TRC: Oct 25-27, 2004

Digital Digital MicromirrorMicromirror Device Device Reliability and Failure MechanismsReliability and Failure Mechanisms

Michael R. DouglassDistinguished Member of the Technical StaffTexas InstrumentsPlano, Texas

12/15/2004 • j://stdpres/template.pot • Slide 2

Topics• Introduction• FMEA approach -- Identify potential risks• Verification and performance demonstration• Research Opportunities• Summary

DMD Reliability and Failure DMD Reliability and Failure MechanismsMechanisms

12/15/2004 • j://stdpres/template.pot • Slide 3

Mirror

Yoke and Hinges

Address Electrodes and Landing Surface

SRAM

Bias and Reset Voltage

Address (Logic) Voltage

DMD MirrorDMD Mirror

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Two DMD Mirrors Two DMD Mirrors -- LandedLanded

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Top down view of tilted mirrorsTop down view of tilted mirrors

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A Few Facts AboutDMD™ MEMS Technology

A Few Facts AboutDMD™ MEMS Technology

Package (Type A)

Optical, hermetic, welded lid

Mechanical motion

Makes discrete contacts or landings

Lifetimeup to 100,000 hrs

Address voltage3.3-volt CMOS technology

Mechanical elementsAluminum

ProcessLow temperature, sputter deposition, plasma etch (standard SC processes)

Number of mirrors480,000 to >2,000,000

12/15/2004 • j://stdpres/template.pot • Slide 7

Light Source

DMD

Color Filter

MemoryProjection Lens

Processor

DLP Board

Optics

Screen

Shaping Lens

Condensing Lens

Digital Light Processing™Digital Light Processing™

12/15/2004 • j://stdpres/template.pot • Slide 8

DLP™ Overview

Since 1996, over 3 million DLP- based display products have been shipped by over 50 different manufacturers

DLP™ Front Projection now account for more than 1 out of every 3 projectors sold

DLP TVs now selling in more than 5800 stores with more than 50 models expected in 2004

DLP Cinema™ now over 220 screens in 20 countries

Capacity again more than doubled in 2004 with addition of Amkor and Anam capabilities

12/15/2004 • j://stdpres/template.pot • Slide 9

Failure Modes and Effects Analysis (FMEA)– How can a DMD fail?– What is the root mechanism?– Assess risk to lifetime, failure rate– What tests can highlight the mechanism?– Can we accelerate the mechanism?

DMD Reliability and Failure DMD Reliability and Failure MechanismsMechanisms

12/15/2004 • j://stdpres/template.pot • Slide 10

Fully Qualified CMOS

DMD Superstructure• Hinge fatigue (do hinges break?)• Hinge memory (limited life?)• Nonfunctional (stuck) mirrors• Shock and vibration failure

DMD Reliability and Failure DMD Reliability and Failure MechanismsMechanisms

12/15/2004 • j://stdpres/template.pot • Slide 11

* Business projector application (1-chip, 8-bit)Assuming 1000 hours per year -- 250 years of useful life

> 250,000 hours*> 3.67 Trillion Cycles> 69,000 hours

1:1 Duty CycleAccelerated 4-8X @ 65°C

Hinge Fatigue

Equivalent LifetimeResultTest ConditionsPurpose

Note: No hinge wearout time identified to-date

DMD Reliability DMD Reliability –– VerificationVerificationFMEA Item #1 FMEA Item #1 ---- Hinge FatigueHinge Fatigue

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Springtip design helps overcome surface adhesion

3249-C06-10

DMD Reliability DMD Reliability –– VerificationVerificationFMEA Item #3 FMEA Item #3 –– NonNon--functional Mirrorsfunctional Mirrors

12/15/2004 • j://stdpres/template.pot • Slide 13

DMD Reliability DMD Reliability –– VerificationVerificationFMEA Item #4 FMEA Item #4 –– Shock and VibrationShock and Vibration

15 cycles100 cycles10 days

Thermal Shock, -55/125CTemperature Cycles, -55/+125CMoisture Resistance

Sequence 2

1500g Mechanical Shock, Y onlyVibration, 20g, 20-2000HzConstant Acceleration, 10Kg, Y1

only

Sequence 1

200 cycles,1000 cycles

-55/125C, liquid-to-liquidThermal Shock

1000 cycles-55/125C, air-to-air, fine/gross leakTemperature Cycle

1000 hours-55/100C, no powerStorage Life Cold/Hot

12/15/2004 • j://stdpres/template.pot • Slide 14

Fully Qualified CMOS

DMD Superstructure• Hinge fatigue • Hinge memory• Nonfunctional (stuck) mirrors• Shock and vibration failure

DMD Reliability and Failure DMD Reliability and Failure MechanismsMechanisms

12/15/2004 • j://stdpres/template.pot • Slide 15

Opportunities for MEMS Reliability Research• Properties of thin-films• Surface effects of micro-/nano-structures• Low-cost, reliable packaging techniques

DMD Reliability and Failure DMD Reliability and Failure MechanismsMechanisms

12/15/2004 • j://stdpres/template.pot • Slide 16

Summary of DMD ReliabilitySummary of DMD Reliability

• Hinge Memory Lifetime> 100,000 hours at normal operating conditions

• Random Defects> 650,000 hour MTBF (<1500 FIT)

• Hinge Fatigue Lifetime >3.67 Trillion Cycles or >250,000 hours

• Environmentally robust