2014 pres - seren rf november general

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History 1994: Founded as a manufacture of Solid State, Analog Controlled RF Generators & Matching Networks. 1996: Entered the Scientific Instruments Market (Optical / Mass Spectrometer) with a order for 2 Million annually. Expanded Sales/Service into the Japan & Europe.. 1998: Purchased 10,000 square foot facility. Release of Microprocessor Controlled RF Generators. 2002: Release of “AT Series” Matching Networks for Sputter/Etch/Deposition. Release of “01 Series” RF Generators for improved Reliability and added Features. Expansion of Sales/ Service Network into Korea, Taiwan. (300W to 5,000 Watts) 2005: Purchased a 20,000 square foot facility located on a 5 acre lot (utilizing 2.5 acres). Expansion of Sales/Service into Mainland China & Singapore. 2007: Release of High Power Generators @ 10 & 15 KW generators. (300W to 15,000 watts) 2010: Release of third generation “HR Series” Generator and Digital ATS Series Matching networks. 2012: Release of LDMOS Power Amplifier & 20KW, 30KW Generates. Improved VSWR Operation and Product Reliability. Continued VI Probe development.

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Page 1: 2014 PRES - SEREN RF November General

History

1994: Founded as a manufacture of Solid State, Analog Controlled RF Generators & Matching Networks.

1996: Entered the Scientific Instruments Market (Optical / Mass Spectrometer) with a order for 2 Millionannually. Expanded Sales/Service into the Japan & Europe..

1998: Purchased 10,000 square foot facility. Release of Microprocessor Controlled RF Generators.

2002: Release of “AT Series” Matching Networks for Sputter/Etch/Deposition. Release of “01 Series” RFGenerators for improved Reliability and added Features. Expansion of Sales/ Service Network intoKorea, Taiwan. (300W to 5,000 Watts)

2005: Purchased a 20,000 square foot facility located on a 5 acre lot (utilizing 2.5 acres). Expansion ofSales/Service into Mainland China & Singapore.

2007: Release of High Power Generators @ 10 & 15 KW generators. (300W to 15,000 watts)

2010: Release of third generation “HR Series” Generator and Digital ATS Series Matching networks.

2012: Release of LDMOS Power Amplifier & 20KW, 30KW Generates. Improved VSWR Operation and ProductReliability. Continued VI Probe development.

Page 2: 2014 PRES - SEREN RF November General

SEREN - Vineland, NJ

Page 3: 2014 PRES - SEREN RF November General

Production Floor

Page 4: 2014 PRES - SEREN RF November General

SEREN Revenue

SEREN IPS, INC. MANUFACTURES AND SHIPS

400 - 450 UNITS MONHTLY FOR A TOTAL ANNUALL

SALES REVENUE OF 18 - 20 MILLION YEARLY.

Page 5: 2014 PRES - SEREN RF November General

Organizational Chart(50) Employees 2014

PRESIDENT &CEO

MANUFACTURINGMANAGER

DIRECTOROFENGINEERING

ACCOUNTING/HUMAN RESOURCE

MANAGER

CONTROLLERIT SYSTEMS/

FACILITYMANAGER

MATCHNETWORKASSEMBLY

TESTPOWER SUPPLY

ASSEMBLY

DIRECTOROF SALES QUALITY MANAGER

DESIGNENGINEERING

POWERSUPPLY

HARDWARE/SOFTWARE DEV. ENG.

DESIGNENGINEERING

MATCHNETWORK

PURCHASING

STOCKROOM,RECEIVING,MANAGER

INSIDE SALES

TRAFFIC &SALESADMIN.

PROJECT MANAGER/ECOCOORDINATOR

PCBDESIGN

MECHANICALENGINEERING

DESIGN

APPLICATIONSENGINEERING

RF ENGINEER

RECEPTIONIST,ACCOUNTS PAYABLE

ACCOUNTSRECEIVABLE

PACK, SHIP,RECEIVING,

STOCKROOM

GLOBAL SUPPORTENGINEER

Page 6: 2014 PRES - SEREN RF November General

Process Flow

Page 7: 2014 PRES - SEREN RF November General

All Employees are considered Customer Care Team members

Team/customer interface is through Inside Sales

All RMA’s are evaluated by appropriate Product Team . Most common final resolution isthrough Applications Engineering or Operations

Actual repairs are performed by the Manufacturing and Test Product team members, asopposed to a dedicated repair department.

The equipment producers get direct customer product feedback, and efficiency isimproved.

Manufacturing Engineering team member audits repair process to ensure quality andprovide direct feedback to Quality, Design Engineering and Documentation.

Repair work is now scheduled just like new equipment, but with shorter lead times.Improvements will allow for routine turnaround time of less than a week.

Customer Care – Product Teams

Page 8: 2014 PRES - SEREN RF November General

Quality

SEREN IPS Inc., Vineland, New Jersey Quality, Environmental andSafety Management Systems have been developed and implementedto fulfill the requirements of ISO 9001:2008 (International QualityStandard for Quality Systems) and ISO 14001:2004 (InternationalStandard for Environmental Management Systems) for the purpose of:

a) Maintaining the ability to provide product and service thatconsistently meets the customer’s and applicable regulatoryrequirements.

b) Enhancing customer satisfaction through continual improvement ofthe quality management system and assurance of conformity tocustomer requirements.

Page 9: 2014 PRES - SEREN RF November General

QualityQM1-MANUAL / Rev B

And Procedures

QP4-2-3: REV D, QMS, PREP, IMP & CONTROLS

QP4-2-3-1: REVC, CONTROL OF DESIGN AND MFG DOCS

QPR2-4: QMS, MASTER LIST OF RECORDS, REV3

QPR-2-4: REV C, CONTROLS OF QMS RECORDS

QP5-6-1-A: MANAGEMENT_REVIEW

QP6-2-2: REV A, HIRING, TRINING, VERIFICATIONS OF COMPETENCE

QP7-2: REV B, PROPOSAL, CONTRACT, ORDER ENTRY, ORDER AMENDMENT

QP7-3:, REV D, DESIGN AND DEVELOPMENT

QP7-3-7: REV C, ECO PROCESS

QP7-4: REV B, PURCHASING

QP7-5-1: REV A, MANUFACTURING

QP7-5-3: PRODUCT IDENFICATIONS AND TRACABILITY

QP7-6-0: CALIBRATION

QP7-6-1: OUT OF TOLERANCE

QP8-2-2: REV B, INTERCATIONAL OMS AUDITING

QP8-2-3: REVD, CONTROL OF NONCONFIORMING PRODUCT

QP8-5: REV D, CORRECTIVE AND PREVENTATIVE ACTION

Page 10: 2014 PRES - SEREN RF November General

Overview - RF Generators

I Series Generators: (Analytical Instruments – ICPOS/MS)

1250w – 2,500 Watts, 27.12 and 40.68 MHz

R & L Series Generators: (Industrial Applications, Sputter/Etch/Deposition)

100W – 30KW, 100 kHz – 40.68 MHz

“HR” Series Generators: (Semiconductor, Sputter/Etch/Deposition, ALD)

600w – 30KW, 100 kHz - 40.68 MHz

M Series Generator: (Table Top, Bias Applications)

125 & 300 Watts @ 13.56 MHz

Page 11: 2014 PRES - SEREN RF November General

M Series Generator125 WATT GENERATOR

FRONT VIEW

REAR VIEW

Page 12: 2014 PRES - SEREN RF November General

R & L Series Generator

Page 13: 2014 PRES - SEREN RF November General

HR Series Low PowerGenerators

600W / 1000 Watt

Page 14: 2014 PRES - SEREN RF November General

HR Series GeneratorMedium Power Generators

2KW / 3KW / 5KW

With Display W/O Display

Page 15: 2014 PRES - SEREN RF November General

HR SERESHigh Power Generators

HR10,001 : 10KW (1 Master Generator)

HR20,001: 20KW (1 Master, 1 Slave Gen. with Combiner)

HR30,001: 30KW (1 Master, 2 Slave Gen. with Combiner)

Page 16: 2014 PRES - SEREN RF November General

.

HR Series G.U.I.Virtual Display

Page 17: 2014 PRES - SEREN RF November General

.

Generator & MatchG.U.I. / Virtual Display

Page 18: 2014 PRES - SEREN RF November General

RF GeneratorsR & L Series ---------------------------- 980

R-01 Series ------------------------------ 5,820

L-01 Series ----------------------------- 725

HR Series -------------------------------- 465

I Series ----------------------------------- 6,825

Automatic Matching NetworksAT Series Match (DC Servo) ---------- 5,400

ATS Series (Stepper) -------------------- 455

IM Series Match (ICP) ----------------- 4,600

Shipments throughOct 31, 2014

Page 19: 2014 PRES - SEREN RF November General

Seren ContinuousProduct ImprovementHR Series Generators

CONTROL LOOP: 10X FASTER

CEX OPERATION: INTERAL PHASE SHIFT OF CEX OUTPUT SIGNAL

IMPROVED RESOLUTION: ADDED DIGIT IN INTERNAL PULSE TIMING FOR 0.1% DUTY CYCLE.

PULSE MODE: 10 MICRO-SECOND MIMUM PULSE WIDTH

IMPROVED VARIABLE FREQUENCY OPERATION: 500 MHZ QUAD HIGH FREQUENCY DDS

DISSIPATION LIMIT PROTECTION: 10X FASTER

IMPROVE TRANSIENT RESPONSE: ADDED CONTROL LOOP MULTPLIER

LDMOS POWER AMPLIFIER: 1250 WATT POWER DEVICES/IMPROVED VSWR / 20% REFLECTEDPOWER LIMIT.

AGENCY APPROVALS: CE, SEMI S2, S8, F47, FCC, NRTL

Page 20: 2014 PRES - SEREN RF November General

LDMOS Power AMPLIFIER(S)Efficiency 70% PLUS

Device Manufacture: Freescale / Type: MRFE6VP61K25H / Power Rating: 1250 Watts

Number Devices per Amplifier: (2) Devices in parallel per Amplifier @ 1300 Watts Tuning

Device’s Rating per Generator / Number Amplifiers / DC Switcher Rating

HR601: 2,500 Watts 1 / 1300W 1,500 Watts /1 Phase

HR1001/HR1201: 2,500 Watts 1 / 1300W 2,500 Watts / 1 Phase

HR2001: 5,000 Watts 2 / 1300W 7,500 Watts / 3 Phase

HR3001: 7,500 Watts 3 / 1300W 7,500 Watts / 3 Phase

HR5001: 10,000 Watts 4 / 1300W 9,000 Watts / 3 Phase

HR6001: 15,000 Watts 6 / 1300W 12,000 Watts / 3 Phase

HR10,001: 20,000 Watts 8 / 1300W 21,000 Watts / 3 Phase

HR20,001: 40,000 Watts 16 / 1300W 42,000 Watts / 3 Phase

HR30,001: 60,000 Watts 24 / 1300W 63,000 Watts / 3 Phase

Page 21: 2014 PRES - SEREN RF November General

DMOS & LDMOSAmplifier

Supplier Device Feature V DSS Pout Gain dB Freq MHz Pdiss Max Die T

ST SD2933 Sealed 125 300 20 150 648 200

ST SD2943 Sealed 125 350 22 150 648 200

ST SD4933 Sealed 200 300 24 100 648 200

ST SD4933MR Sealed/Filled 200 300 24 100 648 200

Freescale MRFE6VP61K25H Sealed 130 1250 24 600 1333 225

Page 22: 2014 PRES - SEREN RF November General

OverviewMatching Networks

IM Series: (Analytical Instruments – ICPOS/MS)

1250W – 2,500 Watts, 27.12 and 40.68 MHz

AT Series: (Industrial Applications/Sputter/Etch/Deposition)

100W through 20,000 Watts @ 350 kHz through 40.68 MHz

ATS Series: (Semiconductor/Sputter/Etch/Deposition/ALD)

100W through 20,000 Watts @ 350 kHz through 40.68 MHz

Matching Transformers: Step up / Step Down (50 kHz – 500 kHz)

1000W through 5,000 Watts

Page 23: 2014 PRES - SEREN RF November General

AT SeriesMatching Networks

External Analog Controller (MC2)

Input Voltage: 110 or 220 VAC

Page 24: 2014 PRES - SEREN RF November General

ATS SeriesMatching Networks

Internal Digital Controller

Input power: 24 VDC @ 3 Amps Max

Page 25: 2014 PRES - SEREN RF November General

ATS Series MatchCUSTOM Dual Output

Page 26: 2014 PRES - SEREN RF November General

.

ATS Series G.U.I.Virtual Display

Page 27: 2014 PRES - SEREN RF November General

.

OptionalATS Series Remote

Page 28: 2014 PRES - SEREN RF November General

ATS SeriesMatching Networks

MOTORS: STEPPER MOTORS

CONTROLLER: DIGITAL, INTERNAL (DIGITAL CONTROL ELIMINATES GAIN CONTROL ISSUES)

RESOLUTION: HIGH REPEATABILTY (0.1%)

POWER REQUIREMENTS: 24 VDC @ 3 AMPS

REMOVAL OF FAILURE MECHANISM: NO POTS, GEARS OR DC MOTOR BRUSHES

IMPROVED TUNING SPEED: 1-3 SECOND (AT SERIES 5-8 SECOND) END TO END

PROGRAMMABLE/SETTABLE TUNE TRAJECTORY

QUIET OPERATION

REMOTE CONTROL WITH VFD DISPLAY OR G.U.I. VERTICAL DISPLAY AVIALBLE

AGENCY APPROVALS: CE, SEMI S2, S8, NRTL

Page 29: 2014 PRES - SEREN RF November General

AT & ATS MatchingNetworks Design

Configuration - Load Impedance Dependant

Standard Configurations: L, Inverted L, PI, T

Custom Configurations: 2 & 3 Cap Match, Dual or Balanced output @ 180 Degrees

Current/DC/RF Voltage Probes/VI Probe

Matching network can be supplied with internal DC, RF Peak, Current or VI probe*

These parameters are programmable and can be programmed to reduce power

until the condition is corrected or abort (turn RF Off).

ATS Series matching networks Load and Tune variable capacitors travel range can be

programmed to ensure that the match does not enter into a problematic tuning region.

*Note: Under development

Page 30: 2014 PRES - SEREN RF November General

R & LR & L ““0101”” Series, Generators:Series, Generators:

Meets FCC requirements for ISM Equipment, Part 15 & 18.Meets FCC requirements for ISM Equipment, Part 15 & 18.

CE Mark : EMC & SafetyCE Mark : EMC & Safety

Semi: S2, S8Semi: S2, S8

AT Series, Automatic Matching Networks:AT Series, Automatic Matching Networks:

MCMC--2 Controller:2 Controller: CE Mark, EMC and SafetyCE Mark, EMC and Safety

Match Network:Match Network: CE Mark, SafetyCE Mark, Safety

Certifications

Page 31: 2014 PRES - SEREN RF November General

HR Series, Generators:HR Series, Generators:

FCC Part 15, 18FCC Part 15, 18

CE Mark EMC & SafetyCE Mark EMC & Safety

SEMISEMI –– S2, S8, F47S2, S8, F47

NRTL Safety (UL61010NRTL Safety (UL61010--1, CAN/CSA C22.2)1, CAN/CSA C22.2)

ATS Series, Automatic Matching Networks:ATS Series, Automatic Matching Networks:

CE Mark, Safety Per EN 61010CE Mark, Safety Per EN 61010--11

NRTL (UL61010NRTL (UL61010--1)1)

Certifications

Page 32: 2014 PRES - SEREN RF November General

NRTL

Page 33: 2014 PRES - SEREN RF November General

CE Mark

Page 34: 2014 PRES - SEREN RF November General

Reliability Testing

Highly Accelerated Life Testing (HALT)

Vibration, Temperature Ramp up/Down

Product Design Phase

Highly Accelerated Stress Screening (HASS)

Vibration, Temperature Ramp up/Down

Production Design Phase

Manufacturing Q.A.

Qualmark Typhoon 3.0 Halt/Hass System

Page 35: 2014 PRES - SEREN RF November General

Reliability Testing

Page 36: 2014 PRES - SEREN RF November General

CAPACITY PLANNING

Seren is located in a 20,000 square foot facility,utilizing approximately 45% percent of themanufacturing area in the production of 400units/month of various generators, matchingnetworks and accessories. Seren owns a second10,000 square foot building used as warehouse aswell as lifecycle testing for product reliability.Seren currently employs a single shift.

Page 37: 2014 PRES - SEREN RF November General

Seren I.P.S., Inc.: Vineland, New Jersey (Factory)

Smith-Semi: San Jose, CA

Integrity Sales: Voorhees, NJ

Seren Korea: Seoul, Korea

Kaitek: Taipei-Taiwan, Shanghai-China

Astech: Tokyo, Osaka - Japan

Odyssey: Singapore

RF Industries: England

Pravartaka: India

SALES CENTERS

Page 38: 2014 PRES - SEREN RF November General

FactorySERVICE REPAIR

Return Authorization Number (RMA) Issued.

1) Unit received logged into MRP.

2) Unit unpacked and cleaned if necessary. Documentation started (trailer Tag).

3) Unit reviewed by Quality then delivered to test for evaluation.

4) Quotation is generated and sent to customer for approval.

5) Once approved, unit is sent to production for replacement of defective part(s),

upgraded to latest revision then moved into Test Que.

6) Unit receives Final Test and moved into overnight heat-run (stress testing).

7) Unit proofed the following day to ensure it operates to specifications, packaged

and shipped.

Page 39: 2014 PRES - SEREN RF November General

FactorySERVICE REPAIRS

Standard Repair Lead Time: 14 Working Days

Priority Repair Lead Time: 3-5 Working Days

On-site Service Support: As Requested

Page 40: 2014 PRES - SEREN RF November General

Seren I.P.S., Inc.: Vineland, New Jersey (Factory)

Odyssey Tech. Solutions: Round Rock, TX

Seren Korea: Seoul

Kaitek: Taipei-Taiwan, Shanghai-China

Astech: Tokyo, Osaka - Japan

Odyssey: Singapore

RF Industries: England

SERVICE CENTERS

Page 41: 2014 PRES - SEREN RF November General

Seren provides a Standard (15) monthparts and labor warranty from the dateof shipment.

WARRANTY

Page 42: 2014 PRES - SEREN RF November General

Seren (PARTIAL LIST)OEM CUSTOMERS

Applied Materials , Mattson Technology, Veeco Instrument

Koffman & Robinson, Nordson March, Kurt J. Lesker, SPTS

AJA International, Denton Vacuum, PVD, 4 Wave, Plasma Therm

Advanced Vacuum Systems, Plasma Etch, PVA Tepla

Oxford Instruments, Canon Tokki, Shincron, Jobin Yvon Horiba

Thermo Fisher Scientific, Varian OSI, P2i, Nordiko, Leybold,

Torr International, Intelvac, Axic, Belight Technology,

CONFIDENTIAL

Page 43: 2014 PRES - SEREN RF November General

Seren CustomersSemiconductor

Applied Materials, Mattson, DMS, PSK, TES, Jusung, ASE,CSUN, Creating Nano, Brillantech, Piotech, NMC

CONFIDENTIAL