fingerprint practice and methodology
TRANSCRIPT
Accelerating Manufacturing Productivity
Copyright ©2010
SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center
and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.
Fingerprint Practice and
Methodology
Gino G Crispieri
Project Manager
Phone : (518) 649 1185
Mobile : (512) 751-3550
ISMI
15 October 2012
Systematic equipment health
monitoring (fingerprint) addresses…
◄Unpredictable downtime of equipment disrupts
factory logistics forcing factory to continuously
modify product and resource allocation
◄ Inability of process tools to provide useful data
to factory information and control system (FIDS)
limits opportunity to monitor and predict
equipment health
◄Long wait times during equipment maintenance
reduces the amount of usable resources in the
factory increasing product queues and creating
bottlenecks
15 October 2012
How these industry detractors are
being addressed by ISMI?
◄Creating industry guidance and methodology for fingerprinting
◄Creating guidance for practical creation and use of independent fingerprints and fault detection application models
◄Demonstrating requirements and factory level management of fingerprint specifications to promote and improve equipment traceability, reliability and health assessment
◄Enhancing data availability and definition for multiple applications (e.g., FDC, APC, PHM, EPT, SPC, WTW, etc.)
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What is Fingerprinting?
◄A fingerprint is a unique representation of the functional
performance of a semiconductor equipment or one of its
components
◄The goal of fingerprinting is to return the equipment to its
previous condition or to match it to an optimally performing
equipment by understanding its differences in relation to a
“golden” fingerprint
In a manufacturing context fingerprint
is…
◄A set of data variables associated with the equipment
component being fingerprinted
◄Sampled at some rate over some period of time
◄Transformed and analyzed using a set of mathematical
techniques
◄To generate a result that represents the state of that
equipment component at that time
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15 October 2012
Differentiation Between Data
Mining and Fingerprinting
◄Data mining uses mathematical
techniques that are applied to data stored
in the factory database searching for
indicators of problems or potential issues
with the equipment or processing.
◄Fingerprinting is a systematic approach
that uses equipment component data to
calculate related parameters that help in
the determination of equipment health
and performance.
Fingerprinting landscape scopeareas of interest
• Fingerprinting can be applied to:
◄Single isolated components
◄Support sub-systems
◄Entire process delivery systems
◄And even abstract items (e.g.,
key process trace variable)
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Fingerprint stakeholders
• Stakeholders span over multiple organizations and roles
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within the equipment supplier…
Test engineering, manufacturing QA
Site installation and equipment qualification
support
Field service
Application support
… and the fab customer
Equipment and maintenance engineering
Production operations
Process engineering
15 October 2012
Fingerprint Use Cases
Being Considered
◄Equipment Acceptance and Qualification
◄Functional capability
◄Process capability
◄Chamber-to-Chamber Matching
◄Machine-to-Machine Matching
◄Equipment Qualification After Maintenance
◄Maintenance & part replacement
Perform
baseline test
Determine
critical
parameters
Critical
parameters
identified?
Perform
Chamber
adjustments
Retest
Matching
accopmplished?
Document and
store results
End
Start
Fingerprinting benefits throughout the
equipment life cycle
◄Benefits range from
◄Ensuring multiple tools are shipped in an identical state
◄Comparing tools from one delivery to the next
◄Speeding tool acceptance (and “time to money”)
◄Avoiding incipient failures
◄Reducing scheduled maintenance time
◄ Improving field service performance (time, hit rate)
◄Speeding process excursion problem resolution
◄Support equipment continuous improvement programs
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Fingerprinting approach and method
◄The fingerprinting process includes
◄Calculation of basic statistics on historical equipment data
associated with individual equipment components
◄Execution of an operation sequence to put the equipment in a
known state, running a fingerprint “recipe” to exercise the object of
interest in a near-production context
◄Development of multivariate control models to determine relative
contribution of equipment parameters to fingerprint results
(perhaps at various operating points)
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TOOL 0.7
EFEM 0.9 PM1 0.9 PM3 0.65PM2 0.4
PUMP 0.7 VAC
CTRL0.8RF 0.3GAS
BOX0.9
GEN 0.3 MATCH 0.7
TOOL 0.7
EFEM 0.9 PM1 0.9 PM3 0.65PM2 0.4
PUMP 0.7 VAC
CTRL0.8RF 0.3GAS
BOX0.9
GEN 0.3 MATCH 0.7
Fingerprinting Application
Characteristics
◄ Build-time and run-time
environment
◄ Data selection and
transformation
◄ Range of analysis methods
◄ Artifact management
(recipes, data sets, results)
◄ Stratification of capabilities
(Basic, Plus, Pro, etc.)
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15 October 2012
Data Storage
CVD
Furnace
CMP
Etch
Etch
DataTransformation
Visualization andApplication Usage
("Equipment View","Wafer View“, etc.)
FingerprintDefinition
FingerprintExecution
FingerprintTransformation
Models
Fingerprint Application System
FingerprintAnalysisRecipes
Fingerprinting Data Flow: Extraction,
Transformation and Loading Process
Raw data
reports
MES,RMS,
Other DB
GEM
RawData
TransformExtract LoadImplanter
CMP
CVD
Furnace
GEM
GEM
EDA
EDA
Custom
Custom
Custom
EDA
Execute
15 October 2012
EHM Promotes Collaborative
Visualization
From Data to Information to Knowledge to Action
• Shared view by IDM and OEM
– Same data
– Same methodologies
– Same conclusions
Initial Lot
Setup EventsParameterChecking only
Full Setup time required
For a new recipeTotal Move In to Move Out time for two lots (TTOT)
Raw Processing
Time Lot 1 (RPT1)
Raw Processing
Time Lot 2 (RPT2)
Raw Processing
Time Lot 3 (RPT3)
TRPT = RPT1 + RPT2
The third lot starts a new cascade and benefits
from overlapping of initial events up to setup.
A new recipe requires the full setup time
Initial Lot
Setup EventsParameterChecking only
Full Setup time required
For a new recipeTotal Move In to Move Out time for two lots (TTOT)
Raw Processing
Time Lot 1 (RPT1)
Raw Processing
Time Lot 2 (RPT2)
Raw Processing
Time Lot 3 (RPT3)
TRPT = RPT1 + RPT2
The third lot starts a new cascade and benefits
from overlapping of initial events up to setup.
A new recipe requires the full setup time
Fingerprint BenefitBetter equipment matching
Acceptance time reduction
Improved performance monitoring
Equipment reliability Improvement
Engineering resource efficiency
and productivity
Status of the Project
• Fingerprint application developed– Can be used by suppliers as well as IDMs
– Available through 3rd party software supplier
• Fingerprint demonstration using manufacturing data– ~ 6 months of data from 4 tools of same type (CVD)
– Results to determine golden fingerprint models and apply them to chamber matching
• After maintenance fingerprint application– Determination of fingerprint models based on parts
replacement
• Multiple recipe fingerprint management– Determination of equipment health monitoring based on
multiple recipe usage in equipment
15 October 2012
Related Documents
• Enhanced Equipment Quality Assurance (EEQA) Data Usage Investigation Work
– TTID: 09095031A-ENG Date Published: 30-Sep-2009
• ISMI Enhanced Equipment Quality Assurance (EEQA) General Guidelines – TTID: 09125066B-ENG Date Published: 12-Apr-2010
• Equipment Component Common Templates – TTID: 35255TD Date Published: 28-May-2010
• Enhanced Equipment Quality Assurance (EEQA) Supplier Implementation Assessment Report
– TTID: 35546TD Date Published: 30-Jul-2010
• Fingerprint Methodology V0.0– 11085156A-ENG Date Published: 31-Aug-2011
• Fingerprint Factory Level Requirements– 11105163A-ENG Date Published: 31-Oct-2011
• Fingerprint Data Model and Key Parameters– 11115168A-ENG Date Published: 30-Nov 2011
• EHM Fingerprint Lessons Learned– 37813TD Data Published: 19-Dec-2011
15 October 2012
