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Business idea: design, fabrication (clean-room environment subcontracting), and characterization of MEMS chemical sensors suitable for integration into embedded systems

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Business idea: design, fabrication (clean-room environment subcontracting), and characterization of MEMS chemical sensors suitable for integration into embedded systems

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Index

Introduction.

Microelectronic gas sensors.

Embedded systems.

Business opportunity: microelectronic gas sensors integrated into

embedded systems.

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Introduction

Various forces, including political, economic and social, are driving the

need to tightly couple embedded devices and sensors, e.g.,

microelectronic gas sensors with established applications, such as

building automation, healthcare, automotive, energy or aerospace. The

result will create new opportunities, technical challenges, and the need

for new products.

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Microelectronic gas sensors

Gas sensor performance parameters:

• Sensitivity: detection at ppm (particles per million) level.

• Selectivity: not affected by other gases.

• Response time: time required to take a reading (valid signal).

Different types: metal oxide (MOX) semiconductors, piezolectric, catalytic,

optical and electrochemical.

Metal oxide semiconductors are the most widely manufactured.

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Microelectronic gas sensors (II)

Such sensors consist of gas-sensitive metal oxide materials deposited

onto interdigitated electrodes with RTD (resistance temperature detector)

and heater. The image shows platinum interdigitated electrodes with

platinum RTD and heater.

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Microelectronic gas sensors (III)

Microelectronic gas sensors based especially on microsystems also

known as MEMS (including sensor functions and also process or action

functions) have been the subject of increasing interest in recent

years. They are made in clean-rooms. The image shows a clean-room.

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Embedded systems

Likewise, over two decade ago (1991), the late Mark Weiser, chief technical

officer of Xerox PARC, described the future vision of ubiquitous computing

[Weiser 91] that is transforming our lives.

Before arriving where it is today, the Internet evolved from the first

generation of connected mainframe computers to the second generation,

characterized by e-commerce and email on PCs and servers, and on to the

third generation, typified by social connectivity applications and the vast

expansion of mobile devices.

We are now on the threshold of a fourth phase in the evolution of the

Internet. A network space where billions of intelligent embedded devices

will connect with larger computing systems, and to each other, without

human intervention.

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Embedded systems (II)

In support of this concept, John Gantz [Gantz 09] of IDC forecasts 15

billion devices will be communicating over the network by the year 2015,

as illustrated in below figure. They will involve a massive build-out of

connected devices and sensors woven into the fabric of our lives and

businesses.

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Business opportunity: microelectronic gas sensors integrated into embedded systems

Integrated into embedded systems.

Numerous areas of application:

• Building automation.

• Health.

• Automotive.

• Energy.

• Aerospace.

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Business opportunity: microelectronic gas sensors integrated into embedded systems (II)

The result will create new opportunities, technical challenges, and the need

for new products. A long list. Currently, these examples under development.

• A gas sensor to detect ammonia at buildings that can be interfaced to

KNX (fieldbus system) alarm system.

• Sensitive ammonia detection system in exhaled human breath using a

metal oxide-based sensor.

• Ammonia/nitrogen oxides gas sensor integration with ECU (Engine

Control Unit) for combustion process control in modern diesel engines.

• A lightweight gas analyzer applied to combined cycle plants fueled wit

h natural gas.

• High sensitivity and fast response gas sensor for hydrogen motors.

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Business opportunity: microelectronic gas sensors integrated into embedded systems (III)

Fabrication process:

1. Preparation of a microelectronic gas sensor specification report, e.g.

active material, interdigitated electrodes, substrate, deposition technique,

etc.

2. Subcontracting of a clean-room environment to fabricate sensor

prototypes.

3. Structural and electrical characterization (test beds) of sensor

prototypes.

4. Connection to a microcontroller and/or FPGA. Computation and

communication capabilities.

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Bibliographic references

[Gantz 09] J. Gantz. “The Embedded Internet: Methodology and Findings”.

IDC, January 2009.

[Weiser 91] M. Weiser. “The Computer for the 21st Century”. Scientific

American, September 1991.

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Questions?

Send to info at Ikersens (commercial name, request sent to the Spanish

patent and trademark office).

[email protected]