instrumentation surface mount technology for sample conditioning systems frank ruiz, ruiz &...

Instrumentation

Surface Mount Technology for

Sample Conditioning SystemsFrank Ruiz, Ruiz & Associates

Steve Doe, Parker Hannifin Corporation

I F P A C S M - 2 0 0 1F i f t e e n t h I n t e r n a t i o n a l F o r u m

P r o c e s s A n a l y t i c a l C h e m i s t r y S M

J a n u a r y 2 1 - 2 4 , 2 0 0 1 ,A m e l i a I s l a n d , F l o r i d a , U . S . A

Surface Mount Technology for Surface Mount Technology for Sample Conditioning SystemsSample Conditioning Systems

AgendaAgenda

Part I: Mechanics, Steve DoePart I: Mechanics, Steve Doe

Surface Mount History in the Semiconductor IndustrySurface Mount History in the Semiconductor Industry

Substrate Design: SP76 Parallels & EnhancementsSubstrate Design: SP76 Parallels & Enhancements

Elastomer or Metallic Device Interface Seals?Elastomer or Metallic Device Interface Seals?

Part II: System Design, Frank RuizPart II: System Design, Frank Ruiz

Device Design for System FlexibilityDevice Design for System Flexibility

Designing a Sample Conditioning SystemDesigning a Sample Conditioning System

Future DevelopmentsFuture Developments


Surface Mount HistorySurface Mount History Parker: surface mount supplier to semiconductor Parker: surface mount supplier to semiconductor

market for several yearsmarket for several years


Surface Mount HistorySurface Mount History SP76 based on Semiconductor Industry 1½” footprintSP76 based on Semiconductor Industry 1½” footprint

SEMI organization forum for industry standardsSEMI organization forum for industry standards

Initial SEMI surface mount effort in early 1990’sInitial SEMI surface mount effort in early 1990’s

Motivations similar to those of today’s Petrochemical Motivations similar to those of today’s Petrochemical IndustryIndustry

Market penetration most significant in AsiaMarket penetration most significant in Asia

Global Standard for interface seal?Global Standard for interface seal?

1111//88” footprint being introduced (and embraced)” footprint being introduced (and embraced)

Semiconductor Industry Use: Gas DeliverySemiconductor Industry Use: Gas DeliveryAnalytical Industry Use: Sample ConditioningAnalytical Industry Use: Sample Conditioning


Substrate DesignSubstrate Design Meets SP76 designMeets SP76 design

specification for specification for

elastomeric seal elastomeric seal

option, however...option, however...


Substrate DesignSubstrate Design Achieves addedAchieves added

system flexibilitysystem flexibility

with 5 streams, with 5 streams,

and…and…


Substrate DesignSubstrate Design Provides ability Provides ability

to mount largerto mount larger

devices such asdevices such as

current designs current designs

for flow controllers,for flow controllers,

regulators and otherregulators and other

devices. devices.


Substrate DesignSubstrate Design


Substrate Block to Block SealingSubstrate Block to Block Sealing Incorporates standard O-RingIncorporates standard O-Ring

seal (size 2-007)seal (size 2-007)

11//88” through hole w/ counterbore to ” through hole w/ counterbore to

capture o-ringcapture o-ring

Blocking flow passagesBlocking flow passages

provides system flexibilityprovides system flexibility

Developing “plug” from either a Developing “plug” from either a

solid elastomer or metallic disksolid elastomer or metallic disk

molded into O-Ringmolded into O-Ring


Substrate DesignSubstrate Design


Elastomeric or Metallic Device Seals?Elastomeric or Metallic Device Seals?

Pro’sPro’s Con’sCon’s Elastomeric:Elastomeric: Used in numerous Used in numerous 1x101x10-4-4 cc He/sec cc He/sec

sample systemssample systems leak integrity leak integrity devices; entrenched,devices; entrenched,successful technologysuccessful technology

Metallic: Metallic: 1x101x10-10-10 cc He/sec cc He/sec Seal & mating surfaces Seal & mating surfaces leak integrityleak integrity subject to handlingsubject to handling

damage resulting in damage resulting in leaksleaks


Elastomeric or Metallic Device Seals?Elastomeric or Metallic Device Seals?

Conclusion:Conclusion: Recommend Elastomeric for majority of sampling systems Recommend Elastomeric for majority of sampling systems

and Metallic for PPB detection level applicationsand Metallic for PPB detection level applications



(1.5 CR) (1.5 CL)(1.5 CL) (1.5 C)

A A B C CB

AA- B-B C-C

(1.5 CR5)

D D

-DD

1.5" BASE BLOCKS



1.5" BASE 2.375" BASE

TWO STANDARD BASE SIZES


COMPONENTS

TEMP.SENSOR

PRESS.XTR

PRESSURE TRANSDUCER

TEMPERATURE SENSOR

FILTER

NEEDLE VALVE

3-WAY VALVE

BALL VALVE

PRESSURE REDUCING REGULATOR

BACK PRESSURE REGULATOR

RELIEF VALVE

FLOW CONTROLLER



IR-4000

(2.5 CL)

PRESSURE REGULATOR

123L

345

D

D

Three Inlet ports tiedtogether inside the body of the component.

All three Outlet portsare common to thediaphragm cavity.

D-D

1 2 3 4 5

1 2

3 4

5

SpringHole

CHANNEL #

IR-4000 BODY

E E

E-E

PRESSURE REDUCING REGULATOR IR-4000 EXAMPLE

ComponentINLETComponent

OUTLET BLANK


IN INBLOCKED

OUT OUTBLOCKED

BLANKIR-4000

(2.5 C)

PRESSURE REGULATOR

123L

345

A A

INOUT

BLOCKED

BLANK

CHANNELNUMBERS

AA-

(2.5 C)

1

2

3

4

5

PRIMARY FLOW DIRECTION

These inlet channels are connectedtogether inside the component.

These outlet ports are connectedtogether inside the component.

The number in the circle is the channelto which this port is connected."3L" Is Channel 3, Left Center Port.


IR-4000

IR-4000 CONNECTIONS TO SUBSTRATE(TOP VIEW OF SUBSTRATE)

IR-4000

(2.5 CL) (2.5 CR)

IR-4000

(2.5 C)

PRESSURE REGULATOR

123L

345

IR-4000

(2.5 C)

PRESSURE REGULATOR

12

345

PRESSURE REGULATOR

12

3R3

45

PRESSURE REGULATOR

123

45

3L 3R

OUTLETOF COMPONENT

INLETOF COMPONENT

BLANK OUTLETOF COMPONENT

PLUGGED


H2OTemp

AIR

AIR

ZEROPARKER

STREAM SWITCH

FLOWCONTROLLER

O2

Temp

FLOWCONTROLLER

ZEROPUMP

R-max

PARKERSTREAM SWITCH

R-max N2

RETURN HDR.

NeSSI SYSTEM 3


H2OTemp

AIR

C

AIR

ZEROPARKER

STREAM SWITCH

C

FLOWCONTROLLER

O2

Temp

FLOWCONTROLLER

ZEROPUMP

R-max

PARKERSTREAM SWITCH

R-maxN2

RETURN HDR.

CIRCUIT 1

CIRCUIT 2

4

6

7

9

2

3

1

NeSSI SYSTEM 3(Modified)


H2OTemp

AIR

FLOWCONTROLLER

ZEROPUMPPARKER

STREAM SWITCH

R-max

N2

RETURN HDR.

4

6

2

9

2

3

1

O2



IR-4000

IR-4000 CONNECTIONS TO SUBSTRATE(TOP VIEW OF SUBSTRATE)

IR-4000

(2.5 CL) (2.5 CR)

IR-4000

(2.5 C)

PRESSURE REGULATOR

123L

345

IR-4000

(2.5 C)

PRESSURE REGULATOR

12

345

PRESSURE REGULATOR

12

3R3

45

PRESSURE REGULATOR

123

45

3L 3R

OUTLETOF COMPONENT

INLETOF COMPONENT

BLANK OUTLETOF COMPONENT

PLUGGED


COMMON

NORMALLY CLOSED

NORMALLY OPEN

AIR

3-WAY R-max

FILTER

(1.5 CR)

H2O CELL

(1.5 CR)

FLOW CONTROLLERWITH EXTERNAL NEEDLE VALVE

UPSTREAM REFERENCE

(2.5 CL)

DOME

DOME

BPR-4000

(2.5 CL)


123

3L45

IR-4000

(2.5 CR)

PRESSURE REGULATOR

3R45

123

4 3R

33R4

a123

ANALYZERCELL

METERING VALVE1.5" SUBSTRATE

123

3R45 FLOW

CONTROLLER

23

3L4

15

1

4

2

3

(2.5 C)

2

1

3

12

(2.5 CR)

4

(1.5 CL)

TEMP. SENSOR1.5" SUBSTRATE

123L

345

TEMP

a

NeSSI SYSTEMNo. 3

H20 ANALYZER

ACTUATING AIR

ASPIRATOR

ACTUATING AIR

VENT RECOVERY

ASPIRATOR

SAMPLE IN

RTN.

RETURN HDR.

IN

9

6

BY-PASS

4

TO R-max

FROM R-max

FROM R-max

3TO R-max


H2O

Temp

AIR

FLOWCONTROLLER

ZEROPUMPPARKER

STREAM SWITCH

R-max

N2

RETURN HDR.


4

6

7

9

2

3

1

O2

5 10


COMMON

NORMALLY CLOSED

NORMALLY OPEN

AIR

3-WAY R-max

FILTER

(1.5 CR)

(1.5 C)

FLOW CONTROLLERWITH EXTERNAL NEEDLE VALVE

UPSTREAM REFERENCE

(2.5 CL)

DOME

DOME

BPR-4000

(2.5 CL)


123

3L45

IR-4000

(2.5 CR)

PRESSURE REGULATOR

3R45

123

4 3R

3

METERING VALVE1.5" SUBSTRATE

123

3R45 FLOW

CONTROLLER

23

3L4

15

1

4

2

3

(2.5 C)

2

1

3

12

4

(1.5 C)

TEMP. SENSOR1.5" SUBSTRATE

123

345

TEMP

NeSSI SYSTEMNo. 3

EXTERNAL H20 ANALYZER

ACTUATING AIR

VENT RECOVERY

ASPIRATOR

ACTUATING AIR

RETURN

ASPIRATOR

SAMPLE IN

RTN.

RETURN HDR.

IN

9

6

7

BY-PASS

4

TO R-max

FROM R-max

FROM R-max

3TO R-max

5TO ANALYZER

5

10FROM ANALYZER

10FROMANALYZER

69

7


Future Developments (Steve & Frank)Future Developments (Steve & Frank) Solicit input from other suppliers to include analyzer & sensor Solicit input from other suppliers to include analyzer & sensor

devices on stickdevices on stick

Develop automation software for system designDevelop automation software for system design

Develop pricing for total offeringDevelop pricing for total offering

Re-present system with updates at PITTCON-2001Re-present system with updates at PITTCON-2001

Build beta-site system for field testing?Build beta-site system for field testing?


Thank you!Thank you!

Questions?Questions?

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