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TRANSCRIPT
The 21st Century COE Program
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The 21st Century COE Program
1
Mitsuhiro SHIKIDA
MEMS Micro Electro Mechanical Systems
MEMS
MEMS
MEMS
1-2mm
mm
2mm
100ms
30nm
The 21st Century COE Program
― 45 ―
The 21st Century COE Program
2
MEMS
1. Z. Tan, M. Shikida, M. Hirota, K. Sato, T. Iwasaki, Y. Iriye, “Experimental and theoretical study of an on-wall in-tube flexible thermal sensor”, J. Micromec. and Microeng., 17, 4, 2007, 679-686.
2. H. Sasaki, M. Shikida, K. Sato, “Fabrication of densely arrayed Si needles with large height for transdermal drug delivery system application”, IEEJ Trans. on Elect. Electro. Eng., 2, 3, 2007, 340-347.
3. Z. Tan, M. Shikida, M. Hirota, Y. Xing, K. Sato, T. Iwasaki, Y. Iriye, “Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition”, Sens. & Act. A138, 2007, 87-96.
4. H. Tsuchiya, M. Okochi, N. Nagao, M. Shikida, H. Honda, “On-chip Polymerase Chain Reaction Microdevice Employing a Magnetic Droplet-Manipulation System”, Sensors & Actuators: B, in print.
5. K. Ino, M. Okochi, N. Konishi, R. Imai, M. Shikida, H. Honda, “Cell culture arrays using magnetic force-based cell patterning for dynamic single cell analysis”, Lab on a Chip, in print.
1. Y. Hasegawa, M. Shikida, D. Ogura, K. Sato, “Novel Type of Fabric Tactile Sensor Made from Artificial Hollow Fiber”, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, 2007, 603-606.
2. N. Nagao, M. Shikida, K. Takayanagi, H. Honda, M. Okochi, 2 ,“Portable Rotary-drive-type Biochemical-Analysis System based on Magnetic bead-droplet Handling”, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, 2007, 457-459.
3. S. Takagi, H. Sasaki, M. Shikida, K. Sato, “Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System”, Tech. dig. 14th Int. Conf. on Solid-State Sensors and Actuators, 2007, 1147-1150.
4. Y. Hasegawa, M. Shikida, D. Ogura, K. Sato, “Glove Type of Wearable
Tactile Sensor Produced by Artificial Hollow Fiber”, Tech. dig. 14th Int. Conf. on Solid-State Sensors and Actuators, 2007, 1453-1456.
5. H. Hida, M. Shikida, K. Fukuzawa, A. Ono, K. Sato, K. Asaumi, 4 ,“Development of Self-vibration and -detection AFM Probe by Using Quartz Tuning Fork”, Tech. dig. 14th Int. Conf. on Solid-State Sensors and Actuators, 2007, 1553-1556.
6. S. Ukai, T. Imamura, M. Shikida, K. Sato, “Bubble Driven Arrayed Actuator Device for a Tactile Display”, Tech. dig. 14th Int. Conf. on Solid-State Sensors and Actuators, 2007, 2171-2174.
7. J. Naito, Z. Y. Tan, M. Shikida, M. Hirota, K. Sato, “Characteristics of On-wall In-tube Flexible Thermal Flow Sensor at Wrap Pipe Condition”, Tech. dig. 14th Int. Conf. on Solid-State Sensors and Actuators, 2007, 2349-2352.
8. M. Koyama, N. Nagao, R. Imai, M. Shikida, H. Honda, 3 ,“Evaluation of Magnetic Beads Agitation Performance Operated by Multi-layered Flat Coil”, Tech. dig. 14th Int. Conf. on Solid-State Sensors and Actuators, 2007, 2385-2388.
1. 2006
1. , “MEMS ”,, 12, 3, 2007, 37-41.
2. , “ ”,,
1. 2006-332735