icops minicourse on plasma processing technology
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ICOPS Minicourse on Plasma Processing Technology. Part 1: Vacuum Basics Jeff Hopwood Northeastern University. Goals. To review basic vacuum technology Pressure, pumps, gauges To review gas flow and conductance To understand the flux of vapor phase material to a substrate - PowerPoint PPT PresentationTRANSCRIPT
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ICOPS Minicourseon Plasma Processing TechnologyPart 1: Vacuum BasicsJeff HopwoodNortheastern University
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GoalsTo review basic vacuum technologyPressure, pumps, gaugesTo review gas flow and conductanceTo understand the flux of vapor phase material to a substrateTo understand mean free path, l
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Vacuum (units)
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Rough VacuumMechanical Pumps typically create a base pressure of 1-10 mTorr or 0.13-1.3 PaRotary Vane Pump(Campbell)Warning:Certain process gases are incompatible with pump fluids and pose severe safety risks!
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High Vacuum PumpingCryopumps condense gases on cold surfaces to produce vacuumTypically there are three cold surfaces:Inlet array condenses water and hydrocarbons (60-100 Kelvin)Condensing array pumps argon, nitrogen and most other gases (10-20 K)Adsorption is needed to trap helium, hydrogen and neon in activated carbon at 10-12 K. These gases are pumped very slowly!Warning: all pumped gases are trapped inside the pump, so explosive, toxicand corrosive gases are not recommended. No mech. pump is needed until regen.adapted from www.helixtechnology.com (Campbell)
- High Vacuum PumpingProcess chamberTurbomolecular PumpHigh rotation speed turbine imparts momentum to gas atomsInlet pressures:
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High Vacuum PumpingProcess chamberHeater/Pumping FluidForeline -to mech pumpDiffusion Pump
The process gas is entrained by the downward flow of vaporized pumpingfluid.
Benefits:Low cost, reliable, and rugged.High pumping speed: ~ 2000 l/s
Caution:The process chamber will becontaminated by pumping fluid.A cold trap must be used between thediffusion pump and the process chamber.
Not recommended for clean processes.Water-cooledwallsadapted from Lesker.com
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Flow RateTypically gas flows are cited in units of standard cubic centimeters per minute (sccm) or standard liters per minute (slm)
Standard refers to T=273K, P = 1 atm.
Example:Process gas flow of 50 sccm at 5 mTorr (@300k) requires
50 cm-3min-1(760Torr/5x10-3Torr)(300/273)(1min/60sec)(1/103) = 140 liters/sec of pumping speed at the chamber pump port
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Conductance Limitation50 sccm5 mTorr140 l/s= Q/(P1 P2)
Fixed Throughput, Q:Q = 0.005 Torr x 140 l/s = 0.7 Torr-l/s> 140 l/s since P2> a, L(see Mahan, 2000)
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Pressure MeasurementVacuum Gauge Selection adapted from Lesker.comRGA:A simple mass spectrometer
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Residual Gas AnalysisLow pressure systems are dominated by water vapor as seen in this RGA of a chamber backfilled with 4x10-5 torr of argonWhy? H2O is a polar molecule that is difficult to pump from the walls --> bake-out the chamberSource: Pfeiffer vacuum productsLeak?
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Gas Density (n)Ideal Gas LawPV = NkT
Gas density at 1 Pascal at room temp.N/V = n = P/kT = (1 N/m2)/(1.3807x10-23J/K)(300 K)= [1 (kg-m/s2)/m2]/[4.1x10-21 kg-m2/s2]= 2.4x1020 atoms per m3= 2.4x1014 cm-3 at 1 Pa
Rule of Thumb n(T) = 3.2x1013 cm-3 x (300/T) at a pressure of 1 mTorr
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Gas KineticsMaxwellian DistributionAverage speed of an atom:Flux of atoms to the x-y plane surface:(Campbell)Very important!
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ExampleA vacuum chamber has a base pressure of 10-6 Torr. Assuming that this is dominated by water vapor, what is the flux of H2O to a substrate placed in this chamber?
n = 3.2x1013 cm-3/mTorr * 10-3 mTorr = 3.2x1010 cm-3
= (8kT/pM)1/2 = 59200 cm/s
Gz = ()n = 4.74x1014 molecules per cm2 per sec!
This is approximately one monolayer of H2O every secondat 10-6 Torr base pressure.
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Collisions and Mean Free PathGas Densityn = P/ kTl = 1/snCross-sections ~ pd2dAr
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ICOPS Minicourseon Plasma Processing TechnologyPart 2: Plasma BasicsJeff HopwoodNortheastern University
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Plasma: an ionized gas consisting of atoms, electrons, ions, molecules, molecular fragments, and electronically excited species (informal definition)www.geo.mtu.edu/weather/aurora/
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Plasma: the fourth state of mattersolid(ice)
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DC Plasma (or AC Fluorescent Lampwhy AC?)+Argon + Mercury @ 0.05 atm.lamp endcap-+
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Paschen Curvehttp://www.duniway.com/images/pdf/pg/Paschen-Curve.pdfF. Paschen, Ann. Phys. Chem., Ser. 3 37, 69 (1889).
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What do we need to know about plasma?substrateWallWallPLASMA
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Power AbsorbedsubstrateWallWallelectronsne, TePowerPLASMA
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Power Absorbed: DCDC powerGeneral electrical mobility and conductivityMobility: me = q/m = q/nmmeWhere is the average time between collisionsand nm is the collision frequency (collisions per second)Electron Conductivity: sDC = qneme = q2ne/nmme DC power absorbed:
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Power Absorbed: RFRF/microwave powerOhmic Heating
Generic electron-neutral collision frequencynm ~ 5x10-8 ngasTe1/2 (s-1) ngas (cm-3), Te(eV).
Example: Find the pressure at which rf ohmic heating becomes ineffective: nm = 0.1w, Te = 2eVw = 13.56 MHz * 2p = 85.2Mrad/sngas = 0.1*85.2x106/5x10-8(2)1/2 = 1.2x1014 cm-3 = 3.7 mTorrAn electron oscillates in a rf electric field without gaining energyunlesselectron collisions occur
f=13.56 MHzHopwood and Mantei, JVST A21, S139 (2003)
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Stochastic Heatingan electron enters and exits a region of high field for a fraction of an rf cyclet0 vx(0)The usual mechanism for heating electrons using RF electric fields at low pressures
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Wave/Resonant HeatingBDCxyvF = q(vxB)E=0Hopwood and Mantei, JVST A21, S139 (2003)
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Electron CollisionssubstrateWallWallelectronsne, TePowerPLASMA
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Electron CollisionsElastic Collisions: Ar + e Ar + eGas heating: energy is coupled from e to the gasExcitation CollisionsAr + ehot Ar* + ecold, Ar* Ar + hn Responsible for the characteristic plasma glowEelectron>Eexc (~11.55 eV for argon)Ionization Collisions:Ar + ehot Ar+ + 2ecoldCouples electrical energy into producing more e_Eelectron > Eiz (15.76 eV for argon) Dissociation:O2 + ehot 2O + ecold or O2 + ehot O + O+ + ecoldCreates reactive chemical species within the plasmaEelectron > Ediss (5.12 eV for oxygen)
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Collision Cross SectionsUnlike the hard sphere model, real collision cross sections are a function of electron kinetic energy s(E), or electron velocity s(v).We must find the expected collision frequency by averaging over all E or v.becomes(cm3s-1)
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Graphicallyf(E) or s(E)Electron energy, E sAr+(E)f(E)TeEizNote: the exponential tail of energeticelectrons is responsible for ionizationThe RATE CONSTANT: Kiz(Te) Kizoexp(-Eizo/Te)curve fitting
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Graphicallyf(E) or s(E)Electron energy, E sAr+(E)f(E)TeEizNote: the exponential tail of energeticelectrons is responsible for ionizationThe RATE CONSTANT: Kiz(Te) Kizoexp(-Eizo/Te)curve fittingHot electrons more ionization
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Examples of Numerically Determined Rate Constants (Lieberman, 2005)
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Generation Rate of Plasma Species by Electron Collisionsy + e x + ednx/dt = Kxneny
For example,Ar + e Ar+ + e + edne/dt = Kiznengas
is the number of electrons (and ions) generated per cm3 per second
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Electron-Ion RecombinationThree-Body Problem: e + Ar+ + M Ar + M the third body is needed to conserve energy and momentum in the recombination process-+MM-+Mwall recombination dominates at low pressure because three body collisions are rarewall recombinationvolume recombination
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Transport to SurfacessubstrateWallWallelectronsne, TePowerPLASMA
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Electron and Ion Loss to the Substrate and Walls- the plasma sheath -nenir 0electrons are much more mobile than ionsme = q/me >> q/mi = michamber
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Electron and Ion Loss to the Substrate and Walls- the plasma sheath -+low energy electrons are trapped within the plasma, but ions are accelerated by the sheath potential to the chamber walls and substrate
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Ion FluxThe ion flux to a solid object is determined by the Bohm velocity (or sound speed) of the ion:
uB = (kTe/mi)1/2 = 9.8x105 (Te/M)1/2 cm/s =9.8x105 (3 eV/40 amu)1/2 ~ 2.5x105 cm/s
and the ion flux is given by Gi = uBni (cm-2s-1)
(this is the ion speed at the edge of the sheath)
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Electron FluxOnly the most energetic electrons can overcome the sheath potential, Vs. Ge = ne exp (qVs/kTe)f(E)Electron energy, E TeqVsflux to surfaceBoltzmann factor
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Sheath Potential, VsIn the steady state, the electron and ion fluxes to the chamber/substrate must be equal, if there is no external current path
Ge = Gi ne exp (qVs/kTe) = uBni = (kTe/mi)1/2 negivingVs = -Teln(mi/2pme) ~ -5Te
This is often called the floating potential: Isolated surfaces have a negative potential relative to the plasma.
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Ion EnergyEx: Assuming argon with Te = 3 eV,the ion energy at the cathode is Ei = q(1 kV + 4.7Te) = 1014 eVignoring ion-neutral collision within s,and the ion energy at the anode is Ei = 4.7 Te = 14 eV
Ion mean free path:li = 1/ngassi ~ 3/p (cm) for Ar+where p is the pressure in mTorrHere li = 3/100 cm or 0.3 mm @ 0.1 torrNOTE: s>>li Ei
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Particle Conservationand Electron TemperatureA simple model for electron temperature can be found for a steady state plasma:
# of ions created/sec = # of ions lost/secKizngasneV = uBniAeff
Kiz/uB = Kizoe-Eiz/kTe /(kTe/mi)1/2 = Aeff/(V ngas)=1/deffngas
(V=plasma volume, Aeff = effective chamber area, deff = V/Aeff)
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The electron temperature (Te) is a unique function of gas density, ngas (pressure)chamber size, deff = V/Aeffgas type: Kiz, Eiz
Example:Two large parallel plates separated by 2 cm are used to sustain an argon plasma at 25 mTorr. Find Te.deff = V/Aeff ~ pR2d / (pR2 +pR2) = d/2ngasdeff ~ (25*3.2x1019m-3)(0.01m) =0.8e+19 m-2
Te = 3 eV
(Note: we have assume that the plasma density is uniform)
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Power Conservation and Electron Density, nePower Absorbed by the Plasma = Power Lost from the Plasma
Pabs = [qniuBEion+q(neeVs/kTe )Eelec]Aeff +(Pheat+Plight+Pdiss) qneuBAeff(Eion + Eelec + Ec)
where EC is the collisional energy lost in creating an electron-ion pair due to ionization, light, dissociative collisions, and heat:EC = [nizEiz + nexEex + ndissEdiss + nm(3me/mi)Te]/nizqVs2TePionPelectron
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Collisional Energy Loss
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Electron Density ExampleContinuing with the previous exampleA plasma is sustained in argon at 25 mTorr between to parallel plates separated by 2 cm. The radius of the plates is 20 cm and the power absorbed by the plasma is 100 watts. Find ne.
100 W = qneuBAeff(Eion + Eelec + Ec)= (1.6x10-19C)ne(2.5x105cm/s)(2px202 cm2) x(5Te + 2Te + 55 eV) ne = 1.3x1010 cm-3
Find ne if the gas is N2, assuming that Te ~ 3 eV100 W = (1.6x10-19C)ne(2.5x105cm/s)(2px202 cm2)(5Te + 2Te + 400 eV) ne = 2.3 x 109 cm-3
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Example (contd)Repeat the previous example using argon, BUT include an electrode voltage of 1000v that is applied to one plate to sustain the plasma.
100 W = qneuBAeff(Eion + Eelec + Ec)= (1.6x10-19C)ne(2.5x105cm/s)(px202 cm2) x{(5Te + 2Te + 55 eV)+[(1000 eV+5Te) + 2Te + 55 eV]} ne = 1.7x109 cm-3anodecathode
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Secondary ElectronsGe = gsec Gi , where gsec~0.1-10 and Ee ~ qVssubstrateWallWallelectronsne, TePowersecondaryelectronsPLASMAsecondaryelectrons
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SummarysubstrateWallWallPLASMA
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Basic Plasma Technology
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Basic Plasma TechnologySputtering MagnetronNSNSNSTargetSubstrateDCPulsedRFto pump
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Basic Plasma TechnologyCapacitively Coupled Plasma0.4 60 MHzHopwood and Mantei, JVST A21, S139 (2003)
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Basic Plasma TechnologyElectron Cyclotron Resonance PlasmaHopwood and Mantei, JVST A21, S139 (2003)
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Basic Plasma TechnologyInductively Coupled Plasma0.4 13.56 MHzHopwood and Mantei, JVST A21, S139 (2003)
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ICOPS Minicourseon Plasma Processing TechnologyPart 3: Physical Vapor DepositionJeff HopwoodNortheastern University
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OUTLINEEvaporationSputteringIonized Physical Vapor Deposition
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Deposition by EvaporationHeating materials until the vapor pressure is non-zero followed by condensation of the vapor on a (relatively cold) substrate.electron beam evaporationthermal evaporationmolecular beam epitaxylaser ablationarc deposition
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Two Types of EvaporationQuasi-equilibrium: liquid-vapor equilibrium within the cellNon-equilibrium: vapor is emittedinto a low pressure volume; no liquid-vapor equilibriumS.M. Rossnagel, J. Vac. Sci. Technol. A 21, Sep-Oct 2003
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Typical e-beam evaporator
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Vapor Pressure vs. TemperatureDiffering vapor pressures make evaporation of alloys quite difficult
Ex: TiW
Solutions:Rod-fed evaporationMultiple evaporators
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Evaporative Flux and Conformality
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Sputtering OutlineRF Diodes vs. Magnetronselectron and ion densityMechanism: collision cascadessputter yieldangular distributionThomson distributionReflected neutrals and ion-assisted dep.film morphology and film stressSputtering AlloysReactive sputtering
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Sputtering System
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Magnetron Sputtering++TARGET ~300vP = 0.1 5 mTorrB = 200 GVTARGET ~ 300 vEe ~ 300 eV 300 eV / (15.76 eV/ion) = 19 ions per secondaryrce = ve/wce ~ 3 mmB-field traps secondary electrons near the target surfacene ~ 1012 cm-3Bne ~ 109 cm-3
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Physical Outcomes of Ion BombardmentCollision CascadeSurface Binding Energy, Usb
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Sputtering Yield:Y(E) = number of ejected atoms per incident ionEmpirical Yield: Y(E) = 6.4x10-3 mT g5/3 E1/4(1-Eth/E)3.5where g = 4mgmT / (mg+mT) 2J. Bohdansky, J. Roth, and H.L. Bay, An analytical formula and important parameters for low-energy ion sputtering, J. Appl. Phys. 51(5) 2861- (1980).J.E. Mahan, Physical Vapor Deposition of Thin Films, p. 207ff (Wiley, New York, 2000).
Eth ~ 4Usb/g
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Angular Distribution of Sputtered AtomsGs (E,q) = Y(E) Gi (cos q)/pTARGETGi
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Thompson Distribution of Energies for Sputtered Neutral AtomsMost probable energy is half the surface binding energy, Usb/2
There is a very broad high energy tail, such that ~ 10s eVEs
Chart2
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0.06582174240.8699330585
0.06540537850.8705891908
0.0649929390.8712411791
0.0645843750.8718890625
0.06417963830.8725328794
0.06377868140.8731726679
0.06338145760.8738084655
0.06298792090.8744403093
0.06259802580.875068236
0.06221172790.8756922818
0.06182898310.8763124824
0.06144974820.8769288732
0.06107398050.8775414889
0.06070163810.8781503642
0.06033267950.878755533
0.05996706420.8793570289
0.05960475180.8799548853
0.0592457030.8805491349
0.05888987870.8811398101
0.05853724060.881726943
0.05818775090.8823105654
0.05784137240.8828907084
0.05749806830.8834674031
0.05715780260.8840406799
0.05682053950.8846105692
0.0564862440.8851771006
0.01549733650.9763321995
Sputtered Al energy distribution (dn/dE)and integration
Distribut
Int.#atom
Energy (eV)
Chart1
0.21679156460.0011200898
0.39419174190.0042047119
0.53914663160.0088959194
0.65728042950.0148983564
0.75317055390.0219674745
0.83056037810.0299001736
0.89252487510.0385273238
0.9416004520.0477077562
0.97988734640.0573234098
1.00913085940.0672753906
1.03078615370.0774807592
1.04607021380.087869898
1.05600371670.0983843463
1.0614449310.1089750129
1.0631172840.1196006944
1.06163187310.1302268431
1.05750592350.1408245388
1.05117797850.1513696289
1.04302044640.1618420059
1.033350.172225
1.02243622360.1825048659
1.0105088260.1926703495
0.9977636740.2027123198
0.98436785550.2126234568
0.97046393690.2223979855
0.95617355480.2320314493
0.9416004520.2415205159
0.92683304970.2508628121
0.91194663280.2600567815
0.89700520830.2691015625
0.88206309120.2779968842
0.86716625830.2867429761
0.85235350750.2953404904
0.83765745160.3037904358
0.8231053710.3120941198
0.80871994740.3202530992
0.79451989610.3282691371
0.780520510.3361441663
0.76673413060.3438802576
0.75317055390.3514795918
0.73983738280.3589444369
0.72674033080.3662771267
0.71388348710.3734800443
0.70126954470.3805556063
0.68890.38750625
0.67677532480.3943344226
0.66489511710.4010425715
0.65325823090.4076331361
0.64186289020.4141085413
0.63070678710.4204711914
0.61978716830.4267234654
0.6091009090.4328677127
0.59864457830.43890625
0.58841449530.4448413584
0.57840677790.4506752811
0.56861738590.4564102217
0.5590421570.4620483427
0.54967683930.4675917646
0.54051711850.4730425649
0.5315586420.4784027778
0.5227970390.4836743939
0.51422793850.4888593602
0.5058469840.4939595799
0.49764984640.4989769126
0.4896322350.5039131752
0.48178990680.5087701416
0.47411867390.5135495437
0.46661441020.5182530716
0.45927305660.5228823749
0.4520906250.5274390625
0.44506320240.5319247041
0.4381869530.5363408304
0.43145812040.5406889345
0.42487302910.544970472
0.41842808550.5491868622
0.41211977840.5533394891
0.40594467910.5574297018
0.39989944130.5614588156
0.39398080080.5654281126
0.38818557480.569338843
0.38251066080.5731922252
0.3769530360.5769894471
0.37150975610.580731667
0.36617795350.5844200139
0.36095483690.5880555884
0.35583768870.5916394638
0.35082386480.5951726866
0.34591079180.5986562769
0.34109596630.6020912299
0.33637695310.6054785156
0.33175138340.6088190804
0.32721695320.6121138471
0.32277142190.6153637158
0.31841261050.6185695646
0.31413840.62173225
0.309946730.6248526077
0.30583559690.6279314531
0.30180305240.6309695816
0.29784720210.6339677697
0.29396620390.6369267751
0.29015826650.6398473373
0.2864216480.6427301782
0.28275465470.6455760024
0.27915563920.6483854979
0.27562299950.6511593364
0.27215517780.6538981739
0.26875065870.656602651
0.26540796830.6592733932
0.26212567290.6619110117
0.25890237790.6645161033
0.25573672660.6670892514
0.2526273990.6696310256
0.24957311080.6721419828
0.24657261220.6746226671
0.24362468740.6770736103
0.24072815260.6794953321
0.23788185620.6818883408
0.23508467690.684253133
0.23233552350.6865901944
0.22963333330.6889
0.22697707210.6911830142
0.22436573270.6934396912
0.22179833420.6956704753
0.21927392160.6978758011
0.21679156460.7000560939
0.2143503570.7022117696
0.21194941630.7043432353
0.20958788250.7064508893
0.20726491780.7085351215
0.20497970580.7105963135
0.2027314510.7126348388
0.2005193780.7146510631
0.19834273110.7166453444
0.19620077360.7186180334
0.19409278740.7205694731
0.19201807230.7225
0.18997594560.7244099432
0.18796574150.7262996253
0.18598681090.7281693623
0.18403852030.7300194637
0.1821202520.7318502328
0.18023140360.7336619668
0.17837138690.7354549569
0.17653962850.7372294887
0.17473556850.7389858418
0.17295866060.7407242906
0.17120837170.7424451038
0.16948418120.744148545
0.16778558120.7458348727
0.16611207560.7475043403
0.16446318020.7491571962
0.1628384220.7507936843
0.16123733920.7524140436
0.15965948090.7540185085
0.15810440650.7556073092
0.15657168550.7571806712
0.15506089770.758738816
0.15357163230.7602819609
0.15210348790.761810319
0.15065607230.7633240997
0.14922900230.7648235083
0.14782190320.7663087463
0.14643440890.7677800117
0.14506616140.7692374987
0.14371681080.7706813979
0.14238601490.7721118967
0.14107343910.773529179
0.13977875630.7749334252
0.13850164660.7763248127
0.13724179690.7777035156
0.13599890110.7790697051
0.13477265990.7804235492
0.13356278020.7817652128
0.13236897540.7830948583
0.1311909650.784412645
0.13002847460.7857187294
0.12888123560.7870132653
0.12774898510.7882964041
0.12663146570.7895682941
0.12552842570.7908290816
0.12443961820.7920789101
0.12336480210.7933179206
0.12230374080.794546252
0.12125620280.7957640405
0.12022196160.7969714204
0.1192007950.7981685233
0.11819248560.7993554791
0.11719682050.8005324152
0.11621359090.801699457
0.11524259250.8028567278
0.1142836250.8040043489
0.11333649210.8051424397
0.11240100150.8062711176
0.11147696490.8073904979
0.11056419750.8085006944
0.10966251840.8096018189
0.108771750.8106939812
0.10789171850.8117772896
0.10702225330.8128518508
0.10616318730.8139177694
&A
Page &P
Distribut
Int.#atom
Energy (eV)
Sputtered Al energy distribution (dn/dE)
Sheet1
Sputtered atom energy distributions
EnergyDistributInt.#atomAve(E)nU0
0.10.21679156460.00112008980.066118397423
0.20.39419174190.00420471190.1311684673E_lInt_N_El
0.30.53914663160.00889591940.1951905379800.1548362123
0.40.65728042950.01489835640.2582224706E_wn_w
0.50.75317055390.02196747450.32029986921.50.1063117284
0.60.83056037810.02990017360.3814562675
0.70.89252487510.03852732380.4417232956
0.80.9416004520.04770775620.5011308304
0.90.97988734640.05732340980.55970713
11.00913085940.06727539060.6174789554
1.11.03078615370.07748075920.6744716805
1.21.04607021380.0878698980.7307093917
1.31.05600371670.09838434630.7862149784
1.41.0614449310.10897501290.8410102153
1.51.0631172840.11960069440.8951158378
1.61.06163187310.13022684310.9485516103
1.71.05750592350.14082453881.0013363893
1.81.05117797850.15136962891.0534881812
1.91.04302044640.16184200591.1050241949
21.033350.1722251.1559608912
2.11.02243622360.18250486591.2063140274
2.21.0105088260.19267034951.2560986987
2.30.9977636740.20271231981.3053293771
2.40.98436785550.21262345681.3540199464
2.50.97046393690.22239798551.4021837357
2.60.95617355480.23203144931.4498335496
2.70.9416004520.24152051591.4969816969
2.80.92683304970.25086281211.5436400171
2.90.91194663280.26005678151.5898199049
30.89700520830.26910156251.6355323334
3.10.88206309120.27799688421.6807878757
3.20.86716625830.28674297611.7255967246
3.30.85235350750.29534049041.769968712
3.40.83765745160.30379043581.8139133261
3.50.8231053710.31209411981.8574397279
3.60.80871994740.32025309921.9005567673
3.70.79451989610.32826913711.9432729971
3.80.780520510.33614416631.9855966867
3.90.76673413060.34388025762.0275358355
40.75317055390.35147959182.0690981846
4.10.73983738280.35894443692.1102912286
4.20.72674033080.36627712672.151122226
4.30.71388348710.37348004432.1915982099
4.40.70126954470.38055560632.2317259971
4.50.68890.387506252.2715121979
4.60.67677532480.39433442262.310963224
4.70.66489511710.40104257152.3500852973
4.80.65325823090.40763313612.3888844572
4.90.64186289020.41410854132.427366568
50.63070678710.42047119142.4655373263
5.10.61978716830.42672346542.5034022669
5.20.6091009090.43286771272.5409667699
5.30.59864457830.438906252.5782360659
5.40.58841449530.44484135842.615215242
5.50.57840677790.45067528112.6519092475
5.60.56861738590.45641022172.6883228986
5.70.5590421570.46204834272.7244608833
5.80.54967683930.46759176462.7603277665
5.90.54051711850.47304256492.795927994
60.5315586420.47840277782.831265897
6.10.5227970390.48367439392.8663456962
6.20.51422793850.48885936022.9011715053
6.30.5058469840.49395957992.9357473353
6.40.49764984640.49897691262.9700770973
6.50.4896322350.50391317523.0041646067
6.60.48178990680.50877014163.0380135856
6.70.47411867390.51354954373.0716276668
6.80.46661441020.51825307163.1050103958
6.90.45927305660.52288237493.1381652344
70.4520906250.52743906253.1710955632
7.10.44506320240.53192470413.2038046839
7.20.4381869530.53634083043.2362958224
7.30.43145812040.54068893453.2685721307
7.40.42487302910.5449704723.3006366892
7.50.41842808550.54918686223.3324925095
7.60.41211977840.55333948913.3641425358
7.70.40594467910.55742970183.3955896473
7.80.39989944130.56145881563.4268366602
7.90.39398080080.56542811263.4578863297
80.38818557480.5693388433.4887413512
8.10.38251066080.57319222523.519404363
8.20.3769530360.57698944713.549877947
8.30.37150975610.5807316673.5801646312
8.40.36617795350.58442001393.6102668905
8.50.36095483690.58805558843.6401871489
8.60.35583768870.59163946383.6699277803
8.70.35082386480.59517268663.6994911105
8.80.34591079180.59865627693.728879418
8.90.34109596630.60209122993.7580949357
90.33637695310.60547851563.7871398519
9.10.33175138340.60881908043.8160163119
9.20.32721695320.61211384713.8447264186
9.30.32277142190.61536371583.873272234
9.40.31841261050.61856956463.9016557802
9.50.31413840.621732253.9298790406
9.60.309946730.62485260773.9579439606
9.70.30583559690.62793145313.9858524489
9.80.30180305240.63096958164.0136063783
9.90.29784720210.63396776974.0412075866
100.29396620390.63692677514.0686578776
10.10.29015826650.63984733734.0959590217
10.20.2864216480.64273017824.1231127572
10.30.28275465470.64557600244.1501207908
10.40.27915563920.64838549794.1769847981
10.50.27562299950.65115933644.2037064252
10.60.27215517780.65389817394.2302872884
10.70.26875065870.6566026514.2567289757
10.80.26540796830.65927339324.2830330472
10.90.26212567290.66191101174.3092010357
110.25890237790.66451610334.3352344476
11.10.25573672660.66708925144.361134763
11.20.2526273990.66963102564.386903437
11.30.24957311080.67214198284.4125418999
11.40.24657261220.67462266714.4380515576
11.50.24362468740.67707361034.4634337928
11.60.24072815260.67949533214.4886899647
11.70.23788185620.68188834084.5138214102
11.80.23508467690.6842531334.5388294441
11.90.23233552350.68659019444.5637153597
120.22963333330.68894.5884804291
12.10.22697707210.69118301424.6131259039
12.20.22436573270.69343969124.6376530157
12.30.22179833420.69567047534.6620629762
12.40.21927392160.69787580114.6863569779
12.50.21679156460.70005609394.7105361944
12.60.2143503570.70221176964.7346017809
12.70.21194941630.70434323534.7585548746
12.80.20958788250.70645088934.782396595
12.90.20726491780.70853512154.8061280442
130.20497970580.71059631354.8297503075
13.10.2027314510.71263483884.8532644536
13.20.2005193780.71465106314.876671535
13.30.19834273110.71664534444.8999725881
13.40.19620077360.71861803344.9231686341
13.50.19409278740.72056947314.9462606786
13.60.19201807230.72254.9692497124
13.70.18997594560.72440994324.9921367118
13.80.18796574150.72629962535.0149226385
13.90.18598681090.72816936235.0376084403
140.18403852030.73001946375.0601950512
14.10.1821202520.73185023285.0826833917
14.20.18023140360.73366196685.1050743691
14.30.17837138690.73545495695.1273688775
14.40.17653962850.73722948875.1495677986
14.50.17473556850.73898584185.1716720013
14.60.17295866060.74072429065.1936823426
14.70.17120837170.74244510385.2155996673
14.80.16948418120.7441485455.2374248083
14.90.16778558120.74583487275.2591585872
150.16611207560.74750434035.2808018141
15.10.16446318020.74915719625.3023552881
15.20.1628384220.75079368435.3238197972
15.30.16123733920.75241404365.3451961189
15.40.15965948090.75401850855.3664850201
15.50.15810440650.75560730925.3876872573
15.60.15657168550.75718067125.4088035769
15.70.15506089770.7587388165.4298347154
15.80.15357163230.76028196095.4507813996
15.90.15210348790.7618103195.4716443466
160.15065607230.76332409975.4924242641
16.10.14922900230.76482350835.5131218506
16.20.14782190320.76630874635.5337377953
16.30.14643440890.76778001175.5542727789
16.40.14506616140.76923749875.5747274728
16.50.14371681080.77068139795.5951025403
16.60.14238601490.77211189675.6153986359
16.70.14107343910.7735291795.6356164058
16.80.13977875630.77493342525.6557564882
16.90.13850164660.77632481275.6758195132
170.13724179690.77770351565.6958061029
17.10.13599890110.77906970515.7157168716
17.20.13477265990.78042354925.7355524263
17.30.13356278020.78176521285.7553133662
17.40.13236897540.78309485835.7750002831
17.50.1311909650.7844126455.7946137618
17.60.13002847460.78571872945.8141543796
17.70.12888123560.78701326535.8336227072
17.80.12774898510.78829640415.8530193082
17.90.12663146570.78956829415.8723447392
180.12552842570.79082908165.8915995506
18.10.12443961820.79207891015.9107842859
18.20.12336480210.79331792065.9298994821
18.30.12230374080.7945462525.9489456701
18.40.12125620280.79576404055.9679233743
18.50.12022196160.79697142045.9868331131
18.60.1192007950.79816852336.0056753989
18.70.11819248560.79935547916.0244507379
18.80.11719682050.80053241526.0431596307
18.90.11621359090.8016994576.0618025719
190.11524259250.80285672786.0803800506
19.10.1142836250.80400434896.0988925502
19.20.11333649210.80514243976.1173405486
19.30.11240100150.80627111766.1357245183
19.40.11147696490.80739049796.1540449265
19.50.11056419750.80850069446.1723022351
19.60.10966251840.80960181896.1904969008
19.70.108771750.81069398126.2086293753
19.80.10789171850.81177728966.2267001052
19.90.10702225330.81285185086.2447095321
200.10616318730.81391776946.2626580928
20.10.10531435660.81497514866.2805462194
20.20.10447560050.81602409016.2983743391
20.30.10364676130.81706469376.3161428745
20.40.10282768450.81809705796.3338522437
20.50.10201821850.81912127946.3515028602
20.60.10121821460.82013745386.369095133
20.70.1004275270.82114567486.3866294668
20.80.09964601260.82214603496.4041062619
20.90.09887353110.82313862516.4215259145
210.09810994470.82412353526.4388888164
21.10.09735511830.82510085326.4561953554
21.20.09660891930.82607066636.4734459151
21.30.09587121780.82703305996.4906408752
21.40.09514188580.82798811856.5077806114
21.50.09442079830.82893592516.5248654953
21.60.09370783220.82987656166.541895895
21.70.09300286670.83081010846.5588721746
21.80.09230578340.83173664526.5757946944
21.90.09161646590.832656256.592663811
220.09093480.8335696.6094798776
22.10.09026067360.83447497116.6262432435
22.20.08959397660.83537423826.6429542547
22.30.08893460090.83626687516.6596132536
22.40.08828244030.83715295436.676220579
22.50.08763739060.83803254766.6927765667
22.60.08699934930.83890572556.7092815487
22.70.08636821590.83977255766.725735854
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29.20.0564862440.88517710067.7000506517
600.01549733650.976332199510.8395159255
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Sputtered Al energy distribution (dn/dE)and integration
Distribut
Int.#atom
Energy (eV)
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-
Energetic DepositionEnhances adatom surface mobility promotes dense films, film stress
-
Sputtering of AlloysAlloys may be stoichiometrically sputtered, even if the component materials have different sputter yields, due to conservation of massThe target surface must be conditioned by pre-sputtering prior to actual depositionYa>Ybconditioning makes the surface deficient in element a
-
Reactive SputteringN2, O2, (+Ar)MetalsMetal-nitridesand metal-oxides
-
Reactive Sputteringmetaltarget,e.g. Tipoisonedtarget,e.g. TiNS.M. Rossnagel, J. Vac. Sci. Technol. A 21, Sep-Oct 2003
-
Ionized Physical Vapor DepositionIPVD
-
IPVD OutlineIntroductionDefinitionsMotivationsExample ApplicationThe physics of IPVDThe evolution of IPVD technologyUnbalanced magnetron geometric filtering of neutrals (collimated, long-throw)auxiliary high density plasmaICP and ECRhigh power density sputteringSIP, hollow cathode magnetron, pulsed sputteringDeposition and modelingSummary and discussion
-
Ionized-PVD DefinitionPhysical vapor deposition in which more than half of the deposited atoms arrive at the substrate as ions.e.g., for sputtering of metals Gm+ > Gm at the substrate.
Includes sputtering, evaporation, arcs, laser ablation
-
MotivationThe energy and direction of ionized depositing species are easily controlled with electrostatic fields and/or sheath voltage. In contrast, neutral depositing species are difficult to control.
-
Comparison of Sputtering Techniques
Ref: S.M. Rossnagel, J. Vac. Sci. Technol. B, 16(5), 2585 (1998)tttbwd(d/w)(tb/tt)
-
Example ApplicationDeposition into High Aspect Ratio Trenches and Vias J. Forster, Ionized Physical Vapor Deposition, Academic, 2000.J. Hopwood, Ionized Physical Vapor Deposition, Academic, 2000.
-
Example ApplicationA dual damascene processJ. Hopwood, Ionized Physical Vapor Deposition, Academic, 2000.
-
OutlineIntroductionDefinitionsMotivationsExample ApplicationThe physics of IPVDThe evolution of IPVD technologyUnbalanced magnetron geometric filtering of neutrals (collimated, long-throw)auxiliary high density plasmaICP and ECRhigh power density sputteringSIP, hollow cathode magnetron, pulsed sputteringDeposition and modelingSummary and discussion
-
Ionized PVD PhysicsIonization mechanismSputter neutral energiesIonization mean free paththermalization vs. long path lengthIonized flux vs Ionization fractionSpatial Distribution: Diffusion
-
Ionization MechanismPenning ionization vs. Electron collisionsPenning ionization: Ar* + M M+ + ArEex > 11.55 eV for argonEiz = 6 - 8 eV for most metalsKp = sp(kTg/M)1/2Electron impact: M + e M+ + 2efor moderate sputter rates, nAr >> nMTe is determined by argon ionization energyEiz(argon) >> Eiz (metal)Kiz= ko exp(-Eiz(M)/kTe(Ar))
-
IPVD Physics: the metalIonizationof thermal metalatoms, MLifetimeof an ion:diffusionto walls (R,L)Particle balance: creation rate of metal ions (Penning, electron impact, and 2-step) is equal to the loss of metal ions due to diffusion to the chamber walls and substrate
-
IPVD Physics: the argongeneration andloss of Ar+generation andloss of Ar*
-
IPVD Physics: metal ionizationion lifetimeargon density (pressure)excited argon lifetimerate constant for excited Ar*rate constant for Penning ionization of metalrate constant for electron impact ionization of metalelectron density, from Pabs
-
Ionization MechanismPenning ionization vs. Electron collisionsTypical sputtering, ne~1010 cm-3Penning DominatesAr*+MM++ArIonization is 50%J. Hopwood, J. Appl. Phys, 1995
-
Sputtered Neutral Energyand Ionization MFPne = 2x1012 cm-3Te = 3 eV50% of Al has E>6 eV MFP~5 cm required to ionize 50% Al50% ionization requires at least ne~1012 over a distance of 10 cm from W.M. Holber, Ionized Physical Vapor Deposition, Academic, 2000.iz = vs / Kizne
Chart2
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0.01549733650.9763321995
Sputtered Al energy distribution (dn/dE)and integration
Distribut
Int.#atom
Energy (eV)
Chart1
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0.39419174190.0042047119
0.53914663160.0088959194
0.65728042950.0148983564
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1.04302044640.1618420059
1.033350.172225
1.02243622360.1825048659
1.0105088260.1926703495
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0.92683304970.2508628121
0.91194663280.2600567815
0.89700520830.2691015625
0.88206309120.2779968842
0.86716625830.2867429761
0.85235350750.2953404904
0.83765745160.3037904358
0.8231053710.3120941198
0.80871994740.3202530992
0.79451989610.3282691371
0.780520510.3361441663
0.76673413060.3438802576
0.75317055390.3514795918
0.73983738280.3589444369
0.72674033080.3662771267
0.71388348710.3734800443
0.70126954470.3805556063
0.68890.38750625
0.67677532480.3943344226
0.66489511710.4010425715
0.65325823090.4076331361
0.64186289020.4141085413
0.63070678710.4204711914
0.61978716830.4267234654
0.6091009090.4328677127
0.59864457830.43890625
0.58841449530.4448413584
0.57840677790.4506752811
0.56861738590.4564102217
0.5590421570.4620483427
0.54967683930.4675917646
0.54051711850.4730425649
0.5315586420.4784027778
0.5227970390.4836743939
0.51422793850.4888593602
0.5058469840.4939595799
0.49764984640.4989769126
0.4896322350.5039131752
0.48178990680.5087701416
0.47411867390.5135495437
0.46661441020.5182530716
0.45927305660.5228823749
0.4520906250.5274390625
0.44506320240.5319247041
0.4381869530.5363408304
0.43145812040.5406889345
0.42487302910.544970472
0.41842808550.5491868622
0.41211977840.5533394891
0.40594467910.5574297018
0.39989944130.5614588156
0.39398080080.5654281126
0.38818557480.569338843
0.38251066080.5731922252
0.3769530360.5769894471
0.37150975610.580731667
0.36617795350.5844200139
0.36095483690.5880555884
0.35583768870.5916394638
0.35082386480.5951726866
0.34591079180.5986562769
0.34109596630.6020912299
0.33637695310.6054785156
0.33175138340.6088190804
0.32721695320.6121138471
0.32277142190.6153637158
0.31841261050.6185695646
0.31413840.62173225
0.309946730.6248526077
0.30583559690.6279314531
0.30180305240.6309695816
0.29784720210.6339677697
0.29396620390.6369267751
0.29015826650.6398473373
0.2864216480.6427301782
0.28275465470.6455760024
0.27915563920.6483854979
0.27562299950.6511593364
0.27215517780.6538981739
0.26875065870.656602651
0.26540796830.6592733932
0.26212567290.6619110117
0.25890237790.6645161033
0.25573672660.6670892514
0.2526273990.6696310256
0.24957311080.6721419828
0.24657261220.6746226671
0.24362468740.6770736103
0.24072815260.6794953321
0.23788185620.6818883408
0.23508467690.684253133
0.23233552350.6865901944
0.22963333330.6889
0.22697707210.6911830142
0.22436573270.6934396912
0.22179833420.6956704753
0.21927392160.6978758011
0.21679156460.7000560939
0.2143503570.7022117696
0.21194941630.7043432353
0.20958788250.7064508893
0.20726491780.7085351215
0.20497970580.7105963135
0.2027314510.7126348388
0.2005193780.7146510631
0.19834273110.7166453444
0.19620077360.7186180334
0.19409278740.7205694731
0.19201807230.7225
0.18997594560.7244099432
0.18796574150.7262996253
0.18598681090.7281693623
0.18403852030.7300194637
0.1821202520.7318502328
0.18023140360.7336619668
0.17837138690.7354549569
0.17653962850.7372294887
0.17473556850.7389858418
0.17295866060.7407242906
0.17120837170.7424451038
0.16948418120.744148545
0.16778558120.7458348727
0.16611207560.7475043403
0.16446318020.7491571962
0.1628384220.7507936843
0.16123733920.7524140436
0.15965948090.7540185085
0.15810440650.7556073092
0.15657168550.7571806712
0.15506089770.758738816
0.15357163230.7602819609
0.15210348790.761810319
0.15065607230.7633240997
0.14922900230.7648235083
0.14782190320.7663087463
0.14643440890.7677800117
0.14506616140.7692374987
0.14371681080.7706813979
0.14238601490.7721118967
0.14107343910.773529179
0.13977875630.7749334252
0.13850164660.7763248127
0.13724179690.7777035156
0.13599890110.7790697051
0.13477265990.7804235492
0.13356278020.7817652128
0.13236897540.7830948583
0.1311909650.784412645
0.13002847460.7857187294
0.12888123560.7870132653
0.12774898510.7882964041
0.12663146570.7895682941
0.12552842570.7908290816
0.12443961820.7920789101
0.12336480210.7933179206
0.12230374080.794546252
0.12125620280.7957640405
0.12022196160.7969714204
0.1192007950.7981685233
0.11819248560.7993554791
0.11719682050.8005324152
0.11621359090.801699457
0.11524259250.8028567278
0.1142836250.8040043489
0.11333649210.8051424397
0.11240100150.8062711176
0.11147696490.8073904979
0.11056419750.8085006944
0.10966251840.8096018189
0.108771750.8106939812
0.10789171850.8117772896
0.10702225330.8128518508
0.10616318730.8139177694
&A
Page &P
Distribut
Int.#atom
Energy (eV)
Sputtered Al energy distribution (dn/dE)
Sheet1
Sputtered atom energy distributions
EnergyDistributInt.#atomAve(E)nU0
0.10.21679156460.00112008980.066118397423
0.20.39419174190.00420471190.1311684673E_lInt_N_El
0.30.53914663160.00889591940.1951905379800.1548362123
0.40.65728042950.01489835640.2582224706E_wn_w
0.50.75317055390.02196747450.32029986921.50.1063117284
0.60.83056037810.02990017360.3814562675
0.70.89252487510.03852732380.4417232956
0.80.9416004520.04770775620.5011308304
0.90.97988734640.05732340980.55970713
11.00913085940.06727539060.6174789554
1.11.03078615370.07748075920.6744716805
1.21.04607021380.0878698980.7307093917
1.31.05600371670.09838434630.7862149784
1.41.0614449310.10897501290.8410102153
1.51.0631172840.11960069440.8951158378
1.61.06163187310.13022684310.9485516103
1.71.05750592350.14082453881.0013363893
1.81.05117797850.15136962891.0534881812
1.91.04302044640.16184200591.1050241949
21.033350.1722251.1559608912
2.11.02243622360.18250486591.2063140274
2.21.0105088260.19267034951.2560986987
2.30.9977636740.20271231981.3053293771
2.40.98436785550.21262345681.3540199464
2.50.97046393690.22239798551.4021837357
2.60.95617355480.23203144931.4498335496
2.70.9416004520.24152051591.4969816969
2.80.92683304970.25086281211.5436400171
2.90.91194663280.26005678151.5898199049
30.89700520830.26910156251.6355323334
3.10.88206309120.27799688421.6807878757
3.20.86716625830.28674297611.7255967246
3.30.85235350750.29534049041.769968712
3.40.83765745160.30379043581.8139133261
3.50.8231053710.31209411981.8574397279
3.60.80871994740.32025309921.9005567673
3.70.79451989610.32826913711.9432729971
3.80.780520510.33614416631.9855966867
3.90.76673413060.34388025762.0275358355
40.75317055390.35147959182.0690981846
4.10.73983738280.35894443692.1102912286
4.20.72674033080.36627712672.151122226
4.30.71388348710.37348004432.1915982099
4.40.70126954470.38055560632.2317259971
4.50.68890.387506252.2715121979
4.60.67677532480.39433442262.310963224
4.70.66489511710.40104257152.3500852973
4.80.65325823090.40763313612.3888844572
4.90.64186289020.41410854132.427366568
50.63070678710.42047119142.4655373263
5.10.61978716830.42672346542.5034022669
5.20.6091009090.43286771272.5409667699
5.30.59864457830.438906252.5782360659
5.40.58841449530.44484135842.615215242
5.50.57840677790.45067528112.6519092475
5.60.56861738590.45641022172.6883228986
5.70.5590421570.46204834272.7244608833
5.80.54967683930.46759176462.7603277665
5.90.54051711850.47304256492.795927994
60.5315586420.47840277782.831265897
6.10.5227970390.48367439392.8663456962
6.20.51422793850.48885936022.9011715053
6.30.5058469840.49395957992.9357473353
6.40.49764984640.49897691262.9700770973
6.50.4896322350.50391317523.0041646067
6.60.48178990680.50877014163.0380135856
6.70.47411867390.51354954373.0716276668
6.80.46661441020.51825307163.1050103958
6.90.45927305660.52288237493.1381652344
70.4520906250.52743906253.1710955632
7.10.44506320240.53192470413.2038046839
7.20.4381869530.53634083043.2362958224
7.30.43145812040.54068893453.2685721307
7.40.42487302910.5449704723.3006366892
7.50.41842808550.54918686223.3324925095
7.60.41211977840.55333948913.3641425358
7.70.40594467910.55742970183.3955896473
7.80.39989944130.56145881563.4268366602
7.90.39398080080.56542811263.4578863297
80.38818557480.5693388433.4887413512
8.10.38251066080.57319222523.519404363
8.20.3769530360.57698944713.549877947
8.30.37150975610.5807316673.5801646312
8.40.36617795350.58442001393.6102668905
8.50.36095483690.58805558843.6401871489
8.60.35583768870.59163946383.6699277803
8.70.35082386480.59517268663.6994911105
8.80.34591079180.59865627693.728879418
8.90.34109596630.60209122993.7580949357
90.33637695310.60547851563.7871398519
9.10.33175138340.60881908043.8160163119
9.20.32721695320.61211384713.8447264186
9.30.32277142190.61536371583.873272234
9.40.31841261050.61856956463.9016557802
9.50.31413840.621732253.9298790406
9.60.309946730.62485260773.9579439606
9.70.30583559690.62793145313.9858524489
9.80.30180305240.63096958164.0136063783
9.90.29784720210.63396776974.0412075866
100.29396620390.63692677514.0686578776
10.10.29015826650.63984733734.0959590217
10.20.2864216480.64273017824.1231127572
10.30.28275465470.64557600244.1501207908
10.40.27915563920.64838549794.1769847981
10.50.27562299950.65115933644.2037064252
10.60.27215517780.65389817394.2302872884
10.70.26875065870.6566026514.2567289757
10.80.26540796830.65927339324.2830330472
10.90.26212567290.66191101174.3092010357
110.25890237790.66451610334.3352344476
11.10.25573672660.66708925144.361134763
11.20.2526273990.66963102564.386903437
11.30.24957311080.67214198284.4125418999
11.40.24657261220.67462266714.4380515576
11.50.24362468740.67707361034.4634337928
11.60.24072815260.67949533214.4886899647
11.70.23788185620.68188834084.5138214102
11.80.23508467690.6842531334.5388294441
11.90.23233552350.68659019444.5637153597
120.22963333330.68894.5884804291
12.10.22697707210.69118301424.6131259039
12.20.22436573270.69343969124.6376530157
12.30.22179833420.69567047534.6620629762
12.40.21927392160.69787580114.6863569779
12.50.21679156460.70005609394.7105361944
12.60.2143503570.70221176964.7346017809
12.70.21194941630.70434323534.7585548746
12.80.20958788250.70645088934.782396595
12.90.20726491780.70853512154.8061280442
130.20497970580.71059631354.8297503075
13.10.2027314510.71263483884.8532644536
13.20.2005193780.71465106314.876671535
13.30.19834273110.71664534444.8999725881
13.40.19620077360.71861803344.9231686341
13.50.19409278740.72056947314.9462606786
13.60.19201807230.72254.9692497124
13.70.18997594560.72440994324.9921367118
13.80.18796574150.72629962535.0149226385
13.90.18598681090.72816936235.0376084403
140.18403852030.73001946375.0601950512
14.10.1821202520.73185023285.0826833917
14.20.18023140360.73366196685.1050743691
14.30.17837138690.73545495695.1273688775
14.40.17653962850.73722948875.1495677986
14.50.17473556850.73898584185.1716720013
14.60.17295866060.74072429065.1936823426
14.70.17120837170.74244510385.2155996673
14.80.16948418120.7441485455.2374248083
14.90.16778558120.74583487275.2591585872
150.16611207560.74750434035.2808018141
15.10.16446318020.74915719625.3023552881
15.20.1628384220.75079368435.3238197972
15.30.16123733920.75241404365.3451961189
15.40.15965948090.75401850855.3664850201
15.50.15810440650.75560730925.3876872573
15.60.15657168550.75718067125.4088035769
15.70.15506089770.7587388165.4298347154
15.80.15357163230.76028196095.4507813996
15.90.15210348790.7618103195.4716443466
160.15065607230.76332409975.4924242641
16.10.14922900230.76482350835.5131218506
16.20.14782190320.76630874635.5337377953
16.30.14643440890.76778001175.5542727789
16.40.14506616140.76923749875.5747274728
16.50.14371681080.77068139795.5951025403
16.60.14238601490.77211189675.6153986359
16.70.14107343910.7735291795.6356164058
16.80.13977875630.77493342525.6557564882
16.90.13850164660.77632481275.6758195132
170.13724179690.77770351565.6958061029
17.10.13599890110.77906970515.7157168716
17.20.13477265990.78042354925.7355524263
17.30.13356278020.78176521285.7553133662
17.40.13236897540.78309485835.7750002831
17.50.1311909650.7844126455.7946137618
17.60.13002847460.78571872945.8141543796
17.70.12888123560.78701326535.8336227072
17.80.12774898510.78829640415.8530193082
17.90.12663146570.78956829415.8723447392
180.12552842570.79082908165.8915995506
18.10.12443961820.79207891015.9107842859
18.20.12336480210.79331792065.9298994821
18.30.12230374080.7945462525.9489456701
18.40.12125620280.79576404055.9679233743
18.50.12022196160.79697142045.9868331131
18.60.1192007950.79816852336.0056753989
18.70.11819248560.79935547916.0244507379
18.80.11719682050.80053241526.0431596307
18.90.11621359090.8016994576.0618025719
190.11524259250.80285672786.0803800506
19.10.1142836250.80400434896.0988925502
19.20.11333649210.80514243976.1173405486
19.30.11240100150.80627111766.1357245183
19.40.11147696490.80739049796.1540449265
19.50.11056419750.80850069446.1723022351
19.60.10966251840.80960181896.1904969008
19.70.108771750.81069398126.2086293753
19.80.10789171850.81177728966.2267001052
19.90.10702225330.81285185086.2447095321
200.10616318730.81391776946.2626580928
20.10.10531435660.81497514866.2805462194
20.20.10447560050.81602409016.2983743391
20.30.10364676130.81706469376.3161428745
20.40.10282768450.81809705796.3338522437
20.50.10201821850.81912127946.3515028602
20.60.10121821460.82013745386.369095133
20.70.1004275270.82114567486.3866294668
20.80.09964601260.82214603496.4041062619
20.90.09887353110.82313862516.4215259145
210.09810994470.82412353526.4388888164
21.10.09735511830.82510085326.4561953554
21.20.09660891930.82607066636.4734459151
21.30.09587121780.82703305996.4906408752
21.40.09514188580.82798811856.5077806114
21.50.09442079830.82893592516.5248654953
21.60.09370783220.82987656166.541895895
21.70.09300286670.83081010846.5588721746
21.80.09230578340.83173664526.5757946944
21.90.09161646590.832656256.592663811
220.09093480.8335696.6094798776
22.10.09026067360.83447497116.6262432435
22.20.08959397660.83537423826.6429542547
22.30.08893460090.83626687516.6596132536
22.40.08828244030.83715295436.676220579
22.50.08763739060.83803254766.6927765667
22.60.08699934930.83890572556.7092815487
22.70.08636821590.83977255766.725735854
22.80.08574389150.84063311256.7421398081
22.90.08512627920.84148745786.7584937336
230.08451528360.84233566016.7747979497
23.10.08391081110.84317778526.7910527724
23.20.08331276960.84401389786.8072585147
23.30.08272106870.84484406176.8234154867
23.40.08213561970.845668346.8395239952
23.50.08155633510.84648679476.8555843443
23.60.08098312930.8472994876.871596835
23.70.08041591780.84810647726.8875617655
23.80.07985461790.8489078256.9034794309
23.90.07929914820.8497035896.9193501239
240.07874942840.85049382726.9351741341
24.10.07820538010.85127859656.9509517485
24.20.07766692570.85205795346.9666832513
24.30.07713398940.85283195346.982368924
24.40.07660649620.85360065136.9980090456
24.50.07608437270.85436410127.0136038923
24.60.07556754650.85512235657.029153738
24.70.07505594670.85587546967.0446588537
24.80.07454950330.85662349267.0601195083
24.90.07404814760.85736647667.0755359678
250.07355181190.85810447237.090908496
25.10.07306042980.85883752947.1062373542
25.20.07257393590.85956569717.1215228014
25.30.07209226590.86028902427.1367650942
25.40.07161535640.86100755837.1519644867
25.50.07114314530.8617213477.1671212311
25.60.07067557120.86243043677.1822355768
25.70.07021257390.86313487367.1973077715
25.80.06975409430.86383470327.2123380602
25.90.06930007380.86452997047.227326686
260.06885045510.86522071947.2422738898
26.10.06840518180.8659069947.2571799102
26.20.06796419830.86658883737.272044984
26.30.06752744980.86726629217.2868693455
26.40.06709488250.86793940027.3016532273
26.50.06666644350.86860820357.3163968598
26.60.06624208060.86927274277.3311004713
26.70.06582174240.86993305857.3457642884
26.80.06540537850.87058919087.3603885354
26.90.0649929390.87124117917.3749734349
270.0645843750.87188906257.3895192074
27.10.06417963830.87253287947.4040260716
27.20.06377868140.87317266797.4184942443
27.30.06338145760.87380846557.4329239406
27.40.06298792090.87444030937.4473153734
27.50.06259802580.8750682367.4616687542
27.60.06221172790.87569228187.4759842925
27.70.06182898310.87631248247.4902621959
27.80.06144974820.87692887327.5045026705
27.90.06107398050.87754148897.5187059206
280.06070163810.87815036427.5328721487
28.10.06033267950.8787555337.5470015557
28.20.05996706420.87935702897.5610943408
28.30.05960475180.87995488537.5751507016
28.40.0592457030.88054913497.5891708339
28.50.05888987870.88113981017.603154932
28.60.05853724060.8817269437.6171031887
28.70.05818775090.88231056547.631015795
28.80.05784137240.88289070847.6448929405
28.90.05749806830.88346740317.6587348132
290.05715780260.88404067997.6725415996
29.10.05682053950.88461056927.6863134846
29.20.0564862440.88517710067.7000506517
600.01549733650.976332199510.8395159255
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Sputtered Al energy distribution (dn/dE)and integration
Distribut
Int.#atom
Energy (eV)
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Chart1
0.8606629658
1.2171612389
1.490711985
1.7213259316
1.9245008973
2.1081851068
2.2771001702
2.4343224778
2.5819888975
2.7216552698
2.8544961286
2.98142397
3.1031644542
3.2203059436
3.3333333333
3.4426518633
3.5486043161
3.6514837167
3.7515428925
3.8490017946
3.9440531887
4.0368671388
4.1275945824
4.2163702136
4.3033148291
4.3885372574
4.472135955
4.5542003404
4.6348119144
4.7140452079
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Figure 3: Calculated aluminum ionization length as function of aluminum kinetic energy. (ne=2.e12 cm^-3, Te=3-3.5 eV).
length(cm)
Al-I Energy (eV)
Ionization Length (cm)
Sheet1
Elec.EngyEi_p1Ei_s2Gryzinski cross-sectionenergycross-section
667.60060
6.567.60.252330733406.50.2523307334
767.60.6248567291070.6248567291
7.567.61.012438127707.51.0124381277
867.61.38374629980.166140026781.5498863264
8.567.61.726762480.50334666768.52.2301091476
967.62.03749242890.880944574892.9184370037
9.567.62.31565807891.26204198759.53.5777000664
1067.62.56273401081.6300804325104.1928144433
10.567.62.78097493671.977201853110.54.7581767898
1167.62.97291477132.2999449832115.2728597545
11.567.63.14110634752.597228696211.55.7383350438
1267.63.28798926892.8692925783126.1572818471
Al energyV0(cm/s)Ne(1.e12)alpha(e-8)length(cm)Al energylength(cm)
0.286066.296582387250.86066296580.20.8606629658
0.4121716.123890037251.21716123890.41.2171612389
0.6149071.198499986251.4907119850.61.490711985
0.8172132.593164774251.72132593160.81.7213259316
1192450.089729875251.924500897311.9245008973
1.2210818.510677892252.10818510681.22.1081851068
1.4227710.017021324252.27710017021.42.2771001702
1.6243432.247780074252.43432247781.62.4343224778
1.8258198.889747161252.58198889751.82.5819888975
2272165.526975909252.721655269822.7216552698
2.2285449.612859225252.85449612862.22.8544961286
2.4298142.396999972252.981423972.42.98142397
2.6310316.445417088253.10316445422.63.1031644542
2.8322030.594359765253.22030594362.83.2203059436
3333333.333333333253.333333333333.3333333333
3.2344265.186329548253.44265186333.23.4426518633
3.4354860.431614918253.54860431613.43.5486043161
3.6365148.371670111253.65148371673.63.6514837167
3.8375154.289247425253.75154289253.83.7515428925
4384900.179459751253.849001794643.8490017946
4.2394405.318873308253.94405318874.23.9440531887
4.4403686.713879666254.03686713884.44.0368671388
4.6412759.458244594254.12759458244.64.1275945824
4.8421637.021355784254.21637021364.84.2163702136
5430331.482911935254.303314829154.3033148291
5.2438853.725736256254.38853725745.24.3885372574
5.4447213.595499958254.4721359555.44.472135955
5.6455420.034042649254.55420034045.64.5542003404
5.8463481.191435871254.63481191445.84.6348119144
6471404.520791032254.714045207964.7140452079
6.2479196.858952174254.79196858956.24.7919685895
6.4486864.495560148254.86864495566.44.8686449556
6.6494413.232473044254.94413232476.64.9441323247
6.8501848.435139387255.01848435146.85.0184843514
7509175.077217316255.091750772275.0917507722
7.2516397.779494322255.16397779497.25.1639777949
7.4523520.843972878255.23520843977.45.2352084397
7.6530548.283836148255.30548283847.65.3054828384
7.8537483.84988657255.37483849897.85.3748384989
8544331.053951817255.443310539585.4433105395
8.2551093.189672767255.51093189678.25.5109318967
8.4557773.351022717255.57773351028.45.5777335102
8.6564374.448853346255.64374448858.65.6437444885
8.8570899.22571845255.70899225728.85.7089922572
9577350.269189626255.773502691995.7735026919
9.2583730.023847275255.83730023859.25.8373002385
9.4590040.802104522255.9004080219.45.900408021
9.6596284.793999944255.962847949.65.96284794
9.8602464.076076709256.02464076089.86.0246407608
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Figure 2: Aluminum ionization cross section calculated using Gryzinski's classical electron ionization cross section.
cross-section
Electron Energy (eV)
Cross Section (10^-16 cm^2)
Aluminum Ionization Cross Section
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Figure 3: Calculated aluminum ionization length as function of aluminum kinetic energy. (ne=2.e12 cm^-3, Te=3-3.5 eV).
length(cm)
Al^0 Energy (eV)
Ionization Length (cm)
Aluminum Ionization Length
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-
High Pressure IPVD:Thermalize, Ionize, Collimate10-50 mTorrlth ~ 24/p cmpresheath
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Limitation due to the Presheathpresheath width ion mean free path collisions decreased collimation of ions
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Titanium Transverse Temperature at the Sheath Edge (s)and Ionized Flux Fraction (%)Target Power = 1 kW- This measurement corresponds to an ion divergence of ~5o to an unbiased wafer- Consistent with Monte-Carlo simulations increase V0 to narrow the angular distribution
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Help from the Preshea