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3D MEMS Accelerometers for Building Applications
Mikaël Colin – MEMScAP S.A.
1st MEMSCON Event – Bucharest
October 7th, 2010
1st MEMSCON Event07/10/10, Bucharest Company
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Acceleration RF ID tag
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
Accelerometer end-user specifications
Parameter Value Unit
Acceleration 0.01-2 g
Frequency 0.1-10 Hz
Duration 15 s
Size constraint - mm3
Operating temperature -20 to +50 °C
Operating Humidity 0 to 100 %RH
Vibrations (15g) 1000 Hz
Shocks 2000 g
Battery lifetime 2 years
3D MEMS accelerometer
MEMS = Micro ElectroMechanical System
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Accelerometers transduction mechanisms
Vibration Beam Accelerometer (VBA) Resonance frequency is dependent on the applied force Driven oscillator at resonance frequency (closed loop) High end applications
Company1st MEMSCON Event07/10/10, Bucharest
Spring Mass System Acceleration force causes a proof
mass displacement Displacement measurement system Direct or indirect measurement Indirect measurement methods:
Piezoelectric effect Piezoresistive effect Capacitive sensing
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Transduction principles
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
Piezoelectric effect Piezoresistive effect
Capacitive sensing
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MEMS Technologies
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
Bulk micromachining
Surface micromachining
Hybrid integration
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Concept of 3D accelerometer
Mounting of 3 1D accelerometers
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
3-axis sensitive mechanical structure
3 independent structures on the same die
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Selected concept
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
3 independent capacitive micromachined sensors on a single die
~ 4mm
~ 11mmOut of the wafer plane sensitivity In plane sensitivity
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Fabrication
Wafer level packaging concept
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
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ASIC+MEMS Assembly
Hybrid integration in a ceramic carrier
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest
MEMSASIC Read-out
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Thank you for your attention
MEMScAP, France1st MEMSCON Event - 07 October 10, Bucharest