www.hvac.vn gas mass flowmeters the materials included in this compilation are for the use of dwyer...
TRANSCRIPT
www.hvac.vn
www.hvac.vn
Gas Mass Flowmeters
The materials included in this compilation are for the use of Dwyer Instruments, Inc. potential customers and current employees as a resource only. They may not be reproduced, published, or transmitted electronically for commercial purposes. Furthermore, the Company’s name, likeness, product names, and logos, included within these compilations may not be used without specific,
written prior permission from Dwyer Instruments, Inc. ©Copyright 2014 Dwyer Instruments, Inc.
www.hvac.vn
Overview
GFM2 – Gas Mass Flowmeter
GFM3 – Gas Mass Flowmeter
Push Button Configuration
GFM4 – Gas Mass Flowmeter
Temperature and Pressure Monitoring
www.hvac.vn
GFM2 - Specifications
Service: Clean dry gasesAccuracy: ±1% FSTemperature Limits: 0 to 50 °CPower Supply: 11 to 26 VDCLeak Integrity: 1 x 10-9 ml/sec of HeFlow Ranges: From 10 ml/min to 100 l/minCalibration: NIST certificate standard
www.hvac.vn
GFM2 - Features
Programmable totalizer Two user-programmable electromechanical SPDT relays with latching option
www.hvac.vn
GFM2 - Features
User-selectable analog
0 to 5 VDC or 4 to 20 mA outputsInternal conversion factors for up to 32 gasesDigital interface option
RS-232, RS-485, or Profibus
www.hvac.vn
GFM3 - Specifications
Service: Clean dry gasesAccuracy: ±1% FSProcess Temperature Limits: -10 to 50 °CPower Supply: 12 VDC; 15 VDC, or ±24 VDCLeak Integrity: 1 x 10-9 ml/sec of HeFlow Ranges: From 10 ml/min to 100 l/minCalibration: NIST certificate standard
www.hvac.vn
GFM3 - Features
Four button keypad and large LCD with backlightProgrammable 12 digit totalizer Two SPDT relays with latching option for high or low alarm outputs
www.hvac.vn
GFM3 - Features
Internal conversion factors for up to 32 gasesDigital interface option
RS-232, RS-485, or Profibus
www.hvac.vn
GFM4 - Specifications
Service: Clean dry gasesAccuracy: ±1% FSProcess Temperature Limits: -10 to 50 °CPower Supply: 12 VDC; 15 VDC, or ±24 VDCLeak Integrity: 1 x 10-9 ml/sec of HeFlow Ranges: From 10 ml/min to 100 l/minCalibration: NIST certificate standard
www.hvac.vn
GFM4 - Features
Flow, Pressure, and Temperature measurement and outputFour button keypad and large LCD with backlight and programmable 12 digit totalizer
www.hvac.vn
GFM4 - Features
Two SPDT relays with latching option for high or low flow or pressure alarm outputsInternal conversion factors for up to 32 gasesDigital interface option
RS-232, RS-485, or Profibus
www.hvac.vn
Flow Scale OptionsFLOW RATE
BODY SIZE REQUIRED FOR THE GIVEN GASAIR AR C2H2 C3H8 C4H10 CH4 CO CO2 HE HF H2 N2 NH3 O2 SO2
10 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 01020 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 01050 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 010
100 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 010200 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 010500 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 010
1000 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 0102 l/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 0105 l/min 010 010 010 050 050 010 010 010 010 010 010 010 010 010 010
10 l/min 010 010 050 050 100 050 010 050 010 010 010 010 050 010 05020 l/min 050 050 050 100 100 050 050 050 050 050 050 050 050 050 05030 l/min 050 050 100 100 050 050 050 050 050 050 050 050 050 05040 l/min 050 050 100 100 050 100 050 050 050 050 100 050 10050 l/min 050 050 100 100 050 100 050 050 050 050 100 050 10060 l/min 100 100 100 100 100 100 100 100 100 100 100 10080 l/min 100 100 100 100 100 100 100 100
100 l/min 100 100 100 100 100 100
www.hvac.vn
Applications
Critical flow testing environments such as analytical laboratories
Used to measure and control gas flow rate into environmental chambers to provide accurate gas concentrations
www.hvac.vn
Applications
Gas burner meteringUsed to measure gas flow rate to burner, and totalize gas consumption
www.hvac.vn
Applications
Widely used in equipment for the semiconductor industry
Chemical Vapor DepositionEtchingBackside Wafer Cooling
www.hvac.vn
Applications
Semiconductor Industry:Chemical Vapor Deposition
Precise amounts of precursor gases are flowed into a reaction chamber to create thin film coatings
www.hvac.vn
Applications
Semiconductor Industry:Wafer Etching
Inert gas flow is used in a high flow purge step between the wafer etching process and the cleaning process to limit wafer exposure to moisture or oxygen
www.hvac.vn
Applications
Semiconductor Industry:Backside wafer cooling
Gases, such as helium, flow across the wafer to reduce the temperature during processing
www.hvac.vn
Applications
Pharmaceutical IndustryMass flowmeters are used to monitor precise air flow rates in tablet coating machinery
www.hvac.vn
Applications
Pharmaceutical IndustryMass flowmeters are used to measure the amount of inert and reactant gases into bioreactors
www.hvac.vn
GFM3 – Demonstration
GFM3 with Power and communication connection cable
www.hvac.vn
GFM3 – Demonstration
25 pin connection for power, outputs,
and communication
Process inlet
connection
Process outlet
connectionProduct label showing model, calibrated flow
rate and gas, and serial number
User Interface Buttons
Backlit LCD
Display
www.hvac.vn
GFM3 – Demonstration
Process value
Calibrated gas
Full scale range
Totalizer value
Flow rate units
www.hvac.vn
GFM3 – Demonstration
Display will show some amount of flow while warming up
www.hvac.vn
GFM3 – Demonstration
Within a few minutes the flowmeter will settle at zero
www.hvac.vn
GFM3 – Demonstration
Changing Units of Measure
Press to enter the Main MenuUse the and keys to cycle through the menu and highlight sub-menu “Units of Measure”Press to enter into the sub menu
www.hvac.vn
GFM3 – Demonstration
Changing Units of Measure - Continued
Use the and keys to cyclethrough the menu optionsHighlight “mL/min” and press to select this optionDisplay will return to the Main Menuand “Current Units: mL/min” will be displayed at the bottomPress to exit the main menu
www.hvac.vn
GFM3 – Demonstration
Units changes from % to mL/min
www.hvac.vn
GFM3 – Demonstration
Configuring the TotalizerPress to enter the Main MenuUse the and keys to cycle through the menu and highlight sub-menu “Totalizer”Press to enter into the sub menu
www.hvac.vn
GFM3 – Demonstration
Configuring the TotalizerUse the and keys to cyclethrough the menu optionsHighlight “Mode Run/Stop” and press to select this optionPress once to highlight “Run” and then press to activate thetotalizerTOT: S at the bottom of the display will change to TOT:R to indicate the totalizer is in run mode
www.hvac.vn
GFM3 – Demonstration
Configuring the TotalizerThe “Start at Flow” option is used to set a minimum flow rate before the totalizer will start accumulating the total flowThe “Stop at Total” option is used to set a maximum limit for the total flow accumulationThese values are shown at the bottom of Totalizer menu display for reference
www.hvac.vn
GFM3 – Demonstration
Configuring the TotalizerThe totalizer value can be reset with the “Reset to Zero” option
www.hvac.vn
GFM3 – Demonstration
Totalizer