attachment d.l summary of operating plant on-site

IPPCAtmlication Form

ATTACHMENT D.l SUMMARY OF OPERATING PLANT ON-SITE

D.1.1 Chemical and Gas Storage /Handling Facilities (- See Section H.l for more detail)

Chemicals

Chemical Delivery and Storage Chemicals will continue to be delivered via the western access road to the chemical warehouse where they are temporarily stored prior to use in the process. The new chemicals and their properties associated are described in Table G of this submission; material handling is described in Section H. 1.

Fab 24-2 and Fab 24-3 will utilise the same chemical warehouse currently used to serve Fab 10, Fab 14 and Fab24 with inventory levels maintained at the lowest levels practicable in a near just- in-time management system.

Chemicals are typically delivered in 210 litre drums or integrated bulk container (IBC) totes. The bulk chemicals are then distributed to the process tools by a dedicated bulk chemical distribution system (BCDS) within each Fab. Drums or totes are transferred to the hazardous process materials (HPM) on the areas protected by the CSS. Incompatible chemicals i.e. corrosive, oxidising or flammable materials are appropriately segregated in the HPM areas.

Chemical Distribution The containers are fitted with pumper systems via internal dip tubes integral to the containers and the liquid extracted into distribution lines via diaphragm pumps. The lines lead to a distribution box that contain control values to start or stop the supply of the chemical to the process tool which are linked to level indicators to initiate flow or otherwise as directed by manual operation. Both the distribution boxes and the distribution lines are double contained for aqueous or corrosive chemicals. Solvents are transferred by welded, stainless-steel piping.

Leak sensors detect the presence of any material in the distribution boxes and automatically stop the supply of material. Any leaks contained in the boxes, drain to the appropriate waste collection system or the AWN.

The BCDS system is summarised below along with the safety and environmental control measures in place;

Attachment D of 19 Intel Ireland Ltd.

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24

I

;

IPPC Application Form ~

THE BULK CHEMICAL DISTRIBUTION SYSTEM Safety and Environmental Control In Place

Delivery by road tanker and storage in on- >I

Transfer to hazardous process material area

l-l

pgi+izl &stnbuhon to process via distribution

Appropriate road haulage vehicles aud traiued drivers Appropriate documentation aud labeling

Trained site ‘Dangerous Goods Safety Advisors’ @GSA) Segregation of incompatible chemicals

Fully bunded and CRC coated areas Chemical scrubbing of warehouse air

Transfer in areas covered by contained surface water system Site handling procedures

Trained personnel

Segregation of incompatible materials Fully bunded and CRC coated area

Double contained aqueous pipes Welded stainless steel pipes for solvents

Distribution boxes with control valves Leak detection systems with automatic supply shut off valves

Leak detection alarm triggering response from technicians

Return of empty containers to chemical warehouse and subsequent collection by

supplier

As for chemical warehouse above

; intel Irela”nd Ltd.

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24

IPPC Application Fom

Chemicals used in smaller quantities on-site are transferred direct to the process tool using a double contained transfer trolley.

Gas Storage and Handling

The gases used on-site can be categorised into either bulk gases or speciality gases.

Bulk Gases Bulk gases used on-site include various grades of nitrogen (Nz), oxygen (OZ.), helium (He) and argon (Ar). N2 and 02 are produced on-site in the air separation units of the nitrogen plants with one nitrogen plant being associated with each of the Fab 10 and Fab 14 facilities, recently the FablO nitrogen plant has been shutdown to improve energy efficiency on site. There is also sufficient capacity with the Fab14 plant to supply nitrogen and oxygen gases to Fab 24 and another nitrogen plant was therefore not required as part of the Fab 24 & fab24-2 development. However a nitrogen plant will be required as part of the Fab24-3 development. Helium and argon are imported to the site. Hydrogen is also used in the process and is brought onto site by road tanker. All bulk gases used in the Fab 24-3 plant will be stored in the bulk gas yard in Fab 24-3 before distribution to the fab areas, Fab24-2 will use the existing Fab24 bulk gas yard.

As with existing facilities the Fab24-3 bulk gas yard will have appropriate separation distances between the hydrogen tanks and other bulk tanks.

Speciality Gases Speciality gases are passed to the process tools either from the purpose built gas pad or from specialist gas cabinets constructed in the sub-fab to serve specific tools. Speciality gases used in the process include PFC gases in etching activities, dopants and in reactions used to build thin films on a wafers surface.

The gases are stored in cylinders and are connected to gas lines in the gas pad areas or gas cabinets. All of these areas have specific leak detection systems to ensure that uncontrolled releases are identified and corrective action enacted.


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24

IPPC Amlication Form

D.1.2 Ultrapure Water Production

Ultra pure water or UPW is a vital component of the manufacturing process with contamination free water being primarily required as an aggressive solvent to wash and clean the wafer after individual production steps. Trace amounts of impurities in the UPW can lead to increased wafer defects and reduce die yield. UPW is produced by passing water through reverse osmosis membranes combined with ion exchange resins to remove impurities associated with the water. The reject stream is sent to the Acid Waste Neutralisation plant for waste water or if of sufficient quality for reuse, it is re-used in plant systems requiring Industrial Water. The reject water is characterized by the presence of dissolved solids (mainly sulphates, fluorides, chlorides and phosphates) present in the original town water supply. Each -fab building has a separate UPW plant to produce UPW and additional small scale UPW plants are being considered in future downstream of the manufacturing process to regenerate suitable waste waters for water-reuse applications

FablO, Fab14 and Fab24 all have an associated Ultra Pure Water or UPW plant. Fab24-3 wil also have an associated UPW. The UPW plant produces ultra pure water and hot ultra pure water. There are 3 modules to the UPW plant; the make-up section, primary loop and polish loop.

Make-Up Loop The make-up loop consists of multimedia and cartridge filters to remove suspended solids from the incoming supply water. Additional stages of filtration are carried out during the processing of UPW to remove finer solids using filter cartridges. These cartridges are disposed of to landfill. The make-up loop can be stopped and started as required. The water is then heated to 22°C. In all site UPW plants heat recovered from chiller condensate is used for this purpose. This water and energy saving measure will also apply to F24-3.

Reverse Osmosis The water is passed through the first pass Reverse Osmosis system to remove dissolved ions. Dissolved salts within the water are removed by passing water under pressure through two different sets of semi-permeable membranes. Prior to treatment the water pH is adjusted to

e mildly acidic level by the application of low quantities of sulphuric acid. This prevents scale build up in the system. Accumulations of these salts are also prevented by the addition of a flocculent which maintains the salts and suspended crystals. The backwash is captured either for water re-use or discharged to the AWN directly depending on the conductivity levels associated with the water. The water is then stored in a Reverse Osmosis storage tank.

Primarv System The primary system feeds from the RO tank and is a continuous process. Water enters the second pass RO system for dissolved ion removal, The salt rich waters that are prevented from passing through the membranes are sent back to the first pass RO inlet for improved efficiency of water use.


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24

IPPC Application Form

EDZ Electra-de-ionisation or ED1 is the next step in the Fab24 system but it is not present in FablO and FablQ. Dilute water enters from the bottom of the stack and flows through the IX resin in a dilute chamber. Normal ion exchange occurs to produce high purity water. Once on the resin the positive ions are drawn to the left to the cathode through the cation membrane and the negative ions are drawn to the right to the anode through the anion membrane. In the left cont. chamber the positive ions are repelled by the cation membrane, so they cannot re enter the dilute chamber. In the right cont. chamber the positive ions are repelled by the anion membrane, so they cannot re enter the dilute chamber. The large electric potential between the electrodes cause water in the dilute chamber to split into H+ and OH- ions which regenerate the resin. Cartridge filters at the outlet of the ion exchange beds move fine particles and resins beads carried over from the ion exchange beds. The use of ED1 means that no chemicals are used to regenerate the beds - regeneration occurs continuously due to the draw from the charged electrodes. Zen exchange The water then passes through the primary Ion exchange beds. Ion Exchange removes dissolved ions (including weakly charged Silica), and organics. It allows the removal of trace amounts of dissolved ions that is essential for the production of 18 megohm-cm water. The system has mixed bed ion exchange resins i.e. they each bed has anion and cation resin. Ion exchange beds are regenerated using sodium hydroxide and hydrochloric acid. Regeneration occurs on a monthly basis in FlO and Fab14 and every 6 months in Fab24. In F24-3 regeneration will take place every 6 months as an ED1 system will also be installed.

Finally the water flows through cartridge filters to remove any suspended particles or ion exchange beads that are carried over. From here the water is fed into UPW storage tanks. Ozone is introduced to the UPW storage tank for sterilization.

The Polish Loop The water is passed over W light for ozone and organics destruction. It then passes through the vacuum degasifier to remove dissolved oxygen. More ion exchange beds are used for polishing the water; these beds are not regenerated but replaced on an annual basis. The water is finally UV sterilised and passed through microfilters before being pumped to the fab. Water returned from the fab is directed towards the UPW storage tank for recirculation

A schematic of the Fab24 UPW system is shown overleaf.

Attachment D PageSof Intel Ireland Ltd.

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24

r scdi”m BiSUlMe lstPasSR0

I a-l TOC reduclng UV’s

I

” 0, destruct UV

.LI ‘I- RO Storage Tanks

-1 I

Exchange -1 L1c

Polished CW trim HX

Sterlllzer uv

UPW Distribution

Pumas

. . . ) .

. . , : , .

,.

,>!.i ” .

; . ; . /

. : : :

Attachment D a Pag f19

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24


D.1.3 Utilities (Heat and Power)

Heat Heat is required to maintain the air temperature within the buildings on-site. This heat is provided by boilers on-site. Small scale boilers are present for buildings IRl , IR3 and warehouse areas. Larger scale boilers for the main fabrication buildings are housed in dedicated energy centers for each Fab. Boilers provide approximately 20 Mw of thermal load capacity in Fab 10 and Fab14, in Fab24 there is approximately 37MW thermal output and with the addition of 2 boilers to support Fab24-2 which is requested in this application the thermal load output in the Fab24 energy centre will increase to 52MW. Fab24-3 energy centre will contain 5 boilers at a thermal output of approximately 37MW. The actual demand is typically much less than this, however capacity is installed to be able to provide the thermal load required on a design day of coldest winter conditions and assuming no redundancy from chiller heat recovery systems. The boilers operate on gas fuel so emissions of sulphur dioxide are negligible. Carbon monoxide is controlled to very low levels though careful combustion control and all boilers in Fab 14 and Fab 24 are fitted with Low-NOx burners to minimise emissions of oxides of nitrogen. Low NOx burners will be fitted to all future boilers and the Autoflame computerised operating system will ensure the greatest efficiency with lowest emissions is achieved.

Electricity Electricity is currently supplied by the ESB. Details of electricity usage are provided and energy efficiency measures are outlined in section G.4

D.1.4 Air Handling and Cooling Systems

The air provided to the cleanroom environment is initially extracted from outside air by air handling units (AHU) across the site. The air is filtered across high efficiency particulate arrestment (HEPA) filters to remove particulate and then temperature adjusted to control humidity. The air is chilled to approximately 6’C to ensure constant water content in the air and is then heated to room temperature. Passing the air through chiller units located in the central utilities building (CUB) chills the air and removes excess heat from the air. Heat exchangers connected to the on-site boilers then reheat the air. Air handling units are also provided for office space air. Heat recovery systems incorporated into chillers to supplement boiler heating requirements are described in Section G.4.

The excess heat extracted is transferred to outside air by cooling towers. These towers pass air through the cooling circuit water. The water is cooled by a combination of air cooling and evaporation of the water itself. This evaporation is evident in the visible plume of water that can be seen on occasion to the north of the plant. The water in the towers is dosed with a biocide to prevent bio-growth accumulation and antiscalant to prevent scaling.

Two types of cooling tower will be present on-site. Fab 10 and Fab 14 have induced draught fans on the roof of the tower. The Fab 24 and future towers use ground-mounted blowers. This


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24

IPPC Auulic.ation Form

change in design is to allow noise emissions from these sources to be controlled more easily through the incorporation of noise attenuation enclosures and a noise retention wall to the north of the cooling towers to control any residual noise from water pumps and moving air and water. A similar design will be followed for the Fab24-3 plant.

D.1.5 Emission Reduction and Abatement Systems

The process and supporting operations generate various emissions and waste streams. Many of these are treated on-site to ensure impacts on the environment are minimized. Waste streams are also recycled wherever possible and if recycling is not achievable, because the materials are not suitable for recycling or no market can be found, then wastes are disposed of in line with regulatory requirements.

Methods of minimising emissions from the process initially and their potential significance include the application of cleaner technology in the tools that are employed and the use of lower

0 volatility substances and more benign substitutes. Residual emissions are then treated by abatement systems if further processing is required. Cleaner Technology and Resource minimization are covered in detail in Section G.

Process Emission Minimisation

Recent examples of the application of emission or waste reduction techniques include the introduction of cleaner technology and material substitution in conjunction with existing and new abatement systems;

(i) Cleaner technology

Design for the Environment The Intel Environmental Technology Development group is involved throughout the process development timeframe and has input into manufacturing process development, chemical selection, waste management, facility systems design and manufacturing equipment selection

a For each technology, goals are set for specific types of emissions; for example mass of VOC’s or copper emitted per wafer produced. For successive technologies goals are set equal to or tighter than preceding technologies thereby ensuring Intel’s environmental footprint does not grow in proportion to the scale of manufacturing carried out.

Supplier Environmental Pe$ormance Targets Equipment or ‘tool’ design is a significant’ area of research for Intel and Intel equipment suppliers. Intel requires that equipment suppliers design tools to minimise environmental emissions and resource consumption by including specific target emission levels on a per wafer processed basis in the equipment contractual purchase specifications. This practice ensures environmental considerations are designed into the process tools from the conceptual phase. Tool vendors are required to select gases and chemicals that can meet the target and must then catty out emissions characterisation on exhaust and waste streams. Since Intel introduced environmental emission target to equipment vendor purchase specifications the vendors have

Attachment D I

of 19 Intel Ireland Ltd.

.

,’ ‘:. : : ,:. .

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24


become aware of the environmental considerations arising from their tools and are often in a more appropriate position than Intel to address any issues. The practice has resulted in dramatic reduction in emissions to air, water conservation and more recently to electricity consumption and have contributed to the overall reductions seen in PFCs, VOCs, scrubbed exhaust emissions and water consumption that are described in greater detail later in Section G.

The application of sub atmospheric distribution systems for dopant chemicals As well as providing significant safety benefits from preventing releases of chemicals in the event of a failure to the integrity of the cylinder the use of SDS systems also reduces the amount of contaminated material generated in the doping process that requires the off-site disposal of hazardous waste. The dopant material was used in solid form, but by using a gas, the application of the dopant in the process can be more carefully controlled. This reduces the amount of equipment cleaning required and hence the generation of equipment wipes disposed of from the site.

(ii) Material substitution

Replacement of ferric cyanide abrasive The P856 process uses a ferric cyanide slurry to chemically and mechanical polish the wafer. The residual cyanide containing slurry is treated to remove traces of cyanide in the cyanide destruct system (CDS) where the material is treated at high temperature. The inert slurry is then sent to AWN. The use of this chemical will be replaced in the P858 and 12 inch processes by more benign slurries based on alumina and silica. These elements are commonly found in soils and rocks. A mild chemical abrasive will be added to the slurry in the form of dilute hydrogen peroxide and a final buffing with citric acid.

With production focusing more and more on the 12 inch process for the site, the use of the CDS in Fab 14 will diminish and no CDS will be present in Fab 10, Fab24 or Fab 24-3.

Replacement of high global warming potential PFC gases Intel has committed in a voluntary agreement to reduce emissions of PFC gases (in terms of net global warming potential) to 90% of the 1995 baseline regardless of production levels. To achieve this, Intel is substituting current gases with lower global warming potential gases where appropriate. This includes replacement of C2P6 with FMAT and the use of NF3 gas in the 12 inch process. Point of Use scrubber systems are also to be employed (see next paragraph)

(iii) Recycling

An on-site recycling center in conjunction with additional off-site recycling capacity is operated by a certified contractor to segregate and recycle waste. Approximately 80% of non-hazardous wastes (excluding the chemical process waste calcium fluoride/calcium phosphate) on-site are currently recycled with non-recoverables being disposed off in licenced facilities in Ireland should the recycling or disposal infrastructure not be available for the material concerned. This rate of recycling is above average for the manufacturing sector. The process chemical non-

Attachment D of I9 Intel Ireland Ltd.

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24

:. .‘


hazardous waste stream calcium fluoride/calcium phosphate is excluded from the non-hazardous waste for the purposes of calculating this recycling rate.

D.l.6 Emission Reduction and Abatement &stems for Releases to Air

(9 Point of Use Systems

Intrinsic to the design of certain tools using relatively high concentrations of fluoride-containing and pyrophoric gases including Oxide Etch, High Density Plasma and Novellas Sequel thin films tools are point of use (POU) treatment systems. Such systems have been used for many years at Intel to control pyrophorics such as silane, and to maintain equipment uptime by reducing the buildup of solid materials in the exhaust duct. On the new manufacturing process, many of these devices are combined wet scrubbers and thermal treatment units which, in addition to control pyrophorics and the buildup of solids, will also reduce HF and other fluorinated byproduct

* emissions to exhaust. A few of the manufacturing steps which don’t use pyrophorics simply have wet scrubbers without the thermal chamber, and a few others actually use two separate devices, rather than a combined thermal chamber/scrubber. The combined thermal chamber/scrubbers used on most of the process steps have two sections.

Thermal chamber The first section is a high temperature thermal chamber used to destroy pyrophoric or L spontaneously combustible gases used in small quantities on site such as silane. This is an essential safety feature to prevent the risk of Kre or explosion. Existing systems described in the original IPC licence application (Attachment 9.12 and 9.33, Dee 1996) with similar applications include dynamic dilution (neutralisation) chambers and guardian burn boxes. Fluoride containing compounds such as PFC gases used in the tools are also converted to soluble products in the high temperature chamber in conjunction with a hydrogen source.

Water based Scrubber The second section is a water-based, tool specific scrubber through which air from the tool i passed after treatment in the thermal chamber. The water scrubber takes out soluble products such as fluoride before air is passed onto the main acid gas scrubber systems on-&e. The scrubber water is then discharged to the HF waste (HFW) treatment plants on-site where the fluoride is converted into an inert solid and disposed of off-site.

The POU systems therefore have the following benefits;

l Eliminate the risk of fire or explosion from pyrophoric gases

l Reduce PFC emissions with high global warming potentials

l Reduce fluoride emissions to air through conversion from gaseous fluoride into an inert solid in conjunction with the HF waste treatment plants

Attachment D Page 1.0 of 19 Intel Ireland Ltd.

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:24


l Maintaining tool uptime by reducing the buildup of solids in the ductwork

A detailed description of the water-based Point of Use (POU) systems is included in Section F. 1

(ii) Acid Gas Scrubber Systems

Corrosive gases or air surrounding tools where corrosive liquids are used in the process are extracted to the acid gas scrubbing system. This primarily relates to the etch, thin films and diffusion functional areas of the process on Fabs 10, 14 and 24 and future facilities Fab24-2 and Fab24-3. The chemical warehouse and gas pad areas also have water based scrubbers in the event of an uncontrolled release. Whilst these scrubbers are continuously in operation, they do not see an incoming corrosive gas burden except in the unlikely event of an emergency condition.

Tool Tie In, Scrubber Design and Control Individual tools are connected to the scrubbed exhaust by manually adjustable and lockable dampers. The extracted air is passed through a packed tower in each of the scrubber units with pressurised water sprayed in the reverse direction to the passage of air. The air extracts the corrosive elements contained in the gas stream and neutralizes and solvates them in the scrubber liquor. The packing in the tower optimizes the level of contact and contact time between the passing airstream and the counterflow water.

The scrubber liquor is controlled by pH probes and make-up water is added into the scrubbers to return the pH towards neutral conditions in line with the acidic loading entering the scrubber unit. The make-up water also replaces lost water resulting from evaporation. Both pH and conductivity are continuously monitored with back up probes in place in the event of a probe failure. Some Fab14 and all of Fab24 scrubbers operate caustic dosing to improve efficiency. Fab 24-2 and 24-3 scrubbers will also be dosed with either caustic or another suitable alkaline material such as a carbonate to control pH response.

The gas pad and warehouse scrubbers have a separate caustic dosing system that can add caustic to these scrubbers in the event of a rapid pH drop. This is due to the potential for these scrubbers to see a high burden of corrosive gas in the unlikely event of an emergency. The burden into the scrubbers for the main production building is very low and typically below current IPC licence limit concentrations even before any scrubbing has taken place.

Should conductivity exceed a conductivity threshold setpoint in the scrubber liquor sump, the liquor is bled off and sent to the AWN until the conductivity drops. This ensures the efficiency of the scrubber operation is maintained and that scrubbed material is not re-entrained in the gas stream and released to air.

Maintenance The scrubbers are maintained by regular visual maintenance as part of the rounds and readings by technicians. These identify the state of operation of the units as per other environmental control equipment. If any problems are identified with environmental implications, the EHS department is notified via the EHS subsection of the passdown system. The scrubbers are also

Attachment D Page I1 of 19 Intel Ireland Ltd.

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25


cleaned when the differential pressure setpoint across the scrubbers is reached. The packed material is either replaced or cleaned with a mild acid solution to remove any scale build up. Scrubber sumps are also cleaned of any solid residues that are sent off-site for disposal. pH probes are also regularly calibrated and operate in a duty/standby configuration in case of a probe failure.

Redundancy Two recirculating pumps are present on each scrubber operating in a duty/ standby mode. Duplicate power systems are also provided to the pumps in the event of a power supply failure to either pump. All primary control systems are monitored by the on-site facilities management system (FMS) and an appropriate response enacted from either shutdown of the system to the raising of an alarm for response by a trained on-site technician if parameters go beyond pre-set limits.

Each scrubber unit has two fans at the scrubber outlet to ‘extract air from around the process tools. The fans operate in duty/standby mode to provide redundancy and are monitored for moto

Q failure, supply voltage and low differential pressure. Any failure of these systems beyond pre-set limits will trigger an alarm in the FMS system.

Typically each Fab building has 1 or 2 scrubbers more than are actually needed, so not all scrubbers (or at least not all of the capacity) are running at any given time. This allows scrubber units to be taken off-line for maintenance without any impact on treatment performance. .

’ Mode of Operation The pressure drop across the system is continually monitored to avoid fluctuations that can affect the operation of the production tools. The fans comprise a mix of variable speed and fixed speeds to allow for additional or alternately, reduced suction by either bringing online additional scrubber units or varying the fan speed of variable speed fans. Not all fans and scrubbers operate at the same time and scrubber units are rotated on and off-line to allow for maintenance and to meet the requirement for a constant pressure drop across the system.

Scrubber System Upgrades 0 New check valves for all the Fab i0 and Fab 14 scrubbers were installed along with an additional

flow switch upstream of the check valves on the Fab 10 systems where no flow measurement system was previously in place. Local flow indicators (sight glasses) have also been incorporated. These upgrades are intrinsic to the Fab14 and Fab24 design and for future scrubber units.

(iii) Solvent Abatement Systems

All major sources of volatile organic compounds (VOC) from the use of solvents within the process will be extracted to an abatement system for each fab building. Two types of solvent abatement systems will operate on-site. These include carbon adsorption/recovery and rotary concentrator thermal oxidation (RCTO). The main functional area of the process that gives rise to emissions of VOC derives from the lithography areas.


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25


Carbon Adsorption and Recovery Fab 14 has a carbon bed recovery system operating. This system absorbs VOC on a fluidized bed of carbon beads. A proportion of these beads are then removed from the beds continuously and transferred by pressurized air to a thermal desorption zone to regenerate the beads before returning to the adsorption chamber. The solvent rich air arising from the desorption chamber is passed through a condenser where the solvent is condensed into a liquid and drained to the general waste solvent tank in Fab 14. It is likely that the replacement of the Kreha at its end of life will however be based on an RCTO system and a future stack has been identified to facilitate the discharge from the oxidiser unit in this event.

Both Fab 10 and Fab 24 are fitted with RCTO units. A single RCTO unit has been installed into Fab 10 due to the relatively low level of VOC emissions envisaged while two units operate in tandem in Fab 24 with provision for a third. These units will also provide redundant treatment capacity.

A detailed description of the Fab 14 VOC Recovery Unit along with process flow diagrams is included in Section F.3.

RCTO ( Rotary Construction Thermal Oxidiser) The RCTO system is composed of three main components comprising the VOC concentrator, thermal oxidiser and heat exchanger. A prefilter is present prior to the system to prevent any large particulate entering the system and clogging lines or the zeolite containing wheel.

Solvent laden air is passed through two, continuously rotating wheels in series containing the zeolite adsorbent. The wheels pass alternately through process air-stream and a regenerating high temperature gas stream. The zeolite adsorbs VOC in one section of the wheel, thereby concentrating the emissions onto the zeolite. The zeolite then passes into the desorption zone where the concentrated VOC is driven off into a separate gas stream that is much smaller than the original fab exhaust. Any residual VOC that is not adsorbed by the zeolite in the concentrator is vented direct to atmosphere by a dedicated stack.

The concentrated VOC gas stream is passed via the preheater (primary heat exchanger) to a thermal oxidiser to convert the VOC components into carbon dioxide and water products.

An ultra-Low NOx burner, run on natural gas will supply the heat to the oxidiser unit. The heat derived from the VOC combustion itself reduces the thermal input to the oxidiser and hence the natural gas demand for the unit itself. This heat is recovered from the exhaust gas stream by a heat exchanger. Having passed the heat exchanger, the exhaust gases are vented to atmosphere via a dedicated stack for each oxidiser unit.

The RCTO system is described in detail in Section F.l along with anticipated operating conditions, best available technique assessment and description of the control systems in place.

A detailed description of the RCTO along with process flow diagrams is also included in Section F.l.


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25

1PPC Application Form

(iv) Speciality Exhaust Filtration

Amine is used as a dopant in very small quantities with IF0 and Fab 24 including both arsenic and amine gas). The arsenic containing compound converts to arsenic oxide in the presence of air. Parts used in the tools are cleaned at regular intervals in the parts clean areas of each Fab. The parts clean sink used to clean the tool contains hydrogen peroxide and the area is extracted to a dedicated speciality exhaust. The exhaust is therefore a potential release point for arsenic containing emissions. Emissions from the parts clean operations are filtered by passing the emissions through a pre-filter followed by high efficiency particulate arrestment (HEPA) filters. The pressure drops across the filters are recorded continuously via the FMS system and alarms are raised should the drop change from pre-set limits. The HEPA filters are replaced on a regular cycle.

Measurements carried out on the speciality exhausts have always identified emissions to be less than the limit of detection and this has been confirmed by mass balance estimates.

(v) Dynamic Neutralisation Chambers and Guardian Burn Boxes

Certain tools on site utilize silane. These include the AMP, Novellus and HDP tools. Where point of use systems are not in place following retrofit work, dynamic neutralization chambers are present to combust the silane under highly controlled conditions.

Dynamic neutralization chambers are present after certain tools in the chemical vapour deposition manufacturing areas with one dilution tube for each of the tool chambers. The silane gas used by the tool is initially diluted at the tool extraction point using ambient air that reacts with the silane to produce silicon oxide and water. This is a safety measure to prevent risk of small fires in pipework resulting from silane use. The chambers are fitted with temperature probes and flame sensors that prevent uncontrolled oxidation from occurring.

Guardian burn boxes are present in the gas pad areas to treat silane and other combustible gases stored from certain tools. These are combustion boxes where the exhaust from the exhaust is initially diluted using nitrogen to below the lower combustion limit of the gases to prevent flame being generated. The extract is then passed to the burn boxes where a natural gas burn !R oxidizes any residual gases. A flame detector ensures that is the burner is operating and temperature sensors identify any excess temperature indicating uncontrolled combustion. A low fuel pressure in the supply to the box is also present.

All exhausts from both the dynamic neutralisation chambers, guardian boxes and the newer POU systems feed into the scrubbed exhaust collection system and ultimately into the acid gas scrubbers before discharge to atmosphere.

Abatement Systems for Waste Water

Two main abatement systems are currently present on-site for the treatment of waste water. Acids used in the etching process dram to the acid waste neutralization (AWN) plant where they


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25


are neutralized and the acids converted to inorganic salts that are subsequently discharged to sewer. The hydrofluoric acid waste has a separate system to treat this waste stream prior to further treatment in the AWN. Phosphoric acid is sent off-site for disposal and a suitable vendor for recycle is currently being sought. This is due to the fact that phosphoric acid waste from Fab24 is of very high quality and suitable for re-use.

WASTEWATER ABATEMENT SYSTEMS

(0 AWN

Each Fab building has a dedicated Acid Waste Neutralisation plant or AWN. There are 3 AWN plants currently in operation for Fab lo,14 and 24. Fab 24-2 will utilize a dedicated AWN treatment train located within the Fab 24 AWN pit while a new pit and treatment train will be introduced for Fab 24-3. All process waste waters from the site pass through the AWN of each fab before being discharged to sewer via a balancing tank. This includes water from cooling tower and boiler blowdown, process water and acids from wet stations, acid baths and rinses along with any contaminated water collected in the surface water containment system should it occur.

The AWN systems comprise of three tanks in series that add in either sulphuric acid or caustic solution to the wastewater to adjust the pH to a neutral condition. The incoming water is typically acidic in nature and therefore caustic is normally dosed to the tank water. The pH is measured by two pH probes with back up probes. The maximum pH adjustment that can occur in any one tank is 2.5 to prevent the potential for significant overdosing and hence an overshoot in the actual pH condition. If additional pH adjustment is required, this is carried out in the next tank. Water discharged from the AWN is within the pH range of 6 to 9.5 and is normally in the pH range 7-7.3. Each tank can be bypassed if necessary to allow maintenance to be carried out..

The on-site AWN plants will discharge to the existing sites effluent balance tank where the effluent is mixed and discharged to sewer. The effluent monitoring point is downstream of this mixing point. A 24 hour composite sample is taken weekly and analysed by an independent laboratory and analysed as identified in lPC licence conditions.

The URW system is used to conserve and minimise water discharges from the site. The AWN at F14, F24, Fab 24-2 and Fab 24-3 have, or will have URW (Ultrapure Water Recycle Waste) tanks for water reclaim and the Industrial Wastewater (IWW) divert tanks to automatically divert out of spec wastewater. There are currently two IWW tanks for Fab 24 and one lWW introduced to Fab 14.

A description of the AWN treatment system is included in Section F.3 of this submission.

(ii) HF/Pho.sphoric Treatment Plant

Fluoride bearing wastewater streams from the process are currently treated on-site and converted into an inert calcium fluoride cake that is presently disposed of to landfill following appropriate


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25


waste regulations. A review of potential recycling options for this cake including use in cement kilns is ongoing. The HF waste (HFW) treatment process will receive waste primarily from two sources;

l Wet benches in the etching process

l Liquor from Point of Use removal systems (on HDP tools for example)

Enhanced removal of fluoride-containing gases was introduced with Fab 24 and the existing site as result of greater use of point-of-use removal systems in the manufacturing process.

Two treatment trains are present in each of Fab 10 and Fab 24. A new treatment train will be introduced for Fab 24-3. Fab 24 and Fab 24-3 systems utilize lamellar plates to settle solids and allow near-continuous operation, otherwise they use the same system as the batch process as installed with Fab 10 and Fab 14.

The system is based on three principal stages. These include collection, treatment and soli separation.

HFW Collection The HF waste is collected from the fabrication building and drains by gravity to one of two collection tanks situated in the AWN. The tanks are used to store waste until one tank has filled to a pre-set level. At this point, feed pumps transfer the material from the collection tank to one of two reaction tanks until a collection tank level reduces to another pre-set level. While the material is being transferred and treated from one collection tank, HF waste is collected in the second collection tank and visa versa. In this manner, a known quantity of HFW is treated on a continuous batch basis.

Treatment (Dosing and pH adjustment) In the reaction chambers, the waste is dosed with sulphuric acid. This acts as a catalyst and prevents the production of ammonia being produced from any NH@ waste. In the second reaction tank the pH is adjusted to a pH of 9 by the addition of lime. The process is controlled by continuous pH measurement by a pH probe. The lime reacts with the HF acid and the sulphuric 0 acid dosing agent to form inert calcium fluoride and calcium sulphate particulate. A small quantity of polyelectrolyte flocculent is also added to aid precipitation and solid removal.

Intel Zreland Ltd.

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25


Solid Separation The solids slurry generated from precipitated solids is transferred to a slurry holding tank via a concentrator tank. The Fab 24 and Fab 24-3 systems use lamellar plates for enhanced solid separation. At present, settled solids are transferred directly to a membrane type, filter press to dewater the slurry further. The dewatered cake is collected in a water-tight container and disposed of by licenced landfill though recycling options for this waste are currently being investigated.

A detailed description of the HF waste treatment plants along with process flow diagrams is included in Section F.3 of this submission.

Phosphoric acid, if it is not treated off-site as for Fab 24, is treated in the exact same way as HF. The collection, dosing and solid separation is the same and the filter cake that is produced is calcium phosphate and is also disposed off in the same way as the calcium fluoride cake. Phosphoric acid from Fab 24 is currently sent off site for physical-chemical treatment. In future the aim is to recycle the phosphoric acid from Fab24-3 for beneficial use e.g as fertilizer as well.

(iii) Cyanide Destruct System (CDS)

The P856 process required the planarisation of silica and tungsten electrical connections. Due to hardness of tungsten, ferric cyanide was used in a slurry to both chemically and mechanical grind the surface of these connections and provide a uniform surface. The waste produced by this activity still contains ferric cyanide and a continuous flow treatment process is present within the Fab 14 complex to destroy the cyanide and convert the waste stream into nitrogen.

The cyanide destruct system or CDS removes cyanide by catalysed hydrolysis carried out at high temperature and pressure. The slurry containing ferric cyanide is initially adjusted to a pH of around 9 to facilitate the hydrolysis reaction. The material is then pumped to a reactor where it is raised to a temperature of 200°C under high pressure conditions. Heat from the reaction chamber is recovered by preheating the incoming material to be treated. Caustic is then added to prevent scale formation before the material is passed to the AWN having been tested for residual cyanide content.

A detailed description of the CDS waste treatment plants is included in Section F.3.

(iv) C4 Metal Waste Treatment Plant

The C4 process generates three waste streams (i) the spent solutions from the electrolytic operations of the C4 process plating tool (LRW - Lead Reclaim Waste in Fab14 and RMW - Reclaim Metal Waste in Fab24) (ii) concentrated lead waste (CLW) from the initial rinse and metal acid cleaning contents and (iii) dilute lead waste (DLW) from further rinses.


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25

The LRW and RMW spent solutions are sent off-site along with concentrated lead waste (CLW), which is collected in a dedicated tank and the contents shipped for off-site disposal. The dilute lead waste (DLW) is treated on site using ion exchange resins before the water is passed to the AWN. The new system of ion exchange resins and pH control allows the metal treatment plant to treat other metals such as copper, tin and other metals. The treatment plants will in future be referred to as Dilute Metal Waste (DMW) treatment plant. With the introduction of the 65 nanometer process in 2005, which has replaced lead C4 bumps with copper bumps, the Fab 24 DMW system will start to treat copper as well as lead. Two series of ion exchange resins are present, operating in duty and standby mode. This allows the resin cartridges to be replaced without interrupting the treatment process. The spent ion exchange resins are stored on-site until a sufficient quantity has been collected to ship off-site for licenced disposal. i

A detailed description of the lead waste treatment plant (DLW) along with process flow diagrams is included in -Section F.3

(v> Copper W&e Treatment Hunt

A significant difference between Fab 24 and the 12 inch process with existing areas of the site (Fabs 10 and 14) is the use of copper metal layers in the production of the integrated circuits. The use of copper for metal interconnects offers significant performance and production benefits due to its excellent electrical properties and environmental benefits.

The chemicals used in the process that are associated with the addition of copper metal layers are identified in Table G of this submission. They include an acidified copper electrolyte solution and two copper planarisation slurries based on alumina and silica.

The application of these chemicals in the process will generate three types of waste. These wastes require treatment to remove and minimise the concentrations of copper associated with the waste and associated acidity. The waste streams produced are concentrated copper waste (CCW), and slurry copper waste (SCW).

Copper bearing wastes are segregated in Fab 24 and sent to treatment and collection systems to ensure that as low a discharge of copper is emitted to the sewer system as possible whilst ensuring that off-site disposal requirements are minimised.

The concentrated copper waste (CCW) system collects waste from copper plating, wet etch and parts clean tools using a lift station and transfers the waste to a collection tank for subsequent removal by tanker. The CCW stream is currently sent offsite for recycle. Commissioning trials and due diligence of the waste treatment operators is currently being carried out to allow the operation of the CCW recovery plant which recovers elemental copper from CCW for recycling.

The SCW stream contains lower levels of copper (typically 30ppm) in comparison to the spent electrolyte solution (CCW) and will be treated on site by ion exchange. For the SCW waste stream, an additional carbon bed step has been incorporated with the copper waste treatment process to

Attachment D Of 19 Intel Ireland Ltd

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25


remove hydrogen peroxide prior to the treatment of the aqueous waste stream by ion exchange. There is the facility to filter the waste in a ceramic membrane to remove solids prior to treatment in the carbon and ion exchange beds however testing has shown that filtering is not required and system removal efficiency increases without microfiltration. The cleaned waste products of the copper treatment process are sent to AWN. Spent ion exchange resins will be removed off-site for either regeneration and copper recovery using electrowinning or safe disposal.

The copper waste treatment system is described in greater detail in Section F.3


For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25

For

insp

ectio

n pur

pose

s only

.

Conse

nt of

copy

right

owne

r req

uired

for a

ny ot

her u

se.

EPA Export 25-07-2013:15:40:25

attachment d.l summary of operating plant on-site

Documents