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Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 1 2019/5/6 MPGD2019 La Rochelle, France Toru Tanimori, Atsushi Takada, Yoshitaka Mizumura, Shotaro Komura, Tetsuro Kishimoto, Taito Takemura, Kei Yoshikawa, Yuta Nakamura, Yuma Nakamasu, Tomoyuki Taniguchi, Ken Onozaka, Kaname Saito, Tetsuya Mizumoto, Shinya Sonoda(Kyoto U.), Joseph Parker(CROSS TOKAI), Kentaro Miuchi(Kobe U.), Tatsuya Sawano(Kanazawa U.)

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Page 1: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Development of m-PICwith glass substrate

aiming at high gas gainMitsuru Abe (Kyoto U.)

12019/5/6 MPGD2019 La Rochelle, France

Toru Tanimori, Atsushi Takada, Yoshitaka Mizumura, Shotaro Komura, Tetsuro Kishimoto, Taito Takemura, Kei Yoshikawa, Yuta Nakamura, Yuma Nakamasu, Tomoyuki Taniguchi, Ken Onozaka, Kaname Saito, Tetsuya Mizumoto, Shinya Sonoda(Kyoto U.),Joseph Parker(CROSS TOKAI), Kentaro Miuchi(Kobe U.),

Tatsuya Sawano(Kanazawa U.)

Page 2: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Contents• Introduction

• TGV (Through Glass Via) m-PIC• Test using X-ray sources

• Results and problems

• Simulation study using Garfield++• Dielectric constants VS Gain

• Dielectric discontinuous effects

• TGV m-PIC without polyimide film• Tests and results

• Summary

2019/5/6 MPGD2019 La Rochelle, France 2

Page 3: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

MeV g ray telescope

2019/5/6 MPGD2019 La Rochelle, France 3Y.Mizumura + JINST (2014)

Directly investigate the existence and generation of RIs in the universe

Launching

ETCC

10-6

10-5

10-4

10-3

Energy spectrum

keV500 1000100

events/sec/keV

ONOFFON-OFF

Balloon experiment in 4/2018

1 Day flight

~5sDiffuse g ray ~10 s

at Alice Springs, AUS

Galactic diffuse & 511 keV

NO Tracking Tracking

φ

BGBGSignal

Solid or liquiddetector

Absorber

φ

BGSignal

Gas detector

Electron-Tracking Compton Camera (ETCC)

Conventional Electron Tracking

The superiority of the ETCC method is proven in space

511 keV bin

Compton scattering

Page 4: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

m-PIC

2019/5/6 MPGD2019 La Rochelle, France 4

gain of ~15,000 (Ar based gas, 1atm)

We temporary adopt m-PIC+GEM

To detect,

TPC

m-PIC & GEM

gamma ray

Compton-recoil electron~10 keV – 1 MeV

Requirements from ETCC :3D tracking low energy e-

MIP-likeshort track (~cm)

A gaseous 2D imaging detector with strip read out

Manufactured with printed circuit board (PCB) technology

Each pixel is place with a pitch of 400 μmFine position resolution (RMS -120 μm)Large detection area :10×10, 30×30 cm2

Gas gain : ~15,000 (MAX, a moment)~6,000 (stable, 1month)

CathodeAnode

Feature of μ-PIC

sub mm sampling

Scintillator

(GainGEM < 10)

Only m-PIC

Drift Plane

GEM

m-PIC

Page 5: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

The more thickness, the more gain

2019/5/6 MPGD2019 La Rochelle, France 5

TSV(Through Silicon Via)μ-PIC

Up to ~300mm, Thickness⤴, Gas gain⤴

PCB(Printed Circuit Board)m-PIC

Anode aspect ratio (Thickness/Anode φ)is limited by PCB technical restrictions. but TSV operation had

instability• charge transfer inside

the silicon substrate.• Thickness of SiO2 film

on side of anode via

50 μm

400mm 50 μm

Insulator Inorganic capable of forming high aspect ratio anode via

we focus on a glass substrate

(T. Takemura et al, 2018)

Garfield

Gain VS Substrate thickness

0 100 200 300 400 500Substrate thickness [mm]

(T. Nagayoshi, Doctor’s thesis, 2004)

Page 6: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

TGV m-PIC

2019/5/6 MPGD2019 La Rochelle, France 6

Train à Grande Vitesse

(R. Delmdahl & R. Paetzel,”Laser Drilling of High-Density Through Glass Vias (TGVs) for 2.5D and 3D Packaging”,2014)

Through Glass Via

※Not a train

Able to form high aspect ratio via Good accuracy (~mm) thanks to

MEMS processing technologies (Potentially) Having a scalability

Page 7: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

First prototype TGV μ-PIC• Developed with DNP(Dai Nippon Printing Co., Ltd.)

MPGD2019 La Rochelle, France 7

400

350

50

Anode 𝜙 60

Cathode𝜙 250

(mm)Anode strip × 128

Cathode strip × 128

5 cm

5 cm

Microscope imageMost geometry parameters (Anode φ, Cathode φ, Pitch, …) are same as for conventional μ-PIC, except for the thickness.

Polyimide thin film 5mmPCB μ-PIC TSV μ-PIC TGV μ-PIC

Substrate material

Polyimide Silicon alkali-free glass

Dielectric constant

3.2 [1 MHz] Si : 11SiO2 : 4.5

5.8 [1 MHz]

Page 8: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Experiments & results

2019/5/6 MPGD2019 La Rochelle, France 8

50MHz

Ar escape

55Fe Spectrum @ 2.5 cm × 2.5 cm

Mn Ka (5.9 keV)

ΔE/E 22.2 % (FWHM)

Charge

LCP GEM (100 mm)

GainTotal : ~45000GEM: ~21m-PIC : ~2100

Preamplifier&Discriminator

ΔGEM : 300V Anode : 520 V

~100 mV

~250 ns

Source : 55Fe(5.9 keV)

Anode

Cathode

Page 9: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Gain curve

2019/5/6 MPGD2019 La Rochelle, France 9

440 460 480 500 520 540 560 580

104

103

Anode voltage [V]

Ar : C2H6= 90:10 (1atm)

Gain of m-PIC (GainTotal/GainGEM)

• The gain of TGV and PCB was comparable.

• In the first TGV, The experimental gain value was ~50% lower than the simulated gain value.

Why ? Plot gain of each 4 regionsUniformity ~4.5% RMS

m-P

IC G

ain

Experiments:First TGVPCB m-PIC (sample1)PCB m-PIC (sample2)

Garfield++ simulation:First TGVPCB

Page 10: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Something that decreases the gain

2019/5/6 MPGD2019 La Rochelle, France 10

(C. Kim & M. Tomozawa, 1975)

Electrode polarization at low

frequency in a Soda lime glass

Dielectric constant VS frequency

50

40

10

20

30

0

e

frequency [Hz]

Hypothesis : Effective dielectric constant > 5.8

ealkali-free glass : 5.8 [@1MHz]

Reflect reality??

10 102 103 104 105 106

It is difficult to measure e at DC

Reference the product catalog

Page 11: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Something that decreases the gain

2019/5/6 MPGD2019 La Rochelle, France 11

(C. Kim & M. Tomozawa, 1975)

Electrode polarization at low

frequency in a Soda lime glass

Dielectric constant VS frequency

50

40

10

20

30

0

frequency [Hz]

esubstrate VS Gain103

102

Gain

Hypothesis : Effective dielectric constant > 5.8

0 10 20 30 40 50Dielectric constant esubstrate

Garfield++ simulation

epoly film : 2.9 fix

esubstrate : free

5.8

ealkali-free glass : 5.8 [@1MHz]

Reflect reality??

As the dielectric constant of the substrate increases, the gas gain tends to decrease.

? 10 102 103 104 105 106

It is difficult to measure e at DC

Reference the product catalog

e

Page 12: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

2019/5/6 MPGD2019 La Rochelle, France 12

E field around the anode

eGas ~ 1

epoly film ~2.9

esubstrate

<<

esubstrate VS Gain103

102

Gain

0 10 20 30 40 50Dielectric constant esubstrate

Garfield++ simulation

5.8

?

kV/cm

102

10Cathode

Anode

0 100-100 200-200

0

-100

-200

100

200

[mm]

[mm]

1

Electric intensity

(using Elmer)

Page 13: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

2019/5/6 MPGD2019 La Rochelle, France 13

Dielectric discontinuous effects

Does it affect the gain?

0 100-100 200-200[mm]

0

100

200

[mm]

-100

0 100-100 200-200[mm]

kV/cm

102

10

1

Removing poly film

esubstrate : 20 esubstrate : 20

ePoly film : 2.9

Page 14: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

2019/5/6 MPGD2019 La Rochelle, France 14

103

102

Gain

0 10 20 30 40 50

Dielectric constant eGlass

Garfield++ simulationAnode : 400V

eglass VS Gain

5.8

Without Polyimide film

With Polyimide film

Dielectric discontinuous effects

Page 15: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

2019/5/6 MPGD2019 La Rochelle, France 15

103

102

Gain

0 10 20 30 40 50

Dielectric constant eGlass

eglass VS Gain

5.8

~ 40 % decrease

~ 70 % decrease

~ 10 % decrease

~ 10 % decrease

Without Polyimide film

With Polyimide film

Trends found from simulation studies

• As the dielectric constant of the substrate increases, the gas gain tends to decrease.

• The dielectric discontinuous makes the gas gain sensitiveto the value of the dielectric constant.

Dielectric discontinuous effects

Let’s remove the polyimide film!

Garfield++ simulationAnode : 400V

Page 16: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

TGV μ-PIC without polyimide film

2019/5/6 MPGD2019 La Rochelle, France 16

GainTotal : ~59000GEM: ~13m-PIC : ~4400

Mn Kα (5.9 keV)

ΔE/E 18.7 %(FWHM)

Ar escape

55Fe Spectrum @ 2.5 cm × 2.5 cm (~3100 pixel)

• We fabricated second TGV μ-PIC without polyimide film.

• Geometry parameters (Anode φ, Cathode φ, Pitch, Detective area, …) are same as for the first prototype TGV.

• Hollow anode vias do not affect the gas gain, that is confirmed by past experiments and simulation studies in TSV.

GlassTransparent

Source : 55Fe(5.9 keV)

Hollow anode

Page 17: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Gain curve

2019/5/6 MPGD2019 La Rochelle, France 17

Garfield++ simulation:Second TGV

104

103

Ar : C2H6= 90:10 (1atm)

55Fe Spectrum @ 2.5 cm × 2.5 cm

Clearly confirm Ar escape

Absorbed in induction space

• The gain of the second TGV is about twice that of the first TGV.

• In the second TGV, the experimental and simulation gain values are consistent.

Plot gain of each 4 regionsUniformity ~3.0% RMS

55Fe

Induction

DriftGEM

m-PIC

Gain of μ-PIC (GainTotal/GainGEM)

GainTotal : ~50000GEM: ~4.2m-PIC : ~12000

m-P

IC G

ain

440 460 480 500 520 540 560 580

Anode voltage [V]

Experiments:First TGVSecond TGV PCB μ-PIC (sample1)PCB μ-PIC (sample2)

Page 18: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Summary• We are developing a m-PIC for the MeV gamma-ray telescope

• We manufactured two types of the m-PIC using a glass substrate with DNP aiming at high gas gain

• The gain of the second TGV m-PIC without the polyimide film was about twice as high as the first TGV with the polyimide film.

• The gain of the second TGV m-PIC reached ~15,000 (discharges rates ~ 1 / several min)

• It was found from Garfield++ simulation study that the dielectric constants discontinuous makes the gas gain sensitive to the value of the dielectric constant.

2019/5/6 MPGD2019 La Rochelle, France 18

Thanks to DNP for the development and manufacturing

Page 19: Development of -PIC with glass substrate aiming at high gas gain · 2019-06-04 · Development of m-PIC with glass substrate aiming at high gas gain Mitsuru Abe (Kyoto U.) 2019/5/6

Future works

2019/5/6 MPGD2019 La Rochelle, France 19

• Feasibility study of manufacturing large detection area (> 30 x 30 cm2) TGV m-PIC using a glass panel

• Long term modulation & Charge-up on substrates by irradiation of high intensity radiation

• Study of m-PIC + mesh (mesh selection, stable operating voltage setting, gain uniformity, …)