Microsystems at Georgia Tech

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Electronics and classical physics

Electronic sciences and solid-state physics

microelectronics

microsystems

So, you wanna study microsystems…

• Undergraduate coursework opportunities

• Graduate coursework opportunities

• Research opportunities– UROP/special problems– MS thesis work– PhD thesis work

Undergraduate Pathway

Core Graduate Pathway

***

*

* = microsystems core

Microelectronics/Microsystems Research Areas

Microsystems and Nanosystems Faculty: Mark G. Allen, Farrokh Ayazi, Oliver Brand, Albert B. Frazier

Photovoltaics Faculty: Christiana Honsberg, Bernard Kippelen, Ajeet Rohatgi

Microelectronics Systems Packaging Faculty: Farrokh Ayazi, Gary S. May, Rao R. Tummala

Manufacturing and Gigascale Integration Faculty: John D. Cressler, Gary S. May, James D. Meindl

Compound Semiconductors Faculty: William A. Doolittle, Ian T. Ferguson

Biomedical Microsystems Faculty: Mark G. Allen, Albert B. Frazier, William D. Hunt

Microelectronics Research Center

Complete facilities list & info:www.mirc.gatech.edu

• 10,000 m2 building• 2,000 m2 annex• 700 m2 clean room space• 18 individual laboratories• 470 graduate student researchers• 230 clean room users• 76 affiliated faculty

Engineering: ECE, MSE, ME, ChESciences: Chemistry, Physics, Mathematics

7 Startup Companies utilize facilities under negotiated arrangements with Georgia Tech

Coming soon: the ‘Nanocenter’

What about Microelectronics Research?

Almost 10% of GT research !?

Some Current Microsystems Programs

Complementary Metal Oxide Semiconductor Platform (CMOS)Microelectromechanical SystemsNanofabricationPackaging Research Center (resource)University Center of Excellence in Photovoltaics

Wide Bandgap Materials: Lasers, Lighting, DevicesChemical Process ResearchComputational ElectronicsOptoelectronicsQuantum DevicesComputer Aided ManufacturingWireless RF ElectronicsUltrafast Fiber Optical Communications

Center Research Possibilities

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University Center of Excellence in Photovoltaics

Center for MEMS and Microsystem Technologies

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Packaging Research Center

Polylithic integration of optical interconnection for

fiber-to-the-chip communication

Magnetic Micromachined Materials and Devices

Upper plate

Pads

Springsinductors

relays

high energy product magnets

RF MEMS

surface micromachined inductors RF switches

LC filters

High Temperature Wireless Sensors

CompressorCombustor

Sensor placed here

Pratt and Whitney

ElectroplatedCu Coil

ElectroplatedCu electrode

ConductivePaste

3.8mmDC sputteredCu electrode

161µm

3.8mm

Biomedical Devices

flexible microelectrode arrays

microneedles