DiscoDAD 641 Operating Instructions

Updated 01/05/2017TJM

1. Enable DiscoDAD 641 in iLabs.2. Open DI water, Spindle cooling water and nitrogen valves on the back wall .

Figure 1: Di water, Spindle water and N2 valves3. Open front panel, turn key to turn system on and wait for the system to boot up indicated by

the appearance of the Main Menu screen on the monitor.

4. Initialize system by pressing the on the front panel.

5. Press the to bring up the Non-Contact Setup screen and then press to initiate setup. Setup completion is indicated by the Led above the setup key. If there is an

error, press the and redo the above procedure.

6. Turn on the spindle water by pressing . Let system warm up for at least 10 minutes.7. Mount Sample on an 8” flat metal ring using the dicing tape.

8. On the main menu screen, press to enter manual operation screen. Use the cursor keys to select the Directory & Device data fields and enter the directory name and the device data no of the data file (created by authorized personnel) containing the cutting data.

Use the to access the alphanumeric keypad, remember to press the to disable the alphanumeric pad.

Updated 01/05/2017TJM

Figure 2: System key

Figure 3: Cursor Keys

9. Load sample on the chuck (fig. 3) and press the . The sample will be clamped held by the chuck vacuum. Close Shield.

10. In the manual operation screen , chose the cutting operation

a. selects the automatic cutting, this performs the cut in both direction

b. selects the semi-automatic cutting which performs the cut only in the selected direction.

11. After selecting the cutting operation , review cutting data by pressing

12. Press to enter manual alignment mode.13. Chuck Table moves under the camera and the alignment screen is displayed on the monitor. It

may be necessary to perform focus & light intensity adjustment.

It might be necessary to perform this adjustment in Low magnification; this can be done by

pressing to change the magnification.

a. Light intensity Adjustment

i. Press the key to enter the light adjustment screen ii. Use the keypad controls to adjust the brightness ( Keypad definition listed at the

bottom of the screen).

iii. Press the Key once done.iv. Repeat process in High magnification.

b. Focus Adjustment

i. Press the key to enter the focus adjustment screen

Updated 01/05/2017TJM

Figure 4: Sample Chuck

ii. Use the keypad controls to adjust the focus (Key pad definition listed at the bottom of the screen)

iii. Press the key once done.iv. Repeat process in High magnification

14. Theta Alignment Procedure:a. It may be necessary to perform this in Low magnification first, then High magnification.b. Use the Cursor keys(figure 4) to align the hairlines to the first point/feature on the

straight line on the sample, end alignment with the key

c. Press to perform theta alignment d. Stage moves to the right, use cursor keys (figure 4) to align to the second point/ feature

that is on the same straight line on the sample, end the alignment with the up key. Press

the key and theta alignment is automatically performede. Repeat procedure in High magnification

15. After theta alignment, Channel 1 street adjustment needs to be performed.a. Use the cursor keys to align the hairlines to street to where first cut is to be performed

in Channel 1.

b. Press and use the cursors to check the cutting positions

c. Press after aligning the hairline back to the first cut, end alignment with

the key and in the Hi mag mode Use the F4 & F9 key to widen and narrow the airlines, this is useful in aligning to the street. Cut will be performed in the center of the hairlines

16. (Valid only in automatic cutting)After Channel 1 Street Adjustment, the stage is rotated 90 degrees and Channel 2 street adjustment needs to be performed, this is performed as in steps 14 a-c

17. Press the to begin dicing

18. After the end of the dicing process, press , the wafer is brought back to the loading position and is declamped.

19. Open the hood and blow dry the sample before removing from the chuck.

20. To dice another sample with the same settings, load the sample and press and repeat steps 10-19

21. If you are done, press exit key repeatedly till the main menu screen appears on the monitor.

22. Press the to turn off the spindle and the cut water and to reinitialize the system. 23. Shutdown the system by using the system key.24. Close the DI water, Spindle water and nitrogen valves on the back wall.25. Disable DiscoDAD 641 in iLabs

Updated 01/05/2017TJM