micro- and nano-technologyand... · 2013-04-17 · nano-structures with anti-reflection properties...
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INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
U.D. U.D. ZeitnerZeitnerFraunhofer Institut fFraunhofer Institut füür Angewandte Optik und Feinmechanikr Angewandte Optik und Feinmechanik
JenaJena
Micro- and Nano-Technology...... for Optics
1. Introduction
Micro- and Nano-Technology...... for Optics
1. Introduction
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Micro-Structured Optics in Nature
2µm
Nano-structures with anti-reflection properties on moth‘s-eyes
Lens-arrays as insects eyes
100µm
Colors of butterflies by diffraction gratings
4µm
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Different Approaches
Nature Technology
!?!?
“Bottom-Up” “Top-Down”
Lithography
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
1mm
1µm
10nm
10µm
100µm
100nm
characteristic feature size
micro-lenses, micro-prisms
lens-arrays,refractive beam-shaper
diffractive beam-shaper,Fresnel-lenses,diffraction gratings
effective media,sub-λ-gratings,photonic crystals,meta-materials
hybride elements
Size scale of micro-optical effects
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Effects of Size-Scaling
1mm 100µm 10µm 1µm 100nm
refraction diffraction
influence of physical effects on optical functionsis changing if characteristic feature sizes are sca led
focus:f=5mm
125µm
Strukturgröße
artificial dichroiticmaterials
physical effect:effective material-properties
disturbing useful !
diffractive beam splitter
2µm
wire-grid-polarizer
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Size-Scale of Optical Structures
1Å
1nm
1µm
1mm
1m
law of refraction and reflection
light diffraction
effective medium
spontaneous and stimulated emission
astronomic mirrors
lenses
micro-lenses
antireflection pattern, polarizers, phase retarder photonic crystals
miniaturized lenses
paraxial beam splitters
non paraxial beam splitter
spectroscopic gratings
mic
ro o
ptic
sλλλλλλλλ
(atomic size) light sources
optical elementsoptical elementsoptical effectsoptical effects
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Micro-optics Challenge
1mm
10mm
100µm
10µm
1µm
100nm
highly efficient illuminationconcentrator structures
characteristic feature size
light homogenizationlens arrays / diffusors
specific light distributionsbeam shapers
high transmissionmoth-eyestructures
Control of optical effects on the whole size-scale
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Milestones of optical engineering
Maxwell
1831 - 1879
electromagnetic wave theory
Fresnel
1788 - 1827
wave theory of the light
Hertz
1857 - 1894
exp. confirm. of Maxwell
Fourier
1768 - 1830
Fourier expansion
Zuse
1910 - 1995
1941 1st calculator
Abbe
1840 - 1905
theory of opt. image
Basics in physics and mathematicsAnalytical and numerical
evaluation of physical optics
Personal Computer
Demands on micro- and
nanomachining
1800
1900
2000
Fundamental understanding
of optics
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Typical Optical Surfaces and Contours
Contours Profileslens prism beam shaper
binary grating blazed grating
subwavelength gratings
complex surface profiles
>> λλλλ
< λλλλ
> λλλλ
>> λλλλ> λλλλ< λλλλ
characteristic detail
Courtesy of E.-B. Kley
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Fabrication Technologies for Micro-Optics
common micro-optics fabrication methods are
• lithography (photo-, e-beam-, laser-)
• ultra precision micro-machining
• melting / reflow technology
• more elaborated technologies
different size and functionalitydifferent fabrication methods
for micro-optical components compared to classical (macro) optics
INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena
Lithography for Optical Applications
Lithography tools are developed for micro-electronics fabrication!
special demands of optics on lithography justify development of lithography tools especially for optical applications
Demands of optics on lithography:• arbitrary lateral contours (often radially symmetric)• several 100mm size of single elements with sub-micron features• thick substrates for elements with low wave-front error• non-planar substrates possible• …
steady development along semiconductor road-map☺☺☺☺
vanishing versatility for other applications ����
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