Introduction to new high-resolution 3D Line Confocal Imaging technology

Content• Company• Line Confocal Imaging• Applications• Scan examples

FocalSpec Ltd• Founded in 2009• Spin-off from Technical Research

Center of Finland (VTT)• HQ in Oulu, Finland• FocalSpec, Inc., Atlanta, GA (2016)• Demo space, Santa Clara, CA (2016)• Core technology: Line Confocal Imaging

Line Confocal Imaging (LCI)• Non-contact optical measurement method• High-speed, high-resolution 3D imaging for

– Dimensions & shapes– Surface roughness– Thickness– Textures– Flatness– Air gaps, etc.

• Unique, globally patented

LCI Principle

LCI Principle

LCI Principle

LCI Principle

Line Confocal Sensors

Key Specifications• 3D points per line 2048• Z (height) resolution 100 – 980 nm (0.0039 – 0.0386 mil)

• Lateral resolution 2.2 – 36 µm (0.0866 – 1.4173 mil)

• Z range 1.0 – 5.5 mm (0.04 – 0.22”)

• Meas. line length 4.50 – 16.40 mm (0.18 – 0.65”)

• Scan speed 300 – 4000 lines/second• Data acquisition rate 0.6 – 8.2 million 3D points/sec.

LCI Strengths• High speed real-time in-production applications• Sub-micron resolution• Works well on all surface types and materials:

– Highly reflective, mirror-like– Transparent, translucent, opaque– Curved, convex, concave, sloping– High-contrast (matte-glossy, dark-light)– Soft, fragile– Porous– All colors

LCI Strengths• Enables measurement of

– Thickness of transparent layers and air gaps– Microtopography under transparent coatings and layers (tomography)

• Acquires 2048 points simultaneously reduced error caused by vibration

• Native 3-dimensional method• Produces high-quality raw data• No speckle noise• Safe

LCI Weaknesses• Sensors

– Sizable– Heavy– New technology small quantities costly to

produce• Shadowing high aspect ratio features parallel

to line may require additional 90-degree scan

Potential Applications

3D Conductor Trace Measurement• For printed and etched conductors

– Flex circuits, PCBs– Heaters, PV contact grids, etc.

• Trace width at top and foot• Trace height• 3D trace profile cross-sectional area

Line length 11.26 mm, 2048 pixels

2.8 mm(z-range)

10 µm ( 1 pixel )

3D Conductor Trace Measurement+++ Non-filtered, unprocessed raw data shown +++

Surface Roughness Measurement • For copper and substrate layers, etc.• Off-line or on-line• Ra range 0.5 -20 µm• 250 Ra readings/sec.

Surface Roughness Measurement

Surface Roughness Measurement

Ink Thickness Measurement • Off-line or on-line• Method: Step height• Height resolution: 100 nm• Speed: 300 measurements/sec.

Ink Thickness Measurement +++ Non-filtered, unprocessed raw data shown +++

Ink Thickness Measurement

Additional Scan Examples

Printed Bio Sensor+++ Non-filtered, unprocessed raw data shown +++

Screen Printed Patterns on PET Film+++ Non-filtered, unprocessed raw data shown +++

Height: 92 µm

Width: 450 µm Width:

250 µm

Height: 96 µm

Hot-embossed Microfluidic Device+++ Non-filtered, unprocessed raw data shown +++

Paper Surface Microtopography+++ Non-filtered, unprocessed raw data shown +++

Hot-embossed Microfluidic Channels on PMMA

+++ Non-filtered, unprocessed raw data shown +++

Surface of 0603 SMT Resistor+++ Non-filtered, unprocessed raw data shown +++

PCB Assembly+++ Non-filtered, unprocessed raw data shown +++

MATTE

GLOSSY

Detail of A Dime+++ Non-filtered, unprocessed raw data shown +++

Thank you!FocalSpec, Inc.1595 Peachtree ParkwaySuite 204-110Cumming, GA 30041USA

Juha SailySales Manager(770) 713-0837juha.saily@focalspec.comwww.focalspec.com