16657596-mbegrowth
TRANSCRIPT
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Theoretische Physik und Astrophysik
& Sonderforschungsbereich 410
Julius-Maximilians-Universitt Wrzburg
Am Hubland, D-97074 Wrzburg, Germany
Mathematics and Computing Science
Intelligent Systems
Rijksuniversiteit Groningen, Postbus 800,
NL-9718 DD Groningen, The Netherlands
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Non-equilibrium growth - Molecular Beam Epitaxy (MBE)
several levels of theoretical description
deposition and transient kineticsthermally activated processes, Arrhenius dynamics
problems and limitations
mound formation and coarsening dynamicsII) (ALE) growth of II-VI(001) systems
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control parameters:substrate/adsorbate materialsdeposition ratesubstrate temperature T
ultra high vacuumdirected deposition ofadsorbate
material onto a substrate crystal
production of, for instance, high quality
layered semiconductor devices
magnetic thin films
nano-structures: quantum dots, wires
clear-cut non-equilibrium situation
interplay: microscopic processes macroscopic properties
self-organized phenomena, e.g. dot formation
Mikrostrukturlabor, Wrzburg
oven
UHV
T
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faithful material specific description
including electronic properties
often: configuration of a few atoms/molecules,
unit cells of periodic structures,
zero temperature treatment
important tool:
description in terms of electron densities
energy/stability of surface reconstructions,
preferred arrangement of surface atoms
CdTe (001) surface reconstructions
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numerical integration of equations of motion + thermal fluctuations
effective interactions, e.g. classical short range pair potentials
(QM treatment: e.g. Car Parinello method )
microscopic dynamics of particles
limited system size and (10-6 s)
example: on a surface
atomic vibrations ( ~10-12 s)
with occasional hops to the next local minimum
dissociation of deposited
dimers at the surface,
transient mobility of arriving atoms
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stochastic dynamics, consider only significant changes of the configuration
simplifying
of
empty / occupied sites
hops from site to site
models:
exclude bulk vacancies, overhangs,
defects, stacking faults, etc.
d+1 dim. crystal represented by
integer array above d-dim. substrate lattice
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Deposition of particles, e.g. with flux F = 1 atom / site / s(incoming momentum, attraction to the surface...)
processes, examples:
upon deposition
knockout-processes
at terrace edges
downhillfunnelling
steering
weakly bound, highly mobileintermediate states
regular lattice site
potentialenergy
distance from the surface
vac.
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waiting timeTBk
oe
rateTBk
oeR
attempt frequency , e.g.o
energy barrier , e.g. for
simplifying representation:
112
o10~
s
after incorporation: mobile at surface sites
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R(ab) = 0 exp[ / (kBT) ]
R(ba) = 0 exp[ ( Ea-Eb+ ) / (kBT) ]a
bEb
Ea
more general:
transition states and energy barriers affect onlythe of the system
Ett
R (ab) exp[ - Ea / (kBT) ] = R (ba) exp[ - Eb / (kBT) ]
stationary P(s) exp[- Es / (kBT) ]
for states of type a,b,...
in absence of deposition and desorption:system approaches
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an example
ESE
E
adatoms attach toupper terraces preferentially
uphill current favors
additional
hinders inter-layer diffusion
non-equilibrium, kinetic effect:
additional barrier ES is irrelevant forequilibrium properties of the system
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deep (local) minima,exclude, e.g., double or multiple jumps:
:correct treatment takes into account entropies / free energies
- temperature independent
-
disregard actual shape of the
energy landscape
o(ab) = o(ba)consistent with discretized state spaceand concept of
:e.g. single, mobile particle in a static environment, neglectconcerted rearrangements of the entire crystal / neighborhood
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(rejection free)
perform the selected event
(evaluate physical real time step)
initial configuration of the (SOS) system
catalogue of all relevant processes i=1,2,...n
and corresponding Arrhenius rates
R1
R2
R3
Rn
... rat
pick one of the possible events
with probability pi Ri
0
1
ra
ndomnumber
update the catalogue of possible processes
and associated energy barriers and rates
R3
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e.g. exchange vs. hopping diffusion
direct / indirect experimental measurement
calculations/estimates: first principlessemi-empirical potentials
quantitative match of simulations and experiments
potentially relevant processes:
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defects, dislocations ?
hetero-epitaxial growth ?
strain and other mismatch effects ?
realistic lattices or off-lattice simulations
interaction potentials, realistic energy barriers
particularities of materials / material classes
basic questions
example: (universal?) dynamical scaling behavior
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SOS lattice (e.g. simple cubic) neglect overhangs, defects
knock-out process upon deposition momentum of incoming particles
irreversible attachment
immobile islands
forbidden downward diffusion
high barriers (large enough flux)
limited diffusion length forterrace / step edge diffusion
effective representation of
nucleation events
single particle picture
characteristic length of step edge diffusion
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initial
due to Schwoebel effect
merging of mounds driven by
- deposition noise
and/or - step edge diffusion
finite system size single mound
example: (associated length lsed=1 lattice const. )
16 ML 256 ML 4096 ML
selection of a
compensating particle currents
upward (Schwoebel)
downward (knockout)
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time t (film thickness)
~mound height
w =t for t< tx
wsat L for t> tx
growth exponent
roughness exponent
saturation time tx L dynamic exponent z= /
systemsizesL = 80
100125
140256512
w
/L
scaling plot, data collapse
=1 (slope selection)
z=4=1/4
relatively slowcoarsening
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for the morphology and coarsening dynamics
64ML
(lsed L)
sed drivencoarsening
128ML
(lsed 1)
noise assistedcoarsening
128ML
absence of
slope selection,
rough surface
hindered sed,
noise assisted
coarsening
128ML
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characteristic exponents:
for 1
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anisotropicbinding structure:
011
110
example system:
lattice, (001) orientation:alternating layers (square lattices) of, e.g.,
representation, four sub-lattices
observed:
- c(2x2), (2x1) Cd-terminated
- (2x1) Te-terminated
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properties of
maximum coverage 50 %
two competing vacancy structures: checkerboard or missing rows
simultaneous occupation
of NN sites in y-direction,
i.e. [1-10], is(extremely unfavorable)
TeCd
xempty
electron counting rule, DFT
[Neureiter et al., 2000]
small difference in surface energies
favors checkerboard c(2x2)-order at low temperatures
e.g. DFT: E 0.008 eV per site in CdTe [Gundel, private comm.]
0.03 eV ZnSe
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isotropic N.N. interaction
additional Te dimerization
: coverage 3/2 observed under flux of excess Teallows for Te deposition on a perfect c(2x2) Cd surface
weakly bound, highly mobile Te-atoms on the surface, e.g.
at a Cd-site (Te-trimers)
bound to a single Cd (neutralizes repulsion)temporary position
time consuming explicit treatment / mean field like Te* reservoir
for elementary processes = o = 1012/s
choice of parameters: qualitative features, plausibility argumentssemi-quantitative comparison,prospective first principle results
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alternating pulses (1s)of Cd and Te
flux: 5ML/sdead time: 0.1s
at high temperature
experiment [Faschinger, Sitter] simulation [M. Ahr, T. Volkmann]
overcome at lower T due to presence of highly mobile, weakly bound Te*
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Non-equilibrium growth - Molecular Beam Epitaxy (MBE)
several levels of theoretical description
following talks: continuum descriptions, multi-scale approach,...
deposition and transient kinetics
thermally activated processes, Arrhenius dynamics
problems and limitations
mound formation and coarsening dynamics
II) (ALE) growth of II-VI(001) systems
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application of KMC method in off-lattice modelstreatment of
- hetero-epitaxy, mismatched lattices
- formation of dislocations
- strain-induced island growth
- surface alloys of immiscible materials