fine particle forum august 15, 2013, a. lloyd spetz new approaches to airborne particle monitoring...
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Fine Particle Forum August 15, 2013, A. Lloyd Spetz
New approaches to airborne
particle monitoring
A. Lloyd Spetz,1,2
J. Huotari2, C. Bur1,3, M. Sobocinski2
R. Bjorklund1, J. Juuti2, J. Lappalainen2, H. Jantunen2, A. Schütze3, M. Andersson1
1Div Applied Sensor Science, Dept. Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden,
2Microelectronics and Material Physics Laboratories, University of OuluFIN 900 14 Oulu, Finland
3Laboratory for Measurement Technology, Saarland University, Campus A5 1D-66123 Saarbrücken, Germany
New approaches to airborne particle monitoring
• SiC-FET improved sensor devices New design, improved functionApplications
• Monitoring of particles byImpedance spectroscopyHeating and detection of emissionsFuture technology
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
SiC-FET sensors, wafer and mounting
SiC-FET sensor system
4” SiC wafer, ~2000 chip
Processing on 4” SiC wafers using standard methods
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
SiC-FET transistor as gas sensor
I/V characteristics SiC-FET: presence of gas –
a shift in the I/V-curve
Mike Andersson
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
O O H HSi OSi O
H H H
SiC/Si
Si O
Three phase boundary: gas - metal - oxide
Porous film
Pt, Ir, Pd, …
Metal
Insulator
SemiconductorSiO2
Strong OH dipoles charge the gate
H2C3H6
H2OO2
CO2
NH3
Control of primary and secondary air by• 2 SiC-FET gas sensors
(different operation temperatures)• 1 temperature sensor
Increased efficiency
and lower emissions
Temperature sensor
Gas sensors
Mike Andersson
Silicon Carbide Sensors Combustion control in small power plants
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Emissions from controlled combustion
Emissions, uncontrolled combustion
SenSiC AB: Silicon Carbide SensorsCombustion control in small power plants
Mike Andersson
The sensors measure the ratio between CO and oxygen in the flue gases
SenSiC AB: SiC-FET sensor system combustion control in
small and medium sized power plants
www.sensic.se
New application: Control of urea injection when using SCR by ammonia sensors in power plants and stationary diesel engines
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Control of urea injection in power plants
SNCR – Selective Non-Catalytic Reduction of NO/ NO2 by NH3 through urea injection in the flue gas
SCR-Selectiv Catalytic Reduction of NO/NO2 in a catalytic converter by NH3
Control of urea injection by an NH3 sensor
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Portable nanoparticle sensor• Nanoparticles show adverse health effect
according to – Size– Shape– Content– Concentration
• Nanoparticles damage cells– Toxic effect on cells
CHEMPACK project (2011-2014) FiDiPro positionUniversity of Oulu i Finland
Welding nanoparticles (courtesy of Pam Drake, National Institute for Occupational Safety and Health NIOSH).
Asbestos fibers (courtesy of the US Geological Survey).
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
IMCS 2012, A. Lloyd Spetz EuNetAir
Soot sensor based on Thermophoresis
Thermophoresis:
A force acting on particles in a temperature gradient →
Soot is deposited on the coldest surface
Thermos packaging to decrease temperature on the sensor surface
Soot sensor surface
Thermos
Soot measurement in diesel engine
Exhaust pipe
Robert Bjorklund, Linköing University and Ann Grant, Volvo Technology
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
Soot sensor
IMCS 2012, A. Lloyd Spetz EuNetAir
Soot measurements during 6 World Harmonized Transient Cycles
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MW
, °C
0 100 200 300
30 min/cycle, 18 min response time, 1370 mg/cycle, 40 mg/kWh)
Robert Bjorklund and Ann Grant
Heater on, 600°C
Exhaust gas 200°C
Sensor 160°C
Particle generator
Joni HuotariPeter MöllerMike AnderssonRobert Bjorklund
• PALAS RGB 1000 dry particle generator• Pegasor nanoparticle sensor as reference• Flow through chamber for testing of sensors (SiC-FETs)• A measurement chamber with probe connections will be
built for measurements from DC to GHz range
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Impedance spectroscopy of particles
Airborne steel plant particles
Deposited CNT particles
CNT (8.9 µg/ml) CNT (89 µg/ml)
SEM:
Optical spectra
Impedance spectra, potential for size, concentration and kind of particles and possible for on-line measurements
Joni Houtari
SEM
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Detection of particle content
Flow controller 1100ml/min
Flow controller 2100ml/min
Heater with particles
Sensor chamber
Electronics
Data acquisition LabView
Gas mixing program
T-control Const. I control
N2
O2
Waste
Heating of particles and detection of emissions with gas sensors
Christian Bur
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Detection of particle content
Christian Bur
Ammonia containing fly ashParticles heated to 430°C. Detection by SiC-FETs and
environmental mass spectrometer. Gas flow: 25ml/ min
Mass spectrometer signal
SiC-FET signal. Pt gate, T=220oC, IS-G = 55 µA
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Future: Envisaged packaging ideas
One alternative co-fired LTCC modules
Maciej SoboskinskiMike Anderson
Jari Juuti
Detection of emitted gases by sensor array
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Conclusions• Toxic gases and airborne nanoparticles need to
be monitored for environmental control
• The new generation SiC-FETs provide a powerful sensor platform for detection of gases (and eventually particles)
• The content of nanoparticles is important to measure: Impedance spectroscopy or heating particles and subsequent detection of the emissions by gas sensors
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
AcknowledgementsApplied Sensor Science at
Linköping UniversityProf. Anita Lloyd SpetzDr. Mike AnderssonDr. Robert BjorklundDr. Jens Eriksson, post docZhafira Darmastuti, PhD studentChristian Bur, PhD student Hossein Fashandi, PhD studentPeter Möller, research engineer
Grant support is acknowledged from:The VINN Excellence Center in Research & Innovation on Functional Nanostructured Materials (FunMat)The Swedish Agency for Innovation Systems (VINNOVA), The Swedish Research Council and TEKES in Finland
Microelectronics and Material Science Laboratories, University of OuluProf. Heli JantunenProf. Jyrki LappalainenProf. Anita Lloyd SpetzAss. Prof. Jari JuutiDr Mike AnderssonJoni Huotari, PhD studentMaciej Soboskinskij, PhD student
Laboratory for Measurement Technology, Saarland UniversityProf. Andreas SchützeChristian Bur, PhD student
COST Action EuNetAir TD 1105
European Network on Air Pollution Control
Sources of emissions: e.g. industry, vehicles, volcanous and candles (soot)
Swedish Lucia performance (1963)
Clean environment through air quality control by sensor systems
A clean environment should belong to human rights.
Sensor systems are needed for emission monitoring and control.
Toxic substances include: NOx, SO2, CO, O3, PAH, PM10, PM2.5, PM1
The vulcano St. Helena
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
SiC-FET transducer platform for gas sensors
I/V characteristics SiC-FET: presence (red dashed line) of a gas - internal voltage drop at the gate metal/ insulator interface – a shift in the I/V-curve
Absence of gas
Presence of gas
Cross section of depletion SiC-FETGate sensing layer: porous catalytic metal, Pt, Ir
Mike Andersson
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Impedance spectra of particles from steel plant and CNTs
Steel plant particles CNT
Optical image, airborne particles from steel plant
Impedance spectra, potential for on-line measurements
SEM: CNTs deposited on IDEs
Joni Huotari
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
Sensor signal set to alarm level of 15-20ppm ammonia.
Detection of NH3 in low oxygen and high CO concentration functions
NH3 detection using new SiC-FET sensor design
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Mike Andersson
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Inauguration A. Lloyd Spetz 2012-09-11
Impedance spectra of particles from steel plant and CNTs
Impedance spectra for detection of concentration, size, content with potential for on-line measurements
Joni Huotari
CNTsSteel plant particles
7.0
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Market legislations for heavy duty trucks On Road US
On Road EU
On Road Japan
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NOx (g/kWh)
PM (g/kWh)
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US’10
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EU-II 95/96
EU-III 00/01
EU-VI 13/14 ~
Japan NLT 05
EU-V 08/09
EU-IV 05/06
From 2015: 0.4g/kW-hr for NOx, 0.02 g/kW-hr for PM
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
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Silicon Carbide Sensors Combustion control in small power plants
Mike Andersson
SCR, Selective Catalytic Reduction, system
4NO +4NH3 + O2 4N2 + 6H2O
2NO2 +4NH3 + O2 3N2 + 6H2O
NH2CONH2 + H2O 2 NH3 + CO2
Engine
Catalyst
NH3 NOx
Ureainjection
ControlAlgorithms
UreaTank
Enginemodel
Catalystmodel
NH3 sensor requirements:
• Operation T > 400C(700C short periods of time)
• Detection limit <10 ppm
SCR now in trucks by both Volvo and Scania
OBD (On Board Diagnostics) expected
NH3 Lab measurements
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SiC-FET sensor signal to ammonia for two SiC FETs. Detection limit < 5 ppm in 10% O2 / N2.
Mike Andersson
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Particles spread by volcanos
The eruption plume of St. Helen volcano, in 1980 courtesy of NASA.
Volcanic iron oxide rich soil in Rwanda(courtesy Biomed Central.)
Podoconiosis
Aggressive African-endemic Kaposi’s
sarcoma of the foot
Buzea et al. Biointerphases, 2, 4 (2007) MR17-MR71
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
The SiC-FET ammonia sensor
Diesel engine measurement
SCR system Two MISiCFET
sensors and optical reference instrument
H. Svenningstorp, H. Wingbrant
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
31
Nano-ID™ NPS500 based on DMA (Differential Mobility Analyzer) technology, portable particle measurement device (5-500nm)
Present commercial particle detectors
DEKATI ELPI (Electrical Low Pressure Impactor (6 nm – 10 µm)
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
NH3 sensor mounting for urea control in boilers
Värmeforsk projects:A08-828 and P08-823Partners: SenSiC AB, Alstom Sweden AB, Tekniska Verken, Vattenfall
Two position sensor mounting ~ 40 cm apart
Robert Bjorklund
Fine Particle Forum August 15, 2013, A. Lloyd Spetz
Gobi desert dust storm spread
Ten major sources of dust in the world
Bacteria, hitch hiking by African dust, was found in North America.
Hitchhiker in Luxemburg, 1977
Buzea et al. Biointerphases, 2, 4 (2007) MR17-MR71
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
Healthy particles
Sea spray from ocean waves (courtesy NASA).
Pale blue swirls in Lake Michigan, probably caused bycalcium carbonate chalk from the lake’s limestone floor (credit: NASA/GSFC)
TEM image of mineral dust mixture with sea salt collected from the marine troposphere
Buzea et al. Biointerphases, 2, 4 (2007) MR17-MR71
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
Fires produce (nano)particles
Distribution of active fires detected by Terra’s MODIS sensor across the planet on 10-19 July 2006
Buzea et al. Biointerphases, 2, 4 (2007) MR17-MR71
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
First results, detection of ammonia containing fly ash particles. Particles are heated repeatedly to ~ 800°C.
A small gas flow brings emissions from heater to SiC-FET sensors.
Detection of particle content
Workplace and Indoor Aerosol conference in Lund:
Detection of Pd in particles by the catalytic CO conversion efficiency Christian Bur
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
IMCS 2012, A. Lloyd Spetz EuNetAir
Future development
Particles are charged, SiC- FET device a possibility
Source and drain contacts need protection by over glass, but also bond wires must be protected
PCB
MEMS
DIE
PARTLY TRANSPARENT SEALING
Piezoelectric layerfor sensing
50 TRANSMISSION LINE
{
THERMAL VIASAND GROUND
CAPACITOR
COUPLER
GRDSIGPOWGRDSIGSIGSIGGRDPOW
MICROWAVEFILTER
Ferroelectric layerfor electrical tuning
Ferromagnetic layerfor radiation protectionor electrical shortening
RESISTOR Deposited layers
Additional functionality by smart packaging, LTCC packaging (Docent Jari Juuti):
Collection of particles by thermophoresis (cold sensor surface), applied voltage, magnetic field
Detection of content of particles by heating at a hot spot and detection of emissions by a sensor array, smart operation and data evaluation
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
Tailoring of SiC based field effect sensors for CO2 monitoring
SiC based CO2 sensor
Li2CO3-BaCO3 sensing layer
MgO prevents response to hydrogen containing gases
H. Inoue, M. Andersson, M. Yuasa, T. Kida, A. Lloyd Spetz, and K. Shimanoe:CO2 sensor combining an MISiC capacitor and a binary carbonate, Electrochemical and Solid-State Letters, 14 (1) (2011) J4-J7.
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
Tailoring of SiC based field effect sensors for O2 monitoring
M. Andersson, A. Lloyd Spetz, Tailoring of SiC based field effect gas sensors for improved selectivity to non-hydrogen containing species, IMCS13, Perth, Australia, July 12-14, 2010, 369.
No response to hydrogen containing gases
Response to oxygen
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
Sensor system for control of small and medium sized power plants
www.sensic.se
Mike Andersson and Magnus Palm: installation of a sensor system for control of a domestic boiler) at Ariterm Sweden AB (key partner)
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
• NANOSIGHT- optical method to measure size- laser light source - typical range 10 nm - 1000 nm • BECKMAN COULTER- particle size of fluid with nanoparticles- laser light- for size analysis: electrophoretic light scattering (ELS)• LIGHTHOUSE WORLDWIDE
SOLUTIONS- handheld and portable particle counters- minimum sensitivity: 200 nm• AIRMODUS- condensation to grow 1 nm diameter nanoparticles to optically detectable sizes• KANOMAX- condensation to grow 15 nm diameter
nanoparticles to optically detectable sizes
- PEGASOR- Portable real time measuring
instrument- Detection of total surface area, mass,
number of particles
BECKMAN COULTER
NANOSIGHT LM10KANOMAX MODEL 3800
AIRMODUS
LIGHTHOUSE HANDHELD 2016
42
Present commercial particle detectors
SPIE Baltimore, April 29 2013, A. Lloyd Spetz
Envisaged packaging ideas
Material combinations and process development to enable wafer level integration of functional packages by cost effective means.
SPIE Baltimore, April 29 2013, A. Lloyd Spetz