a world class facility to develop the technology needed to fulfill...
TRANSCRIPT
A world class facility to develop
the technology needed
to fulfill the CITRIS vision.
11/14/2001 1
Professor Tsu-Jae King, EECS, Director, Berkeley Microfabrication Laboratory
14 November 2001 UC Berkeley Microfabrication Laboratory 2
Energy Efficiency - networked miniature sensors proposed for monitoring building conditions to maximize efficiency of utility systems
CITRIS Research PrioritiesDisaster Response - new sensors for rapidly determining casualties, structural integrity, and most effective emergency response
Low energy 16mm3 integrated sensorKSJ Pister Group Micromirror Drive Mechanism
M.P. Young
Microfabricated neural probeL.P. Lee group
14 November 2001 UC Berkeley Microfabrication Laboratory 3
Transportation - optoelectronic sensors required for analysis of traffic flow to maximize efficiency of transportation networks
CITRIS Research PrioritiesHealthcare - discrete sensors for automated or point of use health monitoring. Integration with biological receptor materials of BNC.
Biological processing microdeviceA.P. Pisano, T.D. Sands groups
Electrolytic oxygen microbubblerR.T. Howe, J.D. Keasling groups
Environment – networked sensors for automated air and water analysis to enable immediate detection of and response to contamination situations
14 November 2001 UC Berkeley Microfabrication Laboratory 4
ICsMEMS
OptoelectronicsBioelectronics
The Challenge: Integrate Researchacross several disciplines
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Optoelectronic materials
Berkeley Microlab
Berkeley Sensor and Actuator Center
Integrated Circuit Design
MEMs
The opportunity:The Integrated Microfabrication Facility
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Based Upon the Successful Microlab Model:Shared Laboratory Capabilities
Common Academic Model:Individual Fiefdoms
Successful Microlab Model:Shared Laboratory
The shared model implies professional administration and support staff, funded by “per use” fees:
efficient use of valuable laboratory spacesignificant improvement in quality of supportPI research flexibilityresearch cross fertilization
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Existing Microlab / Future IMF:Accessible to All
>70 Principal Investigators; 7 departments, >240 active usersfrom UCD, UCSB and UCSD LBL, LLNL, Sandia NL
Cryo1% Sensor
21%
BMLA/Sundry18%
Univ9%
MatSci9%
Physics9%
Device8%
MechE7%
Chem/ChemE7%
Process/IC/CIM5% Compound
4%LBL2%
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A Unique High Tech Incubator among theCalifornia Institutes for Science and Innovation
The Berkeley Microfabrication Laboratory Affiliates has28 member companies, many with fewer than 10 employees.The IMF will greatly expand these activities.
Onix Microsystems, Inc.
Paracer, Inc.
Photon Imaging, Inc.
Progressant Technologies
Robert Bosch Corporation
Sandia National Lab
MicroAssembly Tech
MicroGen Systems
Molecular Reflections
Nanochip, Inc.
NewPeregrine, Inc.
Network Photonics Inc.
OMM, Inc.
DICon Fiberoptics, Inc.
Emitronix, Inc.
General Nanotechnology
GENOA Corporation
Hewlett-Packard Company
Jet Propulsion Laboratory
MEMS PI
Adriatic Research Institute
Advanced Integrated Photonics
Alien Technology Corp.
Analog Devices
Bandwidth9
Bluefox
Covalent Materials, Inc.
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Compound semiconductor processing for integration ofoptoelectroniccomponents
Berkeley Microlab
Integrated Microfabrication Facility
MEMs processing compatible with
biologically modified substrates and
silicon ICs
Bioengineering Nanotechnology
Center
Integrated Materials
Laboratory
Silicon Integrated circuit fabrication with better than
0.25 µm minimum geometries
Education - fiber connected teaching laboratories for long distance learning and remote access to specialized analytical equipment.
14 November 2001 UC Berkeley Microfabrication Laboratory 10
20,000 ft2 Class 100 clean room (1st floor)16-20 ft ceilings and 20-30 ft spans critical for equipment installation8” silicon, 8”/6” MEMs, optoelectronics, and multi-substrate integration
Significant Infrastructure Requirements
16,000 ft2 utilities and support (basement / roof / perimeter)5000 gal DI water, 7gpm, 60gpm non-DI recirc. chilled water30 changes per hour air filtering, 60 ft3/min 80-100psi clean dry airmultiple hazardous gas and liquid effluent treatment systems 300 tons cooling capacity, >50,000 ft3/min supply and exhaust air9000 gal liquid nitrogen storage tank, 400 gal liquid oxygen storagetoxic and flammable compressed gas delivery and storage areaequipment and supplies delivery and staging area
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Significant Space Allocation
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Laboratory construction from CITRIS development funds (~44M)
Laboratory equipment funding (~50M)corporate equipment donationsexisting Microlab equipmentnew funding
Detailed tool lists will include:<.25µm photolithography (8”, 6” and manual)in house >1µm minimum feature mask productionthin film deposition (furnace, rapid thermal, and plasma)thin film etching (wet etching and plasma)Analysis (CDSEM, TEM, ellipsometry, profilometry, interferometry)MEMs specific (etch release, supercritical drying,capillary self assembly)packaging (electroplating, dicing, wafer/wire/flipchip bonding)
Extensive Equipment Requirements
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• Advanced Energy• ASML• Atmel Corp.• Advanced Micro Devices• Applied Materials• Asyst Technologies Inc.• Cymer• Etec Systems Inc.• Intel Corporation
• KLA-TENCOR• Lam Research Corp.• Mykrolis Corp.• Nikon Research Corp.• Novellus Systems Inc.• Silicon Valley Group• Schlumberger• Tokyo Electron Limited
“Small Feature Reproducibility” Group –key potential sponsors for equipping IMF