Fluid Components for Small, Fluid Components for Small, Smart, Sampling Systems Smart, Sampling Systems

Kevin Mracek

AgendaAgenda• Requirements for Fluid Components used in

Small, Smart Systems• Components Currently Available

· Diaphragm Valves· T2 Series· Face Seal Fitting· Weld Fittings· Regulators· Integrated Gas Components

Requirements for Fluid Components Requirements for Fluid Components used in Small, Smart Systemsused in Small, Smart Systems

• Smaller/More Compact

• Cleaner (Accuracy)

• More Reliable

• Easily Automated

• Modular

Diaphragm Diaphragm ValvesValves

Features/Benefits• Small Surface Area

• High Reliability

• No Packing to Contaminate System Fluid

• Low Internal Volume

T2 SERIEST2 SERIESPNEUMATICALLY ACTUATED VALVESPNEUMATICALLY ACTUATED VALVES

CommonBleed / ventCommon

Bleed / vent

CommonOutlet

CommonOutlet

InletInletInletInletInletInletCommon

OutletCommon

Outlet

Open ClosedRR

T2B1T2B1Three Module NetworkThree Module Network

Features/Benefits

• No Cross Contamination

• Reliable Valve Function

• No Dead Volume

• Compact Design

• Low Internal Volume

• Ease of Installation

VCRVCR®®

Features/Benefits

• All-metal seals

• Eliminate crevices around tubing

• Low Dead Volume

• Zero Clearance Component Removal

• Optional Ultra-High-Purity

Features/Benefits• Boreline Seal: Reduces

entrapment zones

• Anti-Twist Design

• All the features of the standard VCR ®

““S” Type VCRS” Type VCR®®

MICRO-FITMICRO-FIT®®

Features/Benefits• Compact Design

· Allows Close Component Spacing for tubing systems

• Automatic Tube Welding

• Smooth Surface Transitions

• Eliminates Crevices Around Tubing

L-15

HF RegulatorHF RegulatorFeatures/Benefits• Half the Size of

Conventional Regulators

• Low Supply-Pressure Effect

• Low Droop

• High Purity Design

Manifold layer

Substrate layer

Surface mount layer

Bridge Block

igcigc-I -I Components: Simple Components: Simple System IntegrationSystem Integration

Features/Benefits• Modular Design

• Easy Replacement of Valves

• Smaller Footprint

• All Metal Seals to Atmosphere

• Variety of Surface-Mount Components Available

• Ultra High Purity

igcigc -II -II