RUTAFore Vacuum Pump Systems with dry compressing ■ Screw pumps ■ Scroll pumps ■ Roots pumps

Operating Instructions 17200469_002_C0

Contents

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Page

0 Important Safety Information 5

0.1 Mechanical Hazards 5

0.2 Electrical Hazards 7

0.3 Thermal Hazards 8

0.4 Hazards Caused by Materials and Substances 9

0.5 Ignition Risk 11

0.6 Noise Hazard 11

0.7 Dangers in Connection with Safety-related Measures and Precautions 11

0.8 Danger of Pump Damage 12

0.9 Hazardous Process Gases 14

0.9.1 Flammable Gases / Vapours: 15

0.9.2 Corrosive 17

0.9.3 Pyrophoric Gases / Dusts / Powders 19

0.9.4 Toxic 20

0.9.5 Explosive 21

0.9.6 Oxidants 21

1 Description 22

1.1 Design and Function 22

1.2 Supplied Equipment 23

1.3 Lubricants 24

2 Transport and Storing 25

3 Installation 26

3.1 Placement 26

3.1.1 Filling Lubricant into the Pumps 27

3.2 Conforming Use 27

3.2.1 Non-conforming Use 28

3.3 Ambient Conditions 29

3.4 Connecting the Intake and Exhaust Lines 30

3.4.1 Connecting Bellows 30

3.4.2 Intake Line 31

3.4.3 Exhaust Line 32

3.4.4 Traps and Condensers 34

3.5 Connecting Cooling Water 35

3.5.1 Water Quality 35

3.6 Connecting Compressed Air or Purge Gas 36

3.7 Electrical Connection 37

Contents

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Described in these Operating Instructions is the general use of backing pump systems from Leybold equipped with dry compressing screw forevacuum pumps and RUVAC Roots pumps.

These Operating Instructions apply to all pump systems equipped with such pump combinations. For the specific description of your pump system please refer to the special Operating Instructions for your pump system and the enc-losed Operating Instructions for the individual components.

Original operating instructions.

3.8 Leak Detection after Installation 39

4 Operation 40

4.1 Media Compatibility 40

4.2 Start-up 40

4.3 Operation 41

4.3.1 Draining out Condensate (at Installed Silencer) 43

4.4 Shut-off and Venting 44

4.5 Removing from Service 45

5 Maintenance 46

5.1 Safety Information 46

5.2 Maintenance Intervals 47

5.2 Maintenance Intervals 48

5.3 Leybold Service 48

5.4 Replacing Individual Pumps in the Pump System 48

6 Waste Disposal 49

8 Troubleshooting 50

Safety Information

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Obligation to Provide Information Before installing and commissioning the pump system, carefully read these Operating Instructions and the Operating Instructions for the individual components and follow the information so as to ensure optimum and safe working right from the start.

The Leybold RUTA pump system has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions. It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions. The pump system must only be operated in the prop-er condition and under the conditions described in the Operating Instructions. It must be operated and maintained by trained personnel only. Consult local, state, and national agencies regarding specific requirements and regulations. Address any further safety, operation and/or maintenance questions to our nearest office.

DANGER indicates an imminently hazardous situation which, if not avoid-ed, will result in death or serious injury.

WARNING indicates a potentially hazardous situation which, if not avoided, could result in death or serious injury.

CAUTION indicates a potentially hazardous situation which, if not avoided, could result in minor or moderate injury.

NOTICE is used to notify users of installation, operation, programming or maintenance information that is important, but not hazard related.

We reserve the right to alter the design or any data given in these Operating Instructions. The illustrations are not binding.

Retain the Operating Instructions for further use.

NOTICE

DANGER

WARNING

CAUTION

NOTICE

Safety Information

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0 Important Safety Information

0.1 Mechanical Hazards1 Avoid exposing any part of the human body to the vacuum.

2 Do not operate the pump with an opened intake port. There exists the risk of suffering injury. At valves or flange openings there is the risk of crushing your fingers. Take care of your fingers.

Even during standstill of the Roots pump and backing pump it is dan-gerous to grasp into the pump casing. Fingers can easily be squeezed between impellers due to the high inertia of the parts. Please use cau-tion when grasping into the pump and make sure that the pump is secured against unwanted rotation due to differential pressures.

Never operate the pump system without connected intake line respec-tively a blank flange at the intake port.

3 The pump is intended for generating a vacuum only. If an overpres sure can occur in the pump and the system then they must be pro tected against such an overpressure by an overpressure safety valve, for example.

The inlet pressure on the suction valve of the pump system must not exceed atmospheric pressure (approx. 1013 mbar abs.). Do not ope-rate the pump system with excess pressure on the suction valve.

4 The maximum permissible discharge pressure for the backing pump is 1.15 bar abs.

We recommend to operate the pump with a silencer or a connected discharge line. The pressure in the discharge line must not exceed atmospheric pressure by 150 mbar max.

Make sure that the gas flow at the discharge is not blocked or restrict-ed in any way, even when the pumped out gases need to be collected or contained

Normally, no shutoff devices are required in the discharge line for pump opera tion. If shutoff devices are installed, open them before starting the pump.

In the case of processes involving much condensate, we recommend the installation of a condensate separator in the discharge line.

5 When using purge gas, protect the purge gas supply so that in the event of a malfunction or power interruption no overpressure can occur within the pump system.

6 We recommend to design the discharge line in consideration of a pos-sible overpressure of 5 bar. In the event of a malfunction, such a pres-sure can occur briefly.

WARNING

Safety Information

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7 For transporting the pump use only suitable transport means.

When selecting the lifting and transport means take note of the total weight before transporting the pump.

When transporting the pump with a forklift or similar, ensure that the pump has been secured on the forks or on a suitable pallet.

The pump systems must not be lifted at the crane eyes of the individu-al pumps.

Parts can drop off from the pump system. Wear the required protec-tion equipment: safety shoes, safety helmet, safety gloves.

8 Before beginning with any maintenance and servicing work always ensure that no gas can flow backwards through the pump since then the rotors might turn against the normal direction of rotation. For this reason vent the vacuum chamber to the discharge pressure level or ensure through suitable valves that the vacuum chamber and the lines are reliably separated from the pump. When connecting several pump systems, pressure differences between inlet and discharge can give rise to uncontrolled turning of the pump’s shafts.

9 If owing to the design of the process, deposits form in the pump or adjacent components, cleaning will be necessary in intervals depend-ing on the specific type of application as otherwise flakes from these deposits may enter the pump.

10 Should malfunctions affect the Roots pump, seized impellers in par-ticular owing to hard deposits or foreign objects, the occurrence of leaks affecting the housing cannot be ruled out. When pumping haz-ardous gases the operator must ensure that the possibility of such an incident is excluded, respectively that leaks at the pump casing will not pose a hazard. Connect a pump casing suction facility, for example.

11 During operation, the cooling water circuit must not be shut off. A cool ing water discharge which has been blocked can cause the for-mation of gas bubbles and result in excessively high pressures. The pumps may overheat and seize.

12 Lay electric feed and cooling water lines so that there is no risk of trip-ping over these.

13 When changing the oil remove any escaped oil as otherwise there is the risk of slipping.

14 Before doing installation work on the pump system make sure that no vacuum is present in the pump and that all media connections have been depressurised.

15 Before disassembling any cooling water lines, leave the pump to cool down, shut off the feed line.

Safety Information

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0.2 Electrical Hazards1 The electrical connection must only be provided by a trained person.

Please observe the national regulations in the country of use like EN 50110-1 for Europe, for example.

2 Potentially lethal voltages are present at the mains connections. Before beginning with any maintenance or service work on the pump, disconnect the pump from all power supplies (lockout/tagout). In addi-tion, there is the danger of residual voltage for up to 5 min after dis-connection.

3 Install a device for a safe disconnection from the power supply.

4 Note the information on the IP type of protection.

5 Always operate the pump with a properly connected protective earth conductor and make sure that the motor casing is closed.

6 The pump must only be operated at the frequency specified for the motor. Use only the Leybold frequency converter.

7 Install a suitable motor protection for the electric motor before starting up for the first time. Note the information in the Operating Instructions and on the nameplate.

8 Before starting, check to ensure that the junction box is undamaged, run a visual inspection on on the seals.

9 Install add-on parts (pressure switches, for example) without any mechanical tensions and protect these against being damaged by impacts, for example.

10 Lay the connecting lines so that these cannot be damaged. Protect the lines against humidity and contact with water. Avoid thermally stressing the lines by unfavourable laying. In particular lay the lines at a distance with respect to the discharge. Comply with the required standards when designing and laying the electrical connections.

11 Provide strain relief for the connecting lines so that the plugs and the line connectors are not subjected to excessively high mechanical stresses.

12 Lay electric feed lines so that there is no risk of tripping over these.

13 The pump must be integrated in the system control arrangement so that it can not run-up automatically after it has been shut down due to overtemperature. This applies equally to emergency shut-down arrange ments. After having determined the fault cause, the pump should be switched on manually again.

14 Work on the frequency converter within the motor casing must always be left to suitably instructed personnel only.

DANGER

Safety Information

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15 Always connect the frequency converter to ground in accordance with the international and local regulations for equipment exhibiting an increased leakage current.

Keep the ground wires as short as possible. The frequency convert-er produces leakage currents (typically less than 10 mA). In the case of unbalanced mains power supplies, the leakage current may exceed 10 mA. In this case the protective ground conductor must exhibit a cross-section of at least 10 mm2. Or connect a further pro-tective ground conductor having at least the same cross-section as the connection cable. A connection point is provided.

When using more than one frequency converter, do not loop the ground wire.

0.3 Thermal Hazards1 Hot surfaces, risk of suffering burns.

Under certain ambient conditions parts of the the pump may attain temperatures over 70° C. There then exists the risk of suffering burns. Note the danger symbols on the pump and in the case of a hot pump wear the required protection equipment. If there is the risk of touching hot surfaces inadvertently, install corre-sponding protection. When working on a pump which is still warm from operation, always wear protective gloves.

2 Handle the pump only while vented and after having let it cool down.

3 Before disassembling any cooling water lines, leave the pump to cool down, shut off the feed line.

4 When uninstalling the cooling water lines, take note of splashing water. Heated water can cause burns.

5 Never remove the oil-fill or oil-drain plugs while the pump is running. There exists the risk of suffering burns. Always wear protective gloves and protective goggles also for protection against the oil.

6 Operating the pump with less than the specified amount of cooling water will result in excessively high surface temperatures which can damage the pump. Moreover, there exists the risk of suffering burns.

CAUTION

Safety Information

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0.4 Hazards Caused by Materials and Substances1 Essentially, the pump system must only be operated when the exhaust

is connected to a suitable air extraction system. Make sure suitable protective clothing is worn and safety measures taken as a function of the medium to be pumped. The operator must comply with the appli-cable local gas emissions and environmental regulations.

2 The vacuum and exhaust lines must be leaktight. Hazardous process gases may escape or the pumped gases can react with air or atmo-spheric humidity. After installation of the pump and after servicing work on the vacuum system, a leak detection will always be necessary.

When pumping hazardous gases we recommend a leak detection on a regular basis. Leaks in the pump cannot be ruled out under all circum-stances. When pumping hazardous gases, the operator must ensure that that leaks at the pump and in the vacuum system will not be a hazard.

3 Since not all application related hazards for vacuum systems can be described in detail in these Operating Instructions, Leybold has availa-ble a separate document (Safety Booklet) in which the hazards and general safety concepts for design, operation and maintenance of vac-uum systems are explained.

When planning to pump hazardous substances with this pump sys-tem, read the related chapters in the Safety Booklet and in these Operating Instructions first. You can download the Safety Booklet from our homepage.

4 Before commissioning the pump, make sure that the media which are to be pumped are compatible with each other so as to avoid hazard-ous situations.

5 If required additional monitoring of the purge gas quantities is neces-sary from the side of the operator when a well-defined and ensured dilution is necessary from the side of the process.

The type of protection depends on the specific process and needs to be assessed by of the customer.

6 The cooling water from the return is not of drinking water quality and should not be used for this purpose.

After having operated the pump, the cooling water lines may suffer from microbiological contamination. Take appropriate safety precau-tions.

7 Before operating the pump with a gas ballast and/or a purge gas (option) check the compatibility of the gas with the pumped media so as to avoid dangerous conditions during operation.

8 When operating the pump with purge gas , secure the purge gas supply so that in the event of a malfunction no overpressure can occur in the system.

DANGERGEFAHR

Safety Information

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9 When the pump has been used to pump hazardous gases before, introduce appropriate safety precautions before opening the intake or the discharge connections. Before opening the pump, purge it for a longer period of time with an inert gas. If necessary, wear suitable per-sonal protection equipment like gloves, breathing protection and pro-tection clothing, for example (see Material Safety Data Sheets for the substances in use, the chemical reactions and the by-products). Firmly seal off the pump. When shipping the decontaminated pump for ser-vicing please also indicate the type of hazard. For this see Section 5.3 Service at Leybold.

10 Leybold is not in a position to perform servicing (repairs) and waste disposal of radioactively contaminated pumps. Both needs to be ensured from the side of the user.

11 When disposing of the pump, used lubricants and used oil filters observe the applicable environment regulations.

12 When pumping hazardous gases you must assume the presence of hazardous residues in the pump.

13 If the pump has been contaminated by the process or through envi-ronmental influences, it must be decontaminated professionally.

Contaminated parts can be detrimental to health and the environment. Before beginning with any repair and maintenance work inform yourself about any possible contamination. When handling contaminated parts observe the pertinent regulations and comply with the necessary pro-tection measures.

When shipping contaminated pumps which require approval by the authorities, note the applicable regulations regarding packaging and shipping.

14 We recommend to inspect the pump system and all components after approximately 6 months under the process conditions. The inspection of the components shall let corrosion attacks become apparent at an early stage and indicate possible deposits of process dust. Depending on the findings, changed maintenance and replacement intervals can become necessary for specific components.

15 All points which are opened on the pump or the vacuum system need to be reliably sealed immediately after having run the maintenance work.

16 Some pumps use perfluoropolyether (PFPE) as lubricant. When handling PFPE you should observe the following: During thermal decomposition at temperatures over 290 °C toxic and corrosive gases are released. When handling PFPE keep it way from open fires. Do not smoke with PFPE on your fingers. Touch the inner sections of the pumps only while wearing clean gloves, and use clean tools; do the necessary work in clean and dry rooms; after having removed the pump from its packaging, start it up as quickly as possible; as cleaning agents, solvents, based on hydrofluorether compounds may be used.

Safety Information

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17 Fluoropolymers are used as sealants (FKM) and as lubricants (PFPE) in the pumps. In case the pump suffers a severe mechanical failure, the possibility of hazardous substances being released owing to their ther-mal decomposition cannot be excluded. The hazards caused by such decomposition are described in the Material Safety Data Sheets for the materials, for example.

0.5 Ignition Risk1 The standard version of the pump is not suited for operation in explo-

sion hazard areas. Contact us before planning to use the pump under such circumstances.

0.6 Noise Hazard1 The noise level of the pump during ultimate pressure operation with

silencer or appropriate discharge line corresponds to the values stated in the Technical Data. In other operating modes and with other equip-ment, higher values may occur. Make sure that suitable protection measures are taken to protect your hearing.

We recommend to wear hearing protectors (earmuffs), if local noise levels exceed mandatory limits.

0.7 Dangers in Connection with Safety-related Measures and Precautions1 The pumps are not equipped with an emergency shutdown facility.

2 The following applies to pumps being operated with a frequency con-verter: after a mains power failure the pump will automatically start up again once the power returns, as long as a start command from the system control is present.

3 Take note of the warning information on the casing surface. If this warning information was removed, covered or obstructed, then pro-vide corresponding additional warning information.

DANGER

CAUTION

CAUTION

Safety Information

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0.8 Danger of Pump Damage1 Select an installation site for the pump so that all controls are easily

accessible.

2 With the pump filled with oil it must placed such that it will deviate by no more than 1° from the vertical axis as otherwise oil can enter into the sealing system. Before filling the pump with oil, align it. Transporting the pump filled with oil is not permissible.

3 Do not allow the ingestion of any objects (screws, welding beads, nuts, washers, pieces of wire, etc.) through the intake port of the pump.

If possible, use the intake screen which has been fitted as standard and clean it regularly. In the case of pump systems equipped with a RUVAC WH/WHU 4000 and 7000 and applications involving shock venting, the intake screen can suffer from overloading so that the metal mesh will be torn off over time and drop into the pump. Under such operating conditions, we recommend to leave the inlet screen in place only during first-time commissioning and thereafter to remove it.

Objects falling into the pump can cause severe damage at the pump including leaks to atmosphere.

The intake screen does not replace a filter. Prevent the intake of parti-cles from the side of the process by fitting suitable filters.

4 When pumping dust containing media, install a suitable dust filter in the process gas flow upstream with respect to the pump.

5 If low concentration corrosive or reactive gases are being pumped, then operate the pump with purge gas.

Please consult us to determine which pump types are required for specific processes and applications.

6 Lines and other vacuum connections should be clean and free of oil. Special attention must be paid here when oil-sealed pumps have been used on the vacuum side. Check the conditions before initial commis-sioning. In the case of deviations, the pump can suffer contamination with oil residues.

7 The pressure within a pump which has been switched off will increase to ambient pressure within a few seconds. In such a case the pump is vented through the discharge. In order to prevent this, DRYVAC pumps can be equipped with a non-return valve in the discharge sec-tion.

8 If no non-return valve has been installed and when connecting the pump, provide a suitable valve on the intake side for the purpose of shutting off the intake line so as to prevent the pump from turning backwards in the event of a power failure. Otherwise the pump may suffer damage or oil may contaminate the pump chamber.

9 The discharge line should be laid so that it slopes down and away from the pump so as to prevent condensed vapours from backstream-ing into the pump.

NOTICE

Safety Information

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10 In the case of wet processes we recommend the installation of liquid separators, upstream and downstream of the pump so as to avoid the influx of liquid into the pump.

11 During installation work on the intake and discharge lines do not sub-ject flanges to any stresses. Check the rubber elements of the pump’s feet as to any deformation.

12 Before pumping condensable vapours the pump should be at operat-ing temperature. If a gas ballast is present, then it should be opened. The pump will attain its operating temperature approximately 30 min-utes after having started the pump. During this warm-up phase, the pump should be left separated from the process by a valve in the intake line, for example.

13 With the pump warm from operation do not clean it from the outside with water. There is the risk of a rotor crash due to shock cooling.

14 If condensable vapours have been pumped, the pump should before switching off be purged with an inert gas or air (depending on the spe-cific application) for approx. 15 min. This process should also be run before cleaning the pump chamber.

15 For shutting down the pump let the pump operate idle for at least 30 minutes. Disconnect the pump from the mains power. Place desiccant into the intake flange and into the discharge flange and blank off the flanges with a piece of foil.

When storing the pump for a longer period of time, drain out the water first. Flood the pump with nitrogen and package it airtight in poly-ethylene foil.

16 Improper maintenance or repair work can have an influence on the service life and the performance of the pump and will void any warran-ty claims.

17 Maximum cooling water pressure: 6 bar(g). When exceeded, there is the risk of leaks.

18 Never reuse disassembled gaskets. Always fit new gaskets.

19 Do not use the pump for applications that produce abrasive or adhe-sive powders or condensable vapors that can leave adhesive or high viscosity deposits. Please contact Leybold Sales e.g. for selecting the right separator.

Pressures given in bar or mbar are absolute values. If exceptionally a gauge pressure is meant, a “g” is added (bar(g)).

Safety Information

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0.9 Hazardous Process GasesPump systems equipped with DRYVAC pumps are frequently used to pump hazardous process gases. Leybold has gained considerable experience in the safe specification, design, operation and maintenance of vacuum sys-tems; this section records this experience with hazardous gases.

The information contained in this section cannot be considered as an exhaustive list, instead it is intended to communicate those foreseeable haz-ards which Leybold has knowledge of. It is essential that any user of vacuum equipment undertakes their own hazard / risk analysis in order to demon-strate compliance with regulatory requirements.

A hazardous process can be defined as a gas which falls into one or more of the following headings:

■ Flammable

■ Corrosive

■ Pyrophoric

■ Radioactive

■ Toxic

■ Explosive

■ Reactive (oxidizing / deoxidizing)

Due to their hazardous nature it is essential to consider their characteristics and the way in which they can impact on the safety of the vacuum system. It is normal to discuss these types of process gases with your vacuum supplier when specifying a vacuum system; however the following points give an overview of some of the hazards.

The reaction of non hazardous process gases inside a vacuum sys-tem can sometimes result in the generation of by-products which may be considered hazardous.

Safety Information

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0.9.1 Flammable Gases / Vapours:Flammable gases / vapours are gases / vapours that when mixed with a cer-tain quantity of air or oxidant can create an explosive mixture, however not all concentrations are hazardous.

The hazardous concentrations fall within the flammable range 1) and are gen-erally call “Potentially explosive atmospheres” due to the fact that they can be ignited to create an explosion.

In accordance with the European Union Explosives Atmospheres Directive the preferred method to ensure the safety of flammable gases is to ensure that their concentration in air does not fall within the flammable range, there by ensuring that they cannot burn in the event of an ignition source occur-ring. It is therefore necessary to undertake one of the following actions:

Operation below the lower flammable limit (LEL):The lower flammable limit can normally be found in the material safety data sheet provided by the suppliers of the gas or vapour; this is the minimum air / oxidant concentration where a flammable gas mixture could be ignited and sustain a flame or explosion.

To avoid a potentially explosive atmosphere and provide a safety margin it is necessary to dilute with an inert gas until the fuel / air [or oxidant] concentra-tion is 25% of the concentration at the lower flammability limit.

This is a preferred operating mode as the effect of an air leakage into the vacuum system only dilutes the flammable gases / vapours further; however, it is necessary to consider the inert gas system as safety critical.

1) The flammable range is the range of fuel / air concentration between the upper flammable limit and the lower flammable limit. Mixtures in this range will burn or explode if they are in contact with an ignition source.

Safety Information

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Operation above the upper flammability limit (UFL):The upper flammable limit can normally be found in the material safety data sheet provided by the suppliers of the gas or vapour; this is the maximum air / oxidant concentration where a flammable gas mixture could be ignited and sustain a flame or explosion.

To avoid a potentially explosive atmosphere and provide a safety margin it is necessary to limit the air / oxidant concentration to 60% of the air / oxidant concentration required at the upper flammability air / fuel limit.

This operating mode requires careful control of air leakage from the process vessel, pipework and vacuum system; in addition, it is necessary to consider accidental ingress of air due to operational or maintenance activities such as opening valves or replacing inert gas cylinders.

The advantage of this approach is that it is not necessary to use an inert gas purge making the abatement of process gases easier / possible and saving cost.

Operation below the minimum oxygen concentration (MOC):The minimum oxygen concentration is the oxygen concentration where a potentially explosive atmosphere can exist. At oxygen concentrations below this level it is not possible for the flammable mixtures to sustain a burn or explosion.

To avoid a potentially explosive atmosphere and provide a safety margin it is necessary to limit the oxygen concentration to 60% of the minimum oxygen concentration.

Again this operating mode requires careful control of air leakage from the process vessel, pipework and vacuum system; in addition, it is necessary to consider accidental ingress of air due to operational or maintenance activities such as opening valves or replacing inert gas cylinders.

Safety Information

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0.9.2 CorrosiveCorrosive gases have the potential to damage the vacuum system and create a hazardous situation.

All corrosive materials should be identified and their compatibility with the materials in the vacuum system should be confirmed, however it is important to note the following:

■ Corrosion is based on physical, chemical or electro chemical reactions

■ The most common metallic corrosion is based on an electro chemical reaction and therefore an electrolyte is necessary; this normally means the presence of water. Where the corrosive material is anhydrous [without water] it is not possible for a reaction to take place.

■ Certain chemicals for example halogens or organic acids can react with pump material without the presence of water and generate reaction prod-ucts consisting of ions from the pumped materials and the corrosive gas. Depending on the type of material these reaction products can build layers which then will prevent/minimize further reaction. Some of the reaction products e.g. AlCl3; SiF4 have a relatively high vapour pressure and will be removed with the gas stream. Under such conditions the pump material will be removed over time and destroy the pump.

■ Strong oxidizing materials like NF3 or fluorine can react with organic materi-al used inside the pump and destroy these components. Such materials are seals, gaskets, grease oil etc.

■ Where corrosive materials can be kept in the vapour phase it is not nor-mally possible for corrosion to take place.

■ Chemical or physical reactions can take place on polymer and ceramic materials.

Safety Information

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To avoid corrosion the following steps can be taken:

Addition of purge gases at the gas ballast port or the exhaust of the pump can ensure that corrosive gases are kept in the vapour phase.

If pumps are turned off it is recommended that a small purge gas flow (e.g. shaft seal purge) is kept running in order to purge the pump of corrosive materials and prevent the ingress of wet air from the exhaust line. In addition, the Installation of a check valve in the exhaust line next to the pump will reduce back streaming of moisture when the pump is switched off. This is strongly recommended where wet scrubbers are installed for gas abatement

Cold surfaces and surfaces at high pressure are where condensation is most likely to take place leading to corrosion. The highest risk is therefore in the exhaust pipeline especially if the pipeline is located in a cold location (e.g. outdoors), it is recommended that the specification of the exhaust line is carefully considered to avoid hazardous corrosion. Sealing materials should be carefully selected to ensure their compatibility with the corrosive materials.

The use of aluminium or aluminium alloys is not recommended for pumps handling halogens; to avoid a reaction between the pump material and halo-gens or acids, coating of the pumping chamber is common practice.

The use of copper or brass in contact with reactive process gases is not rec-ommended.

For pumping corrosive gases or strong oxidizers with oil sealed pumps or with pumps using grease lubricated bearings in the vacuum chamber PFPE is recommended to avoid oil degradation and forming of dangerous reaction products.

Fig. 0.2 RUTA WH7000/DV650/G

Safety Information

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0.9.3 Pyrophoric Gases / Dusts / PowdersA pyrophoric gas will spontaneously ignite in contact with air; it is effectively a flammable gas with an upper flammability limit of 100%.

It is not just gases that are pyrophoric, it is possible for dusts and powders to also be pyrophoric, and this is especially true of metal dust and powders that have been formed by sublimation in the vacuum chamber. These dusts have not formed a protective oxide layer and are therefore sensitive to self ignition on exposure to air.

The dust can also function as an absorber for flammable and pyrophoric pro-cess gases. The adsorption rate into the dust is increased by high pressure, low temperature and large surface area.

When handling pyrophoric gases, dusts or deposits it is essential to exclude air leakage which could create a hazardous reaction. Small air leakages will react with the pyrophoric gas but might not create a hazardous situation, the level of allowable leakage needs to calculated for each application and a suit-able safety margin determined.

Flammable dusts and powders can be collected in filters or might just form layers in the pipework, when exposed to atmosphere there is a real possibility that it could react very exothermically. Steps should be taken to ensure that the air is excluded from these systems in normal operation, during mainte-nance and during fault conditions. When the system needs to be vented to atmosphere it is recommended that nitrogen is used for this purpose and if the vacuum system needs to be disassembled protective equipment should be used in case of an unplanned reaction.

Note: Care should be taken to identify all hazardous materials and determine a suitable handling strategy.

Before opening the pump system to air it is recommended to operate for a time with purge gas to remove the adsorbed gases from any dust layers. A controlled oxidation by pumping oxygen in low concentrations can be used to remove the pyrophoric gases within the dust and also to oxidise the dust. This approach needs to be carefully defined as there is the potential risk that only the material on the surface will be treated while the bulk of the dust layer retains its absorbed gas.

The use of water or oil baths in to which vacuum system components can be submerged after disassembly can be very effective; however, the safety of such a procedure needs to be considered for each application.

Other materials such as silicon and poly-silicon can form unstable deposits inside vacuum systems, these materials are border line between pyrophoric and explosive. See section on explosives.

Safety Information

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0.9.4 ToxicMany process gases and vapours can be toxic to people and the environ-ment, therefore it is essential to consider the safety of these materials.

Vacuum systems are an excellent way of handling toxic materials as a leak-age on the vacuum side will only draw in air from the atmosphere and will not allow toxic process gases to escape. The situation is different when you start to consider the exhaust line of the vacuum system, here the pressure is close to atmosphere or just above atmosphere and a leakage will result in a leak-age of any toxic gas being pumped.

The first step is to try and dilute the toxic gas to a level below the permissible exposure level by using a dilutant gas. If dilution is not feasible or possible then it is recommended that the design of the exhaust line is carefully consid-ered to ensure that it is of a leak tight construction. The use of vacuum standard pipework such as ISO-KF or ISO-K is recommended due to the fact that it is designed to be leak tight to vacuum standards.

The exhaust of the vacuum system must be carefully considered as it might not be possible to vent toxic materials straight into the atmosphere. In this case it is recommended that the advice of a gas abatement company is sought in order to find a safe way of disposing of the waste gas stream.

Where toxic gases have been pumped there is a high possibility that the internal surfaces or trapped internal volumes might contain toxic material. Before removing pumps or components which have been in contact with toxic gases it is recommended to purge them to remove all hazardous gases.

Note: Care should be taken to identify all hazardous materials and determine a suitable handling strategy

On removal of the pump all vacuum flanges should be sealed; parts which cannot be sealed should be stored in air tight containers. When the pump needs to be stripped for maintenance purposes it is essential that it is returned to a service facility where specialist decontamination facilities are available.

Safety Information

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0.9.5 ExplosiveExplosive materials can react without the presence of air or an oxidant, they are particularly hazardous to pump.

Explosive poly-silicon solids can be created in vacuum systems and will col-lect on horizontal surfaces. It is normal to minimise the amount of material forming by regularly performing an etch step with a strong oxidant such as NF3 or SF6, this ensures less material is present in the vacuum chamber and reduces the possibility of a hazardous event. Special care should be given to the design of the vacuum system in order to avoid volumes where the poly silicon deposits could form but which are not effectively flushed by the etch gases. A common example of such a design is horizontal bellows where deposits can form within the convolutions but etch gases can only etch the small exposed surface.

The solution here is to either avoid the use of bellows or mount them in a vertical orientation.

0.9.6 OxidantsThese materials are able to react with a wide range of substances in a vacu-um system including elastomers such as O rings, polymers and oils, creating potentially hazardous conditions. Typical oxidants could be F2, NF3, O2, O3, etc

The actual effect of these oxidants will depend on the pressure and tempera-ture of the gas; both affect the rate of reaction. As the rate of reaction increases so to does the potential for a possible over pressure or fire. The fol-lowing guidelines should be used with oxidants:

■ Where the concentration of oxygen is greater then 25% by volume it is essential to use PFPE lubricant and chemically resistant polymers for com-ponents such as O rings, pump vanes etc. When pumping pure oxygen the use of an O2 qualified pump is essential.

■ If PFPE oil is not available then use an inert gas dilution to reduce the con-centration of the oxidant to safe levels.

Description

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1 DescriptionRUTA pump systems consist of a combination of Roots pumps and backing pumps. Described in these Operating Instructions is the operation of 2 or more stage RUTA pump systems.

Various types of pump may be used in the pump system:

Roots pumps: RUVAC WH, WHU RUVAC WS, WSU RUVAC WA, WAU RUVAC RA

Backing pumps: DRYVAC DV SCREWLINE SP LEYVAC LV SCROLLVAC ECODRY

For a special description on the pumps used in each case please refer to the Operating Instructions for the particular pumps.

1.1 Design and FunctionThe pump systems form compact, pre-assembled units ready for transport, which may be easily installed and operated. The standard models consist of pumps installed on top or beside of each other and, if required, a frame.

The pumps are air or water cooled.

Pump systems with RUVAC WA, WS, WH, RAThe pump system must be equipped with a pressure switch or a pressure sensor the signals of which are monitored accordingly, so that the Roots pump may be switched on while in the permissible pressure range. Depending on the pump ratio the pressure switch may be omitted when a frequency converter is used.

Pumps systems with RUVAC WAU, WSU, WHUIn the case of those pump systems with a Roots pump having a bypass line, the pressure switch will generally not be necessary. For small volumes, the Roots pump can be switched on and off together with the forevacuum pump. In the case of large volumes the pump may suffer from thermal over-loading. In such a case please consult us.

Vacuum Protection (optional)An exhaust gas non-return valve or check valve at the exhaust of the backing pump prevents any backstreaming of gas and humidity from the exhaust line after having switched the pump system off.

Description

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FunctionIt is the task of the pump system to mechanically compress the pumped gas from the pressure in the process or the vacuum chamber to atmospheric pressure by means of one or several Roots pumps and a dry compressing backing pump. The Roots pump compresses the gas to the max. intake pressure of the backing pump.

Silencer (Option)The exhaust silencer reduces the exhaust noise of the dry compressing pump.

It is so designed that it is also capable of separating any condensate which may occur, depending on the process in each case.

1.2 Supplied EquipmentThe pump system is supplied fully assembled, and depending on the order it is supplied

■ without electrical wiring of all installed components or

■ with electrical wiring of all installed components.

Prior to delivery, the ports on the intake and exhaust sides have been sealed using caps, foil, rubber diaphragms or pieces of cardboard.

Upon request by the customer, the pumps are purged with nitrogen to pro-tect the pumps against corrosion.

The following items are supplied for connecting the intake of the vacuum

Intake Side

RUVAC WA, WAU, WS, WSUIntake screen, ISO-K collar flange

RUVAC WH, WHUIntake screen

RUVAC RAAdapter for connecting ISO-K clamped flanges or DIN connection flange without accessories.

Exhaust Exhaust connection of the backing pump without accessories.

Oil FillingDepending on the pump type, the operating oil has been filled into the pump or it has been drained out and is supplied separately.

Possibly required special oils/special lubricants are not included with the standard deliveries. These operating agents are optionally available.

Description

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For some pumps, replacement gaskets for the oil-fill plugs are included in the scope of the delivery.

1.3 Lubricants The pump systems are delivered as standard either with perfluoropolyther (PFPE) or with synthetic oil as lubricant. Information as to any deviations from this is provided in the special Operating Instructions for the pump system.

A subsequent change of the type of gear oil being used should be left exclusively to the Leybold Service.

These safety information for the type of lubricant used must be observed.

Should you have any questions regarding the type of oil, then Leybold Sales will be pleased to assist.

A conversion to other types of oil is possible but only after thorough cleaning by the Leybold Service.

Fig.1.1 RUTA WH2500/SP630F/A

Transport and Storing

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2 Transport and StoringSome pumps are supplied filled with oil. For this reason during transportation it should not be subjected to any tilting as best possible.

Transport the pump systems making use of the crane eyes on the frame or use a fork lift.

If using a pallet truck, the leverage points must be central underneath the centre of gravity of the pump system.

Movable pump systems with castors must only be placed and moved on level, solid, horizontal surfaces. When moving the system, make sure that the moving speed is adequately slow so as to reduce the risk of an accident.Moving to pump along sloping paths or ramps is prohibited!

The pump systems must not be lifted at the crane eyes of the pumps or the crane eyes of the motors.

Use sufficiently rated lifting gear. While transporting, do not stand under the lifted system. Note the centre of gravity. Do not exceed the maximum permissible ceiling load.

StorageStore the pump system only horizontally standing on its feet.

When storing the pump for a longer period of time (> 2 weeks) the flanges should be sealed off with a piece of foil.

Place a bag with desiccant in the pump chamber, if required. Before operat-ing the pump once more do not forget to remove this bag first.

The pumps should be sealed off in a gas-tight manner and vented with nitro-gen.

Pumps which are being operated with PFPE must immediately be protected against corrosion after having switched the pumps off.

If there is the danger of frost, the cooling water must be drained, see Section 4.4 Shut-off and Venting

You may use a water glycol mixture of up to 30 %.

Temperature (only for storage without cooling water!) –10 °C to +60 °C

Storage site dry

Maximum atmospheric humidity 95 %, non-condensing

The pump system must be stored at the most for one year only. Longer stor-ing without turning the rotors will damage the bearings. Connect the pump to operate it briefly and then decommission it as described in the following sec-tions.

If the pump was on stock for a time longer than two years, it should not be connected directly to the power line. If doing so electrical components might be permanently damaged. Consult with Leybold.

WARNING

NOTICE

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3 Installation

3.1 PlacementPlace the pump system on a level, horizontal surface. On inclined planes there is the risk of an uncontrolled movement. Do not exceed the maximum permissible ceiling load.

Each pump system with a frame has four points for affixing, or which may be equipped with additional vibration absorbers or elastic components in case this is required.

The floor and the foundations must be level and clean, and capable of with-standing the static and dynamic forces which will occur.

Install the pump system on level foundations free of vibrations. In the case of vibration sensitive ceilings or steel constructions the pump system should be placed on vibration absorbers and it should be bolted to the floor.

Start-up mobile pump systems only with the castors properly arrested.

The pumps, pipes, valves and monitoring facilities may during operation attain high temperatures (> 70 °C), so that there exists the risk of receiving burns. The same also applies to the exhaust line. Protect the hot parts against being touched.

CAUTION

Fig. 3.1 DRYVAC load-lock pump system RUTA WHU4400/DV650S/A

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3.1.1 Filling Lubricant into the PumpsThe pumps are operated either with the lubricant perfluorinated polyether (PFPE) or with synthetic oil. The pumps in a pump system can be operated with different lubricants. For filling in the lubricant, see the Operating Instructions for the pumps.

Note the safety information given in Chapter 0.4.12.

Only use tools which are clean; for example, the funnel used to fill in the lubricant must not be contaminated with the in each case other lubricant. Never confuse PFPE and oil!

The pumps have been subjected to a test run and contain residual quanti-ties of oil. Filling in the wrong kind of lubricant will destroy the pumps. Use only the oil specified specifically by Leybold.

3.2 Conforming UseWith RUTA pump systems, gases and vapours can be pumped as well as vacuum chambers can be evacuated from atmospheric pressure well into the medium vacuum range. The pump system is suited of pumping water vapour or other vapours within the limits of the respective vapour tolerance specifica-tions. The operating and performance limits described in the current Operating Instructions for the system and individual components must be observed.

The pump system must be installed by trained personnel only. The same applies to operation and maintenance. The electrical connection must only be provided by a trained person. Please observe the national regulations in the country of use like EN 50110-1 for Europe, for example. The information given in the section “Important Safety Information” in the Operating Instructions must be observed.

All operating media (electric power supply, cooling water, compressed air, etc., for example) must be available in sufficient quantity and quality. Accessories, not specified by Leybold must only be used after having coordi-nated the use of such accessories with Leybold.

3.2.1 Non-conforming UseRUTA pump systems are not suitable for pumping of:

■ substances and mixtures (gases, liquids and solids) which are rated as being explosive

■ gas mixtures capable of igniting ■ pyrophorous substances ■ radioactive substances ■ oxygen exceeding atmospheric concentration ■ oxidants ■ toxic gases ■ corrosive media not compatible with the materials of the pump

CAUTION

NOTICE

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■ liquids ■ dusts and solids without suitable screens and filters ■ process gases capable of forming hard or sticky deposits which might cause the pump to seize, for example

RUTA pump systems are, moreover, not suited for: ■ deployment in systems and pump systems in which the pressure may increase over 1.2 bar abs.

■ operation without safely draining exhaust gases and any possibly present condensate away

■ operation in rooms which have been sealed air-tight ■ operation at inadmissibly high gas admission temperatures ■ operation at excessively high ambient temperatures at the installation site ■ operation at inadmissibly high altitude (height above sea level) ■ use in systems where impact-like stresses can affect pump, frequency converter or cable

■ operation for generating overpressures outside the specifications ■ deployment in explosion hazard areas ■ deployment in outdoor areas ■ to climb on the system, add-on components, drive electronics flanges and cables

■ operation with other parameters than those programmed by Leybold, in particular the minimum and maximum speed

■ operation with other types of oil than those approved by Leybold

Also, note limitations from the side of the process, for example in case of applications in the foodstuff industry.

Removing, covering or obstructing warning notices is not allowed.

When planning to operate the system outside the specifications published for conforming utilisation, then you must first discuss such an application with Leybold.

Comply with the maintenance intervals as otherwise damage may be caused or leaks may occur at gaskets, bellows or at the exhaust, for example.

Moreover, note at all safety information provided in the Operating Instructions for the individual pumps.

The expected operational life for the system is at least 8 years.

ModificationLeybold will run a risk assessment for the pump system either for pumping of air or in consideration of the intended applica tion.

If the vacuum system is used for a different purpose or if the process gases being pumped are changed in any way then the original hazard analysis will no longer be valid and there will be a risk of an unexpected hazard occurring. In this case always conduct a new hazard analysis.

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3.3 Ambient ConditionsThe pump system is designed for industrial applications in dry inside spaces with contamination level II to III depending on the pump combination.

The ambient temperature must be between 12 °C and 40 °C. For systems within an enclosure, this temperature range must be maintained within the enclosure.

Generally, elevated temperatures will result in shorter intervals for the oil change and increased wear. In addition, it is possible that elastomeric seals in vacuum pumps could over heat leading to possible leaks and possibly the creation of hazardous decomposition products.

Lower temperatures will hamper running up of the pumps. Low ambient tem-peratures can also result in hazards due to the embrittlement of elastomers such as O rings or the condensation of process by products to form hazard-ous liquids.

The air feed and ejection ducts for the motors and the surfaces of the pumps must remain unobstructed and should be kept free of dust and other depos-its.

The system must not be operated under humid ambient conditions and must never be exposed to drip water, 95% max. relative atmospheric humidity. Maximum installation altitude is 1000 meters above sea level.

There must be enough space to operate and maintain the system inasmuch as each component may be disassembled at its location. Ensure access at all times to a possibly fitted electric controller.

All required kinds of energy should be available to a sufficient extent regard-ing type, quality and quantity.

The sucked off gases and possibly present condensate must be removed in a professional manner. This applies also to the gas ballast and/or purge gas if used.

When using ambient air for gas ballast purposes, the room where the pump is installed must be sufficiently ventilated so as to avoid the creation of a low pressure.

When installing the pump system in smaller rooms or if the pump system has been encased, ensure an adequate exchange of air.

Thermal cyclingWhere equipment is subject to thermal cycling it is important to recognise that over time these thermal cycles can lead to fasteners and fittings coming loose if they are not correctly locked with sealants or mechanical devices. Therefore, check the tightness of these fasteners on a regular basis.

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3.4 Connecting the Intake and Exhaust Lines

3.4.1 Connecting BellowsWe recommend to connect the pumps with bellows and vibration absorbers

Align the bellows. Do not overstress the bellows. Too much stress on the bellows will cause premature failing of the bellows and thus leaks in the system.

■ The bellows may only be fitted and commissioned by trained installation personnel. Proper and professional mounting is an absolute requirement for safe and reliable operation!

■ Before mounting the bellows check these as to possible shipping or stor-age damage in particular regarding damaged surfaces. Also the valleys between the ridges of the bellows - inside and outside - must be free of any substances or materials.

■ The connecting pipes must align as precisely as possible. If possible read-just the lines at their supports.

■ If the bellows are equipped with fixed flanges, then their screw holes must align with the screw holes on the piping. The bellows must not be subject-ed to torsion stress.

■ The amount of expansion must not exceed the specified amount of axial expansion/compression or the stated amount of side displacement. A combination of axial expansion/compression and side displacement is possible. The total percentage of the partial expansions must be less than 100%. For this refer to Fig 3.2.

DANGER

l

max. d

Fig. 3.2 Maximum movement of the bellows

Correct Wrong

Max. movement Max. axial1) to the side d movement DN l in mm2) d in mm mm

63 132 7.5 20

100 132 9.5 28

160 150 3.5 22

250 200 4.5 30

1) Expansion or compression 2) Length of the Leybold bellows

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■ Examples: DN 100: the amount of side displacement is 4 mm. This corre-sponds to 42% of the permitted side displacement of 9.5 mm. In this case a maximum of 58% of the permitted axial displacement is possible: 16 mm.

■ When using movable pump systems connected to fixed piping, position the pump system as precisely as possible and then reliably secure it in place.

■ When mounting the bellows make sure that no tensions from the side of the pipe can have a torsional effect on the bellows.

■ When lifting equipment is used to mount the bellows, then such equipment must not be attached to sensitive sections like the actual bellows section itself.

■ Run the pressure and leak detection on the system only after the bellows have been properly mounted. The bellows shall be installed so that an unrestricted visual inspection regarding integrity is possible in regular inter-vals.

■ In the case of deficiencies like indentations, cracks, corrosion, discoloura-tion or irregular deformations, replace the bellows.

■ Insulation must only be attached to the bellows after prior consultation.

■ Avoid pressure bursts in the system.

3.4.2 Intake Line

Do not allow the ingestion of any objects (screws, welding beads, nuts, washers, pieces of wire, etc.) through the intake port of the pump. Objects falling into the pump can cause severe damage at the pump including leaks to atmosphere.

Remove the cap or the protection foil from the intake port. Connect the intake line using a flexible component so that it is not subjected to any mechanical stress.

If possible, use the inlet screen, which has been fitted as standard, and clean it regularly. In the case of pump systems equipped with a RUVAC WH/WHU 4000 and 7000 and applications involving shock venting, the intake screen can suffer from overloading so that the metal mesh will be torn off over time and drop into the pump. Under such operating conditions, we recommend to leave the inlet screen in place only during first-time commissioning and there-after to remove it.

The diameter of the intake line should at least match that of the intake port. An intake line which is too narrow with throttle the pump.

The intake line must be clean. Deposits in the intake line may degas and impair the vacuum or when coming loose may damage the pump. The con-necting flanges must be clean and undamaged.

NOTICE

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If the pumped medium contains dust, you must install in addition to the pos-sibly supplied intake screen a dust filter; however, any installations in the intake line will reduce the pumping speed of the pump system.

When pumping vapours we recommend that you install a condensate sep-arator on the intake side and also on the exhaust side. Please contact us for more detailed information on this.

Formation of deposits in pipeworkIn some applications it is possible for deposits to form in the fore line of the vacuum system, such an example would be the formation of silicon layers after a semiconductor deposition step. These solid deposits form in the vapour phase and form layers that present a number of hazards.

■ As the layers increase it is possible for them to break off and move towards the vacuum pump. In some cases the vacuum pump can be damaged by such layers and in rare cases it is possible for the layers to cause significant mechanical damage and rupture the pump casing.

■ The layers are deposited under vacuum and therefore often do not have protective oxide layers that prevent them from burning in contact with oxy-gen. Care must be taken when these materials are finally exposed to atmosphere.

■ The build up of significant layers can block fore lines leading to loss of vac-uum performance.

We recommend that where process deposits could break off from the walls of the fore line, that a dead leg should be installed in the fore line to trap the largest particles. In addition a metal mesh screen should be installed in a ver-tical position next to the dead leg or a cyclone separator in order to prevent particle carry over into the pump.

3.4.3 Exhaust LineRemove the protection cap from the exhaust flange.

Connect the exhaust line to the exhaust piping of the system with bellows or a flexible hose so that it is not subjected to any mechanical tension.

The cross-section of the exhaust line must at least match the inside diameter of the connections.

Smaller cross sections may cause an undesirable overpressure within the system. Do not start up the system with a constricted or blocked exhaust. Ensure that any valves or blocking devices in the exhaust line are open. Clogged exhaust lines will reduce the available pumping speed, increase temperature and cause overloading of the pump motors or a dangerous overpressure within the system. There is the risk of bursting.

The cross-section of the exhaust manifold line must be sufficiently wide.

CAUTION

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If condensate forms in the exhaust line, then this must be removed profes-sionally. Condensate must not be allowed to flow from the exhaust line back into the pump system.

The pressure in the exhaust line must be at pressures between 15 mbar below and 150 mbar above atmospheric pressure. If required, suitable pro-tection means need to be provided.

Avoid connecting the dry-compressing pump system together with oil-sealed pumps to one central exhaust system. Using a common exhaust line could result in oil or condensate back streaming into the pump system or in dust adhering in the exhaust line.

In the case of wet processes we recommend the installation of liquid separa-tors upstream and downstream so as to prevent the entry of liquids into the pump.

If the exhaust line is connected to an abatement system it must offer an ade-quate throughput. If the throughput for the abatement system is inadequate, then the DRYVAC pumps will shut down due to an excessively high overpres-sure.

Recommendations for the exhaust pipework ■ Material: Stainless steel 304 (1.4301) or better

■ Minimum wall thickness: 2.0 mm

■ Leak rate: < 1·10-4 mbar·l·s-1

■ Flange type: ISO-K with trapped O-ring (DN63 or DN 100) ISO-KF with outer centering rings (DN 50 only)

■ Flange clamping method: Screwed type

■ Design temperature: 150 °C

■ Sealing: FPM (Viton®) [Kalrez / Chemrez optional]

■ Heating of the pipework has to be possible should the process gases con-dense causing a hazardous condition.

■ We recommend to design the discharge line in consideration of a possible overpressure of 5 bar. In the event of a malfunction, such a pressure can occur briefly.

Exhaust line heatingExhaust line heating should be used where there is a possibility for process gases to condense or solidify in the exhaust line. Heated exhaust lines must be protected against excessively high temperatures especially to protect the elastomer seals.

Hot surfaces, risk of suffering burns. If there is the risk of touching hot surfaces inadvertently, install correspondi-ng protection.

CAUTION

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3.4.4 Traps and Condensers

Hot trapsHot traps are used to trap / react process gases before they reach the vacu-um pump. Ensure that adjoining components such as elastomeric O rings etc are not thermally damaged.

Cold trapsWhere a nitrogen cold trap is used to condense materials that are usually gases or vapours at atmospheric pressure, consider the consequence of unexpected warming up. Liquid gases and vapours on warming will create large volumes of gas / vapours which if vented into a closed system could lead to a dangerous over pressure. Prevent the occurrence of dangerous overpressures through suitable safety measures.

CondensersCondensers remove vapours from a process stream The condenser must not block.

Normally a condenser will be used with a suitable receiver vessel located below into which liquid can drain. If the receiver is not drained there is the possibility that the liquid will over flow into the vacuum pump.

Fig. 3.3 RUTA WH2500/DV650C/A

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3.5 Connecting Cooling WaterConnect cooling water to the central connections. Do not confuse supply and discharge. Connect several pump systems in parallel and not in series.

Observe Safety Information 0.1.2 and 0.3.2.

We recommend the installation of a monitoring facility in the cooling water cir-cuit.

We recommend the use of cooling water of boiler feed water grade (corre-sponding to a hardness of 2 °d). When using cooling water having a hard-ness in excess of 2 °d, you will have to expect at cooling water temperatures over 70 °C a calcification of the heat exchanger.

We also recommend the installation of a dirt sieve in the water feed line and to clean this sieve regularly.

Depending on local regulations, the necessary cooling water must not be taken from the drinking water supply.

Before working on any cooling water lines, it needs to be ensured that these have been depressurised. For this, relief valves need to be provided both in the cooling water feed and also in the cooling water discharge lines.

In order to avoid scalding, let the system to cool down first before starting with any work on the system.

Some backing pumps have been equipped with thermostatic valves for con-trolling the cooling water quantity. To set up, see the Operating Instructions for the backing pumps.

Some DRYVAC pumps are equipped with a pressure relief valve. It prevents the water from boiling in the cooling circuit when the cooling water supply and drain are closed. The valve opens at 8 bar(g) and releases small amounts of water or vapour into the base pan.

If work on the water cooling system becomes necessary and in the case of a longer standstill or transportation, completely drain out all cooling water and completely dry the lines (with nitrogen, for example).

3.5.1 Water QualityIn order to ensure long trouble-free operation the cooling water must not contain any oils, greases and suspended solids. Moreover, we recommend compliance with the following limit values:

Appearance Clear, free of oils and greases

Suspended matter < 250 mg/l

Particle size < 150 µm

Electrical conductivity < 700 µS/cm

pH value 7.0 to 9.0

Total hardness (total alkaline earths) < 8 °dH

Aggressive carbon dioxide None, not detectable

Chloride < 100 mg/l

WARNING

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Sulfate < 150 mg/l

Nitrate ≤ 50 mg/l

Iron < 0.2 mg/l

Manganese < 0.1 mg/l

Ammonium < 1.0 mg/l

Free chlorine < 0.2 mg/l

8 °dH (degrees German hardness) = 1.4mmol/l = 10 °e (degrees English hardness) = 14 °f (degrees French hardness)

If there is the danger of frost, you may use a water glycol mixture of up to 30 %.

DS water (softened or fully desalinated water) can be used for cooling the system, if the pH value corresponds to the range indicated above.

3.6 Connecting Compressed Air or Purge GasConnect compressed air or purge gas if required, see Operating Instructions for the individual component.

When pumping corrosive, reactive gases the nitrogen must be as dry as pos-sible.

The pump system must only be vented such that atmospheric pressure is never exceeded.

Ensure that the gas flow is not obstructed.

Sufficient ventilation of the room in which the equipment is installed must be ensured. There exists the risk of suffocation due to inadequate oxygen levels.

The purge gas supply should not be shut off while the pump system is operat ing, above all especially not during shutdown and venting operations.

DANGER

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3.7 Electrical Connection

Note the safety information given in Section 0.2.

Mains Power ConnectionRefer to the enclosed electrical schematics.

As standard, the pump systems are supplied with a three-phase motor, but without any accessories for the electrical connection. For proper connection in line with the regulations it is required to install a suitable motor protection switch. The setting of this motor protection switch must match the data pro-vided on the name plate of the motor in each case. For details on this please refer to the corresponding Operating Instructions.

The mains connection must be equipped with a suitable overcurrent circuit breaker. After having provided the electrical connection, check to ensure that the overcurrent circuit breaker is operating properly.

After the connection work, run an electrical safety test.

Ground ConnectionTake the following precautions when grounding the frequency converters.

■ Always connect the frequency converters to ground in accordance with the international and local regulations for equipment exhibiting an increased leakage current.

■ Keep the ground wires as short as possible. A single frequency convert-er produces leakage currents (typically less than 10 mA). In the case of unbalanced mains power supplies, the leakage current may exceed 10 mA. In this case the protective ground conductor must exhibit a cross-section of at least 10 mm2. Or connect a further protective ground conductor having at least the same cross-section as the connection cable. A connection point is provided.

■ When using more than one frequency converter, do not loop the ground wire.

Use of Frequency Converters – Use PasswordsSome vacuum pumps are equipped with frequency converters. Never pro-gram the frequency converter to lower or higher speeds than specified.

Upon delivery the minimum and maximum speed in the parameter list have been protected by a password.

Direction of Rotation TestConnect in the three mains phases so that a field rotating clockwise is ensured.

When all pumps are operated off a frequency converter, it will not be neces-sary to check the direction of rotation.

DANGER

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In the case of the WS pumps you can not determine the direction of rotation by referring to the rotational direction of the fan.

Pump systems where the pumps are operated without a frequency converter, must be switched on briefly and the pressure in the system checked. The pressure must drop. Switch the pump system off again.

Prolonged operation with a wrong direction of rotation will result in damage within the vacuum pumps.

Pressure Switch Connection (Option)In the case of pump systems equipped with a pressure switch, connect it such that operation of the Roots pumps is prevented at pressures which are too high.

Purge Gas Pressure Switch Connection (Option)In the case of pump systems equipped with a purge gas pressure switch, connect it. Define the response with respect to a failure of the purge gas within the scope of a risk analysis.

NOTICE

Fig. 3.4 Example of a RUTA-DRYVAC pump system

RUVAC WHU 4400 with frame and junction boxDRYVAC DV 650 C-i

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3.8 Leak Detection after InstallationDepending on the process gases which are to be pumped, the pump system will have to be subjected to a leak detection after having installed it. For this please consult us.

Atmospheric air leakageVacuum systems handling hazardous process gases have to be carefully evaluated in order to determine the consequence of inward air leakage. We recommend that a risk analysis is conducted in order to determine the level of risk; this should consider normal operation, failure modes and mainte-nance procedures. Typical issues are:

■ Reaction with pyrophoric gases

■ Moving flammable gases and vapours into the flammable region

■ Corrosion due to the ingress of atmospheric moisture

■ Undesirable reactions with process gases

No vacuum system is 100% leak tight, there is always some level of air leak-age. Where a lack of leak tightness can create a safety issue, calculations should be undertaken to establish what level of leak tightness is necessary to create a safe condition. Conduct regular checks to confirm that the system remains leak tight.

Special consideration should be given to maintenance activities that can lead to accidental air leakage and possible hazards.

Where the leak tightness of a system is safety critical but it is not possible to provide the required level of integrity, it is recommended to use inert gas dilu-tion of the process gases in order to bring them below the safe limit.

Leakage of water into the vacuum systemWhere process gases and vapours are being pumped which can create a hazard in the event of contact with water, consider the leak tightness of the cooling water system.

Operation

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4 Operation

Observe Safety Information 0.6.

4.1 Media CompatibilitySee Section “3.2 Conforming Utilization”.

4.2 Start-up

Checks before every Start-up ■ Check the oil level of all pumps: Setpoint between the min. and max. marks.

■ Visually check the oil quality. The oil should be clear.

■ Check if the pump system is leak tight.

You must never switch on a pump system where the pumps are in the overheated state. Upon starting up, the gas in the pumps gets even hotter due to compression. This may mechanically damage the pumps, and the oil or the pumped medium may ignite.

Overheated pumps may be identified through the following: ■ the overtemperature switch has responded ■ dark oil ■ discoloured paint on the pump ■ the motor protection switch has responded

Before switching on again, you must in any case remove the cause for over-heating and let the pump cool down first.

Open any valves which are blocking the exhaust line. Never operate the pump system with a shut-off exhaust line.

Switch on cooling water and, if required, nitrogen feed.

Depending on the type of pump the Roots pump must only be switched on after the backing pump has evacuated the vacuum chamber down to the cut-in pressure.

The maximum cut-in pressure is stated in the individual Operating Instructions.

The pressure switch which possibly has also been supplied, has been set by the manufacturer to the correct pressure. Ensure that this pressure switch has been properly connected. Before starting up, check the operation of the pressure switch.

NOTICE

NOTICE

NOTICE

Operation

4117200469_002_C0 - 09/2016 - © Leybold

4.3 Operation

The pumps, pipes, valves and monitoring facilities may during operation attain high temperatures (> 80 °C), so that there exists the risk of receiving burns.

With the purge gas valve (if installed) open let the pump system run warm for at least half an hour until opening it to the process.

Operate the pump system only under the conditions it has been designed for.

Pumping of Non-condensable Gases In the case of excess quantities of permanent gases the pump systems may be operated without gas ballast, provided the saturation vapour pressure at the pump‘s operating temperature is not exceeded during the compression cycle.

If the composition of the gases is not known and the possibility of condensa-tion in the pump system can not be excluded, we recommend that you oper-ate the backing pump of the pump system with its gas ballast valve open.

Pumping of Condensable Gases and VapoursWith the gas ballast valve open and at operating temperature, the pump sys-tems are capable of pumping pure water vapour up to the levels given in the technical data (see Operating Instructions for the backing pump).

Here the pressure ahead of the backing pump must be observed. The per-missible pressure ahead of the Roots pump is lower.

If the vapour pressure rises above the permissible value, the vapour will con-dense in the backing pump or already on the discharge side of the Roots pump.

The (water) vapour tolerance of the pump system may be increased by:

■ increasing the operating temperature and

■ retrofitting a gas ballast facility at the intake of the pump system.

Condensing vapours can damage the pumps.

In the case of periodic processes, you should not shut down the pump sys-tem during the breaks between the individual work phases. When the pump system is running at ultimate pressure, energy consumption will be fairly low. You should leave open the gas ballast valve and seal off the intake, preferably with a valve.

CAUTION

NOTICE

Operation

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Ultimate Pressure of the Pump System If the specified ultimate pressure levels are not attained, you should measure the ultimate pressure directly at the intake port of the pump system. For this, separate the pump system from the remaining part of the system. Use suit-able, calibrated measurement instrumentation, a CTR gauge, for example.

After commissioning, longer breaks or after having exchanged the oil, the pump system will only be able to attain the specified ultimate pressure after some time. The pump system must be at its operating temperature and the pump’s oil must have been allowed to degas.

Missing or too few nitrogen may damage the pump system.

Cross contaminationVacuum systems are often switched to applications where different process gases are used, this can be due to equipment being re-used on a different application or even due to different process steps on a given application.

In all these cases it is necessary to consider the possibility of cross contami-nation between process gases / vapours / materials from one process with the process gases / vapours / materials from another, in some cases hazard-ous reactions can occur between two materials that normally present no haz-ard when pumped individually.

Where hazardous reactions could occur it is normal practice to purge with an inert gas between process steps for ~15 minutes, this often removes the first material before the second material is pumped; however, it should be noted that in some vacuum systems there is the potential for trapped pockets of process gas to exist which are not effectively removed by the purge step. This must be considered at the design of the entire vacuum system.

NOTICE

Operation

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4.3.1 Draining out Condensate (at Installed Silencer)If condensable vapours are being pumped, one must expect condensate to collect on the exhaust side.

The condensate separator integrated within the exhaust silencer of the DRYVAC is capable of collecting condensate up to a quantity of 2.0 litres.

Empty the condensate separator at regular intervals so as to exclude the possibility of collected condensate flowing back into the pump.

When pumping hazardous media, it needs to be insured that when drain-ing the liquid, neither the personnel nor the environment is endangered.

Collected aggressive condensate may attack the materials of the silencer thereby damaging it.

Depending on the process, the exhaust silencer must be checked regularly as to internal contamination (deposits, for example). In the case of a con-taminated silencer compliance with the technical data can no longer be guaranteed.

WARNING

NOTICE

Fig. 4.1 Example of a DRYVAC RUTA pump system

RUVAC WAU 2001DRYVAC DV 650 with non-return valve, silen-cer, base plate and castors

Operation

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4.4 Shut-off and VentingAt the end of operation, the pump system can be switched off. For this pro-ceed as follows:

■ Separate the pump system from the chamber but leave the pump running.

■ When pumping condensable media (water, for example) continue to ope-rate the pump at a gas throughput, which is as high as possible for at least 30 minutes to dry it.

■ With the nitrogen purge running operate the pumps for 15 further minutes so as to ensure that forevacuum line, Roots pump and dry compressing pump are free of process gases.

■ Switch the pump system off. The purge gas valves are switched off togeth-er with the system, i.e. closed.

The pump system must only be vented such that atmospheric pressure is never exceeded.

If the system has previously pumped hazardous gases take the appropriate safety measures before opening any ports. Observe Safety information 0.4.

Pay special attention when the pump fails while the process is in progress and if the pump was switched off without having purged with nitrogen first.

After switching off, maintain the cooling water flow for further 10 minutes, then shut off the cooling water feed.

Open the vacuum system only in the completely vented state and only as short as possible. Otherwise humidity will collect on the inner surfaces. This will then, during subsequent evacuation, result in significantly longer pump-down times until attaining the desired ultimate pressure.

If during longer downtimes the system shall remain conditioned for a rapid pumpdown, we recommend to vent in the system with dry nitrogen to atmospheric pressure and maintain it in this condition without opening it.

The pumps may remain filled with cooling water for 4 weeks at the most. In the case of longer standstill times or danger of freezing drain out the cooling water and dry the cooling water lines as described in Section 4.5.

DANGER

Operation

4517200469_002_C0 - 09/2016 - © Leybold

4.5 Removing from ServiceShut off and vent the pump system as described above.

Electrically switch the pump system off. Clean the pump system of any resi-dues of substances which may lead to corrosion. (e.g. by extended purge).

Flood it with nitrogen, add desiccant and seal it.

Disconnect the cooling water lines from the pump system and drain out the cooling water.

Blow out the cooling water lines with compressed air or nitrogen (4 bar max.) blown into the cooling water inlet.

When the pump system has been used in the process the used oil is con-taminated. In case the pump suffers a severe mechanical failure, the possi-bility of hazardous substances being released owing to their thermal decomposition cannot be excluded. You must determine the nature of the hazard and take the appropriate safety precautions. Observe Safety infor-mation 0.4. Label the PFPE and oil containers according to the type of contamination.

Draining out Lubricant or Leaving it in the PumpThe way in which the lubricant is handled during decommissioning will depend on the type of pump. For this, refer to the Operating Instructions for the individual pumps.

RUVAC WH/WHU 4400 and 7000

RUVAC WH 700

RUVAC WA/WAU and WS/WSU

RUVAC RA

We recommend draining out of the lubricant, as otherwise during shipping it might enter the piston rings in the pump chamber.

The oil contained in the oiler of the RUVAC WA/WAU and RA will not have to be drained out.

RUVAC WH/WHU 2500 The lubricant can remain in the pump.

DRYVAC DV

ECODRY

The lubricant should remain in the pump.

LEYVAC LV

SCREWLINE SP

The lubricant should be drained out.

Drain cooling water

DANGER

Maintenance

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5 Maintenance

5.1 Safety InformationBefore starting any work on the pump system, switch the pump system off reliably and vent in accordance with Section 4.4.

Only Leybold personnel or personnel instructed by Leybold may perform any repair work on the pump system.

Observe all safety information in Section 0!

Pumps that stop unexpectedly may contain hazardous process gas, in this case special procedures might be necessary to protect personnel when the pump is removed.

Consider the effect of cleaning solvents on the vacuum system, especially if they are corrosive or flammable.

The risk analysis run by Leybold also includes the mainte nance aspect.

If the vacuum system is used for a different purpose or if the process gases being pumped are changed in any way then the original hazard analysis will no longer be valid and there will be a risk of an unexpected hazard occurring. In this case always conduct a new hazard analysis.

Please note the safety information given in Section 0.

All points which are opened on the pump or the vacuum system need to be reliably sealed immediately after having run the maintenance work.

Inlet valve positionThe inlet valve located between the vacuum system and the process cham-ber is often used to isolate the vacuum system while maintenance is carried out. It is essential that this valve is in the correct position while the mainte-nance is being conducted.

DANGER

Maintenance

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5.2 Maintenance IntervalsSee the table for the recommended maintenance intervals for the pumps. We recommend a service contract with Leybold.

Normal operation is assumed for the recommended maintenance intervals. Frequent malfunctions causing the pumps to shut down often will result in shorter maintenance intervals.

The intervals stated in the maintenance schedule serve only as a guide when operating the pump normally. Bad ambient conditions or pumping of aggres-sive or dusty media may necessitate more frequent maintenance. The main-tenance schedules for the individual pumps must be observed.

Leybold recommends to inspect the pump system and all components after approximately 6 months under the process conditions. The inspection of the components shall let corrosion attacks become apparent at an early stage and indicate possible deposits of dust. Depending on the findings, changed maintenance and replacement intervals can become necessary for specific components.

Fig. 5.1 RUTA WHU4400/DV650S-i/A/E

Maintenance

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5.2 Maintenance Intervals

Service work Interval

Check the oil level 1 year and before switching on

Check the oil quality Depending on the operating conditions and change oil see also the Operating Instructions for the pumps

Change PFPE normally not required, possibly required due to contamination from the process

Clean the filter insert in the Depending on the contamination grade of cooling water pressure reducer the cooling water

Replace the filter cartridge in the purge gas pressure reducer 1 year

Check water hoses 1 year

Check purge gas hoses 1 year

Clean intake screen Depending on the operating conditions; In the case of deposits install a dust filter in the intake line.

Complete overhaul in the Depending on the service centre operating conditions

Drain condensate in the Depending on the silencer operating conditions

Leak detection on the entire after all maintenance and pump system assembly work and upon request

5.3 Leybold ServiceWhenever you send us in equipment, indicate whether the equipment is con-taminated or is free of substances which could pose a health hazard. If it is con taminated, specify exactly which substances are in volved. You must use the form we have prepared for this purpose.

A copy of this form is reproduced at the end of these Operating Instructions: “Declaration of Contamination of Compressors, Vacuum Pumps and Components”. Moreover, you may download a suitable form from the Internet: www.leybold.com Documents Download Documents.

Attach the form to the equipment or enclose it with the equipment.

This statement detailing the type of contamination is required to satisfy legal requirements and for the protection of our employees.

We must return to the sender any equipment which is not accompanied by a contamination statement.

5.4 Replacing Individual Pumps in the Pump SystemBasically the RUVAC or the backing pump can be changed individually.

We will provide disassembly and assembly information for the individual pumps upon request.

Disposal

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6 Waste DisposalThe equipment may have been contaminated by the process or by environ-mental influences. In this case the equipment must be professionally decon-taminated. We offer this service at fixed prices. Further details are available on request.

Contaminated parts can be detrimental to health and environment. Before beginning with any work, first find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precau tions when handling contaminated parts.

Separate clean pump components according to their materials, and dispose of these accordingly. We offer this service. Further details are available on request.

When sending us a pump, observe the regulations given in Section “Leybold Service”.

Disposal of Waste OilOwners of waste oil are entirely self-responsible for proper disposal of this waste.

Waste oil from vacuum pumps must not be mixed with other substances or materials.

Waste oil from vacuum pumps (Leybold oils which are based on mineral oils) which are subject to normal wear and which are contaminated due to the influence of oxygen in the air, high temperatures or mechanical wear must be disposed of through the locally available waste oil disposal system.

Waste oil from vacuum pumps which is contaminated with other substances must be marked and stored in such a way that the type of contamination is apparent. This waste must be disposed of as special waste.

European, national and regional regulations concerning waste disposal need to be observed. Waste must only be transported and disposed of by an approved waste disposal vendor.

PFPE from vacuum pumps may be regenerated, if required, and provided the quantities are large enough. For this, please contact us for assistance.

WARNING

Troubleshooting

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7 TroubleshootingSymptom Possible cause Remedy

Pump of the pump system will not start.

Motor not connected correctly; wrong mains vol-tage

Faulty motor or PTC.

Faulty pressure switch (Roots pump).

Oil is too thick, pump is too cold.

Clogged exhaust filter or exhaust line.

Pump has seized; faulty vanes, bearings or too-thed wheels.

Connect the motor correctly.

Have the motor repaired or exchanged.

Exchange the pressure switch.

Change the oil or warm up the oil and the pump.

Change the filter and have the overpressure valves repaired. Clean the exhaust line.

Service.

Pump system will not attain its pumping speed and its ultimate pressure.

Clogged intake screen in the intake.

Motor not connected correctly.

Faulty motor.

Leak in the pump or the pump system.

Play of the impellers is too big (Roots pump).

Faulty bearing.

Gas ballast valve is open.

Unsuitable method of measurement or vacuum gauge.

Clean the intake screen.

Connect the motor correctly.

Have the motor repaired or exchanged.

Search the leak and seal it.

Service.

Service.

Close the gas ballast valve, if possible.

Use correct method of measurement and vacuum gauge.

Pumpdown time of the pump system is too long.

Clogged intake screen in the intake.

Vacuum lines too narrow or too long.

Too much evaporating liquid in the system.

Clean the intake screen. Precaution: install a dust filter in the intake line.

Use sufficiently wide and short intake lines.

Check and modify the plant and the process as required.

Pump(s) is/are getting hotter than previously observed.

Cooling water not connected, cooling water pres-sure is too low or water feed temperature is to high.

Cooling air supply to the motor is obstructed.

Ambient temperature is too high.

Process gas is too hot.

Unsuited or contaminated oil in the backing pump.

Clogged exhaust filter or exhaust line.

Calcified cooler.

Obstructed oil or cooling water circuit.

Faulty pump.

Oil level too high or too low.

Clean the system, ensure an adequate supply of cooling water.

Install the pump properly, clean the cooling fins.

Install the pump properly.

Modify the process.

Change the oil.

Change the exhaust filter, have the overpressure val-ves repaired, clean the exhaust line.

Decalcify the cooler.

Have the pump repaired.

Have the pump repaired.

Drain or top up oil as required.

Roots pump is getting hotter than previously observed.

Pressure differential is too high.

Clearance between casing and rotor reduced by - contamination, - flexing the pump.

Check the pressure levels in the system, set up the pressure switch.

Clean the pump chamber. Install and connect the pump so that it is not mechanically strained.

Troubleshooting

5117200469_002_C0 - 09/2016 - © Leybold

Symptom Possible cause Remedy

Power consumption of the motor is too high.

Like symptom “Pump gets too hot”.

Wrong mains voltage for the motor.

Faulty motor.

Oil too thick, pump too cold.

Like symptom “Pump gets too hot”.

Connect the motor to the correct mains supply.

Have the motor repaired or exchange it.

Change the oil or warm up the oil and the pump.

After shutting down the pump system while evacuated, the pressu-re in the connected system will rise too quickly.

Leak in your system.

Dirty or faulty anti-suckback valve of the backing pump.

Too much evaporating liquid in the system.

Check your system.

Clean the valve or repair it.

Check and if necessary modify your system and the process.

Pump is too loud. Oil level much too low, oil level is no longer visi-ble.

Faulty pump.

Top up oil.

Service, shut the pump down immediately.

Roots pump is too loud.

Clearance between casing and rotor reduced by: - contamination, - flexing the pump.

Damaged bearing or gear.

Impellers hit the casing.

Rotor is unbalanced.

Clean the pump chamber. Install and connect the pump so that it is not mechanically strained.

Service, shut the pump down immediately.

Service, shut the pump down immediately.

Service, shut the pump down immediately.

Oil in the intake line or the vacuum chamber.

Oil is coming from your system.

Dirty or faulty anti-suckback valve of the backing pump.

Motor is turning in the wrong direction.

Faulty switching action when operating several pump systems in parallel.

Check your system.

Clean the valve or have it repaired.

Interchange two mains phases on the motor.

Switch pump systems running in parallel on and off together or separate these by valves.

Oil in the pump cham-ber of the Roots pump.

Oil level too high.

Pump has an outward leak.

Pump has not been placed horizontally.

Oil is coming from the application.

Pump has an inward leak (failed piston ring seals, for example)

Drain out oil until the oil level is correct.

Check to see if the oil fill plugs are properly seated and exchange the gaskets as required.

Install the pump correctly.

Check the application.

Service.

Oil is turbid or dark. Oil has worn out.

Condensation or particles or chemical reactions in the oil.

Condensation due to a dirty inlet filter of the gas ballast.

Pump gets too hot.

Change the oil.

Degas the oil or change the oil and clean the pump. Precaution: open the gas ballast valve, gas ballast facility for the fine vacuum stage, install separators and/or suitable filters.

Clean the inlet filter of the gas ballast, degas or change the oil.

See symptom “Pump gets too warm” and after having remedied the fault change the oil.

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Notes

5317200469_002_C0 - 09/2016 - © Leybold

17200001_002_C0 © Leybold

Declaration of Contamination of Compressors, Vacuum Pumps and Components The repair and / or servicing of compressors, va cuum pumps and components will be carried out only if a correctly completed declaration hasbeen submitted. Non-completion will result in delay. The manufacturer can refuse to accept any equipment without a declaration. A separate declaration has to be completed for each single component.This declaration may be completed and signed only by authorized and qualified staff.

Customer/Dep./Institute : Reason for return: applicable please markAddress : Repair: chargeable warranty Exchange: chargeable warranty Exchange already arranged / received Person to contact: Return only: rent loan for credit Phone : Fax: Calibration: DKD Factory-calibr. End user: Quality test certificate DIN 55350-18-4.2.1

A. Description of the Leybold product: Failure description:

Material description : Catalog number: Additional parts: Serial number: Application-Tool: Type of oil (ForeVacuum-Pumps) : Application- Process:

B. Condition of the equipment No1) Yes No Contamination : No1) Yes

11.. Has the equipment been used toxic 2. Drained (Product/service fluid) corrosive 3. All openings sealed airtight flammable 4. Purged explosive 2)

If yes, which cleaning agent radioactive 2) and which method of cleaning microbiological 2)

1) If answered with “No”, go to D. other harmful substances

C. Description of processed substances (Please fill in absolutely)1. What substances have come into contact with the equipment ?

Trade name and / or chemical term of service fluids and substances processed, properties of the substances According to safety data sheet (e.g. toxic, inflammable, corrosive, radioactive)

X Tradename: Chemical name:

a)

b) c) d)

No Yes2. Are these substances harmful ? 3. Dangerous decomposition products when heated ?

If yes, which ? 2) Components contaminated by microbiological, explosive or radioactive products/substances will not be accepted without written

evidence of decontamination.

D. Legally binding declarationI / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level.

Name of authorized person (block letters) :

Date signature of authorized person

firm stamp

HeadquarterLeybold GmbHBonner Strasse 498D-50968 CologneT: +49-(0)221-347-0F: +49-(0)221-347-1250info@leybold.com

GermanyLeybold GmbHSales, Service, Support Center (3SC)Bonner Strasse 498D-50968 CologneT: +49-(0)221-347 1234F: +49-(0)221-347 31234sales@leybold.comwww.leybold.com

Leybold GmbHSales Area NorthBranch Office BerlinIndustriestrasse 10bD-12099 BerlinT: +49-(0)30-435 609 0F: +49-(0)30-435 609 10sales.bn@leybold.com

Leybold GmbHSales Office SouthBranch Office MunichKarl-Hammerschmidt-Strasse 34D-85609 Aschheim-DornachT: +49-(0)89-357 33 9-10F: +49-(0)89-357 33 9-33sales.mn@leybold.comservice.mn@leybold.com

Leybold Dresden GmbHService Competence CenterZur Wetterwarte 50, Haus 304D-01109 DresdenService:T: +49-(0)351-88 55 00F: +49-(0)351-88 55 041info.dr@leybold.com

Europe

Belgium

Leybold Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales:T: +32-2-711 00 83F: +32-2-720 83 38sales.zv@leybold.comService:T: +32-2-711 00 82F: +32-2-720 83 38service.zv@leybold.com

France

Leybold France S.A.S.Parc du Technopolis, Bâtiment Beta3, Avenue du CanadaF-91940 Les Ulis cedexSales and Service:T: +33-1-69 82 48 00F: +33-1-69 07 57 38info.ctb@leybold.comsales.ctb@leybold.com

Leybold France S.A.S.Valence Factory640, Rue A. BergèsB.P. 107F-26501 Bourg-lès-Valence CedexT: +33-4-75 82 33 00F: +33-4-75 82 92 69marketing.vc@leybold.com

Great Britain

Leybold UK LTD.Unit 9Silverglade Business ParkLeatherhead RoadChessingtonSurrey (London)KT9 2QLSales:T: +44-13-7273 7300F: +44-13-7273 7301sales.ln@leybold.comService:T: +44-13-7273 7320F: +44-13-7273 7303service.ln@leybold.com

Italy

Leybold Italia S.r.l.Via Trasimeno 8I-20128 MailandSales:T: +39-02-27 22 31F: +39-02-27 20 96 41sales.mi@leybold.comService:T: +39-02-27 22 31F: +39-02-27 22 32 17service.mi@leybold.com

Netherlands

Leybold Nederland B.V.Floridadreef 102NL-3565 AM UtrechtSales and Service:T: +31-(30) 242 63 30F: +31-(30) 242 63 31sales.ut@leybold.comservice.ut@leybold.com

Switzerland

Leybold Schweiz AG, PfäffikonChurerstrasse 120CH-8808 PfäffikonWarehouse and shipping address:Riedthofstrasse 214CH-8105 RegensdorfSales:T: +41-44-308 40 50F: +41-44-302 43 73sales.zh@leybold.comService:T: +41-44-308 40 62F: +41-44-308 40 60service.zh@leybold.com

Spain

Leybold Spain, S.A.C/. Huelva, 7E-08940 Cornellà de Llobregat(Barcelona)Sales:T: +34-93-666 43 11F: +34-93-666 43 70sales.ba@leybold.comService:T: +34-93-666 46 11F: +34-93-685 43 70service.ba@leybold.com

AmericaUSA

Leybold USA Inc.5700 Mellon RoadUSA-Export, PA 15632T: +1-724-327-5700F: +1-724-325-3577info.ex@leybold.comSales:T: +1-724-327-5700F: +1-724-333-1217Service:T: +1-724-327-5700F: +1-724-325-3577

Brazil

Leybold do BrasilRod. Vice-Prefeito Hermenegildo Tonolli,nº. 4413 - 6BDistrito IndustrialJundiaí - SPCEP 13.213-086Sales and Service:T: +55 11 3395 3180F: +55 11 99467 5934sales.ju@leybold.comservice.ju@leybold.com

AsiaP. R. China

Leybold (Tianjin)International Trade Co. Ltd.Beichen EconomicDevelopment Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400ChinaSales and Service:T: +86-22-2697 0808F: +86-22-2697 4061F: +86-22-2697 2017sales.tj@leybold.comservice.tj@leybold.com

India

Leybold India Pvt Ltd.No. 82(P), 4th PhaseK.I.A.D.B. PlotBommasandra Industrial AreaBangalore - 560 099IndienSales and Service:T: +91-80-2783 9925F: +91-80-2783 9926sales.bgl@leybold.comservice.bgl@leybold.com

Japan

Leybold Japan Co., Ltd.HeadquartersShin-Yokohama A.K.Bldg., 4th floor3-23-3, Shin-YokohamaKohoku-ku, Yokohama-shiKanawaga 222-0033JapanSales:T: +81-45-471-3330F: +81-45-471-3323sales.yh@leybold.com

Leybold Japan Co., Ltd.Tsukuba Technical Service Center1959, Kami-yokobaTsukuba-shi, Ibaraki-shi 305-0854JapanService:T: +81-29 839 5480F: +81-29 839 5485service.iik@leybold.com

Malaysia

Leybold MalaysiaLeybold Singapore Pte Ltd.No. 1 Jalan Hi-Tech 2/6Kulim Hi-Tech ParkKulim, Kedah DarulAman 09000MalaysiaSales and Service:T: +604 4020 222F: +604 4020 221sales.ku@leybold.comservice.ku@leybold.com

South Korea

Leybold Korea Ltd.3F. Jellzone 2 TowerJeongja-dong 159-4Bundang-gu Sungnam-siGyeonggi-doBundang 463-384, KoreaSales:T: +82-31 785 1367F: +82-31 785 1359sales.bd@leybold.comService:623-7, Upsung-DongCheonan-SiChungcheongnam-DoKorea 330-290T: +82-41 589 3035F: +82-41 588 0166service.cn@leybold.com

Singapore

Leybold Singapore Pte Ltd.8 Commonwealth Lane #01-01Singapore 149555SingaporeSales and Service:T: +65-6303 7030F: +65-6773 0039sales.sg@leybold.comservice.sg@leybold.com

Taiwan

Leybold Taiwan Ltd.No 416-1, Sec. 3Chunghsin Rd., ChutungHsinchu County 310Taiwan, R.O.C.Sales and Service:T: +886-3-500 1688F: +886-3-583 3999sales.hc@leybold.comservice.hc@leybold.com

Sales and ServiceLV

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