nanolithography using di nanolithography software for explorer
DESCRIPTION
Before. After. Nanolithography using DI Nanolithography Software for Explorer. PMMA C6 spun at 4000 RPM onto a Si(100) Substrate: thickness ~ 200 nm Baked at 115 o C for 30 seconds Pattern scratched onto surface: Previously used NSC A tip did the actual writing T-B ~ -5 nA, Setpoint = 5 nA - PowerPoint PPT PresentationTRANSCRIPT
![Page 1: Nanolithography using DI Nanolithography Software for Explorer](https://reader035.vdocuments.site/reader035/viewer/2022062501/56815bf2550346895dc9e460/html5/thumbnails/1.jpg)
Nanolithography using DI Nanolithography Software for Explorer
PMMA C6 spun at 4000 RPM onto a Si(100) Substrate: thickness ~ 200 nm Baked at 115oC for 30 seconds Pattern scratched onto surface:
Previously used NSC A tip did the actual writing T-B ~ -5 nA, Setpoint = 5 nA With feedback off, a relative z offset of 100 nm was added to the z scanner to move
the tip closer to the surface Write speed was 1m/s
AfterBefore
![Page 2: Nanolithography using DI Nanolithography Software for Explorer](https://reader035.vdocuments.site/reader035/viewer/2022062501/56815bf2550346895dc9e460/html5/thumbnails/2.jpg)
Nanolithography: OU Symbol
![Page 3: Nanolithography using DI Nanolithography Software for Explorer](https://reader035.vdocuments.site/reader035/viewer/2022062501/56815bf2550346895dc9e460/html5/thumbnails/3.jpg)
Nanolithography: OU Symbol - Zoom in
![Page 4: Nanolithography using DI Nanolithography Software for Explorer](https://reader035.vdocuments.site/reader035/viewer/2022062501/56815bf2550346895dc9e460/html5/thumbnails/4.jpg)
Nanolithography: OU Symbol - Line Scan
![Page 5: Nanolithography using DI Nanolithography Software for Explorer](https://reader035.vdocuments.site/reader035/viewer/2022062501/56815bf2550346895dc9e460/html5/thumbnails/5.jpg)
Nanolithography: OU Symbol - 3D View
![Page 6: Nanolithography using DI Nanolithography Software for Explorer](https://reader035.vdocuments.site/reader035/viewer/2022062501/56815bf2550346895dc9e460/html5/thumbnails/6.jpg)
Nanolithography: Luke -first write
![Page 7: Nanolithography using DI Nanolithography Software for Explorer](https://reader035.vdocuments.site/reader035/viewer/2022062501/56815bf2550346895dc9e460/html5/thumbnails/7.jpg)
Nanolithography: Vertical and Horizontal lines
![Page 8: Nanolithography using DI Nanolithography Software for Explorer](https://reader035.vdocuments.site/reader035/viewer/2022062501/56815bf2550346895dc9e460/html5/thumbnails/8.jpg)
Nanolithography: Tip image Before and After