crystalline structure of photoresist film
DESCRIPTION
The molecular orientation of polymers in a pre-cast dry film is revealed with electron microscopy in the field emission mode.TRANSCRIPT
Examining Crystalline Structure of Pre-‐Cast Photoresist Film
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Electron microscopy in Field Emission Mode!
First Layer or Lamella
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Second Layer or Lamella
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PREPARATION OF SAMPLE
• Pre-‐cast photoresist dry film is etched with 10% w/v NaOH causing more soluble component to dissolve, leaving behind less soluble component appearing as verMcal cylinders.
• SeparaMon of film is arMfact cause by heat transfer of electron beam.
CLEAVAGE MECHANISM BETWEEN LAMELLAE DURING STRIPPING
• SEM’s reveal that the dry film is polycrystalline and that lamellae slide over each other during thermal stress.
• This implies the forces between lamellae are weaker than the forces between the verMcally oriented polymer molecules.
Proposed Mechanism for Ordered Structure
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