leif s. johansen, thøger eskildsen, jesper hanberg & jörg ......18 june 2019 dtu enris 2019...

DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019

Risk management system for critical cleanroom supplies

Leif S. Johansen, Thøger Eskildsen, Jesper Hanberg & Jörg Hübner

DTU Nanolab, Ørsteds Plads 347, Kgs. Lyngby, Denmark

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DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019 2

It all began with a tiny hole…


Pressure relief on HBr regulator

Primary sideSecondary side


1 mm hole

“Pressure

relief valve”

(check valve)To regulator

Leak in HBr gas pipe


Common gas cabinet


Corroded gas valves for three process gases…

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Corroded gas valves for three process gases…

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Summary of events

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• HBr leak corroded three gas panels, valves and bottles

• Lead time for new gas panels: 6 months

• Gas work lead time: >1 month

• Reinstallation time: 2 weeks (incl. entire new HBr line)

• Lead time for HBr: 5 months

• Lead time for BCl3: 6 months

• BCl3 bottle connector was wrong (CGA instead of DIN)

• Bottle connector lead time: >1 month

• Down time of HBr & CH4: Ca. 7 months

• Total down time of BCl3: 9 months (!)

• Many projects seriously affected

• Serious risks were not identified


ISO 9001:2015

• DTU Nanolab is ISO2009:2015 certified

• “…actions to address risks and opportunities…”

• A need to address risks in mission critical cleanroom supplies

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Risk level assessment

• How do you quantify a risk?

• Risk = Probability x Consequence

• Probability: 1-5

• Consequence: 1-5

• 1-3: Very low risk

• 4-7: Low risk

• 8-13: Medium risk

• 14-19: High risk

• 20-25: Very high risk

• Risk level can help prioritize actions

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Labmanager

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• LabManager – DTU Danchip’s proprietary lab management system

• Our home-made LIMS, Coral, Nemo,…

– Booking

– Start/stop

– Competences

– Equipment status

– Invoicing

– Wafer shop

– CAPAs

• Browser based

• No s/w installation needed

• Accessible anywhere (with login)

• Runs a LAMP server stack

(Linux, Apache, MySQL, PHP)

• Like a tailor made suit: fit us quite well


Summary

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2 x 4 = 8

Medium risk


Risk list – ”The sum of all known fears” and how to prioritize

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Preventive actions for the gas incident

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• Don’t share corrosive gases with other gases (not implemented yet)

• Combine pressure relief valve with burst disc

• Stock all gas spares

– Pipe (150 metres coax)

– Valves

– Gauges

– Panels

– Bottle connectors

• Consider stocking spare bottles (not implemented)


Summary

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• Gas incident showed need for risk assessment

• A system for risk management of cleanroom supplies

implemented

• In line with ISO 9001:2015 requirements

• Runs on LabManager

• Risk = Probability x Consequence

• List of identified risks

• Helps log and prioritize preventive work on known risks

• Inside every small problem there is a big one struggling

to get out

• There’s always the unexpected…


Thanks to…

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Jesper Hanberg & Thøger Eskildsen

PHP-programming of risk lists in LabManager software

Leif S. Johansen & Jan V. Eriksen

Work on cleanroom supplies

Own many actions on the risk list

Jörg Hübner

Set the vision, gave the orders and kept everyone on their toes


Summary

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Thank you for your attention…

leif s. johansen, thøger eskildsen, jesper hanberg & jörg ......18 june 2019 dtu enris 2019...

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