Fluid Components for Small, Fluid Components for Small, Smart, Sampling Systems Smart, Sampling Systems
Kevin Mracek
AgendaAgenda• Requirements for Fluid Components used in
Small, Smart Systems• Components Currently Available
· Diaphragm Valves· T2 Series· Face Seal Fitting· Weld Fittings· Regulators· Integrated Gas Components
Requirements for Fluid Components Requirements for Fluid Components used in Small, Smart Systemsused in Small, Smart Systems
• Smaller/More Compact
• Cleaner (Accuracy)
• More Reliable
• Easily Automated
• Modular
Diaphragm Diaphragm ValvesValves
Features/Benefits• Small Surface Area
• High Reliability
• No Packing to Contaminate System Fluid
• Low Internal Volume
T2 SERIEST2 SERIESPNEUMATICALLY ACTUATED VALVESPNEUMATICALLY ACTUATED VALVES
CommonBleed / ventCommon
Bleed / vent
CommonOutlet
CommonOutlet
InletInletInletInletInletInletCommon
OutletCommon
Outlet
Open ClosedRR
T2B1T2B1Three Module NetworkThree Module Network
Features/Benefits
• No Cross Contamination
• Reliable Valve Function
• No Dead Volume
• Compact Design
• Low Internal Volume
• Ease of Installation
VCRVCR®®
Features/Benefits
• All-metal seals
• Eliminate crevices around tubing
• Low Dead Volume
• Zero Clearance Component Removal
• Optional Ultra-High-Purity
Features/Benefits• Boreline Seal: Reduces
entrapment zones
• Anti-Twist Design
• All the features of the standard VCR ®
““S” Type VCRS” Type VCR®®
MICRO-FITMICRO-FIT®®
Features/Benefits• Compact Design
· Allows Close Component Spacing for tubing systems
• Automatic Tube Welding
• Smooth Surface Transitions
• Eliminates Crevices Around Tubing
L-15
HF RegulatorHF RegulatorFeatures/Benefits• Half the Size of
Conventional Regulators
• Low Supply-Pressure Effect
• Low Droop
• High Purity Design
Manifold layer
Substrate layer
Surface mount layer
Bridge Block
igcigc-I -I Components: Simple Components: Simple System IntegrationSystem Integration
Features/Benefits• Modular Design
• Easy Replacement of Valves
• Smaller Footprint
• All Metal Seals to Atmosphere
• Variety of Surface-Mount Components Available
• Ultra High Purity
igcigc -II -II