lab procedures and safety

UNM MTTC Cleanroom Orientation

Safety is everybody’s responsibility

UNM Emergency Call List

Contact Information Phone # Reason to call UNM Police 277-2241 Fire alarms, chemical spills larger

than 12”, electrocutions, chemical exposure, medical emergency

Mark Hofheins 259-9278 Cell Fire alarms, chemical spills, medical emergencies, chemical exposure, chemical requests

Dr. Wood 272-7000 Office

Emergencies, Cleanroom access, Usage Requests

What is a Cleanroom A clean room is just that.

Its cleanliness is measured by the number of a specific size of particles per unit volume of air.

The cleaner the room the harder it is to keep clean

Our room is a ISO Class 6 cleanroom (Class 1000) or better. That means that there are no more than 1000 0.5 micron and smaller particles per cubic foot of clean space.

Why is it a Cleanroom and how is it kept that way

In processing electronic and MEMS devices, particles are boulders

Particles cause defects in electronic circuits and physical geometries in MEMS devices

We are the most contaminating thing in the cleanroom. We shed thousands of particle per second

Always remove any makeup prior to entering the cleanroom

If you smoke do not smoke 15-20 minutes prior to entering the cleanroom

Cleanroom Concerns Humans are the largest source of

contamination in a controlled environment.

Mobil metal ion contamination from fingers, gloves and spit

Never use regular paper and pens in a cleanroom. Cleanroom Paper and pens are provided.

Always wipe down anything that is entering or re-entering the cleanroom from dirty areas. Such as wafers that are transported from fab to fab.

What is done in the Cleanroom

We use chemicals to alter the surface of a silicon wafer to create electronic circuits or physical geometry's

We use a variety of acids, bases and solvents to process wafers.

Some of these chemicals are known to affect an unborn fetus. If you think you are pregnant do not enter the cleanroom.

Gowning Attire Your Requirements Always wear long pants, closed toe shoes, shirts

with sleeves. ( short sleeve minimum)

UNM Provides Hairnet Shoe Covers Face mask/ Beard Cover Smock Gloves ( Latex or Nitrile) Safety Glasses (no contacts are allowed)

Gowning Procedure

When entering the gowning room take 5-10 baby steps on the tacky mats.

Shoe covers, Hairnet, Face cover Gloves, Smocks, Safety glasses, check Mirror. Change shoe covers, hairnet, face masks every

time you re-enter the Cleanroom. Smocks are disposed of once per semester . If any item is damaged replace it immediately.

Gowning Procedure

This person is properly gowned up

No hair sticking out No unnecessary

skin showing. Safety glasses are

on

Cleanroom Entrance Procedure

Once properly gowned you can enter the lab All items entering the lab must be wiped off with

Isopropyl Alcohol/water prior to being taken in to the lab

If you smoke do not smoke 15-20 minutes prior to entering the Cleanroom

Never remove or open your smock or gloves to get something from your pockets while in the cleanroom. This means cell phones as well

Plan Your Lab Day

You must plan your day so that you can complete all that you need to do within the allowed operations time.

This includes restroom breaks. Go before entering the lab

All non computer controlled operations must be attended to at all times. No breaks are allowed while conducting such operations.

Never Eat, Drink or Smoke in a lab environment. (This means gum as well)

Exit Procedure

Store wafers on shelf in chase Clean all beakers and put them away. De-gown in the gowning room in the reverse order

of gowning. (Remembering to dispose all non re-useable items such as gloves, hairnets, booties.)

Hang your Smock for usage next time. Put away safety glasses

Exits from the Lab Fab fire escape paths

Exit Protocols During Emergencies

In the event of evacuation of the lab, if it is safe to do so, turn off all hotplates and remove wafers from etch baths.

Get you and your partner out of the lab ASAP. Do not worry about de-gowning

The safe gathering place is in front of the parking garage

If there is an active fire alarm don’t worry about calling 911. The bldg. fire alarm notifies UNM police. Get to the safe gathering location.

If there is no alarm, but the lab must be evacuated and it is safe to do so, call 911 and Lab management. If not safe to call first, get to a safe location then contact Proper response personnel.

Medical Emergencies If someone faints or is unconscious, have someone call

911 on UNM phone line, (this will give emergency response personnel an address to come to) and start CPR if qualified. If you use a cell phone call 277 2241 UNM Police.

If you are the only person around, call 911 first before starting CPR.

If the person is unconscious and you are trained, place the AED (automatic electronic defibrillator) patches on the individual and start the machine. (UNM staff members are trained on this machine)

Never move a person unless it is not safe to remain in the immediate area. Use Red Cross approved method of holding there collar and drag them to a safe location.

Fire Extinguishers This lab is equipped with

a CO2 Fire Suppression system on the solvent bench.

In the event that the CO2 system is triggered, get out of the fab as quickly and safely as possible.

Ensure that you, your buddy and all other lab users are able to get out as well.

We also have Halotron Fire Extinguishers located throughout the lab.

Halotron is an acceptable extinguishers for a Flammables or Electrical fire, It is a BC type fire Extinguishers.

Other BC (dry chemical fire extinguishers) would contaminate the lab more than necessary.

Types of Fire Extinguishers A- Ordinary solid combustibles.( Paper, Wood,

Cardboard, plastics) B- Flammable or Combustible liquids ( Cleanroom

chemicals) C- Electrical Equipment. ( Wiring, Breakers,

outlets) Non conductive propellant D Combustible Metals. ( Magnesium, Titanium,

potassium, sodium) Halotron ( used in our cleanroom) Non conductive

propellant, semi-clean BC type extinguisher. CO2 Fire Suppression systems. ( located in

Solvent Bench)

General Safety for the MTTC Cleanroom

If you are working on the Solvent bench and the CO2 Fire suppression system is activated get out of the lab as safely and as quickly as possible. Make sure your lab partner is with you!

Go to the emergency assembly point at the corner of Basehart and Bradbury and wait for emergency personal to show up.

The CO2 Fire-Suppression system floods the Cleanroom as well as both service chases with CO2. High concentrations of CO2 is dangerous to humans to breath.

Chemical Safety Overview Read the MSDS Before you work with any

chemical. Understand what it means and the risks associated with using chemicals.

For solvents know your flashpoints! We will be working with hydrofluoric acid (HF) If you get HF on you immediately rinse the

affected area with water for 15 minutes then apply the CaGluconate sauve

Report any chemical spills on you or the floor to the lab manager

Chemical Safety Overview Only pour chemical in the bench designated for it. Acid bench for acids (H2SO4/H2O2, HF) Caustic (Resist Developer) Solvent (Resist Stripper) Never mix corrosive chemicals with organics, or

solvents this will cause a undesired reaction. If you spill acid or caustic on you, immediately go

to the Safety Showers and pull the chain remain under the shower for 30 min or until help arrives

Chemical Safety Overview When working with any corrosives you are

required to have on a – Chemical Resistant Apron – Face Shield – Triple Thick Trionic Gloves – No Exceptions!

Chemical Safety Overview

Always use caution when dealing with chemicals.

Pour chemical away from your body Pour in a steady stream with no gurgles Ensure that all chemical containers are

properly labeled Chemicals poured into a smaller container

for daily use must be properly labeled.


Never enter or use any chemicals if the exhaust ventilation system is malfunctioning.

The photohelics on the acid and caustic benches will alarm when no or low exhaust is present. Leave the lab immediately and notify lab management about the problem.

Never adjust ventilation sash.


Never assume that a clear liquid spill on the floor is water. Many chemicals we use on a daily basis look like water. Use a pH Strip to tell if it is corrosive or neutral. Use caution, it may still be a dangerous chemical even if it has a neutral pH.

Never attempt to clean a spill on the floor yourself. Keep everyone away from the spill and immediately contact lab manager for a spill response!

Chemical Safety Overview Dispose of all chemicals in their proper locations. Solvents will be collected in proper waste

containers and disposed of through SHEA. Never pour solvents down the Corrosives Chemicals drain!

Only Corrosive Chemicals should be disposed of through the Corrosives Waste drain.

Never leave any chemicals on a Hot plate! Cool it down to room temperature before pouring it into a used solvent bottle

Acid and Caustic Wet Bench Usage Guidelines

Insure that all chemicals are in an appropriate container with a label.

Keep bench top dry by wiping up all chemical dragged out when moving from the bath to the dump rinser and all water drag out when moving from the dump rinser to the spin dryer.

Aspirate all approved chemicals. ( see the following for aspiration procedures.)

Never Adjust exhaust ventilation. If the bench photohelic is alarming, the exhaust system is malfunctioning. Do Not Use the bench. Leave the wafer fab immediately and contact lab management.

Acceptable chemicals to Aspirate to Chemical

Neutralization System. Acids such as Hydrofluoric Acid,

Sulfuric Acid, Acetic Acid, Nitric Acid, Piranha mixture, SC1 clean, SC2 clean, other non flammable corrosives

Caustics such as Potassium Hydroxide,

Ammonium Hydroxide, developer solution, Sodium Hydroxide, other non flammable corrosives.

Steps for Aspirating Chemicals 1. Start water Aspirator 2. Insert the end of the aspirator into the chemical

container. 3. The aspirator will lift the chemical from the

container, through a water venturi to the acid waste drain. The venturi will dilute the chemical

4. Rinse chemical container three times with water 5. Shut off Aspirator 6. Wet wipe and dry wipe the container and put

away 7. Wet wipe and dry wipe the bench top.

Chemical Safety Corrosives Corrosives must be stored in the corrosives cabinet. Always use proper PPE when working with any

chemical Remember the AAA Rule Always Add Acid to water

never the reverse When adding several acids/bases always add the

weaker acids/bases first, then add the stronger acid/base

Never pour any excess chemicals back into stock bottle. This could contaminate the bottle, and ruin any further experiments requiring the chemical from that bottle.

Chemical Safety Corrosives

Triple rinse all used corrosives bottles and dry them with a cleanroom wipe.

After they are dry, mark the bottle with “3X Rinse” and place them in the empty bottle collection bin located in chase one.

Dispose of wipes that contain corrosive materials into white labeled corrosive disposal bin

Chemical Safety Flammables/ Solvents

Solvents/Flammables may only be used on the Solvent bench or in the Photoresist spin hood

Know your flashpoints Never work over your maximum temperatures which is 20

degrees below the flash point! Never use a Hot Plate on the solvent bench without first

removing all solvents from the work area with flashpoints with in 20 degrees C of the hotplate temperature

Never use an infrared heat source near the solvent bench this includes infrared lamps


Always use proper PPE when working with solvents

Appropriate PPE for most solvents – Safety Glasses – Latex or Nitrile Gloves, – Ventilation Hood

When cleaning photoresist use Triple Trionic Gloves over the latex or nitrile gloves


Never mix solvents with corrosives Never pour excess chemicals back into

stock bottle. This could contaminate the stock bottle.

Dispose of wipes containing Flammables in the Red Flammable waste containers Only!

Chemical Safety Solvent/Flammable Waste Storage

and Disposal Procedures Never Aspirate any flammable chemicals. Solvent/Flammables are to be collected in an

appropriate container, and sent out for disposal. (use an empty bottle that the solvent came in)

Fill bottle up to 75% of total volume. Cap and label bottle contents on waste management label.

Contact lab manager for disposal. Items will be incinerated at proper disposal site.


When returning chemicals to storage. Always store chemicals in their proper location.

Place solvents under the Solvent Bench. No exceptions!

Place corrosives in a Corrosive cabinet located in one of the chases. No exceptions!

Never put Acetone in the corrosives cabinet. Never put Sulfuric Acid in the Flammable storage

cabinet.

Chemical Safety Process Gas

Only UNM Staff are allowed to replace any gas bottles

If you run out of gas and need to have a bottle exchanged contact the lab manager to schedule a time to have it exchanged.

Always follow proper protocols when working with gases.

Never mix gases or any chemicals that are incompatible.

Always wear proper PPE to help reduce the risk of injury to your self and others.


Know where the Safety Showers/ Eye Washs are, how to find it and operate it in an emergency situation if blinded

Know where the Emergency Exits are and how to operate them in an emergency situation

First Aid kits are available in the Gowning room and in the Operations office.

– Regular Cuts and bruises – CPR – HF Burn


No walking with open containers/ beakers, place the container on the acid cart and move it to the new location.

Look for any dangers when entering a lab environment

Never horseplay in a lab environment


In the event of an emergency that requires evacuation of the lab go directly to the corner of Bradbury and Basehart directly in front of the parking garage across the street from the MTTC building.

Do not leave the scene. We need to be sure everyone is out of the building and will need to take a head count.

Also the Safety response personnel may need to talk to you.

Things Not To Do Never answer your phone without first rinsing and

drying your acid gloves, removing the acid gloves and then going to the gowning room to answer the cell phone. Remember to replace your gloves with clean ones.

Never touch common items such as door handles without first washing and drying your acid gloves. This will keep chemical contamination from spreading in the lab.

The Buddy System You and your lab partners are

buddies You are response-able for each

others safety. Help each other out! Know the evacuation

routes!

Tool Usage

Never use a tool that you are not qualified to use. Never attempt to fix any tool or broken equipment

on your own. Shut off facilities only it is unsafe for the tool to have the facilities connected. Let the lab TA or UNM Staff know of the malfunction

If anything breaks immediately contact the lab manager and inform him of the problem. Leave a note stating that the tool is down.

Waste Disposal Information Dispose of waste in its proper location Corrosive contaminated materials such as wipes, acid

gloves, Etc. into WHITE CORROSIVE waste containers Flammable contaminated materials such as wipes, eye

droppers, Etc. into RED FLAMMABLE waste containers. Regular non contaminated waste such as Paper, pens,

plastic, Etc. into Stainless Steel waste containers in the Cleanroom, and the Brown waste containers in the other areas of the lab.

Sharps such as broken wafers, and razorblades need to go into the RED and WHITE SHARPS Container. No exceptions.

NFPA Label and Symbols Fire- red in color.

Indicated the fire risk associated with a particular chemical

Blue- Health risks associated with a particular chemical

Yellow- Reactivity chemicals ability to react

White- PE Personal Protective Equipment

OSHA Compliance

Never work in an unsafe area. Always know the evacuation routes in the

event of an emergency. Always be aware of your surroundings. Use proper safety devices and interlocks on

high voltage equipment Always use appropriate PPE where

required.

OSHA Compliance

Report any unsafe work conditions to the lab manager immediately.

Report any unsafe work habits immediately to the lab manager.

Report any life safety issues to the lab manager immediately

The end

Remember Safety is everyone’s responsibility

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lab procedures and safety

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