1._10001030_parylene coatings for enhanced reliability of electronics_semicon taiwan 2011

8/3/2019 1._10001030_Parylene Coatings for Enhanced Reliability of Electronics_Semicon Taiwan 2011

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Parylene coatings for enhancedreliability of electronics

Alan Hardy, Electronics Market Manager

SEMICON Taiwan2011

September 9, 2011


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2SEMICON Taiwan2011 September, 2011

AgendaParylene

- History

- Overview of Specialty CoatingSystems

- What is it?

- Why coat with it?- How is it applied?

- Properties and benefits

- Industries and applications

Adhesion Technologies

Advanced Parylene Applications

Conclusion

Questions & Answers

SEMICON Taiwan2011 September, 2011


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History of Parylene Dr. WM Gorham at Union Carbide Corporation (UCC) in late 1940s

Dr. Gorham announced the vapor deposition polymerization (VDP) process

Coating process that bears his name patented in 1967

Nova Tran Corp. purchased license agreement from UCC in 1971

Made Parylene VDP a commercial success

Union Carbide Corporation purchased Nova Tran Corp. in 1984

Renamed Specialty Coating Systems in 1991


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SCS is the direct descendant of Union Carbide Corporation

Unbroken transfer of technology and I.P.

Over 40 years of Parylene applications experience

SCS - the global leader in Parylene coating solutions

Parylene variants, coating center locations, process development, coating

technologies, equipment design, regulatory support

SCS controls its own dimer source, quality and formulation

Specialty Coating Systems



11 Worldwide Centers

North America (5)

Costa Rica United Kingdom

Ireland

Czech Republic

Japan

Singapore

All coating centers use global Manufacturing Standard Procedures

(MSPs) and quality standards

Multiple locations enable SCS to react to changes in requirements,

volume ramp-up or natural disasters

SCS Around the World



Dielectric strength

Electrically conductive

Antistatic Thermal insulation

Heat dissipating

Radiation shielding Moisture, chemical, fluid barrier

Anti-stiction, low friction

Seal or reduce microporosity Abrasion resistance

Stabilizes components and structures

Biostability and biocompatibility

Why Conformal Coat?



Conformal Coating Material Considerations Freedom from byproducts

Application temperatures

Cure forces Conformability - uniformity

Control of thickness

Crevice penetration Regulatory/Quality compliance

Biostability/Biocompatibility

Properties of the coating Barrier capabilities

Environmental stability

Sterilizability and bio-acceptability

Minimization of mechanical loading



A common generic name for a unique series of polymers based on

p-Xylylene

POLY(PARA-XYLYLENE)

A truly conformal, thin, optically clear, inert coating applied in a

vacuum chamber at room temperature

A non-line-of-sight coating that follows molecular level depositionprocess

A chemically pure coating that does not use any catalysts or

leachable materials

What is Parylene?



Why Parylene? Completely conformal

Ultra-thin and lightweight

Free from pinholes and defects

Moisture & chemical barrier

High dielectric strength

Chemical insolubility

Dry film lubricity

Particle immobilization

Hydrophobicity

Optically clear colorless

Biocompatible and biostable

Chemically pure, inert and free

of catalytic, plasticizer and

solvent residues

No outgassing

No leachable ingredients

No cure forces/stresses

Environmentally friendly

No thermal stresses during

room temperature deposition


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Parylene Variants


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Parylene N High dielectric strength 7,000 V@ 25m

Maximum continuous service temperature 60C

Short term (24 hrs.) maximum service temperature 80C

Coefficient of Friction 0.25

Certifications

IPC-CC-830, MIL-I-46058C and listed on the QPL

USP Class VI and ISO-10993 biological evaluations

Parylene Variants


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Parylene C High dielectric strength 5,600 V@ 25m



Excellent chemical resistance

Lowest permeability to moisture and gases


Certifications

IPC-CC-830, MIL-I-46058C and listed on the QPL


Parylene Variants


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Parylene VariantsParylene D

High dielectric strength 5,500 V@ 25m



Lowest elongation



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Parylene VariantsParylene HT

High dielectric strength 5,400 V@ 25m

UV stable

Lowest dielectric constant & dissipation factor

Highest continuous service temperature 350C



Certifications IPC-CC-830, MIL-I-46058C and listed on the QPL


Parylene HT is a registered trademark of Specialty Coating Systems, Inc.


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Parylene CharacteristicsCrevice Penetration

Parylene C 5 times the diameter

Parylene N 40 times the diameter

Parylene HT 50 times the diameter

Results may vary depending on a number of factors

Acrylics Spray or brush

Silicones Spray or brush

Urethanes Spray or brush


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16TECH BRIEFS WEBINAR DEC. 2010

Parylene Deposition Process


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Parylene Deposition Film grows one molecule at a time

Coating thickness is controllable

- 500 angstroms to 75 microns

Coating thickness is based on dimer

quantity and chamber load

Nominal coating rate is 5 microns/hour


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Parylene Deposition No cure forces

No thermal reactions

No expansion or contraction

Very high degree of penetration/conformity

Under, inside, edges and sides

No liquid phase

No meniscus, no edge effects

Nothing to leach or outgas

Parylene Coating Liquid Coating


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SEMs courtesy of

E.E. Hui, UC Berkeley.

Parylene Characteristics


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Parylene Properties


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Parylene Electrical Properties

Properties ParyleneN ParyleneC ParyleneHT

DieletricConstant

6GHz 2.46 2.54 3.06 3.10 2.10 2.15

DissipationFactor

6GHz 0.0002 0.0010 0.0021 0.0028 0.0015 0.0020Additional Data


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Improvement in Wire Lead & Bond Strength

A bare 1 mil aluminum wire has a

typical bond strength of 3 to 5.5 grams

With a 1 mil coating of Parylene C over

the wire, bond strength increases to

between 60 and 70 grams

Wire-bond strength vs. Parylene C coating

thickness on a hybrid-to-chip lead

0

10

20

30

40

50

60

70

80

0 5 10 15 20 25 30

PullStrength(ingrams)

CoatingThickness (inmicrons)

ParyleneC


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Parylene Barrier Properties

Water Vapor Transmission

P olym er N 2 O 2 CO 2 H 2Pary len e N 3 1 5 .4 8 4 .3 2 1 2 .6Pary lene C 0 .4 2 .8 3 4 3 .3Pary lene H T 4 .8 2 3 .5 9 5.4 E po xy (E R ) 1 .6 4 3.1 4 3 .3Po lyu rethane (U R ) 3 1 .5 7 8 .7 1 ,1 8 1 Sil ico ne (SR ) 1 9 ,6 8 5 1 1 8,1 1 0 1 7 ,7 1 7

Gas Permeabil ity at 25C, (ccmm)/(m 2dayatm)a


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Circuit boards after 144-hour salt fog test, in accordance with ASTM B117- (03).

Parylene Barrier Properties

Uncoated Coated


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Parylene Solvent Resistance

Chemical Tested Parylene N Parylene C Parylene HT10% Nitric Acid, RT 0.1 0.1 0.0

10% Nitric Acid at 75oC 0.2 0.1 0.0

70% Nitric Acid, RT 0.2 0.2 0.0

70% Nitric Acid at 75oC Brittle 1.8 1.2

10% Sulfuric Acid, RT 0.1 0.3 0.0

10% Sulfuric Acid at 75oC 0.2 4.1 0.0

95-98% Sulfuric Acid, RT 0.2 0.4 0.0

95-98% Sulfuric Acid at 75oC 5.3 5.1 2.8

% Swelling


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Parylene Properties

0

1

2

3

4

Effectiveness

Rating

Parylene N Parylene C Parylene HT Filter Cotton Duck

Test Samples

7 days

14 days21 days

28 days

Rating: 0 = None

1= Traces of growth (less than 10%)

2= Light growth (10-30%)

3= Medium growth (30-60%)

4= Heavy growth (60% to complete

coverage)

Test Method: ASTM G-21

Microorganism Resistance

Tested in accordance with Mil-STD 202, Method 302,

test condition B (Temp: 650C, RH: 90-96%)

Moisture Resistance


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0

2

4

6

8

10

12

0 100 250 500 1000 1250 1500 2000

Visua

lco

lor,c

ha

lk,

crac

kratin

g

[Sca

le:

0

Verypoor,

10

Excellent]

UVexposuretime(hrs)

Parylene C

Parylene HT

Parylene films were exposed to radiation from a bank of fluorescent lamps

using the following test parameters:

- Device used: QUV - Type of test: Accelerated weathering

- Test method: ASTM 154 - Irradiance: 0.77 Watts per square meter- Source: UVA 340 lamp

UV Stability


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AgendaParylene

- History

- Overview of Specialty CoatingSystems

- What is it?

- Why coat with it?

- How is it applied?

- Properties and benefits

- Industries and applications

Adhesion Technologies


Conclusion

Questions & Answers


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Adhesion Considerations Adhesion effects all types of applications

Aerospace

Automotive

Electronics

Medical

Military

Properties impacted by poor adhesion Electrical insulation

Chemical resistance

Corrosion protection

Environmental stress protection

Moisture resistance


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Physical and chemical nature of

substrate

Solder masks Cleanliness of substrate

Manufacturing and human

residues

Particle contamination

Factors Affecting Adhesion

Particle was not removed before

Parylene coating and is now

captured


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Mode of coating - solution, vapor, plasma

Cure forces

Stresses in the coating Nature of coating material and coating

formulation

Primer and adhesion promotion

Chemical

Plasma

Abrasion

Factors Affecting Adhesion


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Corrosion of a PCB

Delamination, chipping

Blister

Adhesion Issues


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Failed assembly with spots of poor adhesion Good assembly with strong adhesion (no spots)

Adhesion Issues

Latest Developments in


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AdPro PlusChemical compound applied to a variety of metallic and plastic

substrates (e.g., Stainless Steel, Cobalt-Chromium, Copper, Gold,Iridium, Nitinol, Platinum, Solder, Tin, Titanium, Tungsten,Aluminum, Nickel, Chromium, Brass, Polycarbonate, etc.) as a tielayer prior to the application of Parylene coating.

AdPro PolyChemical compound applied to a variety of polymeric substrates

(e.g., Polyimide, Epoxy, Acrylic, EPDM, etc.) as a tie layer prior tothe application of Parylene coating.

AdPro Plus and AdPro Poly are a registered trademarks of Specialty Coating Systems, Inc.

Adhesion Promotion Technologies


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0

1

2

3

4

5

StainlessSteel

(Mirrorlikefinish

#8),24hrs

@50%RH

StainlessSteel

(Mirrorlikefinish

#8),48hrs

@50%RH

StainlessSteel

(Mirrorlikefinish

#8),Autoclave

125C1hr

Titanium Alloy

Grade5(Mil

Finish),24hrs

@50%RH

Titanium Alloy

Grade5(Mil

Finish),50hrs

@50%RH

Titanium Alloy

Grade5(Mil

Finish),Autoclave

125C1hr

1

2.2

0

4.7 4.7

0

4.8 4.8 4.8 4.8 4.8 4.8

SilaneA174 AdProPlus

ASTM

D

3359

2,

MethodB

(0=Poor,5=Excellent)


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0

1

2

3

4

5

24hrs@50%RH Autoclave125C1hr

0 0

1.9

3.2

4.9 4.9

SilaneA174 AdProPlus AdProPoly

ASTM

D3359

2,Method

B(0=Poor,5=Exc

ellent)

Polyimide (Kapton)Substrate

DuPont and Kapton are trademarks or registered trademarks of E.I. du Pont de Nemours and Company.


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AdPro Plus solves adhesion

challenges for difficult metallic and

plastic substrates

AdPro Poly a new system that solves

adhesion challenges for Polyimide

substrates

Both enhance the reliability ofminiaturized and advanced

components in all markets

Courtesy of DuPont.


DuPont and Kapton are trademarks or registered trademarks of E.I. du Pont de Nemours and Company.


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Industries and Applications

Automotive Coating Applications


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Mass air temperature and pressure

sensors

Emission sensors

Tire Pressure Monitoring Systems

(TPMS)

Diesel fuel heaters

O-rings, seals and engine gaskets

Fuel cell and hybrid electronic

systems

Engine electronics

MEMS sensors

Renewable Energy Coating Applications


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Wind power

Solar/photovoltaic Energy harvesting

Hydropower

Geothermal

Medical Device Coating Applications


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Cardiac assist devices and components

ICDs, pacemakers, VADs

Drug delivery devices

Stents, inhalers (MDI, DPI, nasal)

Cochlear and intraocular implants

Catheters Neurostimulators

Gastric balloons and cuffs

Endotracheal tubes

Laboratory devices

Printed circuit boards

Military/Aerospace Coating Applications


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Military/CommercialMEMS

Sensors

Circuit card assemblies

Motor components

Power supplies

Backplanes

Elastomeric parts

AerospaceSpacecraft and satellite electronics

Cameras and assemblies

International Space Station remote arm componentsSpace Shuttle and International Space Station lab equipment

LED Coating Applications


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Video displays

Electronic billboards

Marine lighting Transportation signage

Outdoor illumination

Vehicle lighting

Commercial refrigeration

Aviation lighting

Electronics Coating Applications


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Printed circuit boards

MEMS wafers

Probes / pins

Rotors / stators

Components

Metal

Brackets

Cables

Ferrite cores



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Chip integration onto flexible

Parylene electrodes

Images courtesy of Dr. Y. C. Tai, Caltech.

Parylene/Platinum retinal

implant electrodes

Parylene Etching


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Anisotropic profile of

55 Parylene

Anisotropic profile of

10 Parylene

ICP etch recipes for low temperature (5C) Parylene etching

Reference: A HIGH ASPECT RATIO, FLEXIBLE, TRANSPARENT AND LOW-COST PARYLENE-C SHADOW MASK

TECHNOLOGY FOR MICROPATTERNING APPLICATIONS

By: S. Selvarasah1, S. H. Chao, C.-L. Chen, D. Mao, J. Hopwood, S. Ryley, S. Sridhar, A. Khademhosseini, A.

Busnaina, and M. R. Dokmeci, Shadow Mask Transducers 2007

Etching Method ParylenePlasma (200 mT, 400W) 0.19 m/min

RIE (100 sccm, 200mT, 400W) 0.56m/min

DRIE (60 sccm, 23mT, 800W) 0.77m/min

Conclusion


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Parylene ultra-thin conformal coatings are being used more than ever to

protect devices and components and enhance the reliability of todays and

tomorrows innovative technologies.

Ultra-thin and conformal

Complete encapsulation

No liquid phase

No cure forces

Excellent moisture, chemical and

electrical properties

Low coefficient of friction

Exceptional thermal stability

Superior UV stability

Biocompatible and biostable

Thank you for attending


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Specialty Coating Systems


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Contacts

Mr. Hoon Keat, SCS, SingaporeTel: 65. 6862. 8687; Email: [email protected]

Mr. Alan Hardy, SCS, Indianapolis, USATel: 317. 244. 1200 x 261; Email: [email protected]

Visit Booth 3040 for more information onParylene and Specialty Coating Systems

1._10001030_parylene coatings for enhanced reliability of electronics_semicon taiwan 2011

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