bm658 lecture 18 nanolithography and nanopatterning
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Nanolithography and Nanolithography and NanopatterningNanopatterning
BM658Lecture 18
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Electron Beam Lithography
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EBL Attributes
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EBL Setup
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EBL Applications
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EBL Process Flow
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Photollithography (lift-off)
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EBL Examples
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Emerging Nanopatterning
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Embossing and Nanoimprinting
• Nanoimprint– 10nm, aspect ratio 10:1– Pressure must be uniform– Thermal cycle (longer processing time, low fidelity)
• Embossing with soft mold– 20nm, aspect ratio 1:1
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Nanoimprint lithography
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Nanoimprint lithography # 1
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Nanoimprint lithography # 1
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Nanoimprint lithography # 1
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Nanoimprint lithography # 2
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Nanostencil lithography
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Laser Assisted Direct Imprint
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Laser Assisted Direct Imprint
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Shadow Mask
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Nanotemplates – Sphere Nanolithography
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