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A linear 32.8 dBm 2.4 GHz LDMOS power amplifier in 65 nm CMOS Ted Johansson, Olof Bengtsson, Sara Lo5i, Lars Vestling, Hans Norström, Jörgen Olsson, and Chris=an Nyström

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Page 1: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

A  linear  32.8  dBm  2.4  GHz    LDMOS  power  amplifier  in  65  nm  CMOS  

 Ted  Johansson,  Olof  Bengtsson,  Sara  Lo5i,  Lars  

Vestling,  Hans  Norström,  Jörgen  Olsson,  and  Chris=an  Nyström  

Page 2: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Outline  

•  Background:  WLAN  IC  technology  roadmap  •  PA  device  design  in  65  nm  CMOS  •  Testchip  •  Results:  DC,  RF  small-­‐signal,  LP,  PA,  reliability    •  Summary,  conclusion  

Page 3: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

WLAN  IC  technology  roadmap  

1st/2nd  genera=on  WLAN  circuits  consisted  of  several  chips:  -­‐  WiFi  BB  in  digital  CMOS  -­‐  Separate  Bluetooth  chip  -­‐  WiFi  RF  in  BiCMOS  with  SiGe  BJT    

PA  

Today  a  single  chip  solu=on  is  wanted  using  advanced  CMOS.    But:  -­‐  SiGe  is  not  available  -­‐  Power  MOSFET  is  needed  

for  PA    

Nanoradio  AB  

Page 4: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

To  obtain  maximum  power  into  a  load:    -­‐  use  high  supply  voltage    

 technology  (foundry  technology,  with  or  without  process  add-­‐ons)    circuit  solu=on  that  can  handle  higher  voltage,  e.g.  cascodes    select  PA-­‐class  with  low  voltage  swing  (rela=ve  to  Vdd)  

-­‐  use  power  combinaJon  (use  current  instaed  of  voltage)    low  load,  and  transforma=on  to  50  Ω.    differen=al  amplifiers  (larger  devices  possible  to  use  with  same  matching)    power  combina=on  using  passive  networks,  e.g.  inductor  or    transformers  

 Put  all  "bells  and  whistle"  together  to  achieve  a  good  PA!      

Challenges  of  PA  design  in  nm  technologies  

Page 5: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

To  obtain  maximum  power  into  a  load:    -­‐  use  high  supply  voltage    

 technology  (foundry  technology,  with  or  without  process  add-­‐ons)    circuit  solu=on  that  can  handle  higher  voltage,  e.g.  cascodes    select  PA-­‐class  with  low  voltage  swing  (rela=ve  to  Vdd)  

-­‐  use  power  combinaJon  (use  current  instaed  of  voltage)    low  load,  and  transforma=on  to  50  Ω.    differen=al  amplifiers  (larger  devices  possible  to  use  with  same  matching)    power  combina=on  using  passive  networks,  e.g.  inductor  or    transformers  

 Put  all  "bells  and  whistle"  together  to  achieve  a  good  PA!      

Challenges  of  PA  design  in  nm  technologies  

Page 6: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Design  of  CMOS  WLAN-­‐PA    Specifications  (similar  to  SiGe  HBT/Si  BJT  from  exisJng  WLAN  products):      VDD=3.3  V        

   =>  BVCBO  or  BVDSS  >6-­‐7  V,  up  to  10  V  for  ruggedness    RON  around  2  Ωmm      ION  >  500  mA/mm    fT  >  20  GHz    fmax  >  20GHz      Digital  CMOS  in  65  nm  has  technology  that  is  very  hard  to  use  for  PAs:        

 Vdd=1-­‐1.5  V    Tox=1.2-­‐1.8  nm        Lg=30-­‐50  nm  

 IO-­‐devices  with  Lg=350-­‐500  nm  for  2.5  –  3.3  V  opera=on,  with  thicker  gate  oxide  exist        

 

Challenges:  -­‐ Protect  gate  oxide  from  high  electric  fields  -­‐  reliability  -­‐ Design  extended  drain  drih  region  for  op=mum  current  drive  and  breakdown  voltage  

Page 7: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Different  HV  MOSFET  architectures  in    bulk  CMOS  

Ref.  Bianchi  CICC'09  

Page 8: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Different  HV  MOSFET  architectures  in    bulk  CMOS  

Ref.  Bianchi  CICC'09  

Page 9: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

RF-­‐LDMOS  design  •  65  nm  foundry  CMOS  process  (no  process  changes  possible)  •  No  extra  mask  layers  (only  drawing  layers  for  mask  genera=on)  =>    RF-­‐LDMOS  (EDMOS)  has  been  developed.    

 Test  chip  manufactured  at  foundry.    

Page 10: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

2.5  x  4  mm2  

Page 11: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

DC  and  RF  small-­‐signal  results  W/L  =  200/0.35  (10  fingers*20  um,  1  unit  cell)  

 •  BVDSS  >  10  V    •  RON  ≈  2  Ωmm      •  ION  >  600  mA/mm  •  fT=25  GHz  •  fmax=30  GHz  

•  Specifica=on  filled!  

Page 12: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Load-­‐pull  measurements  

G   D  

S  

S  

S  

S  

40  

30  20

 

10  

0  

-10 -25 -15 -5 5 15

P OU

T (d

Bm

) PIN (dBm)

AB 30% A*

25  15

 5

 -5

 -15

-25 -15 -5PIN (dBm5) 15 25

P OU

T (d

Bm

) AB 10% AB 30% A*

Vdd=3.3  V  2.45  GHz  

Vdd=5  V  5.8  GHz  

Very  good  performance  at  both  frequency  bands  and  at  higher  supply  voltage.  P-­‐1dB>1W,  50%  eff  

GSG  test  transistors  for  load-­‐pull,  W=2.8  mm  (14  unit  cells).    

Page 13: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

•  Target  Pout,peak  >30  dBm  =>  WLAN  modulated  20-­‐24  dBm  signal.  

•  Differen=al  PA  =>  4x  beper  impedance  levels.  

•  Total  transistor  width  =  5.6  mm  (W=2  x  2.8  mm,  2  x  14  unit  cells).  

•  Reference  design:  conven=onal  cascode  with  2  x  3.3  V  IO  transistors.  

PA  measurements  

Page 14: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Direct  bonding  on  PCB  

Page 15: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Soldered  test  board  

Page 16: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

PA  results  

Page 17: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Reliability  DC  stress  performed  at  high  electric  field  and  typical  quiescent  current  for  class  AB.    IDQ  drih  is  caused  by  electron  injec=on  in  the  gate  oxide  resul=ng  in  increase  of  threshold  voltage.    

-5

-4

-3

-2

-1

0

1

101 102 103 104 105 106 107 108 109

Drift in IDQ

∆ID

(%)

Time (sec)

10 years

Vg=1.5 V, Vd=5.4 V

Less  than  2%  driU  at    10  years  (extrapolated)  

Page 18: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Summary  •  Developed  LDMOS  transistors  meet  performance  requirement  

•  WLAN  PA  with  power-­‐MOSFET  possible  in  65nm  CMOS  

•  Solu=ons  scalable  for  PA  down  to  28  nm  for  SoC  WLAN,  pico-­‐basesta=ons,  and  other  RF-­‐ICs.  

Hans  Norström  (UU),  Klas-­‐Håkan  Eklund  (Comheat),  Lars  Vestling  (Comheat/UU),  Ted  Johansson  (LiU),  Sara  Lo5i  (UU),  Jörgen  Olsson  (UU)   Christian  Nyström  (Nanoradio)  

Page 19: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris
Page 20: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

BACKUP  

Page 21: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Linear  class-­‐AB  design  Vdrain  <=  2  Vdd  

Alterna=ve  A:  using  conven=onal  circuit  solu=on  that  can  tolerate  2Vdd  at  drain,  a  cascode:  

PA  core,    incl.  =edown  and  sub  con    two-­‐transistor  cascode,  upper  T  using  twell,  capacitor  to  gnd  (CB),  gate  to  Vdd.  

Page 22: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Linear  class-­‐AB  design  Vdrain  <=  2  Vdd  

Alterna=ve  B:  using  device  that  can  tolerate  high  Vdd  at  drain,  such  as  an  EDMOS  device:  

PA  core,    incl.  =edown  and  sub  con  

Page 23: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Full  cascode  circuit  in  Cadence,  including  input/output  diff  matching.  EDMOS  similar  schema=cs.  

Page 24: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Test  board  layout  

2-­‐lagers  Au-­‐pläterat  t=508  um  er=4,2    4,0  x  2,9  mm2  

Page 25: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Evalua=on  

Page 26: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Evalua=on  

Page 27: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris
Page 28: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

WLAN  PA  •  Transistors  with  5.6  mm  width  mounted  on  PCB  and  characterized  at  

Nanoradio  AB.  Differen=al  PA,  Vdd=3  V,  f=2412  MHz  P-­‐1dB  =  32,5  dBm  (1,8  W).  Class  AB,  efficiency  over  50  %  for  unmodulated  signal.  

Page 29: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

Load-­‐pull  measurements  GSG  test  transistors  for  load-­‐pull,  W=2.8  mm.    

G  

S  

S  

D  

S  

S  

Very  good  performance  at  both  frequency  bands  and  at  higher  supply  voltage.  P-­‐1dB>1W,  50%  eff  

Page 30: EuMIC-LDMOS presentation final - Linköping …...Alinear"32.8"dBm"2.4"GHz"" LDMOS"power"amplifier"in"65"nm"CMOS"! Ted!Johansson,!Olof!Bengtsson,!SaraLo5i,!Lars! Vestling,!Hans!Norström,!Jörgen!Olsson,!and!Chris

WLAN  modulated  signal    802.11g,  f=2412  MHz,  54  Mbps  OFDM  

Both  EDMOS  and  Cascode  reference  pass  frequency  mask  test  up  to  the  limits  of  the  used  signal  source  (peak  Pout  >27  dBm).  

EDMOS     Cascode  2xIO  

0  

1  

2  

3  

4  

5  

6  

7  

8  

9  

10   15   20   25  

EVM  [%

]  

Pout  (peak)  [dBm]  

Cascode  

EDMOS  

EVM  measurement  (linearity)  shows  less  linearity  for  the  EDMOS  compared  to  the  Cascode  reference.  If  this  comes  from  device  performance,  or  matching  circuit  condi=ons,  is  not  fully  clear.