volume 12 issue 0volume 12 issue 02 published …...volume 12 issue 0volume 12 issue 02 published...
TRANSCRIPT
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Volume 12 Issue 01 Published, February 21, 2008 ISSN 1535-864X DOI: 10.1535/itj.1201Volume 12 Issue 02 Published June 17, 2008 ISSN 1535-864X DOI: 10.1535/itj.1202
Intel’s 45nm CMOS Technology
Intel®TechnologyJournal
Intel Technology Journal Q2’08 (Volume 12, Issue 2) focuses on Intel® 45nm high-k metal gate silicon technology. To quote Gordon Moore, co-founder of Intel, “this is the biggest change in transistor technology in 40 years.” In this journal are seven papers that cover the details of transistors and interconnects, variation and design for manufacturability, and packaging and reliability.
45nm High-k+Metal Gate Strain-Enhanced Transistors
Process and Electrical Results for the On-die Interconnect Stack
for Intel’s 45nm Process Generation
Managing Process Variation in Intel’s 45nm CMOS Technology
45nm SRAM Technology Development and Technology Lead Vehicle
45nm Design for Manufacturing
45nm Transistor Reliability
More information, including current and past issues of Intel Technology Journal, can be found at: http://developer.intel.com/technology/itj/index.htm
Flip-Chip Packaging Technology for Enabling 45nm Products
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Volume 12 Issue 01 Published, February 21, 2008 ISSN 1535-864X DOI: 10.1535/itj.1201Volume 12 Issue 02 Published June 17, 2008 ISSN 1535-864X DOI: 10.1535/itj.1202
Intel® Technology JournalIntel’s 45nm CMOS Technology
Articles
Preface iii
45nm High-k+Metal Gate Strain-Enhanced Transistors 77
Process and Electrical Results for the On-die Interconnect 87 Stack for Intel’s 45nm Process Generation
Managing Process Variation in Intel’s 45nm CMOS Technology 93
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kk11
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Computational lithography solution
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1.3V |***************************** .
1.2V |************************** .
1.1V |************************* .
1.0V |********************** .
0.9V |**************** . .
0.8V |****** . . .+---------+---------+---------+1.8GHz 1.3GHz 3.2GHz 5.3GHz
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Pulse
Sleep5p
SRAM N -WellPulse
Sleep5p
SRAM N -Well
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Logic
SRAM
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180 130 90 65 45Node 180 130 90 65 45Node
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print flux on stencil at room temperature
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Less wetting away from the die for lower KOZ
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