xtc/3 - 超高真空技術の真空機器メーカー|キヤノン …...
TRANSCRIPT
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183 Vol.8.9
XTC/3
XTC/3ModeLock
INFICNCrystal12TCrystalSixR
XT/3 9999932 22
XTC/3S 922
TFTLC
Windows
/2/2
1
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Vol.8.9184
IC6 XTC/3M XTC/3S
6.0 4.5 6.0 5.0 6.0 5.0 ( 1)(6MHz 0.0035Hz 0.0043 0.028Hz 0.03 0.028Hz0.03(Hz) 10 4 4 (s) 0.1,0.4,4.0 ,10.0,20.0,30.0
LCD 3.8 LCD 3.8 LCD () 1 1 1 ( /s) 0.01 (0 99.9 /s 0.1 (0.0 99.9 /s 0.1 (0.0 99.9 /s
0.1 (100 999 /s 1(100 999 /s) 1(100 999 /s)
Z 6 Z 64 8 8
200 999 1 32 32 9 50 99 1 USB)
8 2 2 2 4 1 1 8 2 2 2 8 2 2 2
6 2 2 0 10V0 5V ,0 2.5V 0 10V0 5V 0 10V0 5V
0 +10V 0 +10V 0 +10VI/O
TTL,14 14 8 8 8 16 12 12
DC30V,2.5A) DC30V,2.5A) DC30V,2.5A) TTL 14
RS232C Ethernet
100/120/220/240VAC 100 230VAC 100 230VACHxWxD 133x447.7x330 89x203x305 10.5Kg 2.7KgWindows XTC/3M or S Editor Software
= 1.0Z =1.0 100 ms
2
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185 Vol.8.9
25703 IC6-110100 IC6 100V50/60Hz
25560 781-611-G15 IC6,XTC/3 15 IC6,XTC/3
25561 781-611-G30 IC6,XTC/3 30 IC6,XTC/3
25563 781-611-G50 IC6,XTC/3 50 IC6,XTC/3
25562 781-611-G100 IC6,XTC/3 100 IC6,XTC/3
25521 XTC3M-1000 XTC/3M (100V) 100V50/60Hz
25524 XTC3S-1000 XTC/3S (100V) 100V50/60Hz
IC6
780-032-G1 / CD-ROM,XTC/3M XTC/3S
25510 755-262-G1 IC6,XTC/3,IC/5
XIU+XIU-6BNC
3
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http://www.canon-anelva.co.jp/
215-8550 2-5-1
TEL 044-980-5155 FAX 044-986-4236 TEL 044-980-5132 FAX 044-986-4236 TEL 044-980-5131 FAX 044-986-4236 TEL 044-980-3503 FAX 044-986-4236
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20119Vacuum Components Vol.8.920119
20119