basic preventive maintenance on sputtering systems
TRANSCRIPT
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B y Taka Holloway
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S puttering is a process that can deposit any material on any substrate
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SputteringEvaporation Physical
S puttering takes place in a vacuum
It is a metallization process
S puttering is not a chemical process
It is referred to as physical vapor deposition(PV D)
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1. Ensure all operators know the proper procedures for placing a tool down.
-this a llows consistent tracking of downtimes for all tools
-and provide written explanation of actual performance of tool
4. Proper procedures include familiarization of functions within the operating system
-you must make sure all tools and parts that required are present
S teps before you begin Preventive Maintenance
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Preventive Maintenance Once set up properly, perform required steps as listed in
the report to cool and vent the chamber M ust be performed prior to performing a kit and or a
target change Once conditions are met prior to opening the chamber,
follow step-by-step procedure to perform a kit and or target change
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Kit and Target Change1.Check for other conditions that may require maintenance activities
-regeneration of cryopumps-{this will decrease the overall down time of sputter system}
2.Once kit and or target changes have been performed
-you can proceed to allow the tool to complete the remaining steps for a proper PM -{while completing the PM process, operators should utilize this time to reassemble kits for future PM }
-also begin to clean the immediate area and return all parts and tools-
3.F inally, operators must be familiar with all of the required steps from the start to finish of the PM
-in case the final steps require operator assistance-
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-this includes running paste(conditioning),particle checks, and checking thickness of film-without proper conditioning, you run risk of defect issues-full qualifications are necessary to guarantee the tool is running according to specifications
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Operators becoming certified in performing PM s on sputtering systems will allow better utilization of human resources.
A s industry increases production, it is important to release maintenance technicians and engineers from having to perform routine PM S
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For more detailed information on Sputtering Systems Request a copy of the material on Power Tools for
Technical Communication, Preventive Maintenance in Performing Kit and Target Changes for Sputtering Systems