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TRANSCRIPT
HARD COATINGS
FOR OPTICAL APPLICATIONS
Dr. Heiko Plagwitz, 17.10.2017
Workshop 10 IPL PZ Hard-Coatings
1. Welcome to Evatec: Company overview
2. Hard coatings for optical applications
AGENDA
2Workshop 10 IPL PZ Hard-Coatings
OUR HISTORY
1850 1946 1967 1976 1993 2000 2004 2006 2009 2012 2015 2016
Workshop 10 IPL PZ Hard-Coatings
70+ years track record in capital
equipment industry
TEL Solar
TEL Solar IP
3
OUR TECHNOLOGY PORTFOLIO
Workshop 10 IPL PZ Hard-Coatings
Optical Data Storage: Phase change PVD
Technology: CD, CD-R, DVD, BlueRay
1980 200019941967
Front End Semiconductor Technology: Sputtering and Evaporation
2004
Large area TFT Display:
PECVD, Etch, PVD Technology
Optical Disc
Thin Film Si solar panel:
PECVD, LPCVD Techn.
Flat panel
substrates
Solar cellsCrystalline Solar Cells:
PVD Technology
Free Form
optical substratesOptical Coating
Evaporation
HP Optical Coating Techn.:
Evaporation & Sputtering
Wafer processing
1946 – 2017
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OUR IP PORTFOLIO
Patents (Filed and Granted) Worldwide: ≈ 580
Filed: ≈ 200 Granted: ≈ 380
Areas Covered:
• Deposition Sources
• Etch Sources
• Deposition Process
• Process Hardware-Environment
• Thermal Management
• APC
• Substrate Handling Concepts
• Platform Concepts
OUR LOCATION
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• Headquartered in Trübbach, CH
• Global Headcount ≈ 330
Workshop 10 IPL PZ Hard-Coatings
• System assembly in class ISO7 & ISO8
• 2 levels for final equipment assembly
• Application Lab in class ISO6 (customer demo)
• R&D facilities and metrology with >1000m2
• Consecutive growth
4m to 164mCHF
since 2004
• Privately Owned
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Steady Revenue
Growth
• Installed Base
> 5000 Systems
• Balanced business:
System Sales –
Retrofit - Service
• No.1 or strong No. 2
in diversified
markets
Balanced
Business
• Industry Lead User
strategy
• Technological
leadership &
differentiated
solutions in core
markets
• Gain M/S > CAGR
• Average spending
into R&D > 15% to
secure technical
leadership
Innovation
Strategy
Advanced Packaging
12%Power Device
9%
Wireless24%
MEMS6%
Opto Electronic
s15%
Photonics18%
Installed Base15%
OUR TRACK RECORD
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OUR VISION
Evatec the ”Thin Film Powerhouse”
is the global leader in solutions for
the semiconductor, optoelectronics
and photonics industries.
Our technologies help make
innovations like smart hand held
devices, sensors & actuators, touch
and solar panels more affordable
and accessible (IoT) to consumers
and businesses around the world.
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OUR VALUES
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People
Ideas
Quality
Continuous
Improvement
DELIVERING
CUSTOMER
VALUE
Workshop 10 IPL PZ Hard-Coatings
OUR BUSINESS EXCELLENCE
10
With a proven track record
• More than 5000 systems installed
around the world
Integrated process solution
provider
• Equipment / Platform
• Depositon Technology / Process
(Evaporation, Sputter, ICP, PECVD)
• Customer Service (on-site service,
spares, retrofit, training)
Customer-tailored equipment
architecture
• Batch (BAK, LLS, MSP)
• Cluster (CLN 200/300/RAD)
• Inline (SOLARIS, HEXAGON)
Workshop 10 IPL PZ Hard-Coatings
PROCESS SOLUTIONS IN OUR TARGETED MARKETS
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Market /
Industry
Advanced
Packaging
Power
Devices
Wireless
CommunicationMEMS Optoelectronics Photonics
Products
Wafer Level
Packaging
Panel Level
Packaging
Bipolar ICs,
Discrete Power
Semiconductors e.g.
EV/HEV,PV Inverter,
DC Converter
III-V RF-devices:
Power Amp. RF-filter,
RF switches, IR;
WBG RF devices
Optical & Magnetic
MEMS
Thin-Film-Head
Sensors / Actuators
HB LED / Lighting
IR – Devices
Photovoltaic Modules
Free Form Optical
Components
Micro Lenses
Mirrors / Filters
Laser / VCSEL
Touch Screen Panels
/ Tablets
Device /
Technology
• Flip Chip
• WL-CSP
• Fanout/ InFO/
eWLB…
• Power MOS, IGBT,
IGCT, LDMOS
• Mixed signal dev.
(BCD)
• WBG power devices
• HBT on GaAs
• p-HEMT on GaN
• IR devices
• RF-Filter: TC-
SAW & BAW
• TFR
• Wafer / Panel
Level Optics
• Discrete Sensors
• Integr. MEMS:
SoC, SiP
• GaN on sapphire
• GaN on Si
• GaN on GaN
• DBR
• High-eff. Solar
cells
• Interference
Coatings
• DBR
• Integrated Optics
• Wafer Level
Optics
PVD Process
/Application
• UBM
• RDL
• Integr. Passives
• TSV
• EMI shielding
• Backside metal e.g.
Etch- Al- Ti- NiV- Ag
• Thick Al front metal
• AlN Buffer for GaN
on Si
• Backside ViaTFR
• Metal Electrodes
• Piezo Layers (AlN,
AlScN)
• HD-SiO2
• Al IDT
• Soft Magnetics
• PZT, AlScN
• HP-TFR e.g.
NiCr(Si),TaN
• Thermoelectric
Layers
• TCO: ITO, GZO
• Metal Electrodes
• AlN PVD Buffer
• Dielectrics, AR
• AR
• Low/high index
metal-oxides
• Metals /
Dielectrics
• Anti-scratch
• Anti-smudge
HARDWARE SOLUTIONS IN OUR TARGETED MARKETS
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Market / Industry
Advanced
Packaging
Power
Devices
Wireless
CommunicationMEMS Optoelectronics Photonics
12”
HE
XC
LN
8”
CL
N/R
AD
Various S
ubstr
ate
Siz
es
SO
LB
AK
MS
PL
LS
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OUR INNOVATION NETWORK
Patent Families: 98
Collaboration with Customers R&D Consortia
Evatec’s Technology Center
Seize opportunities in next
generation applications
through joint evaluation and by
providing superior solutions
with our broad technology
pool.
PVD PECVD CVD Etch
OUR CUSTOMER SERVICE
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4 Pillars of Sustainable Customer Service
Spare Parts On-site Services Upgrades/Retrofits Training
• Maintaining
Infrastructure for
fast global delivery
• Ensuring high tool
uptime for best
cost of ownership
• Offering self-
sufficient local
capability
• Accessing global
knowledge base for
timely support
• Working together
with customers on
Continuous
Improvement
Programs (CIP)
• Adding capability
and increasing
useful life of
customer existing
installed base
• Enhancing tool
productivity and
reducing running
costs
• Building customer
knowledge for
enhanced uptime
• Delivering standard
& custom trainings
for each product
line
OUR WORLDWIDE PRESENCE
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Supporting customer service around the globe from our headquarters
Evatec AG
Hauptstrasse 1a
CH-9477 Trübbach
Switzerland
AGENDA
17
1 Welcome to Evatec: Company overview
2 Hard coatings for optical applications
Diamond-like carbon: IR optics
Diamond-like carbon: Consumer electronics
TiN and TiCN for decorative coatings
Workshop 10 IPL PZ Hard-Coatings
BAK PRODUCT PORTFOLIO DEVELOPMENT
System Size and Capacity
R&D
Pilot and Niches
Large Scale Production
BAK501
BAK641
BAK761 / BAKSAW / BAP801
BAK901
SAMSON / SPLIT
BAK701
BAV2000
BAV1400
Deliver Capability @ Lower Cost
Deliver Process
Performance &
Productivity
Mid Scale ProductionBAK1101
BAK Pre-Melt
Deliver Process
Performance & Ultra-
High Productivity
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Materials:
Si / aSi/ Ge / ZnS / YtF3
Applications:
• IR, NIR filters Common to all is illumination in the NIR &
• AR and DLC Environment protection for highly demanding products
Already established:
• NIR / IR blocker for image sensors to enhance color rendering
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Wavelength [nm]
Measurement UVIR-Blocking Filter
COATINGS FOR IR AND NIR APPLICATIONS
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Why use Diamond Like Carbon/DLC films?
• IR materials (Si, Ge, ZnS..) are rather soft + wear easily
Demand for a hard coating as terminating layer to the environment
Applications
• Front lenses in IR optics
• Touch panels & camera lenses of mobile devices (thin DLC layers)
Requirements
• Transparent in IR region
• Hard and wear resistant
• Refractive index ca. 1.8-1.9 single layers form AR on Si and Ge
MOTIVATION
from: http://www.optics.umicore.com/ http://www.thebitbag.com/iphone-7-camera-rumors-same-8-
megapixel-sensor-as-previous-models/109475
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PROPERTIES OF DLC
Diamond Like Carbon is not a material, but a class of materials
Requirements for films with desired properties for IR optical applications:
• Hybridization sp3 / sp 2 : > 60%
• Hydrogen content: < 40%
sp3
X-tal / transp /hard
Diamond
sp2 + sp3
amorphous/polymeric /
black – transp/ soft - hard
a-C(:H)tetrahedral hydrogenated
amorphous carbon «DLC»
sp2
X-tal /black /soft
Graphite
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Traditional manufacturing:
• 1st deposit AR coating in box coater
• 2nd deposit DLC coating in separate system
(e.g. PECVD process)
Combine AR + DLC deposition in
ONE deposition system by
Using plasma source in evaporation
system for PECVD deposition of DLC
DLC PROCESS EXPERIENCE
AR
deposition
in
box coater
DLC
deposition
in separate
system
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Configuration:
• IS300 plasma source:
High plasma current density /high ion energy
Operates with pure O2, N2 or H2 gases but also
with e.g. acetylene (C2H2) “maintenance free”,
easy handling
Fast: conditioning /ramp-up time
Low temperature load on substrate
• Stringent safety measures:
Purge gas handling and safety interlocks for
handling flammable gases such as acetylene,
methane etc.
Process control:
• GSM BB optical monitoring
• In-Situ stress measurement
CONFIGURATION OF BAK 1101 BOX-COATER
FOR DLC DEPOSITION
GSM BB Optical
MonitoringIn-situ stress
measurement
IS300
plasma source
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RESULTS: IN-SITU STRESS MEASUREMENT OF
BROADBAND AR COATING WITH DLC LAYER
L – low refractive index material shows ca 700 MPa tensile stress and some stress
relaxation when deposition is stopped
H – high refractive index material is stress free
DLC shows compressive stress ca 750 MPa
Workshop 10 IPL PZ Hard-Coatings 25
WEAR TEST: WINDSHIELD WIPER BLADE TEST
Hardness and Wear Tests:
Various tests depending on the
application of DLC layer, e.g.:
• Nanoindentation
• Bayer test
Windshield wiper blade test:
• Container filled with sand
• Wiper blade rotates with defined force on test
sample
• Standardized by RSRE*
• Test is judged by eye and classified
*Royal Signals and Radar Establishment
Workshop 10 IPL PZ Hard-Coatings 26
RESULTS:
BROADBAND AR COATING WITH DLC LAYER
Numerous combinations of typical IR materials (Si,
Ge, ZnS, Y2O3, YbF3, ..) were tested for adhesion
Broad band antireflection coating, with perfect
adherence and no signs of wear after wiper blade test
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1 Adhesion
2 Humidity
3 Severe
Abrasion
4 Temperature
cycle
5 Ultrasonic cleaning
6 Salt Fog
test
7 Windscreen Wiper Test
Test sample 1
45 days
Test sample 2
45 days
Test sample 3
45 days
Not tested
Passed, failed after overtesting
Passed
ENVIRONMENTAL TESTS
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CONCLUSION FOR BAK PROCESSES
High Volume IR and NIR Coating with BAK
• Using big batch coating chamber for increasing throughput
• Multiple sources for high rate deposition
• Advanced process control (APC) for insitu measurement components
Synergy of PECVD and PVD for AR/DLC
• Hardness of about 22 GPa
• Refractive index around 1.65 – 2.0 and higher
• 100% resistance against the Wiper Test
Workshop 10 IPL PZ Hard-Coatings 29
AGENDA
30
1 Welcome to Evatec: Company overview
2 Hard coatings for optical applications
Diamond-like carbon: IR optics
Diamond-like carbon: Consumer electronics
TiN and TiCN for decorative coatings
Workshop 10 IPL PZ Hard-Coatings
COATINGS FOR TOUCHPANELS
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Objectives
• Scratch resistant AR coatings for glass and sapphire Touchpanels & Watches
Application: Hard transparent
and / or anti reflective
coatings
Evatec solution: Solaris S151 & S380
Workshop 10 IPL PZ Hard-Coatings
Cover Glass
user side
sensor side
PRODUCTION SOLUTIONS ON SOLARIS PLATFORM
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Low ITO resistivity on
ink printed glass
ITO coating
WCA > 100° after
> 10’000 strokes
with steel wool
AS coating
Index Matching Layer
IM coating
Metal Contacts
Metals
Color neutral AR layer
AR coating DLC coating
High abrasion resistance
and low absorption
Decorative
coating
Tailored R, T to
match desired color
Workshop 10 IPL PZ Hard-Coatings
SCRATCH RESISTANT AR COATING ON GLASS
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Microscopic analysis of coated glass samples after scratch testing
• Scratch test simulates wear by coins, sharp objects etc. in user’s pocket
(common test in smartphone manufacturing)
• Scratch resistance is mainly determined by hardness and adhesion
Trade off between optical performance and scratch resistance
Goal: Scratch resistant coating on top of optically optimal AR coating
Typical smartphone cover glass after scratch test:
Evatec Hard AR coated glass
SiO2 Si3N4SiON
Workshop 10 IPL PZ Hard-Coatings
Tool platform
• Solaris S151 and S380
Sputter data
• Target material: Graphite
• Deposition rate up to 2 nm/s
Application
• Abrasion resistant top layer
on AR coatings
SPUTTER DEPOSITED DLC
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DLC: OPTICAL DATA
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• Different sputter processes allow for wide ranges of optical properties
• Refractive index: 1.65 ≤ n ≤ 2.05
• Extinction coefficient: 0.014 ≤ k ≤ 0.410
Workshop 10 IPL PZ Hard-Coatings
TRANSMISSION DATA OF 10 nm DLC FILMS
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• 10 nm DLC on glass substrates
• Average Absorption (400 - 700 nm): Different sputter process allow large variation
Process 3: Abs400-700nm = 0.5%
Process 4: Abs400-700nm = 4.2%
• Transmitted color: Large process window for quasi neutral transmittance,
-0.5 < a* < 0.5, 1 < b* < 2
Glass
10nm DLC
Workshop 10 IPL PZ Hard-Coatings
WINDSHIELD WIPER ABRASION TEST
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Glass
10nm DLC
Non-optimized
optimized
• Container filled with sand and water mixture (according to UK Defence Standard)
• Wiper blade rotates with defined force on test sample, duration 10 min
• Test result is judged by eye: 1.0 = no material removed, 0.0 = all material removed
Abrasion resistance is strongly increased by optimizing the interface to glass
Best combination of abrasion resistance and optical transmittance: Process 3
Workshop 10 IPL PZ Hard-Coatings
SCRATCH RESISTANCE VS. THICKNESS: DLC #3
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• Scratch resistance determined by the steel wool test:
Steel wool grade «0000», 1 kg/cm2
• Scratch resistance increases with increasing film thickness
Significant improvement in comparison to uncoated glass: Factor 4.5 with 25 nm DLC
Workshop 10 IPL PZ Hard-Coatings
Tool platform
• Solaris S151 and S380
Sputter data
• Target material: Graphite
• Deposition rate up to 2 nm/s
Optical data
• Refractive index 1.65 ≤ n ≤ 2.05
• Extinction coefficient 0.014 ≤ k ≤ 0.410
Structural data
• Film density up to 2.3 g/cm3
• Surface roughness: Ra < 1.0 nm, for 10 nm thick films on glass
Scratch and abrasion resistance
• Windshield wiper abrasion test: No abrasion
• Steel wool scratch test: Scratch resistance of glass increased by factor 4.5
SPUTTERED DLC
39Workshop 10 IPL PZ Hard-Coatings
AGENDA
40
1 Welcome to Evatec: Company overview
2 Hard coatings for optical applications
Diamond-like carbon: IR optics
Diamond-like carbon: Consumer electronics
TiN and TiCN for decorative coatings
Workshop 10 IPL PZ Hard-Coatings
41Workshop 10 IPL PZ Hard-Coatings
• High Power Impulse Magnetron Sputtering:
Very short pulses < 200 μsec and low duty cycle < 10 %
• High pulse currents of 300 to 1000 A for high plasma density,
but low average power (20kW)
• Runs on standard PVD sources with small changes
Very dense films
Directional deposition
TiAlN HIPIMS process
TiAlN DC sputtering
HIPIMS SPUTTERING OF HARD DECORATIVE FILMS
TiCN: HARDNESS VARIATION BY PROCESS SETTINGS
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• Hardness of 32 GPa achieved until now
• Close to literature values
• Pulse duration and pulse frequency influence the film structure
Workshop 10 IPL PZ Hard-Coatings
http://www.cityu.edu.hk/cosdaf/img/thin-
film/hardness.gif
High volume IR and NIR coating with BAK: AR/Filters + DLC
• Big batch coating chamber for increased throughput
• Multiple sources for high rate evaporation
• Advanced process control (APC) with insitu measurement
• DLC hardness up to 22 GPa
High throughput, fully automated coating with Solaris
• Inline system with full automation, cycle time ≥ 3 s
• 6 independent process chambers for high rate sputtering
• DLC for optical applications with high abrasion resistance
• TiCN hardness up to 32 GPa, color adjustable by C:N ratio
SUMMARY
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