Spin Coat, Spin Dry

The DELTA 6 RC spin coater module is a simple andeconomical module for applying highly accurate pro-cessing to wafers up to 6 ( 150 mm) or substratesup to 55 (125125 mm). The DELTA 6 RC spincoater module consists of a bench mounted spinnerunit and a remote control unit which is connected by a flexible cable and can be located outside the imme-diate work area. The wafer is held by a vacuum chuckor by a low contact chuck. The specially designedspinning bowl, in combination with an integrated splashring, allows a non splashing coating or drying process.For safety reasons the spinning bowl is covered by atransparent, sensor controlled lid.

Features and benefits

Pieces up to 6, Wafers up to 6, Substrates up to 55

Integrated splash ring

Remote control unit

Programmable process time, speed andacceleration

For wafer drying or coating

Vacuum and low contact chuck

50 recipes, each with 10 steps

Robust and convenient control

Module for bench mounting

Available as Table Top Spinner in poly-propylene housing

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Delta 6 RC Bench Mounted

Delta 6 RC Table Top

To receive a quote from your local sales office go to: www.suss.comor send an email to: Delta@suss.com

ASIA

SUSS MicroTec KK (Japan)GITC 1-18-2, Hakusan, Midori-kuYokohama, Kanagawa, Japan 226-0006Phone (+81)-45-931-5600 Fax (+81)-45-931-5601

SUSS MicroTec (Shanghai) Co., Ltd.580 Nanjing W. RdNanzheng Building Room 606 200041 Shanghai PRCPhone (+86) 21-52340432 Fax (+86) 21-52340430

SUSS MicroTec (Taiwan) Co., Ltd.8F-11 No. 81 Shui-Lee RoadHsin-Chu 300 TaiwanPhone (+886)-(3)-5169098 Fax (+886)-(3)-5169262

SUSS MicroTec Co., LTD (South and Northeast Asia)3388/92-93 25th Floor Sirinrat BuildingRama IV Road Klongtoey Bangkok 10110 ThailandPhone (+66)-(0)-2350 6038 Fax (+66)-(0)-2633 5728

EUROPE

SUSS MicroTec Ltd.Unit 1 Scopwick Lodge FarmScopwick Heath Lincolnshire LN4 3DL EnglandPhone (+44)-(0) 1526-323147 Fax (+44)-(0) 1526-322214

SUSS MicroTec S.A.S.BP24 131 Impasse Barteudet F-74490 Saint Jeoire FrancePhone (+33)-(0) 4 50 35 83 92 Fax (+33)-(0) 4 50 35 88 01

SUSS MicroTec Test Systems GmbHSss-Strasse 1 D-01561 Sacka/Dresden GermanyPhone (+49)-(0) 35240-73-0 Fax (+49)-(0) 35240-73-700

SUSS MicroTec Lithography GmbHSchleissheimer Strasse 90D-85748 Garching/Munich GermanyPhone (+49)-(0) 89/3 20 07-0 Fax (+49)-(0) 89/3 20 07-162

NORTH AMERICA

SUSS MicroTec Inc.Western Regional Sales Office8240 So. Kyrene Road Suite 101 Tempe, AZ 85284-2117 USAPhone (+1) (480) 557-9370 Fax (+1) (480) 557-9371

SUSS MicroTec Inc.228 Suss Drive Waterbury Center, VT 05677 USAPhone (+1) (802) 244-5181 Fax (+1) (802) 244-5103

System Configuration

EC-Motor Ten programmable steps Number of recipes: 50 Number of steps per recipe: 10 Acceleration approx. 3000 rpm/sec programmable

in 10 steps Programmable process spin speed up to 6.000 rpm Programmable process time from 1 up to 999 sec Manual ON/OFF-vacuum switch Integrated vacuum gauge Drain connection: OD 32 mm polypropylene tube

Requirements

Voltage: 230VAC; 50/60Hz; 2A or 110VAC; 60Hz; 4A

Vacuum: min. 0.7bar N2 (optional): 56bar Media disposal: bottle or house drain

Options

Table top cabinet Nitrogen blow off Vacuum pump

Dimensions

Spinner module (WDH): 325325270 mm (12.812.810.6)

Controller (WDH): 28714460 mm (11.35.72.4)

Data, design and specification of custom built machinesdepend on individual process conditions and can varyaccording to equipment configurations. Not all specifi-cations may be valid simultaneously. Illustrations in thisbrochure are not legally binding. SUSS reserves the right to change machine specifications without prior notice.