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Miro Zeman Delft University of Technology, The Netherlands Acknowledgments: Nuon Helianthos, OM&T, IPV Julich, Ljubljana University SenterNovem for financial support Advanced Thin-Film Silicon Solar Cells

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Page 1: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Miro ZemanDelft University of Technology, The Netherlands

Acknowledgments:• Nuon Helianthos, OM&T, IPV Julich, Ljubljana University• SenterNovem for financial support

Advanced Thin-Film Silicon Solar Cells

Page 2: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Outline

Helianthos project

Status of thin-film Si solar cell technology

Issues for further improvement

Conclusions

Photon management

Page 3: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

World of PhotovoltaicsPV industry: the fastest growing industry in the world

0

1000

2000

3000

4000

5000

1999 2000 2001 2002 2003 2004 2005 2006 2007

202 287 401560 750

1256

1815

~3800

MW Solar cell production 1999-2007

42% 40% 39% 34%68%

45%

50%

Photon International, March 2007

2006: 90% wafer-type c-Si technology

Estimation market:

2007Cumulative installed capacity of PV systems

~ 9200 MW

Turnover (modules+BOS)

~ 15x109 €~ 70 000 jobs

2536

40%

Page 4: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

World of PhotovoltaicsPV industry: announced increase in capacity

0,0

5.000,0

10.000,0

15.000,0

20.000,0

25.000,0

30.000,0

35.000,0

40.000,0

45.000,0Pr

oduc

tion

Cap

acity

[MW

]

2006 2007 2008 2009 2010 2012

Crystalline SiliconThin Films

Arnulf Jäger-Waldau, EU-PVSEC-23, Valencia, 2008

Page 5: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

World of PhotovoltaicsPV industry: announced increase in capacity

0

2.000

4.000

6.000

8.000

10.000

12.000

[MW

]

2006 2007 2008 2009 2010 2012

silicon basedCdTeCISDye + others

Oerlikon

Applied Materials

Arnulf Jäger-Waldau, EU-PVSEC-23, Valencia, 2008

Page 6: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Strategic Research Agenda: EU roadmap

www.eupvplatform.org

Wim Sinke (ECN, Leader of WG 3 : Science, technology & applications of EU PV Technology Platform)

Page 7: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Current developments:• Increase in TF Si solar-cell production (in 2010 ~ 8 GW capacity)• Complete production lines available

Future developments:• Short term: optimize tandem cell• Long term: optimize triple cell, breakthrough concepts for high

efficiency (η>17%)

Thin-film Si solar cell technologyPresent status:+ Promising low-cost solar cell technology+ Industrial production experience (Flat panel display industry)- Relatively low stabilized efficiencies (η ≈6-7%)+ Double-junction micromorph solar cell (η>10%)

• ideal combination of materials (a-Si:H/μc-Si:H) for converting AM1.5 solar spectrum into electricity

Page 8: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Thin-film Si solar cell technology

Thin-film Si solar cells on glass

Power plant

Roof integration and new designs

Page 9: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Thin-film Si solar cell technology

Flexible thin-film Si solar cells

Roof integration

Consumer electronics

Stand-alonesystem

Flexible module

Page 10: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

-20

-15

-10

-5

0

5

-0.2 0.0 0.2 0.4 0.6 0.8 1.0Voltage [V]

Cur

rent

den

sity

[mA

cm-2]

initial

degraded

p-i-n a -Si:H Initial Degradedsolar cell

Jsc [mA/cm2] 16.2 15.7Voc [V] 0.75 0.74fill factor 0.69 0.64efficiency [%] 8.4 6.3

• Creation of extra metastable defects in a-Si:H under illumination

• Extra trapping and recombination centres

• Initial versus stabilized efficiency

Thin-film Si solar cell issues

Degradation of a-Si solar cells

Page 11: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Thin-film Si solar cells challenges

Increasing efficiency

Light trapping techniques• Textured substrates - scattering• Back reflector• Novel approaches

Multi-bandgap concept• Low band-gap materials

Suppressing degradation

Stable material• pc-Si:H, μc-Si:H or poly c-Si• New deposition techniques• Hydrogen diluted silane

Multi-junction concept• Tandem solar cells

Page 12: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

300 500 700 900 1100 1300 1500Wavelength [nm]

Pho

ton

flux

[1027

ph

/ m3 s

]

4.13 2.48 1.77 1.38 1.13 0.95 0.83

Photon energy [eV]

5.0

4.0

3.0

2.0

1.0

0.0

a-Si a-SiGe

AM1.5 global solar spectrum

Increase efficiency

Multi-bandgap solar cell concept

Efficient use of solar spectrum

EFEner

gy

p ni

a-Si

EF

p ni

a-Si

EF

p nin pi

a-Si a-Si

Multi-junction solar cell concept

EF

p nin p

a-Si

i

a-SiGe or μc-Si

Suppress degradation

Page 13: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Thin-film Si solar cell structures

uc-Si:H bottom absorber

Ag ZnO

surface textured - TCOZnO:Al

glass

a-Si:H top absorber

a-Si :HGe middle absorber

surface textured TCO-

uc-Si:H absorber

Ag ZnO

surface textured - TCOZnO:Al

glass

a-Si:H absorber

interlayer

surface textured TCO-

glass

uc-Si:H layers

back metal contact (Ag)

pin

ZnO

single-junctionamorphous (a-Si:H)microcrystalline (uc-Si:H)

double-junctionmicromorpha-Si:H/uc-Si:H

triple-junctione.g. a-Si:H/a-SiGe:H/uc-Si:H

Record ηst (confirmed) 9.5% (a-Si) Un. Neuchatel

10.1% (μc-Si) Kaneka

11.7% (a-Si/ μc-Si) Kaneka

12.4% (a-Si/a-SiGe) USSC* 13.0% (Si/SiGe/SiGe) USSC*

Page 14: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Photon management

Proper handling of incident photons which have to

be trapped in the absorber layers of a solar cell

Page 15: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Photon management

Light trapping techniques:• Manipulation of light propagation: multiple passes

Engineering of optically-active layers(back and intermediate reflectors, layers for optical matching)

• Light scattering: change direction of propagation

Design of surface texture (random or periodically textured surfaces)

Trap photons in the absorber layer and enlarge their average path

Page 16: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Importance of light trapping

1x

10x

50x

a-Si:H 300 nm

Wavelength (nm)

400 500 600 700 800 900 1000 1100 1200

AM 1

.5 s

pect

rom

(mW

/(cm

2 um))

0

20

40

60

80

100

120

140

160

180

1x13.11 mA/cm2

10 x19.87 mA/cm2

+ 52 %

50 x23.30 mA/cm2

+ 78 %

a-Si:H film

• change of direction• multiple passes

Janez Krc, 2008

Page 17: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Importance of light trapping

1x

10x

50x

uc-Si:H 1 um

Wavelength (nm)

400 500 600 700 800 900 1000 1100 1200

AM

1.5

spe

ctro

m (m

W/(c

m2 um

))

0

20

40

60

80

100

120

140

160

180

1x14.87 mA/cm2

10 x28.27 mA/cm2+ 90 %

50 x35.31 mA/cm2

+ 137 %

uc-Si:H film

Janez Krc, 2008

Page 18: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Light trapping

AP CVD SnO2:F Wet etched ZnO:Al

Standard techniques:• Random surface-textured substrates

Asahi U-type AP CVD SnO2:F, Julich wet-etched ZnO:Al

• Back reflectorThin ZnO layer between Si and metal

Page 19: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Light trapping

State-of-the-art uc-Si:H solar cell:

Wavelength (nm)

400 500 600 700 800 900 1000 1100 1200

AM

1.5

spe

ctro

m (m

W/(c

m2 um

))

0

20

40

60

80

100

120

140

160

180

di-uc-Si:H = 1 um

cell23.22 mA/cm2

10x

surface textured TCO-

glass

uc-Si:H layers

back metal contact (Ag)

pin

ZnO

Janez Krc, 2008

Page 20: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Wavelength (nm)400 600 800 1000

Abs

orpt

ion

loss

es

0.0

0.2

0.4

0.6

0.8

1.0

Rtot

BR

TCOsub.

i-uc-Si:H

p+n

Light trapping

surface textured TCO-

glass

uc-Si:H layers

back metal contact (Ag)

pin

ZnO

State-of-the-art uc-Si:H solar cell: analysis of optical losses using modeling

Janez Krc, 2008

Page 21: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Wavelength (nm)400 600 800 1000

J SC d

ensi

ty d

istri

butio

n (m

A/(c

m2 um

))

0

20

40

60

80

Rtot

BR

TCOsub.

i-uc-Si:H

p+n

available JSC

(from AM1.5)

i-uc-Si:H1) R2) TCO sub3) BR4) p+n

23.208.374.813.902.33

JSC (mA/cm2)54 %20 %11 %10 %5 %

Light trapping

State-of-the-art uc-Si:H solar cell: analysis of optical losses using modeling

Janez Krc, 2008

Page 22: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Light-In projectTUD, Helianthos

ECN, OM&T

Advanced concepts for light trapping

• Wavelength-selective manipulation of reflection and transmission of light at interfaces using 1-D photonic crystals

• Concept of modulated 1-D photonic crystals

• Applied as back and intermediate reflectors

Wavelength (nm)600 800 1000 1200 1400

Ref

lect

ance

0.0

0.2

0.4

0.6

0.8

1.0 100 %

PC_1

50/100 nm

Wavelength (nm)

600 800 1000 1200 1400

Ref

lect

ance

0.0

0.2

0.4

0.6

0.8

1.0 100 %

PC_2

70/140 nm

Wavelength (nm)600 800 1000 1200 1400

Ref

lect

ance

0.0

0.2

0.4

0.6

0.8

1.0 100 %

PC_1 PC_2+

MODULATED PC

Page 23: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Wavelength (nm)

300 400 500 600 700 800 900 1000

Abs

orpt

ance

0.0

0.2

0.4

0.6

0.8

1.0

thin lines - single IR (150 nm ZnO)thick lines - PC stack IR

IRTES projectTUD, TU/e, Helianthos

• Intermediate reflector (IR)

glass substrate

ZnO:Al

a-Si:H cell

uc-Si:H cell

ZnO:B

WP

n-a-Si:HZnO

Simulation results:

ZnO(d = 70 nm)uc-Si:H(d = 20 nm)

Advanced concepts for light trapping

Jsc,top = 9.4 mA/cm2

Jsc,top = 10.1 mA/cm2

Jsc,top = 12,0 mA/cm2

Jsc,top = 10.1 mA/cm2

Page 24: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Light-In projectTUD, Helianthos

ECN, OM&T

• Angle-selective manipulation of light scattered at the rough interfaces using 1-D and 2-D diffraction gratings

Scattering angle (ϕscatt)

-90 -60 -30 0 30 60 90

AD

F T (a.

u.)

0.0

0.2

0.4

0.6

0.8

1.0

P = 700 nmh = 80 nm

Asahi U-type

ϕinc = 0o

ZnO:Al(40" etched)σr � 110 nm

Advanced concepts for light trapping

Page 25: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

0 50 100 150 200 250 3007.4

7.6

7.8

8.0

8.2

8.4

8.6

8.8

9.0

Period = 600 nm

Asahi reference

Ave

rage

Effi

cien

cy (%

)

Feature height (nm)

Light-In projectTUD, Helianthos

ECN, OM&T

Average efficiency of 10 best cells plotted versus groove height

Advanced concepts for light trapping

• Angle-selective manipulation of light scattered at the rough interfaces using 1-D diffraction gratings

Page 26: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Light-In projectTUD, Helianthos

ECN, OM&T

0 50 100 150 200 250 3007.47.67.88.08.28.48.68.89.09.29.4

Period = 600 nm 2D period = 500-800 nm

Asahi reference

Ave

rage

Effi

cien

cy (%

)

Feature height (nm)

Advanced concepts for light trapping

• Angle-selective manipulation of light scattered at the rough interfaces using 2-D diffraction gratings

Page 27: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Helianthos project

• Development of low-cost roll-to-roll technology for fabrication of thin-film silicon solar modules (started in 1996)

• Dutch route: Temporary superstrate solar cell concept

By courtesy of Helianthos bv.

Page 28: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Helianthos manufacturing sequence

- Al foil

Al foil + TCO + a-Si:H + back contact + carrier foil

+ series connect + contact wires+ cutting

+ encapsulant

Page 29: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Status Helianthos project

Flexible lab-size tandem moduleFlexible a-Si:H module: ready for production

1st generation modulesSingle junction a-Si:H module ηin > 7%ηst = ~6%

Achieved:2nd generation modulesTandem a-Si:H/μc-Si:H module ηin > 11%ηst = ~10%

Challenge:

By courtesy of Helianthos bv.

Page 30: Advanced Thin-Film Silicon Solar Cells · Thin-film Si solar cells on glass Power plant Roof integration and new designs. Thin-film Si solar cell technology Flexible thin-film Si

Summary

Thin-film Si solar cell technology• Promising future option for large-area low-cost PV

• Expected large increase in production capacity

• Large scale of applications (rigid + flexible)

• Modules with 10% efficiency

Challenges:• Increase efficiency (photon management)

• Development and implementation of novel ideas