hte system architecture proto product platform · hte system architecture proto product platform |...
TRANSCRIPT
8-11-2008 2
OTB Solar
OTB Solar is a leading company in the design, engineering, development
and manufacturing of inline production equipment for the solar industry.
8-11-2008 4
Company evolution
Philips ODM
Mastering / Molding
Toolex Alpha
OD&ME
ODME
Toolex
Replication
Singulus
OT
B-E
VDL
OT
B-S
OT
B-D
OTB-E
87
89
91
93
95
97
99
01
03
05
07
Worlds 1st inline CD production system: monoliner MKI
Worlds 1st inline CD mastering system: AMS
Worlds 1st inline soft contact lens production system
Worlds 1st inline SOLAR cell production system
Philips PolyLED
Thin film SiN PECVD tool for Solar: DEPx
Worlds 1st inline PLED production system: PCAP
Fully electrical Injection Molding System: MoldPro
inline CD-R production system: Dye-Line
inline DVD-R production system: Profi-Line
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Inline Solar Cell manufacturing equipment
� Fully inline PV production platform
� Integration latest technologies:
• Wet chemical
• SiN deposition,
• Screen printing processes
� Up to 2400 PV Solar Cells / hour
� Capacity up to 80 MWPeak / year
� MONO & MULTI process available
OTB Solar
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Wafer to Cell
1. Unstacking
2. Etching (saw damage & texturisation)
3. Emitter diffusion (p/n junction)
4. Etching phophoric layer (HF)
5. Anti Reflex coating & Passivation (SiNx:H)
6. Printing fingers and back surface field (Ag; Al)
7. Sintering Ag
8. Isolation p/n (laser)
9. Cell testing (flash test)
10.Binning
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LINEx System Overview
BACCINI PRINTER A
BACCINI PRINTER B
T4A*DEPX-1000 CCW*
T4B*
DEPX-1000 CW*RENA INTEXCLEAN DESPATCH DCF-3640
RENA INOXCLEAN
CENTROTHERM FURNACE
* OTB SOLAR
*
*
*
*
*
**
*
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PECVD, ETP Source:
Ar-NH3-SiH4 plasma expansion
Remote technique
Good uniformity
Ultra-high deposition rates
(>20 nm/s possible)
Ar/NH3 plasma expansion
nozzle with NH3 injection
} cascade plates (4x)
anode plate
electrode
Ar gas inlet
isolating plates
SiH4 injection ring
cathode
Ar/NH3 plasma expansion
nozzle with NH3 injection
} cascade plates (4x)
anode plate
electrode
Ar gas inlet
isolating plates
SiH4 injection ring
cathode
nozzle with NH3 injection
} cascade plates (4x)
anode plate
electrode
Ar gas inlet
isolating plates
SiH4 injection ring
cathode
} cascade plates (4x)
anode plate
electrode
Ar gas inlet
isolating plates
SiH4 injection ring
cathode
Plasma Source
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DEPx Next Generation Platform
The Need
• At start, the technology oriented market appreciated and accepted a proto and product with distinctive features
• After couple of years market developed into focus on operation. This forced the need for the next step � CAPEX & OPEX reduction:cost reduction, higher productivity and reduced footprint
The Approach
• Load locking the wafers turned out to be limiting constraint � load locking carriers instead of products
• Tool has been optimized for technology and functionality, not for productivity and process control. � use full area for deposition
• Uptime limiting factor vacuum leaks on loadlock� use vertical surfaces to avoid sensitivity for wafer contamination.
Redesign system architecture on acquired knowledge
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System Architecture
Focus on
• productivity,
• cost reduction
• scalability
• lean design
• competitive
• versatile.
Focus on
• customer needs,
• key features,
• reproducibility and
• reliability.
• process control
• value engineering
Focus on
• Technology
• Market entry,
• Short time to market by common of the shelf parts and modules
• automate key process
PlatformProductProto
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Thank you
for your attention
OTB Group B.V.
Luchthavenweg 10, 5657 EB Eindhoven
P.O. Box 7005, 5605 JA Eindhoven, The Netherlands
phone +31 (0) 40 2581 581 fax +31 (0) 40 2548 921
website www.otb-group.nl
e-mail [email protected]