variable micro- inspection system - qioptiq1].pdfvariable micro-inspection system mag.x system 125...

Variable micro- inspection system

Modular System

High resolution inspection is being used in

many applications. Each application has its own

requirements and constraints. In order to cater for

all these diverse needs the mag.x system 125 is as

modular as possible. Numerous modules are already

available and additional components are being

developed. Customized elements are readily available

and easily integrated with the system, to provide

enhanced performance optimization.

Base unitsHeart of the system is always the base unit. There are

four different units available with additional options.

All other components are attached to these base

units. Mounting of the system to the surrounding

equipment is also provided by the base unit.

Objective lenses The optical performance of the system is mainly

defined by the objective lenses. These are the

components that make the mag.x system 125 really

unique. All of Qioptiq’s highest end technology is

being used in manufacturing and testing of these

lenses.

Tube lensesSystem magnification and maximum sensor size

are the result of the combination of tube lens and

objective lens. The current selection of tube lenses

allows the use of sensors with a diagonal of up to

56 mm. All tube lenses are also telecentric on image

AutofocusHigh resolution systems always feature small depth

of field. Autofocus systems enable high resolution

inspection of objects that are not perfectly flat. The

optional Piezo Unit is the active part for focusing. It can

be combined either with the AF base unit that enables

through-the-lens AF or with any other solution that

detects the object position. The AF base unit offers

a universal port that is compatible to a variety of AF

sensors.

Variable micro-inspection system

mag.x system 125

Designed for large Sensors

The mag.x system 125 is the first microscope system

that is specifically designed for the use with large

sensors to achieve large field-of-view with high

resolution. Inspection of extended objects is often

done using line sensors due to the high speed of

these sensors and the continuous object movement

that becomes possible with these sensors. mag.x

system 125 supports up to 56 mm image circle and

is therefore a perfect match for 8k TDI line sensors.

Optical Performance

High NA mag.x system 125 stands out from conventional

microscope systems by virtue of its low overall

magnifications that transmit large object fields in high

quality. This is achieved through numerical aperture

(NA) values far higher than those of other systems.

High optical quality is not only ensured on the optical

axis, but also is maintained over the entire sensor

format.

Object space telecentricityExact object space telecentricity is precisely maintained,

preventing flawed measurement results resulting

from objects with height variations or because of a

variation in object position.

Chromatic correctionThe optics are highly chromatically corrected in

the spectral range of 430–700 nm. High contrast

is maintained over the entire spectrum and no

refocusing is required if the illumination wavelength

is changed. Multispectral imaging becomes possible

without any additional focus needs.

Long distance lensesThanks to long working distances and correction

of the lenses without cover glasses, this system

can be universally employed in technical inspection

applications. The parfocal distance of the lenses is

125 mm and is origin of the name mag.x system 125.

Modular System

High resolution inspection is being used in

many applications. Each application has its own

requirements and constraints. In order to cater for

all these diverse needs the mag.x system 125 is as

modular as possible. Numerous modules are already

available and additional components are being

developed. Customized elements are readily available

and easily integrated with the system, to provide

enhanced performance optimization.

Base unitsHeart of the system is always the base unit. There are

four different units available with additional options.

All other components are attached to these base

units. Mounting of the system to the surrounding

equipment is also provided by the base unit.

Objective lenses The optical performance of the system is mainly

defined by the objective lenses. These are the

components that make the mag.x system 125 really

unique. All of Qioptiq’s highest end technology is

being used in manufacturing and testing of these

lenses.

Tube lensesSystem magnification and maximum sensor size

are the result of the combination of tube lens and

objective lens. The current selection of tube lenses

allows the use of sensors with a diagonal of up to

56 mm. All tube lenses are also telecentric on image

AutofocusHigh resolution systems always feature small depth

of field. Autofocus systems enable high resolution

inspection of objects that are not perfectly flat. The

optional Piezo Unit is the active part for focusing. It can

be combined either with the AF base unit that enables

through-the-lens AF or with any other solution that

detects the object position. The AF base unit offers

a universal port that is compatible to a variety of AF

sensors.

mag.x system 125

Designed for large Sensors

The mag.x system 125 is the first microscope system

that is specifically designed for the use with large

sensors to achieve large field-of-view with high

resolution. Inspection of extended objects is often

done using line sensors due to the high speed of

these sensors and the continuous object movement

that becomes possible with these sensors. mag.x

system 125 supports up to 56 mm image circle and

is therefore a perfect match for 8k TDI line sensors.

Optical Performance

High NA mag.x system 125 stands out from conventional

microscope systems by virtue of its low overall

magnifications that transmit large object fields in high

quality. This is achieved through numerical aperture

(NA) values far higher than those of other systems.

High optical quality is not only ensured on the optical

axis, but also is maintained over the entire sensor

format.

Object space telecentricityExact object space telecentricity is precisely maintained,

preventing flawed measurement results resulting

from objects with height variations or because of a

variation in object position.

Chromatic correctionThe optics are highly chromatically corrected in

the spectral range of 430–700 nm. High contrast

is maintained over the entire spectrum and no

refocusing is required if the illumination wavelength

is changed. Multispectral imaging becomes possible

without any additional focus needs.

Long distance lensesThanks to long working distances and correction

of the lenses without cover glasses, this system

can be universally employed in technical inspection

applications. The parfocal distance of the lenses is

125 mm and is origin of the name mag.x system 125.

G405-524-000

G192-043-000 G192-045-000

Light source

Fiber guide

Fiber adapters

Filters

Base units w/ illumination Direct Adapter Base units w/o illumination

Tube lenses

Camera adapters

Piezo Unit

Darkfield illumination adapterObjective lenses

Illumination tubes

Fiber adapters

Fiber guide

Light source

G192-001-000 G192-006-000 G192-003-000

G192-071-000 G192-073-000 G192-074-000

G192-032-000 G192-031-000

G192-009-000 G192-080-000 G192-081-000 G192-080-905

G405-607-000

G192-012-000 G192-011-000 G192-044-901

4401-535-822-00

G192-062-0001:1

Filterschieber, drehbar

Werkstoff:Rohteil Nr.:

Urspr.: Ers. f.: Ers. d.:

Verwendung

Zust. Änderung Datum Name Dateiname 012649.DFT

Bearb.

Verantw.

Maßstab: Gewicht: 0,101 kg

EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715

Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11

Datum Name Benennung

restrictednot export controlled

HM192062000

11.12.13 so

11.12.2013 pv

Version: 0

G192-063-0001:1

Filterschieber lang, drehbar

Verwendung

Bearb.

Verantw.

HM192063000

11.12.13 so

11.12.2013 pv

Version: 0

LD 125 (ohne Revolver)

Werkstoff:

Rohteil Nr.:

Urspr.:Ers. f.:

Ers. d.:

Verwendung

Zust.Änderung

DatumName

Dateiname012653.DFT

Bearb.

Verantw.

Maßstab:

Gewicht:11,998 kg

EU-D:AL-T1 A:

US-D:US-ML:

OberflächeRa 1,6μmOberflächen-angaben nachISO 1302W

erkstückkantenDIN ISO 13715

DatumName

Benennung

Q internal usenot export controlled

HM192001000

11.12.13so

11.12.2013pv

Version:0

mag.x 125 (mit mot. Revolver)

Werkstoff:

Rohteil Nr.:

Urspr.:Ers. f.:

Ers. d.:

Verwendung

Zust.Änderung

DatumName

Dateiname012654.DFT

Bearb.

Verantw.

Maßstab:

Gewicht:12,761 kg

EU-D:AL-T1 A:

US-D:US-ML:

DatumName

Benennung

HM192003000

11.12.13so

11.12.2013pv

Version:0

mag.x Zwischentubus

Verwendung

Bearb.

Verantw.

HM192009000

11.12.13 so

11.12.2013 pv

Version: 0

Adapter Dunkelfeldbel. Volpi4-Seg.Ringlicht

Verwendung

Bearb.

Verantw.

HM192044901

11.12.13 so

11.12.2013 pv

Version: 0

Werkstoff:

Rohteil Nr.:

Urspr.:Ers. f.:

Ers. d.:

Verwendung

Zust.Änderung

DatumName

Dateiname012654.DFT

Bearb.

Verantw.

Maßstab:

Gewicht:12,761 kg

EU-D:AL-T1 A:

US-D:US-ML:

DatumName

Benennung

HM192003000

11.12.13so

11.12.2013pv

Version:0

G192-043-000 G192-045-000

G405-607-000

G405-524-000

Order number Description

G192-012-000 Objective lens LD-Plan Apo 5x/0.2

G192-031-000 Tube lens 1x

G192-032-000 Tube lens 2.25x

G192-001-000 Base unit without turret

G192-006-000 Base unit with manual turret

G192-003-000 Base unit with motorized turret

G192-080-000 Compact Base unit

G192-080-905 Illumination tube 5x

G192-081-000 Base unit AF

4401-535-822-00 Piezo-Unit

G192-009-000 Direct adapter

G192-043-000 Fiber adapter 9 mm

G192-071-000 Camera adapter M72 Dalsa

G192-073-000 Camera adapter M42 SVS-Vistek

G192-074-000 Camera adapter M95 e2v

G192-044-901 Darkfield illumination adapter

G405-524-000 Liquid light guide

G405-607-000 Light source CLS-LED

G192-062-000 Polarizing filter slide short

G192-063-000 Polarizing filter slide long

G192-065-000 Dummy slide short

G192-066-000 Dummy slide long

G192-065-0001:1

Filterschieber Dummy

Verwendung

Bearb.

Verantw.

Maßstab:

POM, schwarz

Gewicht: 0,033 kg

HM192065000

11.12.13 so

11.12.2013 pv

Version: 0

G192-066-0001:1

Verwendung

Bearb.

Verantw.

HM192063000

11.12.13 so

11.12.2013 pv

Version: 0

G405-524-000

G192-043-000 G192-045-000

Light source

Fiber guide

Fiber adapters

Filters

Base units w/ illumination Direct Adapter Base units w/o illumination

Tube lenses

Camera adapters

Piezo Unit

Darkfield illumination adapterObjective lenses

Illumination tubes

Fiber adapters

Fiber guide

Light source

G192-001-000 G192-006-000 G192-003-000

G192-071-000 G192-073-000 G192-074-000

G192-032-000 G192-031-000

G192-009-000 G192-080-000 G192-081-000 G192-080-905

G405-607-000

G192-012-000 G192-011-000 G192-044-901

4401-535-822-00

G192-062-0001:1

Filterschieber, drehbar

Verwendung

Bearb.

Verantw.

HM192062000

11.12.13 so

11.12.2013 pv

Version: 0

G192-063-0001:1

Verwendung

Bearb.

Verantw.

HM192063000

11.12.13 so

11.12.2013 pv

Version: 0

LD 125 (ohne Revolver)

Werkstoff:

Rohteil Nr.:

Urspr.:Ers. f.:

Ers. d.:

Verwendung

Zust.Änderung

DatumName

Dateiname012653.DFT

Bearb.

Verantw.

Maßstab:

Gewicht:11,998 kg

EU-D:AL-T1 A:

US-D:US-ML:

DatumName

Benennung

HM192001000

11.12.13so

11.12.2013pv

Version:0

Werkstoff:

Rohteil Nr.:

Urspr.:Ers. f.:

Ers. d.:

Verwendung

Zust.Änderung

DatumName

Dateiname012654.DFT

Bearb.

Verantw.

Maßstab:

Gewicht:12,761 kg

EU-D:AL-T1 A:

US-D:US-ML:

DatumName

Benennung

HM192003000

11.12.13so

11.12.2013pv

Version:0

mag.x Zwischentubus

Verwendung

Bearb.

Verantw.

HM192009000

11.12.13 so

11.12.2013 pv

Version: 0

Adapter Dunkelfeldbel. Volpi4-Seg.Ringlicht

Verwendung

Bearb.

Verantw.

HM192044901

11.12.13 so

11.12.2013 pv

Version: 0

Werkstoff:

Rohteil Nr.:

Urspr.:Ers. f.:

Ers. d.:

Verwendung

Zust.Änderung

DatumName

Dateiname012654.DFT

Bearb.

Verantw.

Maßstab:

Gewicht:12,761 kg

EU-D:AL-T1 A:

US-D:US-ML:

DatumName

Benennung

HM192003000

11.12.13so

11.12.2013pv

Version:0

G192-043-000 G192-045-000

G405-607-000

G405-524-000

G192-031-000 Tube lens 1x

G192-032-000 Tube lens 2.25x

G192-001-000 Base unit without turret

G192-006-000 Base unit with manual turret

G192-003-000 Base unit with motorized turret

G192-080-000 Compact Base unit

G192-080-905 Illumination tube 5x

G192-081-000 Base unit AF

4401-535-822-00 Piezo-Unit

G192-009-000 Direct adapter

G192-071-000 Camera adapter M72 Dalsa

G192-073-000 Camera adapter M42 SVS-Vistek

G192-074-000 Camera adapter M95 e2v

G192-044-901 Darkfield illumination adapter

G405-524-000 Liquid light guide

G405-607-000 Light source CLS-LED

G192-062-000 Polarizing filter slide short

G192-063-000 Polarizing filter slide long

G192-065-000 Dummy slide short

G192-066-000 Dummy slide long

G192-065-0001:1

Filterschieber Dummy

Verwendung

Bearb.

Verantw.

Maßstab:

POM, schwarz

Gewicht: 0,033 kg

HM192065000

11.12.13 so

11.12.2013 pv

Version: 0

G192-066-0001:1

Verwendung

Bearb.

Verantw.

HM192063000

11.12.13 so

11.12.2013 pv

Version: 0

Tube system –

Polarizing filter, rotatable

Turret –

Objective –

– Filter

– Polarizing filter, rotatable

– Light guide adapter

Illumination unit

Configuration example: Base unit with integrated illumination

SpecificationsObjective

Plan apochromatTube lens

1x 2.25x

f‘tub = 250 mm f‘tub = 563 mm

2y‘ = 25 mm 2y‘ = 56.25 mm

Magn. / NAWD f‘obj δobj R0, obj

NA'R0, ima

mm mm µm lp/mm mm lp/mm mm lp/mm

2x / 0.08 24.8 125.0 ± 42.7 293 2.0 12.5 0.040 147 4.5 12.5 0.018 65

5x / 0.20 13.0 50.0 ± 6.8 733 5.0 5.0 0.040 147 11.25 5.0 0.018 65

Performance GraphsThe following graph displays the optical performance

of the mag.x system 125 micro inspection system,

showing the polychromatic MTF versus field height.

Values for object y and image heights y’ are given

under the horizontal axis. Note that the high contrast

values close to the diffraction limit are maintained

over the entire field!

Integrated IlluminationHigh resolution inspection needs defined illumination

that is optimally adjusted. This is why mag.x system 125

sports built-in coupled illumination for coaxial bright

field illumination. The illumination system operates

on the Koehler principle, with adjustable aperture

and field stops. Thus the illumination and coherence

parameters of the image (relationship of illumination

and imaging aperture) can be appropriately adjusted

for individual inspection tasks. If coaxial bright field

illumination is not appropriate the system can be set

up without integrated illumination as well using direct

adapter or customized solutions.

ApplicationsThere are numerous applications that benefit from

the versatility and the high optical performance of the

system. The usage of large sensors with high resolution

speeds up many inspection tasks considerably and

some applications may become finally possible thanks

to this all new micro inspection system.

Ideal areas of application:

Semiconductor industry

Display inspection

PCB inspection

Universities, laboratories

Technical microscopy

Material science

Micro measurement

Biomedical applications

NA: Numerical aperture in the object space = n · sin (σ)WD: Working distancef'obj: Focal length of the objectivef'tub: Focal length of the tube lensδobj: Depth of field at 546 nm δobj = ±n · λ/(2 · NA2)R0, ima: Cut off frequency in image space at 546 nmR0, obj: Cut off frequency in object space at 546 nm Rcut, obj = (2 · NA)/λ

R0, ima: Cut off frequency in image space 546 nm2y': Image field size (maximum detector diagonal)2y: Object field sizeM: Magnification of the overall system M = Vobj · Vtub

Image of USAF-test chart taken with 5x objective lens and .25x tube

lens and blue light. Camera for this image was 8k TDI in area mode.

Group 9, element 3 represents 645 lp/mm resolution.

Tube system –

Polarizing filter, rotatable

Turret –

Objective –

– Filter

– Polarizing filter, rotatable

– Light guide adapter

Illumination unit

Configuration example: Base unit with integrated illumination

SpecificationsObjective

Plan apochromatTube lens

1x 2.25x

f‘tub = 250 mm f‘tub = 563 mm

2y‘ = 25 mm 2y‘ = 56.25 mm

Magn. / NAWD f‘obj δobj R0, obj

NA'R0, ima

mm mm µm lp/mm mm lp/mm mm lp/mm

2x / 0.08 24.8 125.0 ± 42.7 293 2.0 12.5 0.040 147 4.5 12.5 0.018 65

5x / 0.20 13.0 50.0 ± 6.8 733 5.0 5.0 0.040 147 11.25 5.0 0.018 65

Performance GraphsThe following graph displays the optical performance

of the mag.x system 125 micro inspection system,

showing the polychromatic MTF versus field height.

Values for object y and image heights y’ are given

under the horizontal axis. Note that the high contrast

values close to the diffraction limit are maintained

over the entire field!

Integrated IlluminationHigh resolution inspection needs defined illumination

that is optimally adjusted. This is why mag.x system 125

sports built-in coupled illumination for coaxial bright

field illumination. The illumination system operates

on the Koehler principle, with adjustable aperture

and field stops. Thus the illumination and coherence

parameters of the image (relationship of illumination

and imaging aperture) can be appropriately adjusted

for individual inspection tasks. If coaxial bright field

illumination is not appropriate the system can be set

up without integrated illumination as well using direct

adapter or customized solutions.

ApplicationsThere are numerous applications that benefit from

the versatility and the high optical performance of the

system. The usage of large sensors with high resolution

speeds up many inspection tasks considerably and

some applications may become finally possible thanks

to this all new micro inspection system.

Ideal areas of application:

Semiconductor industry

Display inspection

PCB inspection

Universities, laboratories

Technical microscopy

Material science

Micro measurement

Biomedical applications

NA: Numerical aperture in the object space = n · sin (σ)WD: Working distancef'obj: Focal length of the objectivef'tub: Focal length of the tube lensδobj: Depth of field at 546 nm δobj = ±n · λ/(2 · NA2)R0, ima: Cut off frequency in image space at 546 nmR0, obj: Cut off frequency in object space at 546 nm Rcut, obj = (2 · NA)/λ

R0, ima: Cut off frequency in image space 546 nm2y': Image field size (maximum detector diagonal)2y: Object field sizeM: Magnification of the overall system M = Vobj · Vtub

Image of USAF-test chart taken with 5x objective lens and .25x tube

lens and blue light. Camera for this image was 8k TDI in area mode.

Group 9, element 3 represents 645 lp/mm resolution.

Discover the Q!Discover the capabilities, knowledge, equipment

and technology of Qioptiq

Photonics for Innovation

Sales contact:

North AmericaQioptiq [email protected] +1 (585) 223-2370Toll free 1 (800) 429-0257

Asia (China, Taiwan, Singapore, Malaysia)Qioptiq Singapore Pte [email protected] +65 6499 7766Fax + 65 6265 1479

South KoreaENVISION Co., Ltd.Phone +82-2-2624-5500Fax [email protected]

Europe and Technical SupportQioptiq Photonics GmbH & Co.KGThomas Schä[email protected] +49 (0) 89 255 458-0

variable micro- inspection system - qioptiq1].pdfvariable micro-inspection system mag.x system 125...

Documents