Your source forMemsCat – Your source forTechnology

• Off-the-shelf components• Tailored products• New products

Expertise and resources• Education• Partners• Manufacturing

Projects• Feasilibility• Validation• Development

Mika KoskenvuoriMika.koskenvuori@culminatum.fi+358 50 59 454 59www.memscat.fi